CN220272451U - Wafer transmission standard mechanical interface loading device - Google Patents
Wafer transmission standard mechanical interface loading device Download PDFInfo
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- CN220272451U CN220272451U CN202321838326.2U CN202321838326U CN220272451U CN 220272451 U CN220272451 U CN 220272451U CN 202321838326 U CN202321838326 U CN 202321838326U CN 220272451 U CN220272451 U CN 220272451U
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- 230000005540 biological transmission Effects 0.000 title claims description 6
- 239000013078 crystal Substances 0.000 claims abstract description 45
- 238000013519 translation Methods 0.000 claims abstract description 43
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 210000000056 organ Anatomy 0.000 claims abstract description 9
- 230000002159 abnormal effect Effects 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 abstract description 72
- 238000012546 transfer Methods 0.000 abstract description 5
- 239000002245 particle Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A wafer transfer standard mechanical interface loading device comprises a support base assembly; the unlocking translation assembly is arranged in the supporting base assembly and is used for unlocking the crystal box base and the crystal box shell and fixing the crystal box base; the lifting frame assembly is arranged above the unlocking translation assembly in a lifting manner and comprises a lifting platform, a rotary baffle and a rotary air cylinder, wherein the rotary baffle is rotatably arranged on the lifting platform, and the rotary air cylinder drives the rotary baffle to rotate so as to press the fixed and unlocked crystal box shell; the lifting assembly is arranged at one side of the lifting frame assembly; and the organ page is provided with one end arranged on the supporting base assembly and the other end arranged on the lifting platform, stretches along with the upward movement of the lifting platform and is used for providing a closed and clean environment. The utility model provides an ultra-clean small environment with controlled airflow, pressure and particle quantity, which can effectively avoid pollution of wafers and detection equipment and simultaneously reduce the requirement on external environment.
Description
Technical Field
The utility model relates to the technical field of wafer detection, in particular to a wafer transmission standard mechanical interface loading device.
Background
Semiconductor devices are instruments used for wafer precision machining and measurement in semiconductor processing. Because wafers are completely exposed in an open environment in the process of transferring by using a wafer cassette (wafer cassette), the wafers are easily polluted by suspended particles, water vapor and the like in the external environment, so that the problems of reduced wafer yield, dirt inside detection equipment and the like are caused, and more wafer transfer work requires the use of the wafer transfer cassette to seal and protect the wafers.
For this purpose, we propose a wafer transfer standard mechanical interface loading device.
Disclosure of Invention
The applicant provides a wafer transfer standard mechanical interface loading device, which aims at the defects in the prior art, so as to provide an ultra-clean small environment with controlled air flow, pressure and particle quantity, effectively avoid pollution of wafers and detection equipment, and simultaneously reduce the requirement on external environment.
The technical scheme adopted by the utility model is as follows:
the utility model provides a wafer transmission standard mechanical interface loading device, is applied to in the detection of wafer box, and the wafer box includes wafer box base and wafer box shell, can lock and unblock between wafer box base and the wafer box shell, includes:
a support base assembly;
the unlocking translation assembly is arranged in the supporting base assembly and is used for unlocking the crystal box base and the crystal box shell and fixing the crystal box base;
the lifting frame assembly is arranged above the unlocking translation assembly in a lifting manner and comprises a lifting platform, a rotary baffle and a rotary air cylinder, wherein the rotary baffle is rotatably arranged on the lifting platform, and the rotary air cylinder drives the rotary baffle to rotate so as to press the fixed and unlocked crystal box shell;
the lifting assembly is arranged at one side of the lifting frame assembly and used for driving the lifting frame assembly to lift;
and the organ page is provided with one end arranged on the supporting base assembly and the other end arranged on the lifting platform, stretches along with the upward movement of the lifting platform and is used for providing a closed and clean environment.
It is further characterized by:
still include backplate, spacing direction subassembly and window sunshade, the window sunshade sets up on lifting frame subassembly for isolated environment between getting piece window and the outside, support base subassembly setting is in the bottom of backplate, and lifting assembly and spacing direction subassembly set up on the backplate.
The support base assembly comprises a support base, a key and an indicator lamp are arranged at the top of the support base, and a control board, an electromagnetic valve assembly, a switch and a power interface are arranged at the bottom of the support base.
The unlocking translation subassembly includes crystal box place platform, spacing pin, unblock subassembly, rotatory unblock cylinder, and spacing pin is equipped with a plurality ofly, and a plurality of spacing pin intervals set up at crystal box place platform top for carry out spacingly to the crystal box base, unblock subassembly rotates to set up on crystal box place platform, places the crystal box to behind the crystal box place platform, and unblock subassembly gets into the inslot that crystal box base bottom matches, drives unblock subassembly through rotatory unblock cylinder, accomplishes the structural separation of crystal box base and crystal box shell, accomplishes the fixation to the crystal box base simultaneously.
