JPH05232019A - Particulate detector - Google Patents
Particulate detectorInfo
- Publication number
- JPH05232019A JPH05232019A JP4036360A JP3636092A JPH05232019A JP H05232019 A JPH05232019 A JP H05232019A JP 4036360 A JP4036360 A JP 4036360A JP 3636092 A JP3636092 A JP 3636092A JP H05232019 A JPH05232019 A JP H05232019A
- Authority
- JP
- Japan
- Prior art keywords
- mirror surface
- light
- light source
- fine particles
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- 239000010419 fine particle Substances 0.000 claims description 39
- 239000002245 particle Substances 0.000 claims description 30
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 238000001514 detection method Methods 0.000 description 30
- 238000000151 deposition Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000013618 particulate matter Substances 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、微粒子による光散乱を
利用した微粒子検出装置に関し、更に詳しくは、微粒子
の検出感度を向上させた微粒子検出装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine particle detector utilizing light scattering by fine particles, and more particularly to a fine particle detector having improved detection sensitivity of fine particles.
【０００２】[0002]
【従来の技術】従来のこの種の装置としては、例えば図
７に示すものが知られている。図７に示す微粒子検出装
置は、同図に示すように、互いに平行に配設された一対
の平面鏡１、１と、一方の平面鏡１の斜め上方に配設さ
れ、他方の平面鏡１に向けて光線を照射する光源２と、
光源２から照射された光線３が各平面鏡１、１で反射を
繰り返す間に、両平面鏡１、１間を流れる微粒子で散乱
される光を検出する光センサ（図示せず）とを備えてい
る。そして、光線が両平面鏡１、１間を多数回反射して
微粒子の散在する両平面鏡１、１間の空間に光線網を形
成するようにしてある。2. Description of the Related Art As a conventional device of this type, for example, one shown in FIG. 7 is known. As shown in FIG. 7, the particle detection device shown in FIG. 7 has a pair of plane mirrors 1 and 1 arranged in parallel with each other, and is arranged diagonally above one plane mirror 1 so as to face the other plane mirror 1. A light source 2 for emitting a light beam,
An optical sensor (not shown) for detecting light scattered by fine particles flowing between the plane mirrors 1 and 1 while the light beam 3 emitted from the light source 2 is repeatedly reflected by the plane mirrors 1 and 1. .. The light rays are reflected many times between the two plane mirrors 1 and 1 to form a ray network in the space between the two plane mirrors 1 and 1 in which fine particles are scattered.
【０００３】次に、動作について説明すると、光源２か
ら光線３が照射されると、この光線３は各平面鏡１、１
間で反射を繰り返すと共に、両平面鏡１、１間を流れる
微粒子による光の散乱を発生し、この散乱光を光センサ
よって検出することにより微粒子検出する。そして、反
射を繰り返した光線は他方の平面鏡１の下端から外部へ
出る。Next, the operation will be described. When a light ray 3 is emitted from the light source 2, the light ray 3 is emitted from each of the plane mirrors 1 and 1.
The light is scattered by the fine particles flowing between the plane mirrors 1 and 1, and the scattered light is detected by an optical sensor to detect the fine particles. Then, the light ray that is repeatedly reflected goes out from the lower end of the other plane mirror 1.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、従来の
微粒子検出装置は、光線を反射させる反射面が平行する
二枚の平面鏡１、１によって構成さているため、光線が
各平面鏡１、１内に光線網を作るように、各平面鏡１、
１の平行度を厳格に設定する必要があった。また、この
検出装置の使用中に、いずれかのあるいは双方の平面鏡
１に位置ズレを生じ、稼動中に平行度を調整し直す必要
があり、稼動率を著しく低下させるという課題があっ
た。However, since the conventional particle detection device is composed of two plane mirrors 1 and 1 whose reflecting surfaces for reflecting the light rays are parallel to each other, the light rays are reflected in the respective plane mirrors 1 and 1. Each plane mirror 1, like a net,
It was necessary to strictly set the parallelism of 1. Further, there is a problem in that either or both of the plane mirrors 1 are misaligned during use of this detection device, and it is necessary to readjust the parallelism during operation, which significantly reduces the operation rate.
