JPH05233072A - Electropneumatic regulator for vacuum - Google Patents

Electropneumatic regulator for vacuum

Info

Publication number
JPH05233072A
JPH05233072A JP18977991A JP18977991A JPH05233072A JP H05233072 A JPH05233072 A JP H05233072A JP 18977991 A JP18977991 A JP 18977991A JP 18977991 A JP18977991 A JP 18977991A JP H05233072 A JPH05233072 A JP H05233072A
Authority
JP
Japan
Prior art keywords
negative pressure
air
vacuum
port
secondary side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18977991A
Other languages
Japanese (ja)
Inventor
Ken Sawada
謙 澤田
Motoaki Iwata
元昭 岩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
Original Assignee
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Priority to JP18977991A priority Critical patent/JPH05233072A/en
Publication of JPH05233072A publication Critical patent/JPH05233072A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve control accuracy by decreasing the flow rate of sucking, eliminating the waste of air and controlling secondorder side negative pressure at the low degree of vacuum as well at the electropneumatic regulator for vacuum. CONSTITUTION:This electropneumatic regulator for vacuum adjusts the suction of air in a negative pressure port 1 and the supply of air to the negative pressure port 1 and controls second-order side negative pressure. Then, this regulator is provided with a main body 2 of the regulator, pressure sensor 7, two-way valve 5 for sucking air and two-way valve 6 for supplying air. Time for electrifying the two-way valves 5 and 6 for sucking and supplying air is adjusted corresponding to the differential voltage of the second-order side negative pressure detected by this pressure sensor 7 and set negative pressure shown by input signals from the outside, and the second-order side negative pressure is controlled to the set negative pressure.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、真空用電空レギュレー
タに関し、特に、2次側負圧を制御するために適用して
有効な技術に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum electropneumatic regulator, and more particularly to a technique effectively applied to control a secondary side negative pressure.

【0002】[0002]

【従来の技術】この種の真空用電空レギュレータとして
は、たとえばノズルフラッパ形の真空用電空レギュレー
タがある。
2. Description of the Related Art As a vacuum electropneumatic regulator of this type, for example, there is a nozzle flapper type vacuum electropneumatic regulator.

【0003】すなわち、このノズルフラッパ形の真空用
電空レギュレータは、T字状の負圧路を設け、この負圧
路の端部にそれぞれオリフィス、負圧ポートおよびノズ
ルを形成し、このノズルに対向するフラッパをソレノイ
ドまたは圧電素子により変位させ、このフラッパの変位
に応じて負圧ポート内の2次側負圧を制御する構造とな
っている。
That is, this nozzle flapper type electro-pneumatic regulator for vacuum is provided with a T-shaped negative pressure passage, and an orifice, a negative pressure port and a nozzle are formed at the ends of this negative pressure passage, respectively, and opposed to this nozzle. The flapper is displaced by a solenoid or a piezoelectric element, and the secondary side negative pressure in the negative pressure port is controlled according to the displacement of the flapper.

【0004】[0004]

【発明が解決しようとする課題】しかし、前記したノズ
ルフラッパ形の真空用電空レギュレータの構造では、フ
ラッパの変位に対応したノズルからの大気のリーク流量
に応じて負圧ポート内の2次側負圧を制御する構造とな
っているので、吸気流量が増大し、エアが浪費するとい
う問題があった。
However, in the structure of the nozzle flapper type vacuum electro-pneumatic regulator described above, the secondary side negative pressure in the negative pressure port depends on the leak flow rate of the atmosphere from the nozzle corresponding to the displacement of the flapper. Since the structure controls the pressure, there is a problem that the intake flow rate increases and air is wasted.

【0005】本発明の目的は、吸気流量を減少させ、エ
アの浪費をなくすことのできる真空用電空レギュレータ
を提供する。
An object of the present invention is to provide a vacuum electropneumatic regulator which can reduce the intake flow rate and eliminate the waste of air.

【0006】本発明の他の目的は、低真空度の2次側負
圧をも制御することのできる真空用電空レギュレータを
提供する。
Another object of the present invention is to provide a vacuum electropneumatic regulator capable of controlling the secondary side negative pressure having a low degree of vacuum.

【0007】また、本発明の他の目的は、制御精度を向
上させることのできる真空用電空レギュレータを提供す
る。
Another object of the present invention is to provide a vacuum electropneumatic regulator which can improve control accuracy.

