JPH05233071A - Electropneumatic regulator for vacuum - Google Patents

Electropneumatic regulator for vacuum

Info

Publication number
JPH05233071A
JPH05233071A JP18977891A JP18977891A JPH05233071A JP H05233071 A JPH05233071 A JP H05233071A JP 18977891 A JP18977891 A JP 18977891A JP 18977891 A JP18977891 A JP 18977891A JP H05233071 A JPH05233071 A JP H05233071A
Authority
JP
Japan
Prior art keywords
negative pressure
air
intake
pilot
secondary side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18977891A
Other languages
Japanese (ja)
Inventor
Ken Sawada
謙 澤田
Motoaki Iwata
元昭 岩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
Original Assignee
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Priority to JP18977891A priority Critical patent/JPH05233071A/en
Publication of JPH05233071A publication Critical patent/JPH05233071A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve control accuracy by decreasing the flow rate of sucking, eliminating the waste of air and increasing the supplying flow rate of second- order side negative pressure at the electropneumatic regulator for vacuum. CONSTITUTION:This electropneumatic regulator for vacuum opens/closes an air suck valve element 1 and an air supply valve element 2 through pilot negative pressure and controls second-order side negative pressure. Then, this regulator is provided with a pilot part 3, main valve part 4, pressure sensor 18, two- way valve 9 for sucking air and two-way valve 12 for supplying air. Time for electrifying the two-way valves 9 and 12 for sucking and supplying air is adjusted corresponding to the differential pressure of the second-order side negative pressure detected by this pressure sensor 18 and set negative pressure shown by input signals from the outside, and the second-order side negative pressure is controlled to the set negative pressure.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、真空用電空レギュレー
タに関し、特に、2次側負圧を制御するために適用して
有効な技術に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum electropneumatic regulator, and more particularly to a technique effectively applied to control a secondary side negative pressure.

【0002】[0002]

【従来の技術】この種の真空用電空レギュレータとして
は、たとえばノズルフラッパ形の真空用電空レギュレー
タがある。
2. Description of the Related Art As a vacuum electropneumatic regulator of this type, for example, there is a nozzle flapper type vacuum electropneumatic regulator.

【0003】すなわち、このノズルフラッパ形の真空用
電空レギュレータは、T字状の負圧路を設け、この負圧
路の端部にそれぞれオリフィス、負圧ポートおよびノズ
ルを形成し、このノズルに対向するフラッパをソレノイ
ドまたは圧電素子により変位させ、このフラッパの変位
に応じて負圧ポート内の2次側負圧を制御する構造とな
っている。
That is, this nozzle flapper type electro-pneumatic regulator for vacuum is provided with a T-shaped negative pressure passage, and an orifice, a negative pressure port and a nozzle are formed at the ends of this negative pressure passage, respectively, and opposed to this nozzle. The flapper is displaced by a solenoid or a piezoelectric element, and the secondary side negative pressure in the negative pressure port is controlled according to the displacement of the flapper.

【0004】[0004]

【発明が解決しようとする課題】しかし、前記したノズ
ルフラッパ形の真空用電空レギュレータの構造では、フ
ラッパの変位に対応したノズルからの大気のリーク流量
に応じて負圧ポート内の2次側負圧を制御する構造とな
っているので、吸気流量が増大し、エアが浪費するとい
う問題があった。
However, in the structure of the nozzle flapper type vacuum electro-pneumatic regulator described above, the secondary side negative pressure in the negative pressure port depends on the leak flow rate of the atmosphere from the nozzle corresponding to the displacement of the flapper. Since the structure controls the pressure, there is a problem that the intake flow rate increases and air is wasted.

【0005】本発明の目的は、吸気流量を減少させ、エ
アの浪費をなくすことのできる真空用電空レギュレータ
を提供する。
An object of the present invention is to provide a vacuum electropneumatic regulator which can reduce the intake flow rate and eliminate the waste of air.

【0006】本発明の他の目的は、2次側負圧の供給流
量を増大させることのできる真空用電空レギュレータを
提供する。
Another object of the present invention is to provide a vacuum electropneumatic regulator capable of increasing the supply flow rate of the secondary side negative pressure.

