JPH05245450A - Fluid type cleaning device - Google Patents

Fluid type cleaning device

Info

Publication number
JPH05245450A
JPH05245450A JP14967391A JP14967391A JPH05245450A JP H05245450 A JPH05245450 A JP H05245450A JP 14967391 A JP14967391 A JP 14967391A JP 14967391 A JP14967391 A JP 14967391A JP H05245450 A JPH05245450 A JP H05245450A
Authority
JP
Japan
Prior art keywords
cleaning
cleaned
tank unit
cleaning liquid
cleaning tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14967391A
Other languages
Japanese (ja)
Inventor
Hiroshi Kobayashi
寛 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP14967391A priority Critical patent/JPH05245450A/en
Publication of JPH05245450A publication Critical patent/JPH05245450A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To purify a cleaning liquid for highly efficient cleaning by allowing the cleaning liquid to flow one way from an inlet to an outlet in a cylindrical cleaning tank unit and thus performing the cleaning in a fluidized state. CONSTITUTION:A cleaning tank unit 15 is attached to trough-like retaining parts 16a to 16f in the cleaning process parts 13a to 13f of a cleaning device enclosure 10, and thereby, a cleaning liquid is allowed to flow toward a center hole 14 from each cleaning liquid tank 18a to 18d. Then a rotary disc 12 is rotated sequentially in an arrow direction to match the retaining parts 16a to 16f on which each cleaning tank unit 15 is mounted, with a delivery window 11 for an article to be cleaned. Thus the article to be cleaned is transported in and the cleaned article is transported out. As described above, the cleaning tank unit 15 which receives the article to be cleaned does the cleaning using a cleaning liquid supplied from the tanks 18a to 18d sequentially. The cleaned article is dried using a heater 19.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は流動式の洗浄装置を利用
分野とし、特に洗浄液を滞留させることなく一方向に流
動させた状態で、被洗浄物(電子部品等)を洗浄する洗
浄装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow type cleaning device, and more particularly to a cleaning device for cleaning an object to be cleaned (electronic parts, etc.) in a state where the cleaning liquid is allowed to flow in one direction without staying. ..

【0002】[0002]

【発明の背景】洗浄装置は、汚れ、塵等による電子部品
への影響が多大であることから、製造工程において欠か
せない存在となっている。近年では、電子部品のより高
性能化が求められていることから、洗浄の意義及び洗浄
効率を高めることか益々重要なものとなっている。そし
て、これらを阻害する一つに、洗浄槽内における洗浄液
自体の汚れがある。
BACKGROUND OF THE INVENTION Cleaning devices are indispensable in the manufacturing process because the influence of dirt, dust, etc. on electronic components is great. In recent years, higher performance of electronic parts has been demanded, and it has become more and more important to enhance the significance of cleaning and cleaning efficiency. One of the obstacles to these is the contamination of the cleaning liquid itself in the cleaning tank.

【0003】[0003]

【従来技術】第4図は従来例を説明する洗浄装置の模式
的な断面図である。洗浄装置は、一般的に、10〜20
個の洗浄槽1(an)を縦長に並べて構成される。各洗浄
槽1は例えば市水や酸性液あるいはアルカリ液等の洗浄
液(溶剤)2(an)を貯留する。そして、被洗浄物(未
図示)となる例えば工具類や電子部品を順次に各洗浄槽
1に投入し、各溶剤2に対応した洗浄がなされる。な
お、被洗浄物は例えば網籠等の保持具3に収容される。
そして、通常では、第5図に示したように、各洗浄槽1
はポンプ4、濾過器5、及び回収槽6等をもって洗浄液
2を循環させ、絶えず汚れや塵等を除去するようにして
いる。
2. Description of the Related Art FIG. 4 is a schematic sectional view of a cleaning apparatus for explaining a conventional example. Cleaning devices typically range from 10 to 20.
Each cleaning tank 1 (a to n) is arranged vertically. Each cleaning tank 1 stores a cleaning liquid (solvent) 2 (a to n) such as city water or an acidic liquid or an alkaline liquid. Then, for example, tools and electronic components to be cleaned (not shown) are sequentially put into each cleaning tank 1, and cleaning corresponding to each solvent 2 is performed. The object to be cleaned is housed in the holder 3 such as a net basket.
And normally, as shown in FIG. 5, each cleaning tank 1
The cleaning liquid 2 is circulated through the pump 4, the filter 5, the recovery tank 6 and the like to constantly remove dirt and dust.