【0008】本発明の前記ならびにその他の目的と新規
な特徴は、本明細書の記述および添付図面から明らかに
なるであろう。
The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

【0009】[0009]

【課題を解決するための手段】本願において開示される
発明のうち、代表的なものの概要を簡単に説明すれば、
下記のとおりである。
Among the inventions disclosed in the present application, a brief description will be given to the outline of typical ones.
It is as follows.

【0010】すなわち、本発明の真空用電空レギュレー
タは、負圧ポート内のエアの吸気および負圧ポートへの
給気を調整し、2次側負圧を制御する構造としたもので
ある。
That is, the vacuum electropneumatic regulator of the present invention has a structure for controlling the secondary side negative pressure by adjusting the intake of air in the negative pressure port and the supply of air to the negative pressure port.

【0011】この場合、負圧ポートを有するレギュレー
タ本体と、前記負圧ポート内の2次側負圧を検知する圧
力センサと、前記負圧ポート内のエアを吸引する吸気用
2方弁と、前記負圧ポートに大気を供給する給気用2方
弁とを備え、前記圧力センサで検知した2次側負圧と外
部からの入力信号の示す設定負圧との差圧に応じて前記
吸気用および給気用2方弁への通電時間を調整し、2次
側負圧を設定負圧に制御する構造としたものである。
In this case, a regulator main body having a negative pressure port, a pressure sensor for detecting a secondary side negative pressure in the negative pressure port, and an intake two-way valve for sucking air in the negative pressure port, A two-way valve for air supply for supplying the negative pressure port with atmospheric air, and the intake air according to a differential pressure between a secondary negative pressure detected by the pressure sensor and a set negative pressure indicated by an input signal from the outside. This is a structure in which the energization time to the two-way valve for supply and air supply is adjusted to control the secondary side negative pressure to a set negative pressure.

【0012】[0012]

【作用】前記構成の真空用電空レギュレータによれば、
負圧ポート内のエアの吸気および負圧ポートへの給気を
調整し、2次側負圧を制御する構造としたので、吸気流
量を減少させ、エアの浪費をなくすことができる。
According to the vacuum electropneumatic regulator having the above structure,
Since the structure in which the secondary side negative pressure is controlled by adjusting the intake of air in the negative pressure port and the supply of air to the negative pressure port, the intake flow rate can be reduced and the waste of air can be eliminated.

【0013】また、前記負圧ポート内のエアの吸気およ
び負圧ポートへの給気を調整し、2次側負圧を制御する
構造としたので、エア源を不要にすることができる。
Further, since the structure for controlling the secondary side negative pressure by adjusting the intake of air in the negative pressure port and the supply of air to the negative pressure port, an air source can be eliminated.

【0014】また、前記負圧ポート内のエアの吸気およ
び負圧ポートへの給気を調整し、2次側負圧を制御する
構造としたので、低真空度の2次側負圧をも制御するこ
とができる。
Further, since the secondary side negative pressure is controlled by adjusting the intake of the air in the negative pressure port and the supply of air to the negative pressure port, the secondary side negative pressure with a low degree of vacuum can be maintained. Can be controlled.

【0015】この場合、負圧ポートを有するレギュレー
タ本体と、前記負圧ポート内の2次側負圧を検知する圧
力センサと、前記負圧ポート内のエアを吸引する吸気用
2方弁と、前記負圧ポートに大気を供給する給気用2方
弁とを備え、前記圧力センサで検知した2次側負圧と外
部からの入力信号の示す設定負圧との差圧に応じて吸気
用および給気用2方弁への通電時間を調整し、2次側負
圧を設定負圧に制御する構造としたので、前記圧力セン
サで2次側負圧を検知し、この検知した2次側負圧のフ
ィードバック制御により、制御精度を向上させることが
できる。
In this case, a regulator main body having a negative pressure port, a pressure sensor for detecting the secondary side negative pressure in the negative pressure port, and an intake two-way valve for sucking air in the negative pressure port, A two-way valve for air supply for supplying the atmosphere to the negative pressure port, for intake according to the differential pressure between the secondary side negative pressure detected by the pressure sensor and the set negative pressure indicated by an input signal from the outside. Since the structure is such that the energization time to the air supply two-way valve is adjusted and the secondary side negative pressure is controlled to the set negative pressure, the pressure sensor detects the secondary side negative pressure, and the detected secondary The feedback control of the side negative pressure can improve the control accuracy.

【0016】[0016]

【実施例】図1は本発明の一実施例である真空用電空レ
ギュレータを示す断面図である。
1 is a sectional view showing a vacuum electropneumatic regulator which is an embodiment of the present invention.