【0007】また、本発明の他の目的は、制御精度を向
上させることのできる真空用電空レギュレータを提供す
る。
Another object of the present invention is to provide a vacuum electropneumatic regulator which can improve control accuracy.

【0008】本発明の前記ならびにその他の目的と新規
な特徴は、本明細書の記述および添付図面から明らかに
なるであろう。
The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

【0009】[0009]

【課題を解決するための手段】本願において開示される
発明のうち、代表的なものの概要を簡単に説明すれば、
下記のとおりである。
Among the inventions disclosed in the present application, a brief description will be given to the outline of typical ones.
It is as follows.

【0010】すなわち、本発明の真空用電空レギュレー
タは、パイロット負圧を介して吸気弁体および給気弁体
を開閉し、2次側負圧を制御する構造としたものであ
る。
That is, the vacuum electropneumatic regulator of the present invention has a structure for controlling the secondary side negative pressure by opening and closing the intake valve body and the intake valve body via the pilot negative pressure.

【0011】この場合、ダイヤフラムで形成されたパイ
ロット室を有するパイロット部と、前記ダイヤフラムの
移動に伴って吸気弁体および給気弁体を開閉する主弁部
と、この主弁部の2次側負圧を検知する圧力センサと、
前記パイロット室内のエアを吸引する吸気用2方弁と、
前記パイロット室に大気を供給する給気用2方弁とを備
え、前記圧力センサで検知した2次側負圧と外部からの
入力信号の示す設定負圧との差圧に応じて吸気用および
給気用2方弁への通電時間を調整し、2次側負圧を設定
負圧に制御する構造としたものである。
In this case, a pilot portion having a pilot chamber formed of a diaphragm, a main valve portion for opening and closing the intake valve body and the air supply valve body with the movement of the diaphragm, and a secondary side of the main valve portion. A pressure sensor that detects negative pressure,
A two-way valve for intake that sucks air in the pilot chamber,
A two-way valve for air supply for supplying the pilot chamber with atmosphere is provided, and for intake air in accordance with a differential pressure between the secondary side negative pressure detected by the pressure sensor and a set negative pressure indicated by an external input signal, The structure is such that the energization time to the air supply two-way valve is adjusted to control the secondary side negative pressure to a set negative pressure.

【0012】[0012]

【作用】前記構成の真空用電空レギュレータによれば、
パイロット負圧を介して吸気弁体および給気弁体を開閉
し、2次側負圧を制御する構造としたので、2次側負圧
の供給流量を増大させることができる。
According to the vacuum electropneumatic regulator having the above structure,
Since the structure for controlling the secondary side negative pressure by opening and closing the intake valve body and the air supply valve body via the pilot negative pressure, the supply flow rate of the secondary side negative pressure can be increased.

【0013】また、パイロット負圧を介して吸気弁体お
よび給気弁体を開閉し、2次側負圧を制御する構造とし
たので、吸気流量を減少させ、エアの浪費をなくすこと
ができる。
Further, since the intake valve body and the supply valve body are opened and closed via the pilot negative pressure to control the secondary side negative pressure, the intake flow rate can be reduced and the waste of air can be eliminated. ..

【0014】また、パイロット負圧を吸気および給気に
より調整する構造としたので、エア源を不要にすること
ができる。
Further, since the pilot negative pressure is adjusted by the intake air and the air supply, the air source can be eliminated.

