JPH05253534A - Liquid material applying method - Google Patents

Liquid material applying method

Info

Publication number
JPH05253534A
JPH05253534A JP5799292A JP5799292A JPH05253534A JP H05253534 A JPH05253534 A JP H05253534A JP 5799292 A JP5799292 A JP 5799292A JP 5799292 A JP5799292 A JP 5799292A JP H05253534 A JPH05253534 A JP H05253534A
Authority
JP
Japan
Prior art keywords
film
liquid material
hole
holes
solder resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5799292A
Other languages
Japanese (ja)
Inventor
Katsunori Tsuchiya
勝則 土屋
Tadashi Fujii
正 藤井
Kenji Hattori
健治 服部
Tetsuya Yoshida
哲也 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP5799292A priority Critical patent/JPH05253534A/en
Publication of JPH05253534A publication Critical patent/JPH05253534A/en
Pending legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

PURPOSE:To provide a liquid material applying method with which a liquid material can be applied uniformly even to the edges of holes of a necessary coating surface without entering the holes. CONSTITUTION:When a liquid material is applied to form a film such as a shoulder mask, a permanent mask, an insulating film, a protective film, etc., on a printed circuit board with through holes, the through holes opposite to the side to be coated with the liquid material are colosed with a film and then the liquid material is applied.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、貫通孔が形成された板
上へ液状物を塗布する方法に関し、さらに詳しくはプリ
ント配線板製造、金属精密加工などに使用しうる貫通孔
が形成された板上へ液状物を塗布する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for applying a liquid material onto a plate having a through hole formed therein, and more specifically, a through hole which can be used in printed wiring board manufacturing, precision metal processing, etc. is formed. The present invention relates to a method of applying a liquid material on a plate.

【0002】[0002]

【従来の技術】従来、プリント配線板業界において、プ
リント配線板上にソルダーマスク、永久マスク、絶縁
膜、保護膜などを形成する場合、一般に、ソルダーレジ
ストと呼ばれ、硬化した後に耐熱性、絶縁性等の特性を
有する膜を形成することのできる液状物を塗布する。こ
の際、この液状物をプリント配線板上に塗布する方法と
して、スクリーン印刷法、ロールコート法、カーテンコ
ート法、エアスプレー法、エアレススプレー法、静電ス
プレー法などが用いられている。
2. Description of the Related Art Conventionally, in the printed wiring board industry, when a solder mask, a permanent mask, an insulating film, a protective film or the like is formed on a printed wiring board, it is generally called a solder resist, which has heat resistance and insulation after curing. A liquid substance capable of forming a film having properties such as properties is applied. At this time, screen printing, roll coating, curtain coating, air spraying, airless spraying, electrostatic spraying, and the like are used as methods for applying this liquid material onto a printed wiring board.

【0003】また、ソルダーレジストは、エポキシ樹
脂、アミノプラスト樹脂等の熱硬化性樹脂あるいはエポ
キシアクリレート樹脂等の光硬化性樹脂を主成分とする
ものである。そして、このようなソルダーレジストを用
いて、プリント配線板上にレジストパターンを形成する
方法としては、従来よりスクリーン印刷法が採用されて
きた。
The solder resist is mainly composed of a thermosetting resin such as an epoxy resin or an aminoplast resin or a photocurable resin such as an epoxy acrylate resin. Then, as a method of forming a resist pattern on a printed wiring board using such a solder resist, a screen printing method has been conventionally adopted.

【0004】しかし、近年、プリント配線板の配線密度
が高まり、また、導体間の電気絶縁性の要求も厳しくな
り、これに用いるソルダーレジストも厚膜で寸法精度の
優れたものが要求され、従来のスクリーン印刷法では対
処できなくなっている。
However, in recent years, the wiring density of a printed wiring board has increased, and the requirement for electrical insulation between conductors has become strict. Therefore, a solder resist used for this is required to be a thick film with excellent dimensional accuracy. It can no longer be dealt with by the screen printing method.

