JPH05229875A - Production of ceramic substrate - Google Patents

Production of ceramic substrate

Info

Publication number
JPH05229875A
JPH05229875A JP4030741A JP3074192A JPH05229875A JP H05229875 A JPH05229875 A JP H05229875A JP 4030741 A JP4030741 A JP 4030741A JP 3074192 A JP3074192 A JP 3074192A JP H05229875 A JPH05229875 A JP H05229875A
Authority
JP
Japan
Prior art keywords
sheets
dispersion
sheet
sand
fine sand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4030741A
Other languages
Japanese (ja)
Inventor
Hisaya Yoshimoto
久哉 吉本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP4030741A priority Critical patent/JPH05229875A/en
Publication of JPH05229875A publication Critical patent/JPH05229875A/en
Pending legal-status Critical Current

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  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)

Abstract

PURPOSE:To provide the subject production method so designed that punched ceramic sheets are stacked through fine sand layers, and in calcining the resultant laminate, the fine sand is made to adhere to the sheets using a dispersion, thereby preventing the final substrate from declining in its quality in the calcining process, improving workability and automating the work. CONSTITUTION:Formed ceramic green sheets are punched and made into individual sheets each with a slit. These sheets are then stocked in an adsorption carrying device 20 and activated at all times with a press 22. The sheets are then made to adsorb onto an arm 21 one by one, put on a conveyor 10, moved in the arrow direction, and brought into a spray zone A, where the sheets 1 are sprayed and coated with a dispersion 7 for fine sand from the nozzle 30 of a spraying machine. The dispersion 7 is an alumina dispersion prepared by incorporating an aqueous solution of methyl cellulose (binder) with alumina powder for the fine sand. The sheets 1 coated with the dispersion 7 are then heated by a heater 40 and dried in a drying zone B where the fine sand is made to uniformly adhere, in the form of layer 8, to the surface of the sheets 1; the resulting sheets 1 are mutually laminated and calcined.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電子部品に用いられる
セラミック基板の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a ceramic substrate used for electronic parts.

【0002】[0002]

【従来の技術】チップ抵抗器、チップコンデンサ等の電
子部品に用いられるセラミック基板は、次のようにして
製造される。まず、所定サイズのセラミック基板を得る
のに必要な幅及び肉厚に成形したセラミックからなるグ
リーンシートに、プレス加工等によりブレイク用のスリ
ットを縦横に形成すると共に、スリットが形成された部
分をシートから打ち抜き、スリット付き個別シートとす
る。この個別シートを更に焼成した後、スリットからブ
レイクすることにより個々のセラミック基板となる。
2. Description of the Related Art Ceramic substrates used for electronic parts such as chip resistors and chip capacitors are manufactured as follows. First, a slit for breaking is formed vertically and horizontally by pressing, etc. on a green sheet made of ceramic formed into a width and a thickness necessary to obtain a ceramic substrate of a predetermined size, and the portion where the slit is formed is a sheet. It is punched from the sheet and made into an individual sheet with slits. The individual sheets are further fired and then broken through the slits to form individual ceramic substrates.

【0003】その製造工程中の焼成工程を詳細にみる
と、焼成は、複数枚のグリーンシートを積み重ね、この
シート積層体を焼成用サヤ板に載せ、更にこのサヤ板を
多段数積み重ねて行うのが一般的である。その場合、焼
成時にシート同士が融着するのを防止するために、グリ
ーンシート1間に目砂2(図2参照)、又は敷紙3(図
4参照)を介在させておく。目砂の場合、図3に示すよ
うに、複数枚並べたグリーンシート1上に、目砂用アル
ミナ粉末2をフルイ50等で散布する。又、敷紙3はア
ルミナ粉を内在し、これをグリーンシート1間に挟む。
Looking at the firing process in the manufacturing process in detail, the firing is performed by stacking a plurality of green sheets, placing the sheet laminate on a firing sheath plate, and then stacking the sheath plates in multiple stages. Is common. In that case, in order to prevent the sheets from fusing together during firing, the sand 2 (see FIG. 2) or the spread paper 3 (see FIG. 4) is interposed between the green sheets 1. In the case of grain sand, as shown in FIG. 3, alumina powder 2 for grain sand is sprinkled with a sieve 50 or the like on a plurality of green sheets 1 arranged. Further, the backing paper 3 contains alumina powder therein and is sandwiched between the green sheets 1.