【０００５】また、上記微粒子検出装置を設置する場合
には、その光線網が微粒子の流れに対して垂直になるよ
うに設置して光線を最大限に有効に利用することが好ま
しいが、このよう設置すると散乱光を検出する光センサ
の位置が微粒子の流れを阻害して好ましくないため、微
粒子検出装置を微粒子の流れに垂直に設置できないとい
う課題があった。更に、反応析出性のガス雰囲気では平
面鏡１にこれらが析出するため、このような雰囲気には
上記微粒子検出装置を設置することができないという課
題があった。Further, when the above-mentioned particle detecting device is installed, it is preferable to install it so that its light beam network is perpendicular to the flow of particles, so that the light beam can be utilized to the maximum extent. When installed, the position of the optical sensor for detecting scattered light obstructs the flow of fine particles, which is not preferable, so that there is a problem that the fine particle detection device cannot be installed perpendicularly to the flow of fine particles. Further, in a reaction-precipitating gas atmosphere, since these are deposited on the plane mirror 1, there is a problem that the above-mentioned particle detection device cannot be installed in such an atmosphere.
【０００６】本発明は、上記課題を解決するためになさ
れたもので、稼動中に鏡面を調整し直す必要がなく、光
線を最大限に活用して微粒子の検出感度を高めることが
できると共に、反応析出性ガス雰囲気でも使用できる微
粒子検出装置を提供することを目的としている。The present invention has been made in order to solve the above-mentioned problems, and it is not necessary to readjust the mirror surface during operation, and it is possible to maximize the detection efficiency of fine particles by maximizing the use of light rays. It is an object of the present invention to provide a fine particle detection device that can be used even in a reaction-precipitating gas atmosphere.
【０００７】[0007]
【課題を解決するための手段】本発明の請求項１に係る
微粒子検出装置は、円周内面に形成された鏡面と、鏡面
の側方に配設され且つこの鏡面に向けて光線を照射する
光源と、光源からの光線が上記鏡面の内部で多数回反射
を繰り返す間に、この鏡面内部を通過する微粒子から散
乱された散乱光を検出することにより微粒子を検出する
光センサとを備えたものである。また、本発明の請求項
２に係る微粒子検出装置は、円周内面に形成された鏡面
と、鏡面の側方に配設され且つこの鏡面に向けて光線を
照射する光源と、光源からの光線が上記鏡面の内部で多
数回反射を繰り返す間に、この鏡面内部を通過する微粒
子から散乱された散乱光を検出することにより微粒子を
検出する光センサとを備え、且つ上記鏡面の温度を制御
する温度制御手段を備えたものである。According to a first aspect of the present invention, there is provided a fine particle detecting device which is provided with a mirror surface formed on an inner surface of a circumference and a light beam which is disposed on a side of the mirror surface and is directed toward the mirror surface. A light source and an optical sensor for detecting fine particles by detecting scattered light scattered from fine particles passing through the inside of the mirror surface while a light ray from the light source is repeatedly reflected inside the mirror surface. Is. The particle detection device according to claim 2 of the present invention is a mirror surface formed on the inner surface of the circumference, a light source disposed on the side of the mirror surface and emitting a light beam toward the mirror surface, and a light beam from the light source. Is provided with an optical sensor that detects fine particles by detecting scattered light scattered from fine particles that pass through the inside of the mirror surface while repeating reflection many times inside the mirror surface, and controls the temperature of the mirror surface. It is provided with a temperature control means.
【０００８】[0008]
【作用】本発明によれば、光源から光線を照射すると、
光線が円周面に形成された鏡面に入射して外部へ光線が
漏れることなく鏡面内で反射を多数回繰り返して微粒子
に当り散乱されて、散乱光を発生し、この散乱光を光セ
ンサで検出する。また、温度制御手段で鏡面の温度を調
整して反応析出性ガスの鏡面への析出を防止して初期の
検出感度を保持することができる。According to the present invention, when a light beam is emitted from a light source,
The light rays are incident on the mirror surface formed on the circumferential surface, and the light rays do not leak to the outside and are repeatedly reflected on the mirror surface many times to be scattered by the fine particles to generate scattered light. To detect. In addition, the temperature of the mirror surface can be adjusted by the temperature control means to prevent the reaction-precipitating gas from being deposited on the mirror surface, and the initial detection sensitivity can be maintained.