【0005】そこで、像状露光後の現像で画像を形成さ
せる写真法によって、厚膜で寸法精度の優れた高信頼性
のソルダーレジストが望まれるようになった。そして、
この要求に答えるために、例えば、特開昭53−560
18号公報、特開昭54−1018号公報などに開示さ
れているアクリル系ポリマー及び光重合性モノマーを主
成分とする感光性樹脂組成物、特開昭52−37996
号公報、特開昭58−62636号公報、特開昭62−
74920号公報、特公平1−54390号公報などに
開示されている光反応性が付与されたエポキシ樹脂及び
エポキシ樹脂硬化剤を主成分とする感光性樹脂組成物、
特開昭61−132947号公報などに開示されている
イソシアナートエチルメタクリレート変性感光性樹脂組
成物などが提案されている。
Therefore, a photographic method of forming an image by development after imagewise exposure has led to a demand for a thick film, highly reliable solder resist excellent in dimensional accuracy. And
To meet this demand, for example, Japanese Patent Laid-Open No. 53-560.
No. 18, JP-A No. 54-1018, and the like, a photosensitive resin composition containing an acrylic polymer and a photopolymerizable monomer as main components, and JP-A No. 52-37996.
JP-A-58-62636, JP-A-62-
A photosensitive resin composition containing a photoreactive epoxy resin and an epoxy resin curing agent as main components, which are disclosed in Japanese Patent Publication No. 74920, Japanese Patent Publication No. 1-54390, and the like.
An isocyanate ethyl methacrylate-modified photosensitive resin composition disclosed in JP-A-61-132947 has been proposed.

【0006】これらの写真法ソルダーレジストをプリン
ト配線板上に塗布して膜を形成する方法としては、従来
からのスクリーン印刷法の他、特開昭58−62636
号公報に開示されているカーテンコート法、ロールコー
ト法、各種スプレー法などが用いられている。これらの
方法で、写真法ソルダーレジストをプリント配線板上の
全面あるいは必要面に塗布するが、それぞれの塗布法に
よって長所、短所がある。すなわち、比較的高粘度(数
十〜数百ポイズ)のソルダーレジストを用いるスクリー
ン印刷法あるいはロールコート法は、スキージやロール
によりソルダーレジストをプリント配線板に押しつけな
がら塗布するため、プリント配線板に形成されている貫
通孔内にソルダーレジストが充填されてしまい、後の現
像工程でソルダーレジストを除去できず、部品搭載時の
はんだ付けが不充分になってしまう等の不良の原因とな
る。
As a method for forming a film by applying these photographic solder resists onto a printed wiring board, in addition to the conventional screen printing method, JP-A-58-62636 is used.
The curtain coating method, roll coating method, various spraying methods and the like disclosed in the publication are used. By these methods, a photographic solder resist is applied to the entire surface or a necessary surface of a printed wiring board, but each method has advantages and disadvantages. That is, the screen printing method or the roll coating method using a solder resist having a relatively high viscosity (tens to hundreds of poises) applies the solder resist while pressing it with a squeegee or roll. The solder resist is filled in the formed through holes, and the solder resist cannot be removed in the subsequent developing process, which causes a defect such as insufficient soldering when mounting the components.

【0007】また、比較的低粘度(数十〜数百センチポ
イズ)のソルダーレジストを用いるカーテンコート法及
び各種スプレー法では、プリント配線板に塗布されたソ
ルダーレジストの膜厚が、特に貫通孔の周辺で薄くな
り、必要な耐熱性等の特性が得られなくなり、部品搭載
時のはんだ付けで不必要部分にはんだ付着が発生し、シ
ョート等の不良原因となる。このソルダーレジストの膜
厚が薄くなる原因は、ソルダーレジストが低粘度である
ため、塗布後貫通孔内に流れ落ちてしまうからである。
また、この結果、プリント配線板の塗布面の反対面を流
れ出て、ソルダーレジストが不必要な部分に付着して不
良の原因になったり、さらにこの不要なソルダーレジス
トを除去するための工程を設けることになり、プリント
配線板の製造コストを増大することになる。
Further, in the curtain coating method and various spraying methods using a solder resist having a relatively low viscosity (tens to hundreds of centipoise), the thickness of the solder resist applied to the printed wiring board is particularly around the through hole. As a result, the required characteristics such as heat resistance cannot be obtained, and soldering may occur at unnecessary portions during soldering when mounting components, which may cause defects such as short circuits. The reason why the thickness of the solder resist becomes thin is that the solder resist has a low viscosity and therefore flows down into the through hole after coating.
Further, as a result, the solder resist may flow out on the opposite side of the coated surface and cause the solder resist to adhere to unnecessary portions to cause a defect, and a process for removing the unnecessary solder resist may be provided. As a result, the manufacturing cost of the printed wiring board increases.

