JPH05215633A - Device and method for monitoring vacuum device - Google Patents

Abstract

PURPOSE:To automatically measure the vacuum pressure in a vacuum chamber and plot the relation between the time and vacuum pressure in a graph by periodically collecting the vacuum pressure data of a vacuum gauge by connecting a personal computer with the vacuum gauge and storing the vacuum pressure data in connection with the time. CONSTITUTION:The vacuum pressure data of a vacuum gauge (ion gauge controller) 3 of a vacuum device are collected, preserved, and analyzed by means of a personal computer 4. The computer 4 is provided with a display 4a, keyboard 4b, built-in hard disk 4c, built-in floppy disk 4d, and external floppy disk 4e. Since the computer 4 is connected with the gauge 3, the vacuum pressure data of the gauge 3 are periodically collected and the vacuum pressure data are stored on the disks 4d and 4e together with their collecting time and, at the same time, plotted in a graph on the display 4a. In addition, the vacuum pressure data are periodically collected from the commencement of exhaust and the use of the vacuum is discriminated as 'good' when the vacuum pressure is lower than a preset value after a prescribed period has elapsed or as 'not good' when the pressure is higher than the preset value.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum device monitoring apparatus and method. Vacuum equipment is indispensable for film forming equipment, etching equipment, ion implantation equipment, etc. related to semiconductor device manufacturing. To prevent outgassing in the vacuum chamber, the jigs are replaced and renewed regularly to perform cleaning. In addition, if a failure occurs in the vacuum equipment, it will be repaired. At this time, the vacuum device is opened to the atmosphere.

In order to start up the vacuum apparatus thereafter, it is necessary to confirm the vacuum exhaust characteristic and the leak (and degassing) characteristic to guarantee the quality of the vacuum chamber. Also, it is necessary to confirm the vacuum exhaust characteristic and the leak (and degassing) characteristic when the semiconductor is processed by flowing the process gas and then returned to the vacuum.

[0003]

2. Description of the Related Art FIG. 5 is a conceptual diagram of a vacuum apparatus. 1 is a vacuum chamber, 2a is a thermocouple, 2b is an ion gauge, 3 is an ion gauge controller, 7a is a low vacuum pump, 7b is a high vacuum pump, and 8a. Is the main valve, 8b is the foreline valve,
8c represents a rough valve.

The thermocouple 2a is a vacuum gauge. A Pirani gauge can be used instead of the thermocouple. Ion gauge 2b
The ion gauge controller 3 is a vacuum gauge, which is a unit as a vacuum measuring device.

At the initial stage of evacuation of the vacuum chamber 1, the main valve 8a and the rough valve 8c are opened to evacuate to about 10 ^-3 Torr. At this time, measure with a vacuum gauge 2a (thermocouple or Pirani gauge).

Then, the rough valve 8c is closed, the foreline valve 8b is opened, and the high vacuum pump 7b is activated to perform high vacuum exhaust. Vacuum pressure lower than 10 ^-3 Torr is ion gauge
Measure with 2b. The ion gauge controller 3 can output an output signal in either an analog display or a digital display for the vacuum pressure.

In order to guarantee the vacuum performance of the vacuum chamber, the following two checks are usually always performed before use. See evacuation characteristics. That is, the time from when the main valve 8a is opened and exhausted until the target vacuum pressure is reached is examined. Alternatively, set the evacuation time and check whether the target vacuum pressure is reached during that time.

The leak characteristics of the vacuum chamber and the presence or absence of degassing in the vacuum chamber are examined. That is, after reaching the target vacuum pressure, the main valve 8a is closed to put the vacuum chamber in a clamped state, and it is checked whether the vacuum pressure rises with time, and whether the vacuum pressure is kept lower than a predetermined value after a predetermined time. Check whether or not.

FIG. 6 is a diagram showing the exhaust characteristic and the leak characteristic of the vacuum device. The leak characteristics also include fluctuations due to degassing. The logarithm of time is shown on the horizontal axis (X axis), and the logarithm of vacuum pressure is shown on the vertical axis (Y axis). With this display, it is easy to understand the trends (trends) of exhaust and leakage of the vacuum equipment from the slope of the curve. Exhaust characteristics often show the slope of the curve if measured for up to 24 hours, and leak characteristics often show the slope of the curve after about 10 minutes.