【０００９】[0009]
【実施例】以下、図１〜図６に示す実施例に基づいて本
発明を説明する。尚、各図中、図１は本発明の微粒子検
出装置の一実施例を示す平面図、図２は図１に示す微粒
子検出装置の断面図、図３は図１に示す微粒子検出装置
で微粒子を検出する状態を示す斜視図、図４は本発明の
微粒子検出装置の他の実施例を示す図２相当図、図５は
本発明の微粒子検出装置の更に他の実施例を示す図１相
当図、図６は本発明の微粒子検出装置の更に他の実施例
を示す図１相当図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the embodiments shown in FIGS. In each of the drawings, FIG. 1 is a plan view showing an embodiment of the particle detection device of the present invention, FIG. 2 is a cross-sectional view of the particle detection device shown in FIG. 1, and FIG. 3 shows the particle detection device shown in FIG. FIG. 4 is a perspective view showing a state of detecting particles, FIG. 4 is equivalent to FIG. 2 showing another embodiment of the particle detecting device of the present invention, and FIG. 5 is equivalent to FIG. 1 showing still another embodiment of the particle detecting device of the present invention. FIGS. 6 and 6 are views corresponding to FIG. 1 showing still another embodiment of the particulate matter detection device of the present invention.
【００１０】本実施例の微粒子検出装置Ｄは、図１、図
２に示すように、支持体１０に形成された円周内面に形
成された鏡面１１と、鏡面１１の側方に配設され且つこ
の鏡面１１に向けて光線１３を照射する光源１２と、光
源１２からの光線１３が上記鏡面１１の内部で多数回反
射を繰り返す間に、この鏡面１１内部を通過する微粒子
から散乱された散乱光を検出することにより微粒子を検
出する光センサ１４とを備え、且つ上記鏡面１１の温度
を制御する温度制御手段（図示せず）を備えたものであ
る。As shown in FIGS. 1 and 2, the particle detection device D of this embodiment is provided with a mirror surface 11 formed on the inner surface of the circumference formed on the support 10 and on the side of the mirror surface 11. Moreover, while the light source 12 that irradiates the light ray 13 toward the mirror surface 11 and the light ray 13 from the light source 12 is repeatedly reflected many times inside the mirror surface 11, the scattering scattered from the fine particles passing through the inside of the mirror surface 11. An optical sensor 14 for detecting fine particles by detecting light and a temperature control means (not shown) for controlling the temperature of the mirror surface 11 are provided.
【００１１】上記微粒子検出装置Ｄを更に具体的に示し
たものが図３である。同図によれば、上記支持体１０
は、リング状に形成され、このリング状の支持体１０の
内周面に鏡面１１が形成されている。また、リング状の
上記支持体１０にはその鏡面１１内に光線１３を略径方
向に照射する光センサ１２が取り付けられ、この光源１
２から鏡面１１の孔１１Ａから対向する鏡面１１に向け
て光線１３を照射するようにしている。そして、上記光
源１２は、その光線１３が鏡面１１の中心から僅かに逸
れた位置で進入するように配置され、その光線１３が図
１に示すように多数回反射を繰り返して密度の高い光線
網を形成し、鏡面１１内を通過する微粒子の検出感度を
高めるようにしている。FIG. 3 shows the particle detection device D more specifically. According to the figure, the support 10
Is formed in a ring shape, and a mirror surface 11 is formed on the inner peripheral surface of the ring-shaped support body 10. Further, an optical sensor 12 for irradiating a light beam 13 in a substantially radial direction is attached to a mirror surface 11 of the ring-shaped support body 10.
The light beam 13 is emitted from the hole 2A of the mirror surface 11 toward the opposite mirror surface 11 from 2. The light source 12 is arranged so that the light ray 13 enters at a position slightly deviated from the center of the mirror surface 11, and the light ray 13 is repeatedly reflected many times as shown in FIG. Are formed to enhance the detection sensitivity of fine particles passing through the inside of the mirror surface 11.