【0004】このようにして得られたシート積層体5
を、図5に示すように焼成用サヤ板60に載せ、このサ
ヤ板60を多段数積み重ねてから焼成を実行する。
Sheet laminate 5 thus obtained
5 is placed on the firing sheath plate 60 as shown in FIG. 5, and the firing is performed after stacking the sheath plates 60 in multiple stages.

【0005】[0005]

【発明が解決しようとする課題】上記積み重ね方のう
ち、目砂を介在させる積み重ね方は、目砂用アルミナ粉
末2をグリーンシート1上に単に散布するだけであるた
め、グリーンシート1上でアルミナ粉末2が動いて、不
均一な分布状態になり易い。この状態のままで焼成を行
うと、基板同士が付着したり、基板に反りや変形が生じ
たりする原因となる。
Among the above-mentioned stacking methods, the stacking method with the interposition of the interlocking sand simply involves spraying the alumina powder 2 for the interlocking sand on the green sheet 1, so that the alumina on the green sheet 1 is simply spread. The powder 2 is likely to move and become non-uniformly distributed. If firing is performed in this state, the substrates may adhere to each other, or the substrates may be warped or deformed.

【0006】又、アルミナ粉末2はグリーンシート1上
に載っているだけであるため、シート積層体5は不安定
な状態にあり、シート1の位置ずれや崩れが起き易い。
このため、積層体5を慎重に取り扱う必要があり、搬送
等の作業効率が悪いばかりか、グリーンシートの積み重
ねから積層体の焼成に至る工程を自動化するのが困難で
ある。
Further, since the alumina powder 2 is only placed on the green sheet 1, the sheet laminate 5 is in an unstable state, and the sheet 1 is likely to be displaced or collapsed.
For this reason, it is necessary to handle the laminate 5 carefully, and not only the work efficiency such as transportation is poor, but also it is difficult to automate the processes from stacking the green sheets to firing the laminate.

【0007】従って、本発明の目的は、焼成時における
基板の品質低下の防止、作業性の向上及び一連の作業の
自動化を実現するセラミック基板の製造方法を提供する
ことにある。
Therefore, an object of the present invention is to provide a method for manufacturing a ceramic substrate which prevents deterioration of the substrate quality during firing, improves workability and automates a series of operations.

【0008】[0008]

【課題を解決するための手段】前記目的を達成するため
に、本発明のセラミック基板の製造方法は、成形シート
から打ち抜かれたセラミックからなるシートをシート間
に目砂を介在させて積み重ね、このシート積層体を焼成
するセラミック基板の製造方法において、目砂が、目砂
用溶質と水性バインダー分散溶媒を用いて作製した分散
液をシート上に塗布し、これを乾燥・付着させたもので
あることを特徴とする。
In order to achieve the above object, the method of manufacturing a ceramic substrate according to the present invention comprises stacking ceramic sheets punched from a molded sheet with sand grains interposed between the sheets. In the method for manufacturing a ceramic substrate for firing a sheet laminate, the sand is obtained by applying a dispersion liquid prepared by using a solute for sand and an aqueous binder dispersion solvent onto a sheet, and drying and adhering this. It is characterized by

【0009】本発明の製造方法では、シート間に介在さ
せる目砂が、従来のように単なるアルミナ粉末ではな
く、目砂用溶質(主にアルミナ粉末)と水性バインダー
分散溶媒を用いて作製した分散液を塗布して乾燥させた
ものであるため、乾燥後は目砂がシート上に付着し、し
かも目砂層の厚さが均一である。この結果、搬送等の作
業性が良くなり、焼成時における基板同士の付着や基板
の反りも起こらなくなる。
In the production method of the present invention, the grain sand interposed between the sheets is not a mere alumina powder as in the prior art, but a dispersion prepared by using a solute for grain sand (mainly alumina powder) and an aqueous binder dispersion solvent. Since the solution is applied and dried, the dried sand adheres to the sheet after drying, and the thickness of the sand layer is uniform. As a result, workability such as transportation is improved, and adhesion between the substrates and warpage of the substrates do not occur during firing.

【0010】更に、分散液に着色剤を添加することによ
り、シート上に付着する目砂が彩色され、目砂の付着状
況をその色によって確認することが可能となり、これを
元により一層均一な厚さの目砂を形成することができ
る。なお、本発明で分散液に使用する目砂用溶質として
はアルミナ粉末が一般的であり、水性バインダー分散溶
媒としてはメチルセルロース、ポリビニルアルコール
(PVA)等を用いる。
Further, by adding a colorant to the dispersion, the sand particles adhering to the sheet are colored, and it becomes possible to confirm the adhering condition of the sand particles by the color, and based on this, a more uniform distribution can be obtained. A thick grain of sand can be formed. Alumina powder is generally used as the solute for grain sand used in the dispersion in the present invention, and methyl cellulose, polyvinyl alcohol (PVA), or the like is used as the aqueous binder dispersion solvent.

