JPH0524185Y2 - - Google Patents
Info
- Publication number
- JPH0524185Y2 JPH0524185Y2 JP4386186U JP4386186U JPH0524185Y2 JP H0524185 Y2 JPH0524185 Y2 JP H0524185Y2 JP 4386186 U JP4386186 U JP 4386186U JP 4386186 U JP4386186 U JP 4386186U JP H0524185 Y2 JPH0524185 Y2 JP H0524185Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- support member
- mirror
- columnar body
- conductive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 12
- 239000004020 conductor Substances 0.000 claims description 10
- 229920003002 synthetic resin Polymers 0.000 claims description 7
- 239000000057 synthetic resin Substances 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 description 7
- 230000005611 electricity Effects 0.000 description 5
- 230000003068 static effect Effects 0.000 description 5
- 239000007769 metal material Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4386186U JPH0524185Y2 (fr) | 1986-03-27 | 1986-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4386186U JPH0524185Y2 (fr) | 1986-03-27 | 1986-03-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62156827U JPS62156827U (fr) | 1987-10-05 |
| JPH0524185Y2 true JPH0524185Y2 (fr) | 1993-06-21 |
Family
ID=30861122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4386186U Expired - Lifetime JPH0524185Y2 (fr) | 1986-03-27 | 1986-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0524185Y2 (fr) |
-
1986
- 1986-03-27 JP JP4386186U patent/JPH0524185Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62156827U (fr) | 1987-10-05 |
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