When collecting data, the operator periodically records the vacuum pressure displayed on the ion gauge controller, and creates a log-log graph as shown in FIG. 6 from the result. Then, for example, the vacuum pressure after evacuation for 20 hours and the vacuum pressure after leaking for 10 minutes are compared with a predetermined standard value (set with reference to the value obtained at the first start-up of the vacuum device), and further curve Whether the vacuum device is used or not is judged from the inclination of.

Normally, the measurement requires 15 hours or more for the exhaust characteristic and about 10 minutes for the leak characteristic, but it is troublesome to make a log-log graph and compare it with the standard value. It requires a good judgment.

[0012]

SUMMARY OF THE INVENTION In view of the above problems, it is an object of the present invention to provide a monitoring device capable of automatically measuring the vacuum pressure in a vacuum chamber and displaying a graph of the relationship between time and vacuum pressure.

Another object of the present invention is to provide a method of judging whether or not the vacuum device is used by using the monitoring device. Also,
An object of the present invention is to provide a monitoring device that can automatically measure the vacuum pressure in a vacuum chamber and compare the reached value of the vacuum pressure with respect to time with a predetermined value to judge whether or not the vacuum device is used.

[0014]

FIG. 1 is a diagram for explaining a monitoring device of the present invention, and FIG. 2 is a diagram showing a screen display configuration of the monitoring device.

The above-mentioned problem is to connect to the vacuum gauge 3 of the vacuum device, periodically collect the data of the vacuum pressure, and to store the data of the time and the vacuum pressure in the storage device, and the data read from the storage device. And a means for displaying the relation between time and vacuum pressure in a graph.

Also, using this vacuum device monitoring device,
Data of the vacuum pressure is periodically collected from the start of evacuation of the vacuum device, and when the vacuum pressure after a predetermined time is lower than the predetermined vacuum pressure, it is judged that the use of the vacuum device is appropriate, and the predetermined vacuum pressure is determined. When the pressure is higher than the pressure, the method of monitoring the vacuum device determines that the use of the vacuum device is denied.

Further, using this vacuum device monitoring device,
After evacuation of the vacuum device until the vacuum pressure becomes equal to or lower than the first predetermined vacuum pressure, the evacuation is stopped, data of the vacuum pressure is periodically collected after that, and the second predetermined vacuum pressure after the predetermined time has elapsed. When the vacuum pressure is lower than the vacuum pressure, it is determined that the use of the vacuum device is appropriate, and when the pressure is higher than the second predetermined vacuum pressure, the use of the vacuum device is determined to be non-effective.

Further, means for connecting to the vacuum gauge 3 of the vacuum device to periodically collect the data of the vacuum pressure and storing the time and the data of the vacuum pressure in the storage device, and the vacuum pressure after a predetermined time are set in advance. This is solved by a monitoring device for a vacuum device having a means for comparing with a vacuum pressure and a means for judging whether or not the vacuum device is used based on the result of the comparison.

[0019]

The monitoring device for a vacuum device according to the present invention displays a graph of the relationship between time and vacuum pressure, and means for periodically collecting vacuum pressure data and storing the time and vacuum pressure data in a storage device. By using this monitoring device, it is possible to automatically monitor the vacuum pressure of the vacuum device without human intervention.

Further, by using the monitoring device for the vacuum device, it is possible to easily judge whether the vacuum device is used or not. Further, the vacuum device monitoring device of the present invention comprises means for comparing the value of the vacuum pressure after a predetermined time with a predetermined value of the vacuum pressure, and means for judging whether the vacuum device is used or not based on the comparison result. With the above, it is possible to automatically determine whether or not the vacuum device is used, and it is possible to avoid individual measurement errors without requiring individual experience.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram for explaining a monitoring device of the present invention. This monitoring device collects and stores the vacuum pressure data of the vacuum gauge (ion gauge controller) 3 of the vacuum device,
An interface from the ion gauge controller 3 for analysis, such as RS232C board (6a)
Also, the vacuum pressure data is collected in the personal computer 4 through the RS232C cable (6b), the collected data is saved, and the data analysis is also performed.

The personal computer 4 is, for example, a laptop personal computer, and has a display 4a, a keyboard 4b, a built-in hard disk (85Mb) 4c, a built-in floppy disk (1.2Mb) 4d, and an external floppy disk 4e.
have. This laptop personal computer is connected to the printer 5 by a printer cable 5a.

