JPH05240999A - X-ray irradiation device with irradiation region monitor - Google Patents

Abstract

PURPOSE:To obtain a device for easily observing an X-ray irradiation region on sample surface by an X-ray irradiation device using visible light without obstracting the sample movement. CONSTITUTION:In between an X-ray source 1a and a total reflection type X-ray lens 4 to condense X-ray 12, an X-ray penetration mirror 6 penetrating the X-ray 12 and reflecting visible light 14 is inserted with an inclination. At a position optically equivalent to the X-ray source against the X-ray penetration mirror 6, a visible light source 10 is arranged to make the irradiation of both of the X-ray 12 and the visible light 14 on the spot of a sample 5 to be identical shape and position. Also, the visible light 14 irradiated on the sample and reflected by the X-ray penetration mirror 6 is separated from the visible light source axis with a half mirror 7, and on that axis, a two dimensional visible light position detector 11 is provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray irradiation apparatus equipped with an irradiation area monitor.

[0002]

2. Description of the Related Art As a conventional X-ray irradiation monitor device in an X-ray irradiation device, for example, JP-A-58-1332 is known.
There is one disclosed in Japanese Patent No. 39. This is an X-ray that transmits X-rays but reflects visible light between the X-ray irradiation device and the sample.
The line-transmission mirror is interposed with its surface tilted at about 45 degrees with respect to the X-ray optical axis. Further, the visible light source is once placed on the X-ray transmission mirror so as to irradiate the X-ray irradiation area on the sample surface. A collimator is provided between the sample and the X-ray transmission mirror to narrow down the X-rays and visible rays to make them parallel rays. With this configuration, the X-rays generated from the X-ray irradiation device pass through the X-ray transmission mirror and are narrowed down by the collimator to become parallel X-rays and irradiate the sample surface.
Further, the visible light emitted from the visible light source is applied to the X-ray transmission mirror substantially at right angles to the X-ray optical axis and reflected. As a result, the visible light becomes coaxial with the X-ray optical axis, and is narrowed down by the collimator to become parallel light and irradiate the sample surface. That is, the area irradiated with the X-ray on the sample surface is
Visible light is emitted. The X-ray irradiation region is monitored by observing the portion irradiated with this visible light by other means.

As another conventional example, for example, Japanese Patent Laid-Open No.
There is one disclosed in Japanese Patent Publication No. 185500. This configuration
The X-ray is irradiated on the surface of the sample with a spot by the elongated guide tube. Between the X-ray irradiation device and the sample, X
A reflecting mirror that reflects the rays, with its surface approximately 4 with respect to the X-ray optical axis
The guide tube is provided with a hole through which the guide tube is inserted. Further, the visible light source is placed on the reflecting mirror so as to irradiate the X-ray irradiation region on the sample surface. Further, an optical lens is arranged on the visible light axis so that the visible light is focused on the surface of the sample. This example also monitors the X-ray irradiation region by irradiating the region irradiated with the X-ray with the visible light and observing the portion irradiated with the visible light with other means. ..

[0004]

Problems to be Solved by the Invention JP-A-58-1332
In the technique disclosed in Japanese Patent No. 39, the X-ray and the visible light are narrowed by a hollow cylindrical collimator to form a beam having a small diameter, and the sample surface is irradiated with the X-ray from the X-ray source.
It is difficult to set the inner diameter of the collimator to about several tens of μm or less due to the fact that a large X-ray intensity cannot be obtained because the solid angle of radiation emission becomes small and due to the diffraction phenomenon. That is, a minute beam diameter cannot be obtained.

Also, in the one disclosed in Japanese Patent Laid-Open No. 1-185500, a thin guide tube narrows X-rays to form a beam having a small diameter and irradiates the sample surface, and visible light is an optical lens. Since the beam is focused into a beam shape, it is necessary to adjust the alignment to match the respective focal positions, and there is a problem that the focal points do not match when the sample position is deviated.