The unlocking translation assembly further comprises a translation air cylinder, a translation guide rail, a translation sliding block and a buffer stop, wherein the translation air cylinder can drive the crystal box placing platform to move forwards, and the translation guide rail and the translation sliding block are matched with each other so that the crystal box placing platform moves more stably.
The lifting frame assembly further comprises a correlation sensor I and a protrusion detection sensor, whether the wafer is protruded from the wafer cassette is detected by the protrusion detection sensor, and whether the position of the wafer is abnormal is detected by the correlation sensor I.
The lifting assembly comprises a lifting air cylinder, a lifting guide rail, a fixing seat, a lifting connecting shell and a lifting sliding block, wherein the lifting air cylinder is fixed on the fixing seat, the fixing seat is fixed on the back plate, the lifting guide rail is also fixed on the fixing seat and is parallel to the lifting air cylinder, the lifting sliding block is matched with the lifting guide rail, and the lifting sliding block is fixedly connected with the lifting connecting shell.
The lifting assembly further comprises a correlation sensor II, a rack and a connecting block, wherein the correlation sensor II is arranged on the lifting connecting shell, the rack is arranged on the lifting guide rail and is provided with a notch, and the lifting connecting shell is fixedly connected with the lifting platform through the connecting block.
The limiting guide assembly comprises a limiting plate, a guide groove and limiting guide wheels, wherein the guide groove is formed in the limiting plate, the limiting guide wheels are movably arranged in the guide groove, and the limiting guide wheels are arranged on the lifting platform through a rotating shaft and used for limiting and guiding the lifting platform.
The beneficial effects of the utility model are as follows:
the utility model has compact and reasonable structure and convenient operation, forms an ultra-clean small environment through the crystal box shell, the organ pages and the supporting base, has controlled air flow, pressure and particle quantity, can effectively avoid pollution of wafers and detection equipment, and simultaneously reduces the requirement on external environment.
Meanwhile, the utility model has the following advantages:
(1) Through setting up translation cylinder, translation guide rail and translation slider, drive crystal box place the platform and move forward, and then drive the wafer cassette and move forward, make the wafer cassette be close to the inside robotic arm of equipment, be convenient for robotic arm get the piece from the wafer cassette.
(2) The whole loading device has compact structure, small occupied space, convenient installation, moderate size and no occupied space.
(3) Through setting up spacing guide component, spacing leading wheel activity sets up in the guide way, and spacing leading wheel sets up on lifting the platform through the pivot for carry out spacing and direction to lifting the platform.
(4) By arranging the protrusion detection sensor and the correlation sensor I, when the lifting platform moves upwards, the protrusion detection sensor starts to work, and when signals are shielded, an indicator light can be lightened to prompt that a wafer protrudes out of the wafer cassette. When the lifting platform moves upwards, the correlation sensor starts to work, and if the wafer position is abnormal, the other indicator lamp can be lightened to prompt that the wafer position is abnormal.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a schematic view showing a lifting operation state of the device of the present utility model when the round box is placed.
Fig. 3 is a top view of fig. 2.
Fig. 4 is a schematic view of section A-A of fig. 3.
Fig. 5 is a schematic diagram of a control portion of the present utility model.
Fig. 6 is a schematic view of a lifting assembly according to the present utility model.
Fig. 7 is a top view of fig. 6.
Fig. 8 is a schematic view of section B-B of fig. 7.
Fig. 9 is a partial schematic view of a lifting frame assembly according to the present utility model.
Fig. 10 is a bottom view of fig. 9.
Fig. 11 is a partial schematic view of a spacing guide assembly of the present utility model.
Fig. 12 is a partial schematic view of an unlocking translation assembly of the present utility model.
Fig. 13 is a bottom view of fig. 12.
Wherein: 1. a back plate; 2. a support base assembly; 201. a support base; 202. a control board; 203. a solenoid valve assembly; 204. a switch; 205. a power interface; 206. a key; 207. an indicator light; 3. unlocking the translation assembly; 301. a crystal box placing platform; 302. limit pins; 303. unlocking the assembly; 304. rotating an unlocking cylinder; 305. an in-situ sensor; 306. a translation cylinder; 307. translating the guide rail; 308. a translation slider; 309. a buffer stop; 4. a lifting frame assembly; 401. lifting a platform; 402. rotating the baffle; 403. a rotary cylinder; 404. correlation sensor I; 405. a protrusion detection sensor; 406. an amplifier; 5. a lifting assembly; 501. a lifting cylinder; 502. lifting the guide rail; 503. a fixing seat; 504. lifting the connecting shell; 505. a lifting slide block; 506. correlation sensor II; 507. a rack; 508. a connecting block; 6. a limit guide assembly; 601. a limiting plate; 602. a guide groove; 603. limiting guide wheels; 7. a window shutter; 8. a wafer cassette; 801. a crystal box base; 802. a cassette housing; 803. a wafer cassette; 9. organ pages.