By extending the communication line of RS232C and connecting it to, for example, 50 ion gauge controllers, it is possible to monitor 50 vacuum devices in a multiple manner. FIG. 2 is a diagram showing a screen display configuration of the monitoring device.

When the power of the laptop personal computer is turned on, a menu screen appears. In the menu, for example,
There are "ultimate vacuum", "pressure rise", "readout graph", "ultimate vacuum graph", "arrival time graph", and "data backup".

"Ultimate vacuum" and "Pressure increase" are menus used when measuring the temporal change of the vacuum pressure of the vacuum device. "Achieved vacuum" is used to collect the data for knowing the exhaust characteristics of the vacuum equipment and save it.
Follow the instructions for "Parameter input", "Measurement", and "Data storage".

The "pressure increase" is used when collecting and storing the data for knowing the leak characteristic (and degassing) of the vacuum device, and the instruction of "parameter input""measurement""datastorage". Follow the procedure below.

The "arrival vacuum graph", "arrival time graph", and "readout graph" are menus used when analyzing the measurement results. The ultimate vacuum graph is the ultimate vacuum
Or it is used when displaying the transition of vacuum pressure up to a specific time as a graph based on the data of "pressure rise" and saving it. "File number input""Graphdisplay"
Follow the instructions in "Save graph".

The "arrival time graph" is used to display the time transition of the vacuum pressure until it reaches a specific vacuum pressure in the form of a graph based on the data of "the ultimate vacuum" or "the pressure rise" and save it. , Follow the instructions of “File number input” “Graph display” “Save graph”.

The "read-out graph" is used when superimposing two "arrival vacuum graphs" or "arrival time graphs" to see the time transition of the performance of the vacuum device. "File number input""Graphdisplay" Follow the instructions in "Save graph".

The "data backup" is used when data in the storage device is transferred to another storage device, and is operated according to the instructions of "input file number" and "floppy backup".

FIG. 3 is an example of a flow chart of measurement, and shows "ultimate vacuum" as an example. Select "Ultimate vacuum" on the menu screen, and then use "Enter gauge number" to enter the number of the ion gauge controller of the vacuum device to be measured. Next, a file name is determined and "file name input" is performed.

Next, "measurement time input" is performed, and "time interval input" is performed. When observing the vacuum exhaust characteristic, the measurement time is set to, for example, 24 hours, and the time interval is set to 1 minute, 3 minutes, and 5 minutes in units of 1 minute, for example.

When the "start switch?" Is YES, the measurement is started. The start switch is linked with the opening of the main valve 8a of the vacuum device. When 24 hours or more have passed, the answer is “time end?” YES, and then “data storage” is performed.

If "time end?" NO, "stop key?" YES, return to "attainment vacuum", enter the number of the ion gauge controller of the next vacuum device to, and perform the same operation as above. To do. In this way, if the vacuum devices are operated one after another, multiple monitoring of a plurality of vacuum devices becomes possible. The number of vacuum devices capable of multi-monitoring is 50, for example.

Leakage characteristics (and degassing characteristics) of vacuum equipment
To see, select "Pressure rise" and perform the measurement according to the same flow chart as "Ultimate vacuum" above. However, "Measurement time input" is specified as about 20 minutes, and the start switch is the main valve 8a of the vacuum device.
It is linked with the closing of.

FIG. 4 is an example of a flow chart for analysis, and shows an example of the "attainment vacuum graph". Select "Ultimate vacuum graph" on the menu screen, then display "File screen" with "Read file?" YES, and enter "File number" that has already completed "Ultimate vacuum" measurement. In the "graph display", as shown in FIG. 6, the exhaust characteristic is displayed with the logarithm of time as the horizontal axis (X axis) and the logarithm of vacuum pressure as the vertical axis (Y axis).

"Delete graph" NO, "Save file" Y
Save the file as ES and return to the ultimate vacuum graph. The time and vacuum pressure values can also be displayed in a list. However, the slope of the curve can be seen at a glance in the graph display using logarithm. In addition, it is useful when examining the secular change in the performance of the vacuum equipment, and if you select the "readout graph" menu and display the two exhaust characteristics in a superimposed manner, you can easily grasp the trend.

In addition, on the menu screen, "Attainment vacuum graph"
Select, and then "Read file?"
It is also possible to display the graph as shown in the leak characteristic of FIG. 6 by inputting the file number of.