Further, in the above-mentioned conventional example, it is necessary to dispose a visible light observing device (visible light image pickup device) at another position around the sample, which is a means for confirming the irradiation position of the beam-like visible light on the sample. is there. There are cases where the sample requires a large degree of freedom, such as a tilt rotation mechanism, or where the arrangement of the visible light observation device is limited due to the device configuration, and the X-ray irradiation position cannot be confirmed. When directly observing a visible light irradiation area (that is, an X-ray irradiation area), it can be confirmed only up to several hundred μm.

[0007]

In order to solve the above-mentioned problems, the present invention provides an X-ray generator for generating X-rays, and total reflection for totally reflecting and condensing the X-rays on the inner surface of its mirror surface state. Type X-ray lens, the X-ray generator, and the total reflection type X
Between the X-ray lens and the X-ray lens, the surface of which is inclined with respect to the optical axis of the X-ray, transmits the X-ray, reflects the visible light, and reflects the X-ray transmissive mirror. The visible ray reflected by the total reflection type X-ray lens is arranged so as to be coaxial with the optical axis of the X-ray, and the X-ray optical distance between the X-ray generator and the total reflection type X-ray lens. , The total reflection type X
A visible light source having the same visible light optical distance as a linear lens, a half mirror provided between the total reflection X-ray lens and the visible light source, and light of the visible light and the half mirror An X-ray irradiating device with an irradiation region monitor, characterized in that a visible light two-dimensional position detecting device is provided on the other optical axis with respect to the axis.

[0008]

The visible light superposed on the X-ray optical axis by the X-ray transmission mirror has the X-ray optical distance between the X-ray generator and the total reflection type X-ray lens, the visible light source and the total reflection type X-ray lens. Since they are arranged to have the same visible light optical distance, the light enters the total reflection type X-ray lens under the same conditions as the X-rays. With this total reflection type X-ray lens, X-rays and visible light are totally reflected according to the reflection principle of a mirror. Since the inner diameter of the total reflection type X-ray lens has a concave mirror shape, the X-ray and visible light irradiate the same position (region) on the sample surface. Here, if the X-ray source and the visible light source have a spot shape, the sample surface is irradiated as a spot. The spot irradiation of visible light indicates the irradiation position of X-ray irradiation (spot). Further, the visible light applied to the sample of visible light passes through the total reflection type X-ray lens, is reflected by the X-ray transmission mirror, and reaches the half mirror. With this half mirror, part of the visible light from the sample passes through another optical axis different from the visible light source and is input to the visible light two-dimensional position detecting device. With this visible light two-dimensional position detecting device, it is possible to observe where on the sample the visible light is radiated.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a schematic cross section of an X-ray irradiator according to an embodiment of the present invention. Reference numeral 1 denotes an X-ray generator, which is a point-like X-ray source 1a having a slit or a pinhole (not shown).
have. The spot size of the X-ray source 1a is several hundred μm
To several μm. The X-rays 12 from the X-ray source 1a have a beam shape having an X-ray axis 13,
The gas passes through the pipe 2 kept in a vacuum or a gas that hardly absorbs X-rays. Energy 5 for He gas
X-rays 12 having a keV or higher pass through 99% or more.

The X-ray 12 that has passed through is provided with a lens holder 3 at the other end of the pipe 2. Lens holder 3
Is equipped with a total reflection type X-ray lens 4 for focusing the X-rays 12 so as to be movable in five axes. The inner surface of the total reflection type X-ray lens 4 is mirror-finished, is an ellipsoidal mirror, and has a concave shape. In the present embodiment, the pyrex glass type total reflection type X-ray lens 4 has a spindle-shaped inner surface, but a dish-shaped one can also be used.

On the other hand, the X-ray irradiator is provided with a visible light source 10 for irradiating spot-shaped visible light on the X-ray irradiation position on the sample surface. The visible light 14 generated from the visible light source 10 is narrowed down by the optical lens 9, and the pinhole 8 is provided on the focal point thereof. The pinhole 8 determines the spot shape as the light source of the visible light 14. The visible light source 10, the optical lens 9, and the pinhole 8 are positioned so that the direction of the visible ray axis 15a from the visible light source 10 is parallel to the direction of the X-ray axis 13.