Detailed Description
The following describes specific embodiments of the present utility model with reference to the drawings.
As shown in fig. 1, a wafer transmission standard mechanical interface loading device comprises a back plate 1, a supporting base assembly 2, an unlocking translation assembly 3, a lifting frame assembly 4, a lifting assembly 5, a limit guide assembly 6 and a window shielding plate 7. The loading device is fixed through the backboard 1; support base subassembly 2 sets up in the bottom of backplate 1, and unblock translation subassembly 3 sets up on supporting base subassembly 2, and lifting frame subassembly 4 activity sets up in unblock translation subassembly 3 top, and lifting assembly 5 and spacing direction subassembly 6 set up on backplate 1 for drive lifting frame subassembly 4 and go up and down, spacing direction subassembly 6, be used for carrying out spacing direction to lifting frame subassembly 4, window sunshade 7 sets up on lifting frame subassembly 4, is used for the isolated environment of getting between piece window and the outside, prevents that outside foreign matter from getting into the detection window.
As shown in fig. 2-4, the loading device of the present utility model further comprises an organ page 9, wherein the bottom of the organ page 9 is fixed on the top of the supporting base assembly 2, and the top of the organ page 9 is fixed on the bottom of the lifting frame assembly 4. The wafer cassette 8 includes a cassette base 801, a cassette housing 802, and a wafer cassette 803, the cassette base 801 and the cassette housing 802 being detachably connected, the wafer cassette 803 being provided on the cassette base 801. The support base assembly 2 comprises a support base 201, and a key 206 and an indicator light 207 are arranged on the top of the support base 201.
As shown in fig. 5, a control board 202, a solenoid valve assembly 203, a switch 204 and a power interface 205 are provided at the bottom of the support base 201. The power source is connected to supply power to the device through the power interface 205, and the electromagnetic valve assembly 203 controls the operation of the electrical equipment.
As shown in fig. 12-13, the unlocking translation assembly 3 includes a cassette placement platform 301, a limit pin 302, an unlocking assembly 303, a rotary unlocking cylinder 304, a position sensor 305, a translation cylinder 306, a translation rail 307, a translation slider 308, and a buffer stop 309. The spacing pin 302 is equipped with a plurality of, and a plurality of spacing pins 302 interval sets up at crystal box place platform 301 top for spacing crystal box base 801. The unlocking component 303 is rotatably arranged on the wafer box placing platform 301, after the wafer box 8 is placed on the wafer box placing platform 301, the unlocking component 303 enters a groove matched with the bottom of the wafer box base 801, the unlocking component 303 is driven by rotating the unlocking cylinder 304, the structural separation of the wafer box base 801 and the wafer box shell 802 is completed, and meanwhile, the fixation of the wafer box base 801 is completed. After the cassette housing 802 is driven to move upwards to a certain position by the lifting frame assembly 4 and the lifting assembly 5, whether the cassette base 801 is placed in place or not is detected by the in-situ sensor 305, and after the cassette base 801 is placed in place, the translation cylinder 306 drives the cassette placing platform 301 to move forwards, so that the wafer cassette 803 is driven to move forwards, the wafer cassette 803 is close to a mechanical arm in the equipment, and the mechanical arm is convenient for taking a wafer from the wafer cassette 803. Translation cylinder 306 sets up the bottom at crystal box place platform 301, and translation guide rail 307 sets up the both sides at crystal box place platform 301, and translation slider 308 matches and sets up on translation guide rail 307, and crystal box place platform 301 bottom still is provided with buffer stop 309 for buffer when the translation.