【0004】[0004]

【従来技術の問題点】しかしながら、上記構成の洗浄装
置では、各洗浄槽1にはそれぞれの洗浄液2を貯留して
いるため、前述したような循環機構をもってしても、例
えば底部や側壁に付着した汚れ等を充分に排除できず、
微小な塵等が浮遊したりしする。このため、洗浄液2は
次第に汚染され、洗浄液自体が充分に浄化されず、電子
部品等を完全に洗浄できない問題があった。そして、こ
のような場合、洗浄液2を早めに交換する必要もあり、
洗浄能率を低下させる問題もあった。
However, in the cleaning apparatus having the above structure, since the cleaning liquid 2 is stored in each cleaning tank 1, even if the circulation mechanism as described above is used, it adheres to, for example, the bottom or side wall. Dirt cannot be fully removed,
Small dust may float. Therefore, the cleaning liquid 2 is gradually contaminated, the cleaning liquid itself is not sufficiently purified, and there is a problem that the electronic parts and the like cannot be completely cleaned. And in such a case, it is necessary to replace the cleaning liquid 2 early,
There is also a problem that the cleaning efficiency is lowered.

【0005】[0005]

【発明の目的】本発明は、洗浄液自体を充分に浄化でき
て、高能率の洗浄をし得るようにした洗浄装置を提供す
ることを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a cleaning device capable of sufficiently cleaning the cleaning liquid itself and capable of highly efficient cleaning.

【0006】[0006]

【解決手段】本発明は、被洗浄物を収容して複数の洗浄
工程を順番に通過するとともに、入出口を有する筒状と
した複数の洗浄槽ユニットと、前記洗浄工程に対応した
洗浄液を前記洗浄槽ユニットに供給し、順番に並べて設
置された複数の洗浄液供給源と、前記洗浄槽ユニットを
順次に次の洗浄工程へ移送する移送手段とを具備し、前
記洗浄槽ユニット内における洗浄液を入口から出口へ一
方通行として流動させた状態で、前記被洗浄物を洗浄す
ることを解決手段とする。以下、本発明の一実施例によ
り詳細する。
According to the present invention, a plurality of cylindrical cleaning tank units that contain an object to be cleaned and sequentially pass through a plurality of cleaning steps and have an inlet and an outlet, and a cleaning liquid corresponding to the cleaning step are provided. The cleaning tank unit is provided with a plurality of cleaning liquid supply sources that are arranged in order and installed, and a transfer means that sequentially transfers the cleaning tank unit to the next cleaning step, and the cleaning liquid in the cleaning tank unit is inlet. The solution means is to wash the object to be cleaned in a state that the fluid flows as one-way from the outlet to the outlet. Hereinafter, one embodiment of the present invention will be described in detail.

【0007】[0007]