【００１２】また、上記支持体１０の軸芯方向の外方に
はこの軸線に沿った光センサ１４が配設され、この光源
１２からの光線１３に基づいて上記微粒子から散乱され
た散乱光を検出することにより上記鏡面１１を通過する
微粒子を検出するようにしている。更に、上記微粒子検
出装置Ｄは、上記鏡面１１表面を反応析出性ガスの析出
しない温度に制御する温度制御手段（図示せず）を備
え、反応析出性ガス雰囲気で使用した場合にも反応析出
性ガスが鏡面１１の表面に析出しないようにしている。Further, an optical sensor 14 along the axis of the support 10 is disposed outside the axial direction of the support 10, and the scattered light scattered from the fine particles based on the light ray 13 from the light source 12 is provided. By detecting, the fine particles passing through the mirror surface 11 are detected. Further, the fine particle detection device D is provided with a temperature control means (not shown) for controlling the surface of the mirror surface 11 to a temperature at which the reaction-precipitating gas does not precipitate, and the reaction-precipitating property is obtained even when used in a reaction-precipitating gas atmosphere. The gas is prevented from being deposited on the surface of the mirror surface 11.
【００１３】次に、動作について説明すると、微粒子を
含む気体の通路２０に上記微粒子検出装置Ｄを図３に示
すように配置すれば、気体は通路２０を流れて支持体１
０の鏡面１１で囲まれた部分を通過する。このとき、光
源１２から鏡面１１に向けて照射した光線１３は鏡面１
１の表面で反射を繰り返す間に、鏡面１１の中心付近で
密度の高い光線網を気流方向に対して斜行する方向に形
成し、特にこの中心部分で微粒子を高感度に検出するこ
とができる。Next, the operation will be described. If the particle detection device D is arranged in the gas passage 20 containing fine particles as shown in FIG.
It passes through the part surrounded by the mirror surface 11 of 0. At this time, the light beam 13 emitted from the light source 12 toward the mirror surface 11 is reflected by the mirror surface 1
While repeating reflection on the surface of No. 1, a dense light network is formed in the vicinity of the center of the mirror surface 11 in a direction oblique to the air flow direction, and fine particles can be detected with high sensitivity particularly in this central portion. ..
【００１４】従って、本実施例によれば、気体の速度が
通路２０の中心で高速度の場合にその部分に含まれる微
粒子を高感度で検出することができると共に光センサ１
４を気体の流れを阻害しない位置に配置することができ
る。また、本実施例によれば、鏡面１１をこれで気流を
囲む円周鏡面としたことにより従来のように鏡面１１の
平行度の調整などを行なう必要がなく、また、温度制御
手段によって反応析出性ガス雰囲気下でも鏡面１１に反
応析出性ガスを析出させることなく初期の反射性能を維
持し、結果として微粒子検出装置Ｄをメンテナンスフリ
ーにすることができる。Therefore, according to the present embodiment, when the velocity of the gas is high at the center of the passage 20, it is possible to detect the fine particles contained in that portion with high sensitivity and the optical sensor 1 is used.
4 can be placed at a position that does not impede the flow of gas. Further, according to the present embodiment, since the mirror surface 11 is a circumferential mirror surface that surrounds the air flow, it is not necessary to adjust the parallelism of the mirror surface 11 as in the prior art, and the temperature control means allows the reaction deposition. It is possible to maintain the initial reflection performance without depositing the reactive depositing gas on the mirror surface 11 even in a reactive gas atmosphere, and as a result, to make the particle detection device D maintenance-free.
【００１５】また、図４は本発明の他の実施例を示す図
で、本実施例の微粒子検出装置Ｄは、光源１２が支持体
１０の外部に配設され、光線１３を鏡面１１の外部から
光源１２と対向する鏡面１１へ斜め方向から光線１３を
照射するようにしたものである。この光源１２の配置に
伴って、鏡面１１は、入射光線１３を鏡面１１内で有効
に反射させて光線１３を鏡面１１内で多数回繰り返すよ
うにその断面が外側に湾曲して形成されている。従っ
て、本実施例によれば、光源１２が鏡面１１外部に位置
しているため、上記実施例のように光源１２が通過する
孔１１Ａを鏡面１１に設ける必要がなく、延いては光線
１３の反射を乱すことがなく、光線１３をより有効に利
用することができ、より高感度で気流中の微粒子を検出
することができる。FIG. 4 is a view showing another embodiment of the present invention. In the particle detector D of this embodiment, the light source 12 is arranged outside the support 10 and the light beam 13 is outside the mirror surface 11. To the mirror surface 11 facing the light source 12 from a diagonal direction. With the arrangement of the light source 12, the mirror surface 11 is formed so that its cross section is curved outward so that the incident light ray 13 is effectively reflected in the mirror surface 11 and the light ray 13 is repeated many times in the mirror surface 11. .. Therefore, according to the present embodiment, since the light source 12 is located outside the mirror surface 11, it is not necessary to provide the hole 11A through which the light source 12 passes in the mirror surface 11 as in the above embodiment, and the light beam 13 is extended. The light rays 13 can be used more effectively without disturbing the reflection, and the particles in the airflow can be detected with higher sensitivity.