【0015】この場合、ダイヤフラムで形成されたパイ
ロット室を有するパイロット部と、前記ダイヤフラムの
移動に伴って吸気弁体および給気弁体を開閉する主弁部
と、この主弁部の2次側負圧を検知する圧力センサと、
前記パイロット室内のエアを吸引する吸気用2方弁と、
前記パイロット室に大気を供給する給気用2方弁とを備
え、圧力センサで検知した2次側負圧と外部からの入力
信号の示す設定負圧との差圧に応じて吸気用および給気
用2方弁への通電時間を調整し、2次側負圧を設定負圧
に制御する構造としたので、前記圧力センサで2次側負
圧を検知し、この検知した2次側負圧のフィードバック
制御により、制御精度を向上させることができる。
In this case, a pilot portion having a pilot chamber formed of a diaphragm, a main valve portion for opening and closing the intake valve body and the intake valve body with the movement of the diaphragm, and a secondary side of the main valve portion. A pressure sensor that detects negative pressure,
A two-way valve for intake that sucks air in the pilot chamber,
A two-way valve for air supply for supplying the atmosphere to the pilot chamber is provided, and intake and air supply are performed according to the differential pressure between the secondary side negative pressure detected by the pressure sensor and the set negative pressure indicated by an input signal from the outside. Since the structure is such that the energization time to the two-way valve for air is adjusted to control the secondary side negative pressure to the set negative pressure, the pressure sensor detects the secondary side negative pressure, and the detected secondary side negative pressure is detected. The control accuracy can be improved by the pressure feedback control.

【0016】[0016]

【実施例】図1は本発明の一実施例である真空用電空レ
ギュレータを示す断面図である。
1 is a sectional view showing a vacuum electropneumatic regulator which is an embodiment of the present invention.

【0017】本実施例における真空用電空レギュレータ
は、パイロット負圧を介して吸気弁体1および給気弁体
2を開閉し、2次側負圧を制御する間接作動形のもの
で、パイロット部3と主弁部4とからなる。
The vacuum electropneumatic regulator in the present embodiment is an indirect operation type in which the intake valve body 1 and the air supply valve body 2 are opened and closed via the pilot negative pressure to control the secondary side negative pressure. It comprises a part 3 and a main valve part 4.

【0018】前記パイロット部3は、ダイヤフラム5に
より形成されるパイロット室6を有している。このパイ
ロット室6および吸気ポート7間のパイロット吸気路8
に吸気用2方弁9が設けられ、パイロット室6および給
気ポート10間のパイロット給気路11に給気用2方弁
12が設けられ、これらの2方弁9,12は吸気および
給気によりパイロット室6内のパイロット負圧を調整
し、2次側負圧との差圧によりダイヤフラム5を上下動
させる構造となっている。
The pilot section 3 has a pilot chamber 6 formed by a diaphragm 5. The pilot intake passage 8 between the pilot chamber 6 and the intake port 7
Is provided with a two-way valve 9 for intake air, and a two-way valve 12 for air supply is provided in a pilot air supply passage 11 between the pilot chamber 6 and the air supply port 10. The structure is such that the pilot negative pressure in the pilot chamber 6 is adjusted by air and the diaphragm 5 is moved up and down by the pressure difference from the secondary side negative pressure.

【0019】この主弁部4は可動シリンダ部13を有
し、この可動シリンダ部13の内部に給気路14が形成
され、吸気ポート7と連通している。この可動シリンダ
部13の上側開口端部に吸気弁座15が形成され、この
吸気弁座15はダイヤフラム5と一体の吸気弁体1によ
り開閉される構造となっている。
The main valve portion 4 has a movable cylinder portion 13, an air supply passage 14 is formed inside the movable cylinder portion 13, and communicates with the intake port 7. An intake valve seat 15 is formed at the upper open end of the movable cylinder portion 13, and the intake valve seat 15 is opened and closed by an intake valve body 1 which is integral with the diaphragm 5.

【0020】可動シリンダ部13の下側開口端部に筒状
の給気弁体2が形成され、この給気弁体2は平常状態で
はスプリング16の付勢力により給気弁座20に押付け
られて閉弁し、動作状態ではスプリング16の付勢力に
抗したダイヤフラム5に連動して下動し、開弁する構造
となっている。
A cylindrical air supply valve body 2 is formed at the lower open end of the movable cylinder portion 13. The air supply valve body 2 is pressed against the air supply valve seat 20 by the urging force of the spring 16 in a normal state. The valve 5 is closed, and in the operating state, the valve 5 is moved downward in conjunction with the diaphragm 5 that resists the biasing force of the spring 16 to open the valve.