【0011】[0011]

【実施例】以下、本発明のセラミック基板の製造方法を
実施例に基づいて説明する。製造工程全般について述べ
る前に、本発明の特徴である目砂の形成に使用する装置
及びその装置を用いた目砂形成工程を図1に示す。この
装置は、ブレイク用のスリット付きグリーンシート1を
搬送コンベア10上に載せるための吸着搬送機20と、
搬送コンベア10で移送されてくるシート1に目砂用分
散液を散布する噴霧機(特に図示せず)と、シート1上
の分散液を乾燥する乾燥機(特に図示せず)とを備え
る。噴霧機と乾燥機は、搬送コンベア10の上流側から
順に設定された噴霧帯Aと乾燥帯Bにそれぞれ設置され
ている。
EXAMPLES A method for manufacturing a ceramic substrate of the present invention will be described below based on examples. Before describing the overall manufacturing process, FIG. 1 shows an apparatus used for forming grain sand, which is a feature of the present invention, and a grain formation step using the apparatus. This apparatus includes an adsorption / conveyance machine 20 for placing the slitting green sheet 1 on the conveyance conveyor 10, and
The sheet 1 transferred by the transport conveyor 10 is provided with a sprayer (not shown) for spraying the dispersion for grain sand and a dryer (not shown) for drying the dispersion on the sheet 1. The sprayer and the dryer are respectively installed in the spraying zone A and the drying zone B which are set in order from the upstream side of the transport conveyor 10.

【0012】次に、具体的な製造工程を記載するが、目
砂形成までの工程は従来どおりに行えばよい。即ち、前
記したように、所定サイズのセラミック基板を得るのに
必要な幅及び肉厚に成形したセラミックからなるグリー
ンシートに、プレス加工等によりブレイク用のスリット
を縦横に形成すると共に、スリットが形成された部分を
シートから打ち抜き、スリット付き個別シートとする。
この個別シートのサイズは、例えば一辺が約75mmの
正方形で、厚さが約0.6mmである。
Next, a specific manufacturing process will be described, but the process up to the formation of grain sand may be carried out in the conventional manner. That is, as described above, the slits for breaking are formed in the vertical and horizontal directions by pressing or the like on the green sheet made of ceramic formed into the width and thickness necessary to obtain the ceramic substrate of the predetermined size. The cut part is punched out from the sheet to make an individual sheet with slits.
The size of this individual sheet is, for example, a square having a side of about 75 mm and a thickness of about 0.6 mm.

【0013】得られたグリーンシート1は、図示のよう
に吸着搬送機20に溜めておく。シート1は、アーム2
1で1枚ずつ吸着され、搬送コンベア10上に順次載せ
られる。搬送コンベア10はローラ11によって矢印方
向に移動しており、シート1は噴霧帯Aと乾燥帯Bを順
に通過する。なお、吸着搬送機20内のシート1は押圧
具22によって上方に常時付勢されており、シート1が
残り少なくなってもアーム21でシート1を容易に吸着
できるように構成されている。
The green sheet 1 thus obtained is stored in the suction transporter 20 as shown in the drawing. Seat 1 is arm 2
1 is adsorbed one by one and is sequentially placed on the conveyor 10. The conveyor 10 is moved in the direction of the arrow by the roller 11, and the sheet 1 passes through the spray zone A and the dry zone B in order. The sheet 1 in the suction conveyance device 20 is always urged upward by the pressing tool 22 so that the arm 1 can easily suck the sheet 1 even when the remaining amount of the sheet 1 is small.