【0008】[0008]

【発明が解決しようとする課題】本発明は、前記従来技
術の欠点を解消し、塗布した液状物が貫通孔へ流れ落ち
ず、必要な塗布面に均一に塗布することができる液状物
の塗布方法を提供することを目的とする。
DISCLOSURE OF THE INVENTION The present invention solves the above-mentioned drawbacks of the prior art, and a liquid material coating method capable of uniformly coating a required coating surface without causing the coated liquid material to flow into a through hole. The purpose is to provide.

【0009】[0009]

【課題を解決するための手段】本発明は、液状物を塗布
する面の反対面の貫通孔を別のフィルム状物で密閉する
ことによって前記目的を達成したものである。すなわ
ち、本発明は、貫通孔が形成された板上に膜を形成する
ため液状物を塗布するにあたり、液状物を塗布する面の
反対面の貫通孔をフィルム状物で密閉した後、液状物を
塗布することを特徴とする液状物の塗布方法に関する。
The present invention has achieved the above object by sealing a through-hole on the surface opposite to the surface on which a liquid material is applied with another film-like material. That is, the present invention, when applying a liquid material to form a film on a plate in which a through hole is formed, after sealing the through hole on the opposite surface of the surface to which the liquid material is applied with a film-like material, the liquid material The present invention relates to a method for applying a liquid substance, characterized by applying.

【0010】本発明において、貫通孔が形成された板と
しては、特に制限はなく、プリント配線板、様々な金属
精密加工板などがある。
In the present invention, the plate in which the through holes are formed is not particularly limited, and examples thereof include a printed wiring board and various precision metal working plates.

【0011】本発明の方法に用いるフィルム状物として
は、粘着性を有するフィルム状物が好ましく、例えば、
ヒタレックス(日立化成工業株式会社製の粘着性フィル
ムの商品名)、タックウエル(積水化学工業株式会社製
の粘着性フィルムの商品名)等の粘着層を有するフィル
ム、あるいは熱や圧力をかけると粘着性を示すフィルム
類があげられる。また、商品名フォテック(日立化成工
業株式会社製)等の感光性ドライフィルムを用いること
もできる。これらのフィルム状物の厚さは、特に制限は
ないが、数ミクロンから数ミリメートルであることが好
ましい。
The film-like material used in the method of the present invention is preferably a film-like material having an adhesive property.
Films with adhesive layers such as HITAREX (product name of adhesive film made by Hitachi Chemical Co., Ltd.), TACKWELL (product name of adhesive film made by Sekisui Chemical Co., Ltd.), or adhesive when heat or pressure is applied. Films exhibiting properties are listed. In addition, a photosensitive dry film such as a product name Fotec (manufactured by Hitachi Chemical Co., Ltd.) can be used. The thickness of these film-like materials is not particularly limited, but is preferably several microns to several millimeters.

【0012】本発明においては、上記のようなフィルム
状物を貫通孔の孔の縁部に密着させることが必要であ
る。この密着させる方法には、特に制限はなく、例え
ば、板の貫通孔の上にフィルム状物を手、ローラー等で
押しつけて密着させる方法、貫通孔を有する板上にフィ
ルム状物を重ねて熱ロール間を通過させることによって
密着させる方法、真空チャンバー内で貫通孔を有する板
とフィルム状物を重ね合わせて密着させる方法などがあ
る。
In the present invention, it is necessary to bring the above film-like material into close contact with the edges of the through holes. There is no particular limitation on the method of contacting, for example, a method of pressing the film-like material onto the through-holes of the plate by hand, using a roller or the like to bring it into close contact, and stacking the film-like material on the plate having the through-holes and heating. There are a method of bringing them into close contact by passing them between rolls, a method of making a plate having a through hole and a film-like material overlap each other in a vacuum chamber, and bringing them into close contact.