【００１６】また、図５は本発明の更に他の実施例を示
す図で、本実施例の微粒子検出装置Ｄは、光源１２が図
１に示すものと同様に鏡面１１に孔１１Ａを設け、この
孔１１Ａから光線１３を鏡面１１の中心から大きく偏倚
した位置で入射させ、光線１３が鏡面１１の表面近傍に
図５に示すような光線網を形成するようにしたものであ
る。従って、本実施例によれば、特に、半導体製造装置
に用いる場合において、鏡面１１の直径をウエハの直径
に合わせたものにすれば、ウエハの周縁部で微粒子を集
中的に検出することができる。FIG. 5 is a view showing still another embodiment of the present invention. In the particle detection device D of this embodiment, the light source 12 is provided with a hole 11A in the mirror surface 11 like the one shown in FIG. The light beam 13 is made to enter from the hole 11A at a position largely deviated from the center of the mirror surface 11, and the light beam 13 forms a light network as shown in FIG. 5 in the vicinity of the surface of the mirror surface 11. Therefore, according to the present embodiment, particularly when used in a semiconductor manufacturing apparatus, if the diameter of the mirror surface 11 is made to match the diameter of the wafer, the fine particles can be intensively detected at the peripheral portion of the wafer. ..
【００１７】また、図６は本発明の更に他の実施例を示
す図で、本実施例の微粒子検出装置Ｄは、図１に示す光
源１２と図５に示す光源１２とを組み合わせて構成され
たもので、このような構成により気流中心及び気流の周
縁部において微粒子を検出することができる。FIG. 6 is a view showing still another embodiment of the present invention. A particle detection device D of this embodiment is constructed by combining the light source 12 shown in FIG. 1 and the light source 12 shown in FIG. With such a configuration, the fine particles can be detected at the center of the air flow and the peripheral portion of the air flow.
【００１８】尚、本発明は、上記実施例に何等制限され
るものではなく、要は、円周面に形成された鏡面と、鏡
面の側方に配設され且つこの鏡面に向けて光線を照射す
る光源と、光源からの光線が上記鏡面の内部で多数回反
射を繰り返す間に、この鏡面内部を通過する微粒子から
散乱された散乱光を検出することにより微粒子を検出す
る光センサとを備え、且つ上記鏡面の温度を制御する温
度制御手段を設けものであれば、各構成要素を適宜設計
変更したものであっても本発明に包含される。The present invention is not limited to the above-described embodiment. In short, the point is that the mirror surface formed on the circumferential surface and the light beam disposed on the side of the mirror surface and directed toward this mirror surface. A light source for irradiating and an optical sensor for detecting fine particles by detecting scattered light scattered from fine particles passing through the inside of the mirror surface while a light ray from the light source is repeatedly reflected many times inside the mirror surface. Further, as long as the temperature control means for controlling the temperature of the above-mentioned mirror surface is provided, even if the design of each component is appropriately changed, it is included in the present invention.
【００１９】[0019]
【発明の効果】以上説明したように本発明の請求項１に
係る微粒子検出装置よれば、稼動中に鏡面を調整し直す
必要がなく、光線を最大限に活用して微粒子の検出感度
を高めることができる。また、本発明の請求項２に係る
微粒子検出装置よれば、稼動中に鏡面を調整し直す必要
がなく、光線を最大限に活用して微粒子の検出感度を高
めることができると共に、反応析出性ガス雰囲気でも使
用できる。As described above, according to the particle detecting device of the first aspect of the present invention, it is not necessary to readjust the mirror surface during operation, and the light rays are used to the maximum extent to enhance the particle detecting sensitivity. be able to. Further, according to the particle detecting device of the second aspect of the present invention, it is not necessary to readjust the mirror surface during operation, it is possible to maximize the detection sensitivity of the particles by maximizing the use of the light beam, and the reaction depositability It can also be used in a gas atmosphere.