By analyzing the data of "attainment vacuum" showing the exhaust characteristic, if the vacuum pressure after 20 hours is a predetermined standard value, for example, 5 × 10 ^-7 Torr or less, use of this vacuum device It is determined to be good, otherwise it is determined to be no.

Further, by analyzing the "pressure rise" data showing the leak characteristic (and the degassing characteristic), it is confirmed that the vacuum pressure after 10 minutes, for example, is a predetermined standard value, for example, 5 × 10 ^-5 Torr or less. For example, it is determined that the use of this vacuum device is correct, and otherwise it is determined that it is not.

Exhaust characteristics and leak characteristics (and degassing characteristics)
Only when both of the above are acceptable, the use of the vacuum device should be permitted. The standard value of the vacuum pressure after 20 hours to guarantee the exhaust characteristic or the standard value of the vacuum pressure after 10 minutes to guarantee the leak characteristic (and degassing characteristic) is stored in advance in personal computer 4. , Exhaust characteristics or leak characteristics (and degassing characteristics) of actual vacuum equipment
After measuring, the personal computer 4 may compare the measured value with the standard value to judge whether the vacuum device is used or not.

Further, in the case of no, an alarm may be generated or the vacuum device may be interlocked.

[0043]

As described above, according to the present invention,
It is possible to automatically measure the exhaust characteristics and leak characteristics of the vacuum equipment, which can reduce the man-hours of the operator. Further, it is possible to avoid erroneous recognition by workers and measurement error between workers.

According to the present invention, the vacuum device can be reliably monitored with reference to the standard value, and the reliability of the vacuum device can be ensured. In addition, it can be easily compared with past data, the trend of the vacuum device over time can be known, and reliable management becomes possible.

[Brief description of drawings]

FIG. 1 is a diagram for explaining a monitoring device of the present invention.

FIG. 2 is a diagram showing a screen display configuration of a monitoring device.

FIG. 3 is an example of a measurement flowchart.

FIG. 4 is an example of a flowchart of analysis.

FIG. 5 is a conceptual diagram of a vacuum device.

FIG. 6 is a diagram showing an exhaust characteristic and a leak characteristic of a vacuum device.

[Explanation of symbols]

 1 is a vacuum chamber 2a is a vacuum gauge, thermocouple 2b is a vacuum gauge, ion gauge 3 is a vacuum gauge, ion gauge controller 4 is a personal computer 4a is a display 4b is a keyboard 4c is an internal hard disk 4d is an internal floppy Disk 4e is external floppy disk 5 Printer 5a is printer cable 6 is communication cable RS232C cable 6a is interface RS232C board 7a is low vacuum pump 7b is high vacuum pump 8a is main valve 8b is foreline valve 8c is a rough valve

Claims (4)

[Claims] 1. A means for connecting to a vacuum gauge (3) of a vacuum device, periodically collecting vacuum pressure data, and storing time and vacuum pressure data in a storage device, and reading the data from the storage device. And a means for displaying the relationship between time and vacuum pressure in a graph. 2. The vacuum device monitoring device according to claim 1, wherein vacuum pressure data is periodically collected from the start of evacuation of the vacuum device, and the vacuum pressure after a predetermined time is less than a predetermined vacuum pressure. A method of monitoring a vacuum device, wherein when it is low, it is determined that the vacuum device is used properly, and when it is higher than the predetermined vacuum pressure, it is determined that the vacuum device is not used. 3. The vacuum device monitoring device according to claim 1, wherein the vacuum device is evacuated until the vacuum pressure becomes equal to or lower than a predetermined first vacuum pressure, and then the evacuation is stopped, and then the vacuum pressure is periodically applied. Data is collected, and when the vacuum pressure after a predetermined time is lower than a predetermined second vacuum pressure, it is judged that the use of the vacuum device is appropriate, and when the vacuum pressure is higher than the predetermined second vacuum pressure, A method of monitoring a vacuum device, characterized by determining whether or not the vacuum device is used. 4. A means for connecting to a vacuum gauge (3) of a vacuum device, periodically collecting vacuum pressure data, storing time and vacuum pressure data in a storage device, and previously measuring the vacuum pressure after a predetermined time. A monitoring device for a vacuum device, comprising: a device for comparing with a predetermined vacuum pressure; and a device for judging whether or not the vacuum device has been used based on a result of the comparison.