JPH05226454A - Clean air unit mounting structure of vertical substrate heat treatment device - Google Patents

Abstract

PURPOSE:To easily carry out a maintenance operation such as a maintenance check or an replacement operation done for a clean air unit provided between a carrier housing box and a heat treatment oven. CONSTITUTION:A control box 7 and a carrier housing box 4 are provided to the upper part of a casing 2 provided with an open-close door in such a manner that they are movable up to a point outside the door 1 and displaceable as rotating throughout an area extending from the point concerned to a receding point on the lateral side of the casing 2. A clean air unit 6 provided at an innermost position is provided to the casing 2 so as to be movable up to a dismounting point close to the open-close door 1, whereby the clean air unit 6 can be dismounted on a clean room side and subjected to a maintenance operation.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to various substrates such as semiconductor substrates and ceramics substrates for various heat treatments such as oxidation, annealing, CVD (chemical vapor deposition), and diffusion. In the upper side of the casing with the open / close door provided in the casing, a carrier storage box capable of accommodating substrate carriers in multiple stages is provided, and a heat treatment furnace is provided in the back of the carrier storage box, and the open / close door and the carrier storage box are The present invention relates to a structure for mounting a clean air unit of a vertical substrate heat treatment apparatus in which a control box is provided between the carrier storage box and a heat treatment furnace.

[0002]

2. Description of the Related Art In this type of vertical substrate heat treatment apparatus,
When performing maintenance work such as maintenance inspection and filter replacement for the clean air unit, conventionally,
After removing the detachable partition wall on the inner side of the casing and removing the heat treatment furnace, take out the clean air unit to the maintenance room side opposite to the clean room side, or to store the control box and the carrier housing the computer. After removing each box, I took out the clean air unit to the clean room side.

[0003]

However, when taking out the heat treatment furnace to the outside of the casing when taking out to the maintenance room side, not only a great deal of labor is required for the removal work, but also due to the air in the maintenance room,
The clean air unit, the carrier storage box, and the control box, which should be on the clean room side of the partition wall, are easily contaminated.

On the other hand, when taking out to the clean room side,
Since the control box and the carrier storage box are taken out of the casing, there is a drawback that the removing work requires a lot of trouble.

The present invention has been made in view of such circumstances, and facilitates maintenance work such as maintenance inspection and replacement for a clean air unit provided between a carrier storage box and a heat treatment furnace. The purpose is to be able to.

[0006]

In order to achieve the above-mentioned object, the present invention provides a carrier storage box capable of accommodating substrate carriers in multiple stages on the upper side in a casing having an opening / closing door on the front surface. In addition to providing a heat treatment furnace on the back side of the carrier storage box, a control box is provided between the opening / closing door and the carrier storage box,
In the mounting structure of the clean air unit of the vertical substrate heat treatment apparatus in which the clean air unit is provided between the carrier storage box and the heat treatment furnace, each of the control box and the carrier storage box can be moved to a position outside the open / close door, In addition, the clean air unit is installed in the casing so that it can be rotationally displaced from its outer position to the sideward retracted position of the casing, and the clean air unit can be moved from between the carrier storage box and the heat treatment furnace to the take-out position near the open / close door. It is installed in the casing and configured.

[0007]

According to the structure of the mounting structure of the clean air unit of the vertical substrate heat treatment apparatus of the present invention, the opening / closing door is opened, the control box is moved to a position outside the opening / closing door, and then the control box is rotationally displaced to the retracted position. Furthermore, after moving the carrier storage box to a position outside the open / close door, it is rotationally displaced to the retracted position, and in that state, the clean air unit is opened / closed without being disturbed by the control box and the carrier storage box. It is possible to perform maintenance work such as maintenance inspection and replacement as appropriate, such as moving to an extraction position in the vicinity of and pulling out to replace the filter, or replacing the entire clean air unit.

[0008]

Embodiments of the present invention will now be described in detail with reference to the drawings.

FIG. 1 is an overall vertical side view showing an embodiment of a mounting structure of a clean air unit of a vertical substrate heat treatment apparatus according to the present invention, and FIG. 2 is an overall front view, in which a double door opening / closing door 1 is provided on the front side. , 1 on the upper side in the casing 2 provided with
A carrier accommodating box 4 capable of accommodating the substrate carriers 3 in multiple stages is provided, a heat treatment furnace 5 is provided behind the carrier accommodating box 4, and between the carrier accommodating box 4 and the heat treatment furnace 5. A clean air unit 6 accommodating the filter 6a is provided, and is separated from the heat treatment furnace 5 by a partition wall 30. On the other hand, a control box 7 containing a computer is provided on the front side of the carrier storage box 4.

A handling stage 8 for raising and lowering the substrate carrier 3 is provided below the carrier storage box 4, and a boat handler 10 for raising and lowering the substrate boat 9 is provided below the heat treatment furnace 5.

A cassette handler 11 is provided in front of the handling stage 8 and a wafer handler 12 is provided between the handling stage 8 and the boat handler 10.