【0021】また、負圧ポート17に圧力センサ18が
接続され、この圧力センサ18は負圧ポート17内の2
次側負圧を検知し、この検知した2次側負圧をコントロ
ーラ19に送る構造となっている。
Further, a pressure sensor 18 is connected to the negative pressure port 17, and the pressure sensor 18 is connected to the negative pressure port 2 within the negative pressure port 17.
The secondary side negative pressure is detected and the detected secondary side negative pressure is sent to the controller 19.

【0022】前記コントローラ19は外部からの入力信
号の示す設定負圧と、圧力センサ18で検知し、帰還さ
せた2次側負圧とを比較して差圧を求め、この差圧に応
じて吸気用および給気用2方弁9,12への通電時間
(パルス幅)を調整し、パイロット室6内のパイロット
負圧を調整し、2次側負圧を設定負圧に制御する機能を
有する。
The controller 19 compares the set negative pressure indicated by an external input signal with the secondary negative pressure detected by the pressure sensor 18 and fed back to obtain a differential pressure, and according to this differential pressure. A function of adjusting the energization time (pulse width) to the intake and supply two-way valves 9 and 12 to adjust the pilot negative pressure in the pilot chamber 6 and controlling the secondary side negative pressure to the set negative pressure Have.

【0023】次に、本実施例の作用について説明する。Next, the operation of this embodiment will be described.

【0024】真空度を上げて2次側負圧を設定負圧に制
御する場合、入力信号が入ると、吸気用2方弁9が開
き、パイロット室6内のパイロット負圧が下がる。この
ためダイヤフラム5が押し上げられ、吸気弁体1が上動
し、吸気弁座15が開く。
When the degree of vacuum is raised to control the secondary side negative pressure to the set negative pressure, when the input signal is input, the intake two-way valve 9 opens and the pilot negative pressure in the pilot chamber 6 decreases. Therefore, the diaphragm 5 is pushed up, the intake valve body 1 moves upward, and the intake valve seat 15 opens.

【0025】その結果、負圧ポート17内のエアが吸気
弁座15を経て吸気ポート7より真空ポンプで吸引さ
れ、真空度が上がる。
As a result, the air in the negative pressure port 17 is sucked by the vacuum pump from the intake port 7 through the intake valve seat 15 and the degree of vacuum is increased.

【0026】真空度が上昇する2次側負圧は圧力センサ
18で検知され、コントローラ19で入力信号の示す設
定負圧と比較され、一致したところで吸気用2方弁9は
閉じられる。
The secondary side negative pressure at which the degree of vacuum rises is detected by the pressure sensor 18, is compared with the set negative pressure indicated by the input signal by the controller 19, and when they match, the intake two-way valve 9 is closed.

【0027】真空度を下げて2次側負圧を設定負圧に制
御する場合、入力信号が入ると、給気用2方弁12が開
き、パイロット室6内のパイロット負圧が上がる。この
ためダイヤフラム5が押し下げられるので、吸気弁体1
が下動し、吸気弁座15が閉じ、一方で、給気弁体2が
下動し、給気弁座20が開く。
When the degree of vacuum is reduced and the secondary side negative pressure is controlled to the set negative pressure, when the input signal is input, the air supply two-way valve 12 opens and the pilot negative pressure in the pilot chamber 6 rises. For this reason, the diaphragm 5 is pushed down, so that the intake valve body 1
Moves downward and the intake valve seat 15 closes, while the intake valve body 2 moves downward and the intake valve seat 20 opens.

【0028】その結果、給気ポート10からの大気が給
気弁座20を経て負圧ポート17に供給され、真空度が
下がる。
As a result, the atmosphere from the air supply port 10 is supplied to the negative pressure port 17 via the air supply valve seat 20 and the degree of vacuum is lowered.

【0029】真空度が下降する2次側負圧は圧力センサ
18で検知され、コントローラ19で入力信号の示す設
定負圧と比較され、一致したところで給気用2方弁12
は閉じられる。
The secondary side negative pressure at which the degree of vacuum decreases is detected by the pressure sensor 18, is compared with the set negative pressure indicated by the input signal by the controller 19, and when they match, the two-way valve 12 for air supply.
Is closed.

