JPH0522072A - Tuning fork type torsional crystal oscillator - Google Patents
Tuning fork type torsional crystal oscillatorInfo
- Publication number
- JPH0522072A JPH0522072A JP17014991A JP17014991A JPH0522072A JP H0522072 A JPH0522072 A JP H0522072A JP 17014991 A JP17014991 A JP 17014991A JP 17014991 A JP17014991 A JP 17014991A JP H0522072 A JPH0522072 A JP H0522072A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- tuning fork
- excitation
- electrodes
- excitation electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は複数の振動部と支持部を
化学的エッチング法によって、一体に形成した音叉形状
捩り水晶振動子の励振電極構成に関する。特に、小型
化、高精度化、耐衝撃性、低廉化の要求の強い腕時計、
ポケットベル、ICカードや移動無線等の基準信号源と
して最適な音叉型捩り水晶振動子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an excitation electrode structure of a tuning fork-shaped torsional quartz crystal resonator in which a plurality of vibrating portions and a supporting portion are integrally formed by a chemical etching method. In particular, wristwatches that are highly demanded for downsizing, high precision, impact resistance, and low cost,
The present invention relates to a tuning fork type twisted crystal oscillator which is most suitable as a reference signal source for pagers, IC cards, mobile radios and the like.
【0002】[0002]
【従来の技術】従来の音叉形状水晶振動子では、機械加
工による振動子形成法が採られていたために、励振電極
は振動腕の上下両面に配置されていた。しかも、上面と
下面の電極は平行電界が印加されるように分割されてい
た。2. Description of the Related Art In a conventional tuning-fork crystal oscillator, since the oscillator forming method by machining is adopted, the excitation electrodes are arranged on both upper and lower surfaces of the vibrating arm. Moreover, the upper and lower electrodes were divided so that a parallel electric field was applied.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、従来の
励振電極配置法では、電界の有効成分が平行電界によっ
てもたらされるために、電界効率が悪く、振動子の等価
直列抵抗R1 が大きくなり、Q値の低下及び発振回路で
の消費電流が多いなどの極めて重要な課題が残されてい
た。このようなことからR1 をより小さくできる、電界
効率に優れた新しい励振電極配置法が所望されていた。However, in the conventional excitation electrode arrangement method, since the effective component of the electric field is brought by the parallel electric field, the electric field efficiency is poor and the equivalent series resistance R 1 of the vibrator becomes large, so that Q There remains a very important problem such as a decrease in the value and a large current consumption in the oscillation circuit. Therefore, a new method of arranging the excitation electrodes, which has a smaller electric field efficiency and can make R 1 smaller, has been desired.
【0004】[0004]
【課題を解決するための手段】本発明は以下の方法で従
来の課題を解決するものである。すなわち、複数の振動
腕を有し、振動部と支持部を化学的エッチング法にて一
体に形成された音叉形状捩り水晶振動子で、該振動部の
エッチング面には対向する電極あるいは対向する電極と
隣接する電極が互いに異極となる励振電極を配置するこ
とにより課題を解決している。The present invention solves the conventional problems by the following methods. That is, a tuning-fork-shaped twisted quartz crystal oscillator having a plurality of vibrating arms and a vibrating portion and a supporting portion formed integrally by a chemical etching method, and an electrode facing or facing an etching surface of the vibrating portion. The problem is solved by arranging an excitation electrode in which adjacent electrodes have different polarities.
【0005】[0005]
【作用】このように、励振電極を配置することにより対
向する電極の電界成分は垂直となるので、電界効率が良
くなり、その結果、等価直列抵抗R1 の小さい、Q値の
高い捩り水晶振動子が得られる。By arranging the excitation electrodes in this way, the electric field components of the opposing electrodes become vertical, so that the electric field efficiency is improved, and as a result, the twisted quartz vibration with a small equivalent series resistance R 1 and a high Q value I have a child.