【実施例】第1図は本発明の一実施例を説明する洗浄装
置の模式的な概略平面図である。洗浄装置は、筺体10
に被洗浄物の搬出入窓11を設け、その内部に、回転板
12と各洗浄工程部13とを収容する。回転板12は内
側に向かってスリバチ状に傾斜し、中央部分に孔14を
有する。そして、その板面上に洗浄ユニット15を着脱
自在に装着される第1から第5の樋状の保持部16(a
f)を放射状に設けてなる。洗浄槽ユニット15は、第2
図に示したように例えば半円状とした筒体からなり、そ
の外表面に圧電材よりなる超音波発生体17が装着され
ている。なお、筒体の両端側は網目状の孔を有する。ま
た、回転板12は例えば間欠モータを駆動源(未図示)
として断続的に回転される。洗浄工程部13は各種の洗
浄源13aと乾燥源13bからなる。洗浄源13aは例
えば市水、中性洗浄液、第1温水、第2温水等の各洗浄
液をそれぞれのタンク18(ae)に貯留する。そして、
電磁弁20により制御される蛇口(給水口)21(ad)
を有する。乾燥源13bはヒータ19に温風口22を設
けてなる。そして、各蛇口21と温風口22は回転板1
2の外周上に整列する。この例では、最初に市水用蛇口
21aを搬出入窓11の左側として半時計回りに各蛇口
21を周回させ、最後に温風口22を搬出入窓11の右
側に配置している。このようなものでは、複数個用意し
た洗浄槽ユニット15にそれぞれ被洗浄物例えば水晶片
(未図示)を収容する。そして、先ず、第1の洗浄槽ユ
ニット15aを搬出入窓11の前に停止中の第1保持部
16aに装着する(未図示、以下同)。そして、回転板
12を矢印方向に回転させ、第1乃至第6の保持部16
(ad)を次の洗浄工程部13に移動させる。第1保持部
16aは市水用蛇口21aの前に、第2保持部16bは
搬出入窓11の前に停止する。そして、各電磁弁20を
開いて各洗浄液をそれぞれ流出させる。第1洗浄槽ユニ
ット15aには、市水が一端側(上端側)から給水さ
れ、他端側(下端側)から自然流出する。すなわち、槽
内の水晶片を市水洗浄する。そして、電磁弁を閉じる。
この間に、搬出入窓11の前に移動した第2保持部16
bに第2の洗浄槽ユニット15bが装着される。次に、
回転板12を回転して各保持部16をさらに次の洗浄工
程部13に移動する。すなわち、第1保持部16aを中
性洗浄液蛇口21bに、第2保持部16bを市水用蛇口
21aに、第3保持部16cを搬出入窓11に移動させ
る。そして、各電磁弁20を開き、第1洗浄槽ユニット
15aは中性洗浄液により、第2洗浄槽ユニット15b
は市水により洗浄される。そして、第3洗浄槽ユニット
15cは第3保持部16cに装着される。なお、洗浄槽
ユニット15の他端側から流出した中性洗浄液は例えば
受皿等によりタンクに回収され、前述したようなポンプ
P、濾過器F等の循環機構をもって循環される。また、
タンク18bには補充タンク23が接続される。このよ
うにして、各洗浄槽ユニット15は、搬出入窓11から
の保持部16への装着に始まって、順次に、市水、中性
洗浄液、第1温水、第2温水により洗浄される。そし
て、乾燥源19により乾燥された後、搬出入窓11の前
に戻り、ここから取り出される。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic plan view of a cleaning apparatus for explaining an embodiment of the present invention. The cleaning device is a housing 10.
A loading / unloading window 11 for the object to be cleaned is provided in which the rotating plate 12 and each cleaning process unit 13 are housed. The rotary plate 12 is slanted inward toward the inside and has a hole 14 in the central portion. Then, the cleaning unit 15 is detachably mounted on the plate surface of the first to fifth gutter-shaped holding portions 16 (a to
f) are provided radially. The cleaning tank unit 15 is the second
As shown in the figure, it is composed of, for example, a semicircular cylinder, and an ultrasonic wave generator 17 made of a piezoelectric material is attached to the outer surface thereof. It should be noted that both ends of the cylindrical body have mesh holes. The rotary plate 12 is, for example, an intermittent motor as a drive source (not shown).
As it is rotated intermittently. The cleaning process unit 13 includes various cleaning sources 13a and a drying source 13b. The cleaning source 13a stores each cleaning liquid such as city water, neutral cleaning liquid, first warm water, second warm water, etc. in each tank 18 (a to e) . And
Faucet (water inlet) 21 (a to d) controlled by solenoid valve 20
Have. The drying source 13b has a heater 19 provided with a warm air outlet 22. The faucet 21 and the hot air outlet 22 are provided on the rotary plate 1
Align on the outer circumference of 2. In this example, first, the tap 21a for city water is set on the left side of the carry-in / out window 11, and each faucet 21 is circulated counterclockwise, and finally the warm air port 22 is arranged on the right side of the carry-in / out window 11. In such a case, the plurality of cleaning tank units 15 accommodate the objects to be cleaned, for example, crystal pieces (not shown). Then, first, the first cleaning tank unit 15a is attached to the stopped first holding portion 16a in front of the carry-in / out window 11 (not shown, hereinafter the same). Then, the rotary plate 12 is rotated in the direction of the arrow, and the first to sixth holding portions 16 are rotated.
(a to d) are moved to the next cleaning process unit 13. The 1st holding part 16a stops before the tap 21a for city water, and the 2nd holding part 16b stops before the loading / unloading window 11. Then, each solenoid valve 20 is opened to allow each cleaning liquid to flow out. City water is supplied to the first cleaning tank unit 15a from one end side (upper end side) and naturally flows out from the other end side (lower end side). That is, the crystal piece in the tank is washed with tap water. Then, the solenoid valve is closed.
During this time, the second holding unit 16 moved in front of the loading / unloading window 11
The second cleaning tank unit 15b is attached to b. next,
The rotating plate 12 is rotated to move each holding unit 16 to the next cleaning process unit 13. That is, the first holding part 16a is moved to the neutral cleaning liquid faucet 21b, the second holding part 16b is moved to the city water faucet 21a, and the third holding part 16c is moved to the loading / unloading window 11. Then, each solenoid valve 20 is opened, and the first cleaning tank unit 15a is treated with a neutral cleaning solution to remove the second cleaning tank unit 15b.
Are washed with city water. Then, the third cleaning tank unit 15c is attached to the third holding portion 16c. The neutral cleaning liquid that has flown out from the other end of the cleaning tank unit 15 is collected in a tank by, for example, a pan, and circulated by the circulation mechanism such as the pump P and the filter F as described above. Also,
A replenishment tank 23 is connected to the tank 18b. In this way, each cleaning tank unit 15 is sequentially cleaned with city water, a neutral cleaning liquid, the first warm water, and the second warm water, starting from the mounting on the holding portion 16 from the carry-in / out window 11. Then, after being dried by the drying source 19, it returns to the front of the carry-in / out window 11 and is taken out from here.