As shown in a perspective view with a part of FIG. 3 omitted, on the side of the left and right inner peripheral wall surfaces of the casing 2 to which the support pillar 13 of the cassette handler 11 is attached, a pair of upper and lower parts is provided in front of the support pillar 13. First fixed guides 14, 14
Is attached, and the first movable guide 15 is slidably attached to each of the first fixed guides 14 and 14, and the lateral side of the control box 7 is attached to the tip end side of each of the first movable guides 15 and 15. First attached to the side
The support bracket 16 of the vertical axis P1 [Fig. 4
(See (b)] It is attached so as to be rotatable around.

Further, a pair of upper and lower second fixed guides 17, 17 are attached to the other side of the left and right inner peripheral wall surfaces of the casing 2, and the second movable guides 17 and 17 are respectively movable in the second direction. The guide 18 is slidably mounted, and a second support bracket 19 mounted on the lateral side surface of the carrier storage box 4 is provided at the tip end side of each of the second movable guides 18 and 18 in the vertical axis P2 [ See FIG. 4 (b)].

A pair of left and right third fixed guides 20, 20 are attached to the lower surface of the top plate of the casing 2, and the third fixed guides 20, 20 are attached to the upper surface of the clean air unit 6, respectively. The engagement member 21 is slidably attached.

With the above construction, as shown in the horizontal cross-sectional views of the main parts of FIGS. 4 (a) and 4 (b), the clean air unit 6 is normally attached to the left and right contact plates 22, 2.
The carrier storage box 4 is positioned and fixed at a position where it abuts the casing 2, and the carrier storage box 4 is provided with a positioning pin 23 attached to a side farther than the second support bracket 19 from the casing 2.
The positioning box (not shown) of the bracket 24 attached to the inner peripheral wall surface of the control box 7 is positioned and fixed, and the control box 7 is fixed to the first support bracket 16 thereof.
The positioning pin 25 provided on the farther side is fitted into the positioning hole (not shown) of the bracket 26 attached to the inner peripheral wall surface of the casing 2 so that the positioning pin 25 can be positioned and fixed.

At the time of maintenance work on the clean air unit 6, the opening / closing doors 1, 1 are opened by swinging, and first, the control box 7 is slidably moved to the outside of the casing 2 with respect to the opening / closing doors 1, 1. , And the vertical axis P
It rotates around 1 and is displaced to the retracted position on the lateral outer side of the casing 2, and then the carrier storage box 4 is opened / closed.
The casing 2 slides to the outside of the casing 2 and further rotates around the vertical axis P2 to be displaced to the retreat position on the lateral outside of the casing 2. After that, the clean air unit 6
Can be slidably moved and taken out of the casing 2.

Although not shown, electric wirings for the control box 7 are housed in a cable bear or the like so as not to hinder the movement of the casing 2 in and out. In the above embodiment, the clean air unit 6 is manually moved in and out of the casing 2. However, for example, one of the third fixed guides 20 and 20 is formed of a screw shaft, and An inner screw member screwed to the screw shaft is attached to the clean air unit 6, and an electric motor is interlockingly connected to the screw shaft so that the clean air unit 6 is moved into and out of the casing 2 by driving the electric motor. Is also good.

[0018]

As described above, according to the mounting structure of the clean air unit of the vertical substrate heat treatment apparatus of the present invention, after the control box and the carrier storage box are moved to positions outside the open / close door, respectively. Since the clean air unit can be moved to the retracted position and moved to the position near the opening / closing door, the filter can be replaced, or the entire clean air unit can be replaced.
When performing maintenance work such as maintenance and inspection,
The control box and carrier storage box can be easily moved to positions that do not interfere with the removal of the clean air unit, and maintenance work such as maintenance inspection and replacement of the clean air unit can be performed easily and with less effort. ..

Moreover, since the maintenance work for the clean air unit is performed on the side of the open / close door located on the clean room side, contamination of the carrier storage box etc., which occurs when the clean air unit is taken out to the maintenance room side as in the conventional case, is prevented. Good avoidance.

[Brief description of drawings]

FIG. 1 is an overall vertical cross-sectional side view showing an embodiment of a mounting structure of a clean air unit of a vertical substrate heat treatment apparatus according to the present invention.

FIG. 2 is an overall front view.

FIG. 3 is a perspective view of a main part with a part omitted.

FIG. 4 is a cross-sectional view of a main part.

[Explanation of symbols]

 1 ... Opening / closing door 2 ... Casing 3 ... Substrate carrier 4 ... Carrier storage box 5 ... Heat treatment furnace 6 ... Clean air unit 7 ... Control box

Claims (1)

[Claims] 1. A carrier storage box capable of accommodating substrate carriers in multiple stages is provided on the upper side in a casing having an opening / closing door on the front surface, and a heat treatment furnace is provided on the back side of the carrier storage box to open and close the housing. A control box is provided between the door and the carrier storage box,
In a mounting structure of a clean air unit of a vertical substrate heat treatment apparatus in which a clean air unit is provided between the carrier storage box and the heat treatment furnace, each of the control box and the carrier storage box is located outside the opening / closing door. Is provided in the casing such that the clean air unit is movable from the outer position to a retracted position laterally of the casing from the outer position thereof, and the clean air unit is provided between the carrier storage box and the heat treatment furnace. A structure for mounting a clean air unit of a vertical substrate heat treatment apparatus, wherein the structure is provided in the casing so as to be movable to a take-out position near an opening / closing door.