【0017】本実施例における真空用電空レギュレータ
は、負圧ポート1内のエアの吸気および負圧ポート1へ
の給気を調整し、2次側負圧を制御する直接作動形のも
ので、レギュレータ本体2を有している。
The vacuum electropneumatic regulator in this embodiment is a direct-acting type that regulates the intake of air in the negative pressure port 1 and the supply of air to the negative pressure port 1 to control the secondary side negative pressure. , Has a regulator body 2.

【0018】前記レギュレータ本体2は、一側に吸気ポ
ート3および給気ポート4が形成され、他側に負圧ポー
ト1が形成されている。
The regulator body 2 has an intake port 3 and an air supply port 4 formed on one side, and a negative pressure port 1 formed on the other side.

【0019】また、レギュレータ本体2には、吸気用2
方弁5および給気用2方弁6が搭載され、前記吸気用2
方弁5は負圧ポート1内のエアの吸引と停止とを切り換
える弁構造であり、給気用2方弁6は負圧ポート1への
大気の供給と停止とを切り換える弁構造である。
In addition, the regulator body 2 has a suction port 2
A two-way valve 5 and a two-way valve 6 for air supply are installed, and
The one-way valve 5 has a valve structure that switches between suctioning and stopping the air in the negative pressure port 1, and the two-way air supply valve 6 has a valve structure that switches between supplying and stopping the atmosphere to the negative pressure port 1.

【0020】また、負圧ポート1に圧力センサ7が接続
され、この圧力センサ7は負圧ポート1内の2次側負圧
を検知し、この検知した信号をコントローラ8に送る構
造となっている。
A pressure sensor 7 is connected to the negative pressure port 1, and the pressure sensor 7 detects the secondary side negative pressure in the negative pressure port 1 and sends the detected signal to the controller 8. There is.

【0021】前記コントローラ8は外部からの入力信号
の示す設定負圧と、圧力センサ7で検知し、帰還させた
2次側負圧とを比較して差圧を求め、この差圧に応じて
吸気用および給気用2方弁5,6への通電時間(パルス
幅)を調整し、パイロット室内のパイロット負圧を調整
し、2次側負圧を設定負圧に制御する機能を有する。
The controller 8 compares the set negative pressure indicated by an external input signal with the secondary negative pressure detected by the pressure sensor 7 and fed back to obtain a differential pressure, and in accordance with this differential pressure. It has a function of adjusting the energization time (pulse width) to the intake and supply two-way valves 5 and 6, adjusting the pilot negative pressure in the pilot chamber, and controlling the secondary side negative pressure to the set negative pressure.

【0022】次に、本実施例の作用について説明する。Next, the operation of this embodiment will be described.

【0023】真空度を上げて2次側負圧を設定負圧に制
御する場合、入力信号が入ると、この入力信号の示す設
定負圧と圧力センサ7の検知した2次側負圧との差圧が
求められ、この差圧に応じて吸気用2方弁5への通電時
間が調整され、この調整した通電時間だけ吸気用2方弁
5がON作動し、負圧ポート1内のエアは吸気ポート3
より真空ポンプで吸引され、負圧ポート1内の真空度が
上昇する。
When the degree of vacuum is raised and the secondary side negative pressure is controlled to the set negative pressure, when an input signal is input, the set negative pressure indicated by this input signal and the secondary side negative pressure detected by the pressure sensor 7 are detected. The differential pressure is obtained, the energization time to the intake two-way valve 5 is adjusted according to this differential pressure, and the intake two-way valve 5 is turned on for the adjusted energization time, and the air in the negative pressure port 1 is Is the intake port 3
More vacuum is sucked by the vacuum pump, and the degree of vacuum in the negative pressure port 1 rises.

【0024】真空度が上昇する2次側負圧は圧力センサ
7で検知され、コントローラ8で入力信号の示す設定負
圧と比較され、一致したところで吸気用2方弁5は閉じ
られる。
The secondary side negative pressure at which the degree of vacuum rises is detected by the pressure sensor 7, is compared with the set negative pressure indicated by the input signal by the controller 8, and when they match, the intake two-way valve 5 is closed.

【0025】真空度を下げて2次側負圧を設定負圧に制
御する場合、入力信号が入ると、この入力信号の示す設
定負圧と圧力センサ7の検知した2次側負圧との差圧が
求められ、この差圧に応じて給気用2方弁6への通電時
間が調整され、この調整した通電時間だけ給気用2方弁
6がON作動し、給気ポート4からの大気は負圧ポート
1に供給され、その真空度が下降する。
When the secondary side negative pressure is controlled to the set negative pressure by lowering the degree of vacuum, when an input signal is input, the set negative pressure indicated by the input signal and the secondary side negative pressure detected by the pressure sensor 7 are detected. The differential pressure is obtained, the energization time to the air supply two-way valve 6 is adjusted according to this differential pressure, and the air supply two-way valve 6 is turned on for the adjusted energization time, Is supplied to the negative pressure port 1, and the degree of vacuum thereof is lowered.