【0008】このような洗浄装置であれば、洗浄槽ユニ
ット15を傾斜させた状態で、濾過器等により充分に浄
化されたクリーンな洗浄液を、その一端側から給水して
他端側から一方向として流出する。したがって、洗浄液
が洗浄槽ユニット15の内部に滞留することなく、常時
クリーンな洗浄液が流下する。したがって、被洗浄物で
ある水晶片に付着した塵や汚れをとるとともに、これら
を洗浄液と一緒に他端側から流出する。すなわち、微小
な塵等が洗浄槽ユニット15内に浮遊することを防止す
る。このようなことから、洗浄槽ユニット15内での洗
浄液の汚染を防止するので、水晶片の洗浄を完全にして
洗浄能率を高めることができる。そして、この実施例で
は、洗浄槽ユニット15を回転板12上に配置して、順
次に各種の洗浄を行う。したがって、従来の縦長に並べ
た洗浄装置に比較してコンパクトに構成できるととも
に、作業者は搬出入窓11の前で、洗浄槽ユニット15
の装着及び取り出しを行えばよいのでその作業能率をも
向上する。
With such a cleaning apparatus, with the cleaning tank unit 15 tilted, a clean cleaning liquid sufficiently purified by a filter or the like is supplied from one end side thereof and fed in one direction from the other end side. As outflow. Therefore, the cleaning liquid does not stay inside the cleaning tank unit 15, and a clean cleaning liquid always flows down. Therefore, dust and dirt adhering to the crystal piece, which is the object to be cleaned, is removed, and these are discharged together with the cleaning liquid from the other end side. That is, it is possible to prevent minute dust and the like from floating in the cleaning tank unit 15. For this reason, since the cleaning liquid is prevented from being contaminated in the cleaning tank unit 15, the crystal piece can be completely cleaned and the cleaning efficiency can be improved. Then, in this embodiment, the cleaning tank unit 15 is arranged on the rotary plate 12 and various kinds of cleaning are sequentially performed. Therefore, the cleaning device can be made compact as compared with the conventional vertically arranged cleaning devices, and the operator can place the cleaning tank unit 15 in front of the loading / unloading window 11.
Since it suffices to attach and remove the, the work efficiency is also improved.