【図１】本発明の微粒子検出装置の一実施例を示す平面
図である。FIG. 1 is a plan view showing an embodiment of a particle detection device of the present invention.
【図２】図１に示す微粒子検出装置の断面図である。FIG. 2 is a sectional view of the particle detection device shown in FIG.
【図３】図１に示す微粒子検出装置で微粒子を検出する
状態を示す斜視図である。FIG. 3 is a perspective view showing a state in which fine particles are detected by the fine particle detection device shown in FIG.
【図４】本発明の微粒子検出装置の他の実施例を示す図
２相当図である。FIG. 4 is a view corresponding to FIG. 2, showing another embodiment of the particle detection device of the present invention.
【図５】本発明の微粒子検出装置の更に他の実施例を示
す図１相当図である。FIG. 5 is a view corresponding to FIG. 1 showing still another embodiment of the particle detection device of the present invention.
【図６】本発明の微粒子検出装置の更に他の実施例を示
す図１相当図である。FIG. 6 is a view corresponding to FIG. 1 showing still another embodiment of the particulate matter detection device of the present invention.
【図７】従来の微粒子検出装置の一例を示す平面図であ
る。FIG. 7 is a plan view showing an example of a conventional particle detection device.
１１ 鏡面 １２ 光源 １３ 光線 １４ 光センサ 11 mirror surface 12 light source 13 light beam 14 optical sensor
Claims (2)
に配設され且つこの鏡面に向けて光線を照射する光源
と、光源からの光線が上記鏡面の内部で多数回反射を繰
り返す間に、この鏡面内部を通過する微粒子から散乱さ
れた散乱光を検出することにより微粒子を検出する光セ
ンサとを備えたことを特徴とする微粒子検出装置。1. A mirror surface formed on a circumferential surface, a light source disposed on the side of the mirror surface and irradiating a light ray toward the mirror surface, and a light ray from the light source is reflected multiple times inside the mirror surface. An optical sensor for detecting fine particles by detecting scattered light scattered from the fine particles passing through the inside of the mirror surface while repeating, and a fine particle detecting device.
に配設され且つこの鏡面に向けて光線を照射する光源
と、光源からの光線が上記鏡面の内部で多数回反射を繰
り返す間に、この鏡面内部を通過する微粒子から散乱さ
れた散乱光を検出することにより微粒子を検出する光セ
ンサとを備え、且つ上記鏡面の温度を制御する温度制御
手段を備えたことを特徴とする微粒子検出装置。2. A mirror surface formed on a circumferential surface, a light source disposed on the side of the mirror surface and irradiating a light beam toward this mirror surface, and a light beam from the light source is reflected multiple times inside the mirror surface. During the repetition, an optical sensor for detecting fine particles by detecting scattered light scattered from the fine particles passing through the inside of the mirror surface is provided, and a temperature control means for controlling the temperature of the mirror surface is provided. Particle detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4036360A JP2869241B2 (en) | 1992-02-24 | 1992-02-24 | Particle detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4036360A JP2869241B2 (en) | 1992-02-24 | 1992-02-24 | Particle detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05232019A true JPH05232019A (en) | 1993-09-07 |
| JP2869241B2 JP2869241B2 (en) | 1999-03-10 |
Family
ID=12467666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4036360A Expired - Fee Related JP2869241B2 (en) | 1992-02-24 | 1992-02-24 | Particle detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2869241B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008268168A (en) * | 2007-04-16 | 2008-11-06 | Toshiba Corp | Image-forming device for forming image in recording medium |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03287047A (en) * | 1990-04-04 | 1991-12-17 | Fujitsu Ltd | Suspended particulate counter |
-
1992
- 1992-02-24 JP JP4036360A patent/JP2869241B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03287047A (en) * | 1990-04-04 | 1991-12-17 | Fujitsu Ltd | Suspended particulate counter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008268168A (en) * | 2007-04-16 | 2008-11-06 | Toshiba Corp | Image-forming device for forming image in recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2869241B2 (en) | 1999-03-10 |
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