【0026】真空度が下降する2次側負圧は圧力センサ
7で検知され、コントローラ8で入力信号の示す設定負
圧と比較され、一致したところで給気用2方弁6は閉じ
られる。
The secondary side negative pressure at which the degree of vacuum decreases is detected by the pressure sensor 7, is compared with the set negative pressure indicated by the input signal by the controller 8, and when they match, the air supply two-way valve 6 is closed.

【0027】このように、負圧ポート1内のエアの吸気
および負圧ポート1への給気を調整し、2次側負圧を制
御できるので、吸気流量を減少させ、エアの浪費をなく
すことができる。
As described above, the intake of the air in the negative pressure port 1 and the supply of air to the negative pressure port 1 can be adjusted to control the secondary side negative pressure, so that the intake flow rate is reduced and the waste of air is eliminated. be able to.

【0028】また、前記負圧ポート1内のエアの吸気お
よび負圧ポート1への給気を調整し、2次側負圧を制御
する構造としたので、エア源を不要にすることができ
る。
Further, since the secondary side negative pressure is controlled by adjusting the intake of air in the negative pressure port 1 and the supply of air to the negative pressure port 1, the air source can be eliminated. ..

【0029】また、前記負圧ポート1内のエアの吸気お
よび負圧ポート1への給気を調整し、2次側負圧を制御
する構造としたので、低真空度の2次側負圧をも制御す
ることができる。
Further, since the secondary side negative pressure is controlled by adjusting the intake of air in the negative pressure port 1 and the supply of air to the negative pressure port 1, the secondary side negative pressure having a low vacuum degree is obtained. Can also be controlled.

【0030】また、圧力センサ7で2次側負圧を検知
し、この検知した2次側負圧のフィードバック制御する
構造としたので、制御精度を向上させることができる。
Since the pressure sensor 7 detects the secondary side negative pressure and the feedback control of the detected secondary side negative pressure is performed, the control accuracy can be improved.

【0031】なお、本発明者によってなされた発明を実
施例に基づき具体的に説明したが、本発明は前記実施例
に限定されるものでなく、その要旨を逸脱しない範囲で
種々変更可能であることはいうまでもない。
Although the invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention. Needless to say.

【0032】[0032]

【発明の効果】本願において開示される発明のうち、代
表的なものによって得られる効果を簡単に説明すれば、
以下のとおりである。
The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.
It is as follows.

【0033】(1).負圧ポート内のエアの吸気および負圧
ポートへの給気を調整し、2次側負圧を制御する構造と
したので、吸気流量を減少させ、エアの浪費をなくすこ
とができる。
(1). Since the structure is such that the intake of air in the negative pressure port and the supply of air to the negative pressure port are adjusted to control the secondary side negative pressure, the intake flow rate is reduced and air is wasted. It can be lost.

【0034】(2).負圧ポート内のエアの吸気および負圧
ポートへの給気を調整し、2次側負圧を制御する構造と
したので、エア源を不要にすることができる。
(2) The air source can be dispensed with because the structure is such that the intake of air in the negative pressure port and the supply of air to the negative pressure port are adjusted to control the secondary side negative pressure.

【0035】(3).負圧ポート内のエアの吸気および負圧
ポートへの給気を調整し、2次側負圧を制御する構造と
したので、低真空度の2次側負圧をも制御することがで
きる。
(3). Since the secondary side negative pressure is controlled by adjusting the intake of air in the negative pressure port and the supply of air to the negative pressure port, the secondary side negative pressure with a low degree of vacuum is controlled. Can also be controlled.