As shown in fig. 9 to 10, the lifting frame assembly 4 includes a lifting platform 401, a rotation baffle 402, a rotation cylinder 403, a correlation sensor one 404, a protrusion detection sensor 405, and an amplifier 406. The rotary baffle plates 402 are arranged at two, the two rotary baffle plates 402 are rotatably arranged at the top of the lifting platform 401, the amplifier 406 is arranged at the top of the lifting platform 401, the rotary cylinder 403, the correlation sensor one 404 and the protrusion detection sensor 405 are arranged at the bottom of the lifting platform 401, the rotary cylinder 403 drives the rotary baffle plates 402 to rotate, and then the wafer box shell 802 is fixed through the rotary baffle plates 402, so that the wafer box shell 802 is conveniently driven to move upwards through the lifting platform 401, when the lifting platform 401 moves upwards, the protrusion detection sensor 405 starts to work, and when signals are shielded, one indicator lamp 207 can be lightened to prompt that the wafer protrudes out of the wafer box 803. When the lift platform 401 moves upward, the correlation sensor 404 starts to work, and if the wafer position is abnormal, the other indicator 207 is turned on to indicate that the wafer position is abnormal. When the lifting platform 401 moves upwards, the organ pages 9 will stretch upwards along with the lifting platform 401, so as to provide a relatively airtight and clean environment for wafer detection.
As shown in fig. 6-8, the lifting assembly 5 includes a lifting cylinder 501, a lifting guide 502, a fixed seat 503, a lifting connection housing 504, a lifting slider 505, an opposite sensor 506, and a rack 507. The lifting cylinder 501 is fixed on the fixed seat 503, the fixed seat 503 is fixed on the back plate 1, and the lifting guide rail 502 is also fixed on the fixed seat 503 and is arranged parallel to the lifting cylinder 501. The lifting slide block 505 is arranged on the lifting guide rail 502 in a matching way, the lifting slide block 505 is fixedly connected with the lifting connection housing 504, the correlation sensor II 506 is arranged on the lifting connection housing 504, and the rack 507 is arranged on the lifting guide rail 502 and provided with a notch. The lifting connection housing 504 is fixedly connected with the lifting platform 401 through a connection block 508. The lifting connection housing 504 is driven to move upwards through the lifting cylinder 501, and meanwhile, the correlation sensor II 506 also moves upwards along with the lifting connection housing 504, and the correlation sensor II 506 detects the position of the notch on the rack 507 and matches with the detection position of the subsequent correlation sensor II 506. When the lifting connection housing 504 moves, the connection block 508 drives the lifting platform 401 to move, so that the pod housing 802 on the lifting platform 401 is driven to move.
As shown in fig. 11, the limit guide assembly 6 includes a limit plate 601, a guide groove 602, and a limit guide wheel 603. The guide way 602 is arranged on the limiting plate 601, the limiting guide wheel 603 is movably arranged in the guide way 602, and the limiting guide wheel 603 is arranged on the lifting platform 401 through a rotating shaft and used for limiting and guiding the lifting platform 401.
After all wafers in the wafer cassette 803 are detected, the translation cylinder 306 is retracted backwards to drive the wafer cassette placing platform 301 to move, after the wafer cassette placing platform 301 moves to the initial position, the lifting cylinder 501 starts to move downwards to drive the lifting platform 401 to descend until the wafer cassette is returned to the lowest point position, at this time, the wafer cassette shell 802 also returns to the initial position along with the lifting platform 401, the rotary unlocking cylinder 304 drives the unlocking component 303 to rotate, so that the wafer cassette shell 802 and the wafer cassette base 801 are restored to a locking state, meanwhile, the wafer cassette base 801 and the wafer cassette placing platform 301 are separated and are not fixed any more, the rotary cylinder 403 rotates to drive the rotary baffle 402 to retract, the rotary baffle 402 does not press the edge of the wafer cassette shell 802 any more, so far, the wafer cassette 8 is in the natural placing state, and an operator can take out the wafer cassette shell 802.
The above description is intended to illustrate the utility model and not to limit it, the scope of which is defined by the claims, and any modifications can be made within the scope of the utility model.
Claims (9)
1. The utility model provides a wafer transmission standard mechanical interface loading device, is applied to in the detection of wafer box (8), and wafer box (8) include wafer box base (801) and wafer box shell (802), can lock and unblock between wafer box base (801) and the wafer box shell (802), its characterized in that includes:
a support base assembly (2);
the unlocking translation assembly (3) is arranged in the supporting base assembly (2) and is used for unlocking the crystal box base (801) and the crystal box shell (802) and fixing the crystal box base (801);
the lifting frame assembly (4) is arranged above the unlocking translation assembly (3) in a lifting manner, the lifting frame assembly (4) comprises a lifting platform (401), a rotary baffle plate (402) and a rotary cylinder (403), the rotary baffle plate (402) is rotatably arranged on the lifting platform (401), and the rotary baffle plate (402) is driven to rotate through the rotary cylinder (403) so as to press a fixed and unlocked crystal box shell (802);
the lifting assembly (5) is arranged at one side of the lifting frame assembly (4) and is used for driving the lifting frame assembly (4) to lift;
and the organ page (9) is provided with one end arranged on the supporting base assembly (2) and the other end arranged on the lifting platform (401), stretches along with the upward movement of the lifting platform (401) and is used for providing a closed and clean environment.