【0013】また、フィルム状物を密着させる部分は、
貫通孔を完全に塞ぐことができる限り、その板の一部で
もあるいは全面でもよい。
The portion where the film-like material is adhered is
The plate may be a part or the whole surface as long as the through hole can be completely closed.

【0014】液状物が塗布された後、フィルム状物は取
り除かれなければならないが、その剥離方法には、特に
制限はなく、液状物が硬化されるまでの工程中で除かれ
ればよい。そのため、簡単に手で剥がすことができ、さ
らに粘着物が残らないようなフィルム状物を用いること
が好ましい。また、感光性ドライフィルムを用いた場合
には、液状物が写真法を用いたレジストであれば、未露
光状態を維持すれば現像時に除くことも可能であり、ま
た、感光性がなく、現像性だけを有するドライフィルム
を使用することにより簡単に現像時に除くことができ
る。
The film-like material must be removed after the liquid material is applied, but the peeling method is not particularly limited, and it may be removed in the process until the liquid material is cured. Therefore, it is preferable to use a film-like material that can be easily peeled off by hand and that does not leave an adhesive substance. Further, when a photosensitive dry film is used, if the liquid substance is a resist using a photographic method, it can be removed at the time of development if the unexposed state is maintained. It can be easily removed at the time of development by using a dry film having only properties.

【0015】前記のように、貫通孔部にフィルム状物を
密着することにより、貫通孔は片側(液状物を塗布する
面の反対面)が密閉され、例えば、スクリーン印刷やロ
ールコート時に貫通孔内に液状物が押し込まれようとす
ると、内圧が上がり、これにより孔内に液状物が入らな
くなる。また、カーテンコートやスプレーコート時も同
様に貫通孔内に液状物が入り込まなくなる。さらに、貫
通孔内への垂れ込みが起こらないので、貫通孔周辺部で
の液状物の付着量が減少することがなく、孔際まで充分
な膜厚が得られ、同時に反対面への液状物の付着が起こ
らなくなる。
As described above, by sticking the film-like material to the through-hole portion, one side of the through-hole (the surface opposite to the surface on which the liquid material is applied) is sealed, and the through-hole is used, for example, during screen printing or roll coating. When the liquid substance is pushed into the inside, the internal pressure rises, which prevents the liquid substance from entering the holes. Similarly, during curtain coating or spray coating, liquid does not enter the through holes. Further, since the dripping does not occur in the through hole, the amount of the liquid matter attached around the through hole does not decrease, and a sufficient film thickness can be obtained up to the edge of the through hole, and at the same time, the liquid matter on the opposite surface can be obtained. Will not occur.

【0016】さらに、プリント配線板の場合、スルーホ
ール内への液状物の入り込みがなくなるため、特に写真
法液状ソルダーレジストを用いた場合、スルーホール内
のレジストを除去するために現像時のスプレー圧を高く
(例えば、2kgf/cm2 以上)する必要がなくなり、こ
れによりQFP(quad flat package)実装用のパッド間
のレジストの剥離等の欠陥が発生せず、高精度で高信頼
性のソルダーマスクが得られる。
Further, in the case of a printed wiring board, since the liquid substance does not enter the through hole, the spray pressure at the time of development is used to remove the resist in the through hole, especially when a photographic liquid solder resist is used. Does not need to be high (for example, 2 kgf / cm 2 or more), so that defects such as resist peeling between pads for QFP (quad flat package) mounting do not occur, and a highly accurate and highly reliable solder mask Is obtained.

【0017】[0017]

【実施例】次に、実施例及び比較例により本発明をさら
に具体的に説明するが、本発明はこれらによって制限さ
れるものではない。
EXAMPLES Next, the present invention will be described in more detail with reference to Examples and Comparative Examples, but the present invention is not limited thereto.