【0036】(4).前記(1) の場合、負圧ポートを有する
レギュレータ本体と、前記負圧ポート内の2次側負圧を
検知する圧力センサと、前記負圧ポート内のエアを吸引
する吸気用2方弁と、前記負圧ポートに大気を供給する
給気用2方弁とを備え、前記圧力センサで検知した2次
側負圧と外部からの入力信号の示す設定負圧との差圧に
応じて吸気用および給気用2方弁への通電時間を調整
し、2次側負圧を設定負圧に制御する構造としたので、
前記圧力センサで2次側負圧を検知し、この検知した2
次側負圧のフィードバック制御により、制御精度を向上
させることができる。
(4) In the case of (1), the regulator body having a negative pressure port, the pressure sensor for detecting the secondary side negative pressure in the negative pressure port, and the air in the negative pressure port are sucked. A two-way valve for intake and a two-way air supply valve for supplying the atmosphere to the negative pressure port, and a secondary side negative pressure detected by the pressure sensor and a set negative pressure indicated by an input signal from the outside. Since the energization time to the intake and air supply two-way valves is adjusted according to the differential pressure of, and the secondary side negative pressure is controlled to the set negative pressure,
The pressure sensor detects a negative pressure on the secondary side, and the detected 2
By the feedback control of the secondary side negative pressure, the control accuracy can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例である真空用電空レギュレー
タを示す断面図である。
FIG. 1 is a cross-sectional view showing a vacuum electropneumatic regulator that is an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 負圧ポート 2 レギュレータ本体 3 吸気ポート 4 給気ポート 5 吸気用2方弁 6 給気用2方弁 7 圧力センサ 8 コントローラ 1 Negative pressure port 2 Regulator body 3 Intake port 4 Air supply port 5 Intake 2-way valve 6 Air supply 2-way valve 7 Pressure sensor 8 Controller

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 負圧ポート内のエアの吸気および負圧ポ
ートへの給気を調整し、2次側負圧を制御することを特
徴とする真空用電空レギュレータ。
1. A vacuum electropneumatic regulator characterized by adjusting the intake of air in the negative pressure port and the supply of air to the negative pressure port to control the secondary side negative pressure.
【請求項2】 請求項1記載の真空用電空レギュレータ
において、負圧ポートを有するレギュレータ本体と、前
記負圧ポート内の2次側負圧を検知する圧力センサと、
前記負圧ポート内のエアを吸引する吸気用2方弁と、前
記負圧ポートに大気を供給する給気用2方弁とを備え、
前記圧力センサで検知した2次側負圧と外部からの入力
信号の示す設定負圧との差圧に応じて前記吸気用および
給気用2方弁への通電時間を調整し、2次側負圧を設定
負圧に制御することを特徴とする真空用電空レギュレー
タ。
2. The vacuum electropneumatic regulator according to claim 1, wherein a regulator body having a negative pressure port, and a pressure sensor for detecting a secondary side negative pressure in the negative pressure port,
An intake two-way valve for sucking air in the negative pressure port, and an air supply two-way valve for supplying air to the negative pressure port are provided.
The energization time to the intake and air supply two-way valves is adjusted according to the differential pressure between the secondary side negative pressure detected by the pressure sensor and the set negative pressure indicated by the input signal from the outside. An electro-pneumatic regulator for vacuum characterized by controlling the negative pressure to a set negative pressure.
JP18977991A 1991-07-30 1991-07-30 Electropneumatic regulator for vacuum Pending JPH05233072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18977991A JPH05233072A (en) 1991-07-30 1991-07-30 Electropneumatic regulator for vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18977991A JPH05233072A (en) 1991-07-30 1991-07-30 Electropneumatic regulator for vacuum

Publications (1)

Publication Number Publication Date
JPH05233072A true JPH05233072A (en) 1993-09-10

Family

ID=16247065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18977991A Pending JPH05233072A (en) 1991-07-30 1991-07-30 Electropneumatic regulator for vacuum

Country Status (1)

Country Link
JP (1) JPH05233072A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002062939A (en) * 2000-08-21 2002-02-28 Ckd Corp Electropneumatic negative pressure control valve
JP2006063815A (en) * 2004-08-25 2006-03-09 Ckd Corp Liquid chemical supply system
JP2007520818A (en) * 2004-01-21 2007-07-26 フィッシャー コントロールズ インターナショナル リミテッド ライアビリティー カンパニー A pressure-loaded pilot valve system and method for a regulator that does not require release into the atmosphere.

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002062939A (en) * 2000-08-21 2002-02-28 Ckd Corp Electropneumatic negative pressure control valve
JP2007520818A (en) * 2004-01-21 2007-07-26 フィッシャー コントロールズ インターナショナル リミテッド ライアビリティー カンパニー A pressure-loaded pilot valve system and method for a regulator that does not require release into the atmosphere.
JP4667396B2 (en) * 2004-01-21 2011-04-13 フィッシャー コントロールズ インターナショナル リミテッド ライアビリティー カンパニー Pressure-loaded pilot valve system for regulators that does not need to be released into the atmosphere
JP2006063815A (en) * 2004-08-25 2006-03-09 Ckd Corp Liquid chemical supply system
JP4658248B2 (en) * 2004-08-25 2011-03-23 シーケーディ株式会社 Chemical supply system

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