【0006】[0006]
【実施例】次に、本発明を実施例に基づいて具体的に述
べる。図1は、本発明の音叉型捩り水晶振動子とその励
振電極配置の一実施例を示す概観図(a)とxz面の断
面図(b)である。振動子1は、励振電極4、5、6、
7、8、9、10、11と接続電極12、13を有する
振動部2と端子電極14、15を有する支持部3から構
成されている。特に、励振電極4と6、5と7、8と1
0、9と11は振動部2に対して対向するように配置さ
れている。一方、励振電極4と5、6と7、8と9、1
0と11は隣接するように配置されている。本発明の音
叉型捩り振動子は化学的エッチング法によって形成され
る。そして、一方の音叉腕である振動部2の側面のエッ
チング面に配置された励振電極4は接続電極12を介し
て励振電極7に接続されている。EXAMPLES Next, the present invention will be specifically described based on Examples. 1A and 1B are a schematic view (a) and a cross-sectional view (b) of the xz plane showing an embodiment of the tuning fork type twisted crystal oscillator of the present invention and its excitation electrode arrangement. The vibrator 1 includes excitation electrodes 4, 5, 6,
It is composed of a vibrating portion 2 having 7, 8, 9, 10, 11 and connecting electrodes 12, 13 and a supporting portion 3 having terminal electrodes 14, 15. In particular, the excitation electrodes 4 and 6, 5 and 7, 8 and 1
0, 9 and 11 are arranged so as to face the vibrating portion 2. On the other hand, the excitation electrodes 4 and 5, 6 and 7, 8 and 9, 1
0 and 11 are arranged so as to be adjacent to each other. The tuning fork type torsion oscillator of the present invention is formed by a chemical etching method. The excitation electrode 4 arranged on the etching surface of the side surface of the vibrating portion 2 which is one tuning fork arm is connected to the excitation electrode 7 via the connection electrode 12.
【0007】更に、励振電極7は振動子1の下面(図示
されてない)に配置された接続電極を介して、励振電極
9、10へと接続され、最後に端子電極15に接続され
る。全く同様に異極となるエッチング面に配置された励
振電極11は接続電極13を介して励振電極8に接続さ
れている。さらに、励振電極8は振動子1の上面に配置
された電極を介して端子電極14に接続されると同時に
更に励振電極5にも接続される。それ故、端子電極14
と15により2端子電極を形成している。この両端子間
に交番電圧を印加することにより、容易に捩り振動を引
き起こすことができる。Further, the excitation electrode 7 is connected to the excitation electrodes 9 and 10 and finally to the terminal electrode 15 via a connection electrode arranged on the lower surface (not shown) of the vibrator 1. Exciting electrodes 11 arranged on the etching surfaces having opposite polarities are connected to exciting electrodes 8 via connecting electrodes 13. Further, the excitation electrode 8 is connected to the terminal electrode 14 via the electrode arranged on the upper surface of the vibrator 1, and at the same time, further connected to the excitation electrode 5. Therefore, the terminal electrode 14
And 15 form a two-terminal electrode. By applying an alternating voltage between the two terminals, torsional vibration can be easily caused.
【0008】このように音叉形状で励振電極を構成する
ことにより、等価直列抵抗R1 の低減が図れるととも
に、振動エネルギーを音叉腕の振動部内部に閉じ込める
ことができるので、振動漏れのない優れた音叉型捩り水
晶振動子が得られる。尚、本発明の実施例では2本の腕
を有する音叉形状について述べたが、3本以上の腕を有
する音叉形状でも、隣接する電極を異極に配置すること
によって、本発明の目的を達成できることは言うまでも
ない。又、本実施例では音叉腕に対して対向電極4個の
場合について説明したが、少なくとも1個あれば、本発
明の目的を達成することができる。By constructing the excitation electrode in the tuning fork shape as described above, the equivalent series resistance R 1 can be reduced and the vibration energy can be confined inside the vibrating portion of the tuning fork arm. A tuning fork type twisted crystal oscillator is obtained. Although the tuning fork shape having two arms has been described in the embodiment of the present invention, even in the tuning fork shape having three or more arms, the object of the present invention can be achieved by disposing the adjacent electrodes in different polarities. It goes without saying that you can do it. Further, in the present embodiment, the case where four counter electrodes are provided for the tuning fork arm has been described, but the object of the present invention can be achieved if at least one counter electrode is provided.