【0014】噴霧帯Aでは、噴霧機のノズル30から目
砂用分散液7がシート1に向かって噴出される。ここで
使用する分散液7では、溶質としては目砂用として市販
されているアルミナ粉末を用い、水性バインダー分散溶
媒としてはメチルセルロースを用いる。分散液7の調製
においては、まず結合剤としてメチルセルロースを水に
溶かし、0.5〜5wt%の水溶液を作製し、これに目
砂用アルミナ粉末を5〜15重量部添加して攪拌・混合
し、アルミナ分散液を得る。調製の際に、分散促進剤と
してポリカルボン酸塩等を1〜2%加えると、アルミナ
粉末の分散を効果的に行える。又、分散液を着色する場
合には、着色剤として例えば市販のローダミンを1〜2
%添加すればよい。
In the spray zone A, the sand dispersion liquid 7 is jetted toward the sheet 1 from the nozzle 30 of the sprayer. In the dispersion liquid 7 used here, alumina powder commercially available for grain sand is used as the solute, and methyl cellulose is used as the aqueous binder dispersion solvent. In the preparation of the dispersion liquid 7, first, methyl cellulose as a binder is dissolved in water to prepare an aqueous solution of 0.5 to 5 wt%, to which 5 to 15 parts by weight of the alumina powder for grain sand is added and stirred and mixed. , To obtain an alumina dispersion. At the time of preparation, by adding 1 to 2% of a polycarboxylic acid salt or the like as a dispersion accelerator, the alumina powder can be effectively dispersed. When coloring the dispersion, for example, commercially available rhodamine is used as a coloring agent in an amount of 1 to 2
% May be added.

【0015】こうして上記のようなアルミナ分散液7が
散布されたシート1は、更に乾燥帯Bに達し、乾燥機の
例えばヒータ40で加熱される。これにより、分散液7
中の水分が蒸発し、分散液7は乾燥すると共にシート1
の表面に目砂層として付着し、目砂8付きのシート1が
得られる。この目砂8は、目砂中のバインダーにより適
度な強度を有する。なお、乾燥帯Bの温度は約100℃
で、シート1が乾燥帯Bを通過する時間は約1分であ
る。
The sheet 1 thus dispersed with the alumina dispersion 7 reaches the drying zone B and is heated by, for example, the heater 40 of the dryer. As a result, the dispersion liquid 7
The water content therein evaporates, the dispersion liquid 7 dries, and the sheet 1
A sheet 1 having a grain 8 is obtained by depositing as a grain layer on the surface of. The grain sand 8 has an appropriate strength due to the binder in the grain sand. The temperature of the dry zone B is about 100 ° C.
Then, the time for the sheet 1 to pass through the dry zone B is about 1 minute.

【0016】その後に、目砂付きグリーンシートを複数
枚積み重ね、このシート積層体を焼成用サヤ板に積載
し、更にこのサヤ板を多段数積み重ねた後に、多段数の
サヤ板を焼成工程に搬送する。焼成は例えばトンネル炉
により行い、焼成によりグリーンシートを焼結する。焼
成終了後にシートをスリットから各シートに分離するこ
とにより、個々のセラミック基板が得られる。
After that, a plurality of green sheets with grain sand are stacked, the sheet laminated body is stacked on a firing sheath plate, and then the sheath plates are stacked in multiple stages, and then the multi-stage sheath plates are conveyed to the firing process. To do. The firing is performed, for example, in a tunnel furnace, and the green sheet is sintered by firing. Individual ceramic substrates are obtained by separating the sheet from the slits into individual sheets after firing.

【0017】ここで、シート上には適度の強度を有する
目砂が付着しているため、目砂形成工程から焼成工程ま
でシート積層体を搬送する時に、積層体を傾けたりシー
ト同士が擦れたりした程度では、目砂が剥がれることは
なく、吸着搬送も可能である。又、分散液を着色してあ
れば、特に噴霧帯Aにおいてアルミナ分散液7の散布状
態を容易に確認することができ、散布異常の早期発見が
可能である。
Here, since the grain sand having an appropriate strength is attached on the sheet, when the sheet laminated body is conveyed from the grain forming step to the firing step, the laminated body is tilted or the sheets are rubbed against each other. With such a degree, the sand is not peeled off, and the suction conveyance is possible. Further, if the dispersion liquid is colored, it is possible to easily confirm the spraying state of the alumina dispersion liquid 7, especially in the spray zone A, and it is possible to detect a spraying abnormality at an early stage.