The half mirror 7 is tilted on the visible light axis 15a from the visible light source 10. The inclination is 45 degrees in the direction of the X-ray axis 13. The visible light ray 14 reflected by the half mirror 7 has a visible light axis 15b perpendicular to the visible light axis 15a from the visible light source 10, and the visible light axis 15b is orthogonal to the X-ray axis 13.
At the intersection of the visible light axis 15b from the half mirror 7 and the X-ray axis 13, an X-ray transmission mirror 6 that transmits the X-rays 12 on the X-ray optical axis 13 and reflects the visible light is provided. It is inserted at an angle of 45 degrees with respect to the axis 15b in the direction of the sample 5. These arrangements and inclinations are not limited to those in the embodiment. In short, the visible light rays 14 from the visible light source 10 pass through the half mirror 7 and are reflected by the X-ray transmission mirror 6.
The arrangement is such that it is focused on the inner surface of the total reflection type X-ray lens 4 and irradiates the surface of the sample 5. That is, the inclination of each of the mirrors 7 and 6 is generally most suitable at 45 degrees, but is not limited to that angle.

For the X-ray transmission mirror 6, a beryllium or aluminum thin plate is generally used. At least the surface that reflects visible light is a mirror surface. Here, the optical distance of the visible light 14 from the slit 8 to the X-ray transmission mirror 6 is equal to the X-ray optical distance from the X-ray source position such as a slit (not shown) of the X-ray generator to the X-ray transmission mirror 6. Each arrangement is set so that.

Further, the half mirror 7 is placed on the visible light axis 15b.
The visible light two-dimensional position detection device 11 is provided on the extension line (in the direction opposite to the X-ray transmission mirror). The visible light two-dimensional position detecting device 11 is a device for optically observing the surface of the sample 5. Here, the actions of the X-ray 12 and the visible light 15 will be described. That is, the X generated from the X-ray generator 1
The line 12 has an X-ray axis 13 in the direction of the sample 5, passes through the X-ray transmission mirror 6, is reflected by the total reflection type X-ray lens 4, is focused, and is irradiated as a spot on the surface of the sample 5. In addition,
Since the X-rays 12 passing near the X-ray axis 13 pass through the central portion of the total reflection type X-ray lens 4, they are not focused on the sample surface. It is provided near the entrance.

The visible light 14 emitted from the visible light source 10
Is reflected by the half mirror 7 and reaches the X-ray transmission mirror 6. Here again, the visible light 14 is reflected by the X-ray transmission mirror 6 and becomes the same beam as the above-mentioned X-ray 12. The visible light 14 reflected by the X-ray transmission mirror 6 is reflected by the total reflection type X-ray lens 4 as in the case of X-rays, is focused, and is irradiated as a spot on the surface of the sample 5. That is, the X-ray 12 and the visible light 14 that are irradiated as a spot on the surface of the sample 5 have the same shape. Therefore, the visible light 14 on the surface of the sample 5
The X-ray irradiation region can be monitored by observing the spots.

The visible light 14 radiated as a spot on the surface of the sample 5 is scattered and reflected on the surface of the sample 5. A part thereof is again made incident on the total reflection type X-ray lens 4, is reflected, and advances along the X-ray axis 13 in the direction of the X-ray source 1a. The visible light 14 is reflected by the X-ray transmission mirror 6 again, and the visible light axis 15 is reflected.
Proceed along b. Then, it reaches the half mirror 7. Part of the visible light 14 that has reached the half mirror 7 passes through the half mirror 7 and reaches the visible light two-dimensional detection device 11. That is, the visible light two-dimensional detection device 11 forms an image detection device, and the position of irradiation of the visible light 14 spot on the surface of the sample 5, that is, the irradiation position of the X-ray 12 can be enlarged and observed and confirmed. Is.

Here, in order to observe the vicinity of the spot irradiation position of the visible light 14 on the sample, the second visible light source 20 for illuminating the vicinity of the spot irradiation position of the visible light 14 on the sample with light. It is provided near the sample 5. The image detected by the visible light two-dimensional detector 11 is detected with a resolution of about 30 μm. When the data is displayed on the television monitor 17 via the image processing device 18, the position of the visible light spot is several μm. Images can be displayed at a resolution of about a certain degree.