【0009】[0009]

【他の事項】上記実施例では、洗浄槽ユニット15の装
着に始まって取り出しまでの一連の洗浄工程を回転板1
2の一周により終了させたが、例えば搬出入窓11を対
向する反対側に設けて一連の洗浄工程を回転板12の半
周により終了させるようにしてもよい。また、洗浄槽ユ
ニット15は必ずしも回転板12に放射状に配置(移
動)することなく、例えば直線上の一方向に移動するよ
うにしてもよいものである。また、洗浄槽ユニット15
は半円筒状として両端側に孔を設けたが、この孔はなく
とも洗浄液は充分に流出するので必須の要件ではない。
また、半円筒状に限らず完全な円筒状であっても(但し
この場合は両端側に洗浄液の流出入要の孔を要する)あ
るいはその他の角筒状であってもよい。洗浄槽ユニット
15には超音波発生体17として圧電材を用いたが、こ
れ以外の例えばエアバブル発生装置であってもよく、さ
らには必要に応じて除去されてもよいものである。ま
た、洗浄工程は市水、中性洗浄液、第1温水、第2温水
による洗浄及び乾燥としたが、これに限らず被洗浄物に
応じて設定できることはいうまでもない。また、洗浄槽
ユニット15の移動(移送)手段は、周知技術に基づい
てどのようにでも構成できることはいうまでもない。ま
た、回転板123は内側に傾斜するとしたが、平板状で
あっても洗浄槽ユニット15が傾斜するような構造にす
ればよい。また、回転板12に内側に傾斜した樋状の溝
を放射状に設けて各洗浄液を流出入させ、ここに例えば
網状とした洗浄物収容体を配置するようにしてもよいも
のである。この場合、桶状の溝自体が洗浄槽ユニット1
5となる。要するに、本発明は、洗浄工程に応じて移動
する筒状の洗浄槽ユニット15に洗浄液を一方向に流出
入させながら洗浄するようにしたことを基本的な主旨と
し、この主旨を逸脱しない範囲内で適宜自在に変更でき
るものである。
[Other Matters] In the above embodiment, a series of cleaning steps from the mounting of the cleaning tank unit 15 to the removal thereof are performed on the rotary plate 1.
Although it is completed by one round of 2, the carry-in / out window 11 may be provided on the opposite side to end the series of cleaning steps by half the circumference of the rotary plate 12. Further, the cleaning tank unit 15 may not necessarily be arranged (moved) radially on the rotary plate 12, but may be moved in one direction on a straight line, for example. In addition, the cleaning tank unit 15
Has a semi-cylindrical shape and has holes on both ends, but the cleaning liquid can sufficiently flow out without the holes, and is not an essential requirement.
Further, the shape is not limited to the semi-cylindrical shape, but may be a perfect cylindrical shape (however, in this case, holes for inflow and outflow of the cleaning liquid are required at both ends) or other rectangular cylindrical shape. Although the piezoelectric material is used as the ultrasonic wave generator 17 in the cleaning tank unit 15, other devices such as an air bubble generator may be used, and the ultrasonic wave generator 17 may be removed as necessary. Further, although the cleaning process is cleaning with city water, neutral cleaning liquid, first warm water, and second warm water and drying, it is needless to say that the cleaning process can be set according to the object to be cleaned. Further, it goes without saying that the moving (transferring) means of the cleaning tank unit 15 can be configured in any way based on a known technique. Although the rotary plate 123 is inclined inward, the cleaning tank unit 15 may be inclined even if it has a flat plate shape. Further, a trough-shaped groove inclined inward may be radially provided on the rotary plate 12 to allow each cleaning liquid to flow in and out, and for example, a mesh-shaped cleaning material container may be arranged therein. In this case, the trough-shaped groove itself is the cleaning tank unit 1
It becomes 5. In short, the present invention is basically intended to perform cleaning while allowing the cleaning liquid to flow into and out of the cylindrical cleaning tank unit 15 which moves in accordance with the cleaning process, and within a range not departing from this principle. Can be changed as desired.

【0010】[0010]

【発明の効果】本発明は、洗浄工程に応じて移動する洗
浄槽ユニット内における洗浄液を入口から出口へ一方通
行として流動させた状態で前記被洗浄物を洗浄するの
で、洗浄液自体を充分に浄化できて、高能率の洗浄をし
得るようにした流動式の洗浄装置を提供でき、その実際
的な価値は非常に高いものである。
According to the present invention, since the cleaning liquid in the cleaning tank unit which moves according to the cleaning process is flowed as one-way flow from the inlet to the outlet, the object to be cleaned is cleaned, so that the cleaning liquid itself is sufficiently purified. It is possible to provide a fluid-type cleaning device capable of performing high-efficiency cleaning, and its practical value is very high.