【0018】実施例1 直径0.3mmから0.8mmまでの貫通孔(以下、スルー
ホールという)が形成された回路厚50μmの両面プリ
ント配線板の片面に、ラミネーターを用いてタックウエ
ル#150AS−ST(積水化学工業株式会社製)をラ
ミネートした後、タックウエルフィルムをラミネートし
た面の反対面に液状ソルダーレジストHR−5000A
E−21(日立化成工業株式会社製)をスクリーン印刷
を用いて塗布した。塗布後、タックウエルフィルムを剥
離し、スルーホール内を観察したところ、液状ソルダー
レジストは全く入っていなかった。さらに、この塗布基
板を80℃で20分間乾燥した後、スルーホールランド
部を観察したところ、充分な膜厚が得られていることが
分かった。その後、形成した塗膜を所定条件で硬化さ
せ、さらにはんだ付けを行ったところ、全く問題なくは
んだ付けが達成された。
Example 1 A tackwell # 150AS- was formed on one side of a double-sided printed wiring board having a circuit thickness of 50 μm, in which through holes (hereinafter referred to as through holes) having a diameter of 0.3 mm to 0.8 mm were formed using a laminator. After laminating ST (manufactured by Sekisui Chemical Co., Ltd.), liquid solder resist HR-5000A is formed on the surface opposite to the surface where the TACKWELL film is laminated.
E-21 (manufactured by Hitachi Chemical Co., Ltd.) was applied by screen printing. After the application, the tackwell film was peeled off and the inside of the through hole was observed. As a result, the liquid solder resist was not contained at all. Further, after the coated substrate was dried at 80 ° C. for 20 minutes and the through hole land portion was observed, it was found that a sufficient film thickness was obtained. After that, when the formed coating film was cured under predetermined conditions and further soldered, soldering was achieved without any problems.

【0019】実施例2 実施例1で用いたタックウエルフィルムをラミネートし
た両面プリント配線板に、同じ液状ソルダーレジストH
R−5000AE−21をプロピレングリコールモノメ
チルエーテルアセテートで希釈した後、カーテンコータ
ーを用いて塗布した。80℃で20分間乾燥した後、観
察したところ、スルーホール内にレジストは入っておら
ず、また、スルーホールランド部に充分な膜厚が得られ
ていた。さらに、タックウエルフィルムを剥がした面に
は液状ソルダーレジストは全く付着していなかった。そ
の後、形成した塗膜を所定条件で硬化させ、さらにはん
だ付けを行ったところ、全く問題なくはんだ付けが達成
された。
Example 2 The same liquid solder resist H was applied to a double-sided printed wiring board laminated with the tackwell film used in Example 1.
R-5000AE-21 was diluted with propylene glycol monomethyl ether acetate and then applied using a curtain coater. Observation after drying at 80 ° C. for 20 minutes revealed that no resist was contained in the through holes and a sufficient film thickness was obtained at the through hole lands. Further, the liquid solder resist did not adhere to the surface from which the tackwell film was peeled off. After that, when the formed coating film was cured under predetermined conditions and further soldered, soldering was achieved without any problems.

【0020】実施例3 実施例1におけるタックウエルフィルムの代わりに、ア
ルカリ現像型感光性ドライフィルムであるフォテックH
−F450(日立化成工業株式会社製)の光重合開始剤
成分を除いたフィルムを用い、また、液状ソルダーレジ
ストとしてアルカリ現像型HR−6060(日立化成工
業株式会社製)を用いた以外は、実施例1と同様の操作
を行った後、観察したところ、スルーホール内にレジス
ト詰まりはなかった。次に、HR−6060の塗膜面に
所定のネガフィルムを重ねて所定の露光を行った後、フ
ォテックH−F450の支持フィルムを剥がして現像を
行うと、フォテックH−F450は完全に除かれた。こ
の後、HR−6060の塗膜を所定条件で硬化させた
後、はんだ付けを行ったところ、全く問題なくはんだ付
けが達成された。
Example 3 Instead of the tackwell film in Example 1, an alkaline development type photosensitive dry film, Fotec H, was used.
-Except that a film excluding the photopolymerization initiator component of F450 (manufactured by Hitachi Chemical Co., Ltd.) was used and alkali development type HR-6060 (manufactured by Hitachi Chemical Co., Ltd.) was used as the liquid solder resist. After observing after performing the same operation as in Example 1, there was no resist clogging in the through holes. Next, after a predetermined negative film was superposed on the coating surface of HR-6060 and a predetermined exposure was performed, the supporting film of Fotec H-F450 was peeled off and development was carried out, and Fotec H-F450 was completely removed. It was After that, when the coating film of HR-6060 was cured under predetermined conditions and then soldering was performed, soldering was achieved without any problems.