【0030】このように、パイロット負圧を介して給気
弁体2および吸気弁体1を開閉し、2次側負圧を制御で
きるので、2次側負圧の供給流量を増大させることがで
きる。
As described above, since the secondary side negative pressure can be controlled by opening / closing the intake valve body 2 and the intake valve body 1 via the pilot negative pressure, the supply flow rate of the secondary side negative pressure can be increased. it can.

【0031】また、パイロット負圧を介して給気弁体2
および吸気弁体1を開閉し、2次側負圧を制御する構造
としたので、吸気流量を減少させ、エアの浪費をなくす
ことができる。
Further, the intake valve body 2 is supplied through the pilot negative pressure.
Since the intake valve body 1 is opened and closed to control the secondary side negative pressure, the intake flow rate can be reduced and the waste of air can be eliminated.

【0032】また、パイロット負圧を吸気および給気に
より調整する構造としたので、エア源を不要にすること
ができる。
Further, since the pilot negative pressure is adjusted by the intake air and the air supply, the air source can be eliminated.

【0033】また、圧力センサ18で2次側負圧を検知
し、この検知した2次側負圧のフィードバック制御構造
としたので、制御精度を向上させることができる。
Further, since the pressure sensor 18 detects the secondary side negative pressure and the feedback control structure of the detected secondary side negative pressure is adopted, the control accuracy can be improved.

【0034】なお、本発明者によってなされた発明を実
施例に基づき具体的に説明したが、本発明は前記実施例
に限定されるものでなく、その要旨を逸脱しない範囲で
種々変更可能であることはいうまでもない。
Although the invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention. Needless to say.

【0035】[0035]

【発明の効果】本願において開示される発明のうち、代
表的なものによって得られる効果を簡単に説明すれば、
以下のとおりである。
The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.
It is as follows.

【0036】(1).パイロット負圧を介して吸気弁体およ
び給気弁体を開閉し、2次側負圧を制御する構造とした
ので、2次側負圧の供給流量を増大させることができ
る。
(1). Since the structure for controlling the secondary side negative pressure by opening and closing the intake valve body and the intake valve body via the pilot negative pressure, it is necessary to increase the supply flow rate of the secondary side negative pressure. You can

【0037】(2).パイロット負圧を介して吸気弁体およ
び給気弁体を開閉し、2次側負圧を制御する構造とした
ので、吸気流量を減少させ、エアの浪費をなくすことが
できる。
(2) Since the intake valve body and the intake valve body are opened and closed via the pilot negative pressure to control the secondary side negative pressure, the intake flow rate is reduced and the waste of air is eliminated. You can

【0038】(3).パイロット負圧を吸気および給気によ
り調整する構造としたので、エア源を不要にすることが
できる。
(3) Since the pilot negative pressure is adjusted by intake and air supply, the air source can be eliminated.