【図面の簡単な説明】[Brief description of drawings]

【第1図】本発明の一実施例を説明する流動式洗浄装置
の模式的なな平面図である。
FIG. 1 is a schematic plan view of a fluid-type cleaning device for explaining an embodiment of the present invention.

【第2図】本発明の一実施例を説明する洗浄槽ユニット
の図である。
FIG. 2 is a diagram of a cleaning tank unit illustrating an embodiment of the present invention.

【第3図】本発明の一実施例を説明する循環機構の概略
構成図である。
FIG. 3 is a schematic configuration diagram of a circulation mechanism for explaining an embodiment of the present invention.

【第4図】従来例を説明する洗浄装置の概略的な断面図
である。
FIG. 4 is a schematic sectional view of a cleaning device for explaining a conventional example.

【第5図】従来例を説明する洗浄装置の循環機構の断面
図である。
FIG. 5 is a cross-sectional view of a circulation mechanism of a cleaning device for explaining a conventional example.

【符号の説明】[Explanation of symbols]

10 筺体、11 搬出入窓、12 回転板、13a
洗浄源、13b 乾燥源、14 孔、15 洗浄槽ユニ
ット、16 保持部、17 超音波発生体、18 タン
ク、19 ヒータ、20 電磁弁21、22 温風口、
23 補助タンク.
10 housing, 11 loading / unloading window, 12 rotating plate, 13a
Cleaning source, 13b Drying source, 14 holes, 15 cleaning tank unit, 16 holding part, 17 ultrasonic generator, 18 tank, 19 heater, 20 solenoid valve 21, 22 warm air inlet,
23 Auxiliary tank.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】被洗浄物を収容して複数の洗浄工程を順番
に通過するとともに、入出口を有する筒状とした複数の
洗浄槽ユニットと、 前記洗浄工程に対応した洗浄液を前記洗浄槽ユニットに
供給し、順番に並べて設置された複数の洗浄液供給源
と、 前記洗浄槽ユニットを順次に次の洗浄工程へ移送する移
送手段とを具備してなる洗浄装置であって、 前記洗浄槽ユニット内における洗浄液を入口から出口へ
一方通行として流動させた状態で、前記被洗浄物を洗浄
することを特徴とする流動式洗浄装置。
1. A plurality of cylindrical cleaning tank units that contain an object to be cleaned and sequentially pass through a plurality of cleaning steps and have inlets and outlets, and a cleaning liquid that corresponds to the cleaning step is supplied to the cleaning tank unit. And a transfer means for sequentially transferring the cleaning bath unit to the next cleaning step, the cleaning device being provided in the cleaning bath unit. 2. The flow type cleaning apparatus, wherein the cleaning target is cleaned in a state in which the cleaning liquid in 1 is allowed to flow from the inlet to the outlet in one way.
【請求項2】前記洗浄槽ユニットを放射状に並べて構成
した請求項1の流動式洗浄装置。
2. The fluidized cleaning apparatus according to claim 1, wherein the cleaning tank units are arranged in a radial pattern.
【請求項3】前記洗浄槽ユニットを傾斜させ、上端側を
入口、下端側を出口として構成した請求項1の流動式洗
浄装置。
3. The fluid-type cleaning device according to claim 1, wherein the cleaning tank unit is inclined, and the upper end side is an inlet and the lower end side is an outlet.
JP14967391A 1991-05-24 1991-05-24 Fluid type cleaning device Pending JPH05245450A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14967391A JPH05245450A (en) 1991-05-24 1991-05-24 Fluid type cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14967391A JPH05245450A (en) 1991-05-24 1991-05-24 Fluid type cleaning device

Publications (1)

Publication Number Publication Date
JPH05245450A true JPH05245450A (en) 1993-09-24

Family

ID=15480334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14967391A Pending JPH05245450A (en) 1991-05-24 1991-05-24 Fluid type cleaning device

Country Status (1)

Country Link
JP (1) JPH05245450A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102243988A (en) * 2011-07-05 2011-11-16 上海集成电路研发中心有限公司 Cleaning process cavity and cleaning process for semiconductor silicon slice

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102243988A (en) * 2011-07-05 2011-11-16 上海集成电路研发中心有限公司 Cleaning process cavity and cleaning process for semiconductor silicon slice

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