When the sample 5 is arranged with the sample surface tilted, even if the diffusely reflected light of the visible light 14 from the sample 5 to the total reflection type X-ray lens 4 decreases, the vicinity of the irradiation position of the visible light 14 is irradiated. 2 visible light sources 20 are provided, so sample 4
The surface can be easily observed. Here, the second visible light source 2
When 0 is illuminated by a fiber, the sample can be freely tilted without giving any restriction to the tilt of the sample.
When the sample is tilted or rotated, the irradiation distance of visible light changes, but since the total reflection type X-ray lens 4 has a deep focal depth, the irradiation position of visible light 14 is not lost easily. This total reflection type X-ray lens 4 has a large aberration, but a visual field of about 300 μm or more can be obtained. further,
A wider field of view can be obtained by using an aberration correction lens. Since the total reflection type X-ray lens 4 has a long depth of focus, even if the sample 5 is tilted by about 80 degrees or more,
Observation in the μm region is possible.

The X-ray source is not limited to the micro focus X-ray tube. For example, a rotating anticathode X-ray source, an X-ray source excited by laser plasma, an ordinary X-ray tube, a synchrotron radiation source, etc. The present invention also includes the case where the X-ray source is used directly, and the case where the X-ray source is a pinhole, a slit, or a focal point formed by another X-ray optical element. The total reflection type X-ray lens 4 having a mirror surface state is not limited to the cylindrical shape shown in FIG. 1, but includes a flat or curved crystal having a surface that causes reflection of visible light. Materials and shapes are also included in the present invention.

The X-ray axis 1 is not limited to the structure of this embodiment.
The present invention also includes a case in which a plurality of X-ray transmission mirrors 6 are arranged in 3 and a case in which a plurality of half mirrors 7 are provided.

[0021]

With this structure, it is not necessary to install a visible light observing mechanism such as a microscope, a telescope, and a zoom lens near the sample position for observing the X-ray irradiation region on the sample surface, and the sample can be freely rotated. It is possible to incline, and the position of the X-ray irradiation region can be accurately observed and monitored with an accuracy of several μm or less even if the position is slightly displaced with respect to the X-ray axis length direction. Since the X-ray irradiation region and the visible light irradiation region have the same shape, the axis adjustment of the total reflection X-ray lens can be achieved by observing the spot of visible light.

[Brief description of drawings]

FIG. 1 is a schematic sectional view of one embodiment according to the present invention.

[Explanation of symbols]

 1 X-ray generator 1a X-ray source 2 Pipe 3 Lens holder 4 Total reflection type X-ray lens 5 Sample 6 X-ray transmission mirror 7 Half mirror 8 Slit 9 Optical lens 10 Visible light source 11 Visible light two-dimensional detector 12 X-ray 13 X Line axis 14 Visible light 15a, 15b Visible light axis 17 Television monitor 18 Image processing device 19 Stopper 20 Second visible light source

Claims (1)

[Claims] 1. An X-ray generator for generating X-rays, a total-reflection X-ray lens for totally reflecting and condensing the X-rays on the inner surface of the mirror surface thereof, the X-ray generator and the total reflection. Between the type X-ray lens,
An X-ray transmissive mirror that is inclined with respect to the optical axis of the X-ray and transmits X-rays and reflects visible light; and a total reflection X-ray lens that reflects the X-ray transmissive mirrors. Visible light reflected by the X-ray generator and the total reflection type X are arranged so as to be coaxial with the optical axis of the X-ray.
Provided between the total reflection X-ray lens and the visible light source, and a visible light source in which the X-ray optical distance to the line lens and the visible light optical distance to the total reflection X-ray lens are equal. An X-ray irradiation device with an irradiation area monitor, comprising: a half mirror; and a visible light two-dimensional position detection device on the other optical axis with respect to the optical axes of the visible light and the half mirror.