【0039】(4).前記(1) の場合、ダイヤフラムで形成
されたパイロット室を有するパイロット部と、前記ダイ
ヤフラムの移動に伴って吸気弁体および給気弁体を開閉
する主弁部と、この主弁部の2次側負圧を検知する圧力
センサと、前記パイロット室内のエアを吸引する吸気用
2方弁と、前記パイロット室に大気を供給する給気用2
方弁とを備え、前記圧力センサで検知した2次側負圧と
外部からの入力信号の示す設定負圧との差圧に応じて吸
気用および給気用2方弁への通電時間を調整し、2次側
負圧を設定負圧に制御する構造としたので、前記圧力セ
ンサで2次側負圧を検知し、この検知した2次側負圧の
フィードバック制御により、制御精度を向上させること
ができる。
(4) In the case of the above (1), a pilot portion having a pilot chamber formed of a diaphragm, and a main valve portion for opening and closing the intake valve body and the intake valve body with the movement of the diaphragm, A pressure sensor for detecting the secondary side negative pressure of the main valve portion, an intake two-way valve for sucking air in the pilot chamber, and an air supply 2 for supplying the atmosphere to the pilot chamber.
A two-way valve for intake and air supply is adjusted according to the differential pressure between the secondary side negative pressure detected by the pressure sensor and a set negative pressure indicated by an external input signal. Since the secondary negative pressure is controlled to the set negative pressure, the pressure sensor detects the secondary negative pressure and the feedback control of the detected secondary negative pressure improves the control accuracy. be able to.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例である真空用電空レギュレー
タを示す断面図である。
FIG. 1 is a cross-sectional view showing a vacuum electropneumatic regulator that is an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 吸気弁体 2 給気弁体 3 パイロット部 4 主弁部 5 ダイヤフラム 6 パイロット室 7 吸気ポート 8 パイロット吸気路 9 吸気用2方弁 10 給気ポート 11 パイロット給気路 12 給気用2方弁 13 可動シリンダ部 14 給気路 15 吸気弁座 16 スプリング 17 負圧ポート 18 圧力センサ 19 コントローラ 20 給気弁座 1 Intake valve body 2 Air supply valve body 3 Pilot section 4 Main valve section 5 Diaphragm 6 Pilot chamber 7 Intake port 8 Pilot intake passage 9 Intake 2-way valve 10 Air supply port 11 Pilot air supply passage 12 Air supply 2-way valve 13 Movable Cylinder Section 14 Air Supply Path 15 Intake Valve Seat 16 Spring 17 Negative Pressure Port 18 Pressure Sensor 19 Controller 20 Air Supply Valve Seat

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 パイロット負圧を介して吸気弁体および
給気弁体を開閉し、2次側負圧を制御することを特徴と
する真空用電空レギュレータ。
1. A vacuum electropneumatic regulator characterized by opening and closing an intake valve body and an air supply valve body via a pilot negative pressure to control a secondary side negative pressure.
【請求項2】 請求項1記載の真空用電空レギュレータ
において、ダイヤフラムで形成されたパイロット室を有
するパイロット部と、前記ダイヤフラムの移動に伴って
吸気弁体および給気弁体を開閉する主弁部と、この主弁
部の2次側負圧を検知する圧力センサと、前記パイロッ
ト室内のエアを吸引する吸気用2方弁と、前記パイロッ
ト室に大気を供給する給気用2方弁とを備え、前記圧力
センサで検知した2次側負圧と外部からの入力信号の示
す設定負圧との差圧に応じて前記吸気用および給気用2
方弁への通電時間を調整し、2次側負圧を設定負圧に制
御することを特徴とする請求項1記載の真空用電空レギ
ュレータ。
2. The vacuum electropneumatic regulator according to claim 1, wherein a pilot portion having a pilot chamber formed of a diaphragm, and a main valve that opens and closes an intake valve body and an air supply valve body as the diaphragm moves. Section, a pressure sensor for detecting the secondary side negative pressure of the main valve section, an intake two-way valve for sucking air in the pilot chamber, and an air supply two-way valve for supplying the atmosphere to the pilot chamber. 2 for the intake air and the supply air according to the differential pressure between the secondary side negative pressure detected by the pressure sensor and the set negative pressure indicated by an input signal from the outside.
The electropneumatic regulator for vacuum according to claim 1, wherein the energization time to the one-way valve is adjusted to control the secondary side negative pressure to a set negative pressure.
JP18977891A 1991-07-30 1991-07-30 Electropneumatic regulator for vacuum Pending JPH05233071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18977891A JPH05233071A (en) 1991-07-30 1991-07-30 Electropneumatic regulator for vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18977891A JPH05233071A (en) 1991-07-30 1991-07-30 Electropneumatic regulator for vacuum

Publications (1)

Publication Number Publication Date
JPH05233071A true JPH05233071A (en) 1993-09-10

Family

ID=16247048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18977891A Pending JPH05233071A (en) 1991-07-30 1991-07-30 Electropneumatic regulator for vacuum

Country Status (1)

Country Link
JP (1) JPH05233071A (en)

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