【0009】[0009]
【発明の効果】以上述べたように、本発明は音叉形状で
新しい励振電極構成を持つ音叉型捩り水晶振動子を提案
することにより、次の著しい効果を有する。 (1)音叉振動部側面のエッチング面に音叉腕に対して
対向となる励振電極及び隣接する励振電極が異極となる
ように、励振電極を配置しているので、電界効率に優
れ、等価直列抵抗R1 が小さく、Q値が高くなる。 (2)本振動子はエッチング法によって、一体に形成さ
れるので、小型化、薄型化ができる。 (3)片側でリード線等にマウントするので、製造が容
易、安価にできる。 (4)音叉形状であるので、振動漏れのない捩り水晶振
動子が得られる。それ故、マウント部でリード線等に支
持、固定してもR1 の小さい振動子が得られる。As described above, the present invention has the following remarkable effects by proposing a tuning fork type twisted crystal oscillator having a tuning fork shape and a new excitation electrode configuration. (1) Since the excitation electrodes are arranged so that the excitation electrode facing the tuning fork arm and the adjacent excitation electrode have different polarities on the etching surface on the side surface of the tuning fork vibrating portion, excellent electric field efficiency and equivalent series The resistance R 1 is small and the Q value is high. (2) Since this oscillator is integrally formed by the etching method, it can be made compact and thin. (3) Since it is mounted on a lead wire or the like on one side, it can be manufactured easily and at low cost. (4) Since it has a tuning fork shape, it is possible to obtain a twisted quartz oscillator without vibration leakage. Therefore, a vibrator having a small R 1 can be obtained even if it is supported and fixed to the lead wire or the like by the mount portion.
【図1】本発明の音叉型捩り水晶振動子の励振電極配置
の一実施例の概観図(a)とxz面の断面図(b)であ
る。FIG. 1 is a schematic view (a) and a cross-sectional view (b) of an xz plane of an embodiment of an excitation electrode arrangement of a tuning fork type twisted crystal oscillator of the present invention.
1 振動子 2 振動部 3 支持部 4〜11 励振電極 12、13 接続電極 14、15 端子電極 x 電気軸 y 機械軸 z 光軸 DESCRIPTION OF SYMBOLS 1 vibrator 2 vibrating part 3 support part 4-11 excitation electrode 12, 13 connection electrode 14, 15 terminal electrode x electrical axis y mechanical axis z optical axis
Claims (1)
化学的エッチング法にて一体に形成された音叉形状捩り
水晶振動子で、該振動部のエッチング面には対向する電
極あるいは対向する電極と隣接する電極が互いに異極と
なる励振電極が配置されていることを特徴とする音叉型
捩り水晶振動子。Claim: What is claimed is: 1. A tuning fork-shaped twisted quartz resonator having a plurality of vibrating arms, wherein a vibrating portion and a supporting portion are integrally formed by a chemical etching method. A tuning-fork type twisted quartz crystal resonator, in which an opposing electrode or an exciting electrode in which an opposing electrode and an electrode adjacent to the opposing electrode have different polarities is arranged.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17014991A JPH0522072A (en) | 1991-07-10 | 1991-07-10 | Tuning fork type torsional crystal oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17014991A JPH0522072A (en) | 1991-07-10 | 1991-07-10 | Tuning fork type torsional crystal oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0522072A true JPH0522072A (en) | 1993-01-29 |
Family
ID=15899587
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17014991A Pending JPH0522072A (en) | 1991-07-10 | 1991-07-10 | Tuning fork type torsional crystal oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0522072A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6951435B1 (en) | 2002-08-02 | 2005-10-04 | Global Trade Enterprises, Ltd. | Method and apparatus for forming new and retrofit detectable warning surfaces |
JP2013143779A (en) * | 2012-01-09 | 2013-07-22 | Micro Crystal Ag | Compact piezoelectric tuning-fork resonator |
-
1991
- 1991-07-10 JP JP17014991A patent/JPH0522072A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6951435B1 (en) | 2002-08-02 | 2005-10-04 | Global Trade Enterprises, Ltd. | Method and apparatus for forming new and retrofit detectable warning surfaces |
JP2013143779A (en) * | 2012-01-09 | 2013-07-22 | Micro Crystal Ag | Compact piezoelectric tuning-fork resonator |
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