【0018】[0018]

【発明の効果】以上説明したように、本発明のセラミッ
ク基板の製造方法は、目砂用溶質と水性バインダー分散
溶媒を用いて作製した分散液をシート上に塗布し、これ
を乾燥・付着させたものを目砂とするため、下記の効果
を奏する。 (1)シート上に目砂が均一厚さで付着しているため、
焼成時におけるシート同士の融着及び基板の反りや変形
が発生しなくなり、歩留り及び品質が向上する。 (2)シート積層体の安定性が改善されるため、シート
積層体の取扱性が良くなり、作業性が向上し、延いては
生産性が高まる。 (3)シート積層体の安定性が良くなるため、シート積
層体の搬送自動化が可能である。
As described above, according to the method for producing a ceramic substrate of the present invention, a dispersion liquid prepared by using a solute for grain sand and an aqueous binder dispersion solvent is applied onto a sheet and dried and attached. The following effects are achieved because the sand is used as sand. (1) Since the grain sand has a uniform thickness on the sheet,
The fusion between the sheets during firing and the warpage and deformation of the substrate do not occur, and the yield and quality are improved. (2) Since the stability of the sheet laminate is improved, the handleability of the sheet laminate is improved, the workability is improved, and the productivity is increased. (3) Since the stability of the sheet laminated body is improved, the conveyance of the sheet laminated body can be automated.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の製造方法において、目砂形成工程に使
用する装置の概略構成図である。
FIG. 1 is a schematic configuration diagram of an apparatus used in a grain forming step in the manufacturing method of the present invention.

【図2】従来のシート積層体の一形態の側面図である。FIG. 2 is a side view of one form of a conventional sheet laminate.

【図3】シートへの目砂の載せ方を示す説明図である。FIG. 3 is an explanatory view showing how to put grain sand on a sheet.

【図4】従来のシート積層体の別形態の側面図である。FIG. 4 is a side view of another form of the conventional sheet laminated body.

【図5】シート積層体を載せた焼成用サヤ板を数段積み
重ねた状態を示す側面図である。
FIG. 5 is a side view showing a state where a plurality of firing sheath plates on which the sheet laminate is placed are stacked.

【符号の説明】[Explanation of symbols]

1 グリーンシート 5 シート積層体 7 アルミナ分散液 8 目砂 1 Green sheet 5 Sheet laminate 7 Alumina dispersion 8th sand

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】成形シートから打ち抜かれたセラミックか
らなるシートをシート間に目砂を介在させて積み重ね、
このシート積層体を焼成するセラミック基板の製造方法
において、 前記目砂は、目砂用溶質と水性バインダー分散溶媒を用
いて作製した分散液をシート上に塗布し、これを乾燥・
付着させたものであることを特徴とするセラミック基板
の製造方法。
1. Sheets made of ceramics punched out from molded sheets are stacked with interposing sand between the sheets,
In the method for manufacturing a ceramic substrate for firing this sheet laminate, in the sand grain, a dispersion liquid prepared by using a solute for sand grains and an aqueous binder dispersion solvent is applied onto a sheet and dried.
A method for manufacturing a ceramic substrate, characterized in that it is attached.
【請求項2】前記目砂用溶質がアルミナ粉末であること
を特徴とする請求項1記載のセラミック基板の製造方
法。
2. The method for producing a ceramic substrate according to claim 1, wherein the solute for grain sand is alumina powder.
【請求項3】前記分散液に着色剤を添加することを特徴
とする請求項1又は2記載のセラミック基板の製造方
法。
3. The method for producing a ceramic substrate according to claim 1, wherein a colorant is added to the dispersion liquid.
JP4030741A 1992-02-18 1992-02-18 Production of ceramic substrate Pending JPH05229875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4030741A JPH05229875A (en) 1992-02-18 1992-02-18 Production of ceramic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4030741A JPH05229875A (en) 1992-02-18 1992-02-18 Production of ceramic substrate

Publications (1)

Publication Number Publication Date
JPH05229875A true JPH05229875A (en) 1993-09-07

Family

ID=12312105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4030741A Pending JPH05229875A (en) 1992-02-18 1992-02-18 Production of ceramic substrate

Country Status (1)

Country Link
JP (1) JPH05229875A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008056563A (en) * 2007-11-19 2008-03-13 Toho Titanium Co Ltd Method for producing compound oxide
WO2016199777A1 (en) * 2015-06-12 2016-12-15 住友化学株式会社 Method for producing ceramic sintered body
CN111592370A (en) * 2020-06-03 2020-08-28 朱振朋 Preparation process of high-strength porous ceramic material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008056563A (en) * 2007-11-19 2008-03-13 Toho Titanium Co Ltd Method for producing compound oxide
WO2016199777A1 (en) * 2015-06-12 2016-12-15 住友化学株式会社 Method for producing ceramic sintered body
CN111592370A (en) * 2020-06-03 2020-08-28 朱振朋 Preparation process of high-strength porous ceramic material

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