2. A wafer transport standard mechanical interface loading apparatus as recited in claim 1, wherein: still include backplate (1), spacing direction subassembly (6) and window sunshade (7), window sunshade (7) set up on lifting frame subassembly (4) for isolated environment between film taking window and the outside, support base subassembly (2) set up in the bottom of backplate (1), lifting unit (5) and spacing direction subassembly (6) set up on backplate (1).
3. A wafer transport standard mechanical interface loading apparatus as recited in claim 1, wherein: the support base assembly (2) comprises a support base (201), a key (206) and an indicator lamp (207) are arranged at the top of the support base (201), and a control board (202), an electromagnetic valve assembly (203), a switch (204) and a power interface (205) are arranged at the bottom of the support base (201).
4. A wafer transport standard mechanical interface loading apparatus as recited in claim 2, wherein: the unlocking translation subassembly (3) is including crystal box place platform (301), spacing pin (302), unblock subassembly (303), rotatory unblock cylinder (304), spacing pin (302) are equipped with a plurality ofly, a plurality of spacing pin (302) interval sets up at crystal box place platform (301) top for carry out spacingly to crystal box base (801), unblock subassembly (303) rotate and set up on crystal box place platform (301), place crystal box (8) on crystal box place platform (301), in unblock subassembly (303) get into the groove that crystal box base (801) bottom matches, drive unblock subassembly (303) through rotatory unblock cylinder (304), accomplish the structure separation of crystal box base (801) and crystal box shell (802), accomplish simultaneously to the fixed of crystal box base (801).
5. A wafer transport standard mechanical interface loading apparatus as recited in claim 4, wherein: the unlocking translation assembly (3) further comprises a translation air cylinder (306), a translation guide rail (307), a translation sliding block (308) and a buffer stop block (309), the translation air cylinder (306) can drive the crystal box placing platform (301) to move forwards, and the translation guide rail (307) and the translation sliding block (308) are matched with each other so that the crystal box placing platform (301) moves more stably.
6. A wafer transport standard mechanical interface loading apparatus as recited in claim 2, wherein: the lifting frame assembly (4) further comprises a correlation sensor I (404) and a protrusion detection sensor (405), whether a wafer protrusion wafer cassette (803) exists or not is detected through the protrusion detection sensor (405), and whether the wafer position is abnormal or not is detected through the correlation sensor I (404).
7. A wafer transport standard mechanical interface loading apparatus as recited in claim 2, wherein: lifting component (5) are including lift cylinder (501), lift guide rail (502), fixing base (503), lift connection shell (504), lift slider (505), lift cylinder (501) are fixed on fixing base (503), fixing base (503) are fixed on backplate (1), lift guide rail (502) are also fixed on fixing base (503), and with lift cylinder (501) parallel arrangement, lift slider (505) match and set up on lift guide rail (502), lift slider (505) are with lift connection shell (504) fixed connection.
8. A wafer transport standard mechanical interface loading apparatus as recited in claim 7, wherein: the lifting assembly (5) further comprises a correlation sensor II (506), a rack (507) and a connecting block (508), the correlation sensor II (506) is arranged on the lifting connecting shell (504), the rack (507) is arranged on the lifting guide rail (502) and is provided with a notch, and the lifting connecting shell (504) is fixedly connected with the lifting platform (401) through the connecting block (508).
9. A wafer transport standard mechanical interface loading apparatus as recited in claim 2, wherein: the limiting guide assembly (6) comprises a limiting plate (601), a guide groove (602) and limiting guide wheels (603), wherein the guide groove (602) is arranged on the limiting plate (601), the limiting guide wheels (603) are movably arranged in the guide groove (602), and the limiting guide wheels (603) are arranged on the lifting platform (401) through rotating shafts and used for limiting and guiding the lifting platform (401).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321838326.2U CN220272451U (en) | 2023-07-13 | 2023-07-13 | Wafer transmission standard mechanical interface loading device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321838326.2U CN220272451U (en) | 2023-07-13 | 2023-07-13 | Wafer transmission standard mechanical interface loading device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220272451U true CN220272451U (en) | 2023-12-29 |
Family
ID=89298372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321838326.2U Active CN220272451U (en) | 2023-07-13 | 2023-07-13 | Wafer transmission standard mechanical interface loading device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220272451U (en) |
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2023
- 2023-07-13 CN CN202321838326.2U patent/CN220272451U/en active Active
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