【0021】比較例1 粘着フィルムであるタックウエルをラミネートしない以
外は、実施例1と同様にして液状ソルダーレジストを塗
布したところ、全てのスルーホールにレジストが詰まっ
ていた。
Comparative Example 1 A liquid solder resist was applied in the same manner as in Example 1 except that the tackwell, which was an adhesive film, was not laminated, and the resist was clogged in all through holes.

【0022】比較例2 粘着フィルムであるタックウエルをラミネートしない以
外は、実施例2と同様にして液状ソルダーレジストを塗
布したところ、スルーホールランド部にレジストがほと
んど塗布されておらず、また、スルーホールそばの回路
上の膜厚も極端に薄くなっており、レジスト硬化後のは
んだ付けで保護されるべき部分にはんだが付着し、ショ
ートの原因となることが分かった。
Comparative Example 2 A liquid solder resist was applied in the same manner as in Example 2 except that the tackwell, which is an adhesive film, was not laminated. As a result, almost no resist was applied to the through-hole lands, and the through-hole was not applied. It was also found that the film thickness on the circuit near the hole was extremely thin, and the solder adhered to the part to be protected by soldering after hardening the resist, causing a short circuit.

【0023】[0023]

【発明の効果】本発明の方法によれば、貫通孔を有する
板に液状物を塗布したときに貫通孔内への液状物の入り
込みが起こらず、孔際まで均一な膜厚が得られ、反対面
への液状物の付着が起こらない。また、塗布にあたっ
て、スクリーン印刷法、ロールコート法、カーテンコー
ト法、各種のスプレー法など、任意の方法を適用するこ
とができる。さらに、写真法レジストを用いて、高精度
で高信頼性のプリント配線板が得られ、欠陥のない金属
精密加工板が得られる。
According to the method of the present invention, when a liquid material is applied to a plate having a through hole, the liquid material does not enter the through hole, and a uniform film thickness is obtained up to the hole. Liquid matter does not adhere to the opposite surface. Further, in coating, any method such as a screen printing method, a roll coating method, a curtain coating method, and various spraying methods can be applied. Further, by using a photographic resist, a highly accurate and highly reliable printed wiring board can be obtained, and a metal precision-processed board without defects can be obtained.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 吉田 哲也 茨城県日立市東町四丁目13番1号 日立化 成工業株式会社山崎工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tetsuya Yoshida 4-13-1, Higashimachi, Hitachi, Ibaraki Prefecture Hitachi Chemical Co., Ltd. Yamazaki Plant

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 貫通孔が形成された板上に膜を形成する
ため、液状物を塗布するにあたり、液状物を塗布する面
の反対面の貫通孔をフィルム状物で密閉した後、液状物
を塗布することを特徴とする液状物の塗布方法。
1. In order to form a film on a plate having through-holes formed therein, when applying a liquid material, the through-hole on the surface opposite to the surface on which the liquid material is applied is sealed with a film-like material, and then the liquid material is applied. A method for applying a liquid material, which comprises applying.
【請求項2】 貫通孔が形成された板が、プリント配線
板製造あるいは金属精密加工用の板である請求項1記載
の液状物の塗布方法。
2. The method for applying a liquid material according to claim 1, wherein the plate having the through holes is a plate for printed wiring board production or precision metal processing.
JP5799292A 1992-03-16 1992-03-16 Liquid material applying method Pending JPH05253534A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5799292A JPH05253534A (en) 1992-03-16 1992-03-16 Liquid material applying method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5799292A JPH05253534A (en) 1992-03-16 1992-03-16 Liquid material applying method

Publications (1)

Publication Number Publication Date
JPH05253534A true JPH05253534A (en) 1993-10-05

Family

ID=13071507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5799292A Pending JPH05253534A (en) 1992-03-16 1992-03-16 Liquid material applying method

Country Status (1)

Country Link
JP (1) JPH05253534A (en)

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