JPH052102U - Double-sided quartz glass lightweight mirror - Google Patents
Double-sided quartz glass lightweight mirrorInfo
- Publication number
- JPH052102U JPH052102U JP057193U JP5719391U JPH052102U JP H052102 U JPH052102 U JP H052102U JP 057193 U JP057193 U JP 057193U JP 5719391 U JP5719391 U JP 5719391U JP H052102 U JPH052102 U JP H052102U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- quartz glass
- rim
- rim portion
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Abstract
(57)【要約】
【目的】 軽量で取扱が容易、かつ両面使用が可能で、
また各部屋の雰囲気が均一となり、大型製品においても
歪が生ぜず、時間的安定性、寸法安定性を向上する。
【構成】 表面鏡2、リム部4、裏面鏡3及び外周リン
グ6より構成され、上下の鏡面を支えるリム部4の断面
形状が円または多角形のハニカム構造で、かつ各リム面
に導通孔5を設けてなる両面使用石英ガラス製軽量ミラ
ー。
(57) [Summary] [Purpose] Lightweight, easy to handle, and can be used on both sides.
In addition, the atmosphere in each room is uniform, distortion does not occur even in large products, and temporal stability and dimensional stability are improved. [Structure] A rim portion 4 composed of a front surface mirror 2, a rim portion 4, a back surface mirror 3 and an outer peripheral ring 6 has a circular or polygonal cross-sectional shape of the rim portion 4 supporting the upper and lower mirror surfaces, and each rim surface has a through hole. A double-sided quartz glass lightweight mirror that is equipped with 5.
Description
【0001】[0001]
本考案は、石英ガラス製軽量ミラー、さらに詳しくは、両面使用が可能で、レ ーザー核融合、天文学用等に使用できる大口径ミラー、大型プリズムに関する。 The present invention is a lightweight mirror made of quartz glass, and more specifically, it can be used on both sides. Lasers, large-diameter mirrors and large prisms that can be used for astronomy.
【0002】[0002]
従来より、石英ガラス製のミラーとしては、充実式の両面使用タイプや、石英 ガラスの細胞状又はハチの巣状の保持支持台に相互に溶接された石英ガラス製の 鏡板を有し、鏡面の連結面から出発して多数の開放された導溝が保持台を貫通し てなる軽量反射鏡(特開昭56−17302号公報)や、石英ガラスの前後板の 間にこれらの板に動かないように連結された石英ガラス製の支持格子を有し、後 板のぞれぞれの部屋に換気孔を設けた軽量鏡(特開昭57−6802号公報:図 6参照)、さらに図7に示すような片面軽量鏡が開示されている(特開昭61− 223702号公報)。 Conventionally, as a mirror made of quartz glass, a full-fledged double-sided type, quartz Made of fused silica glass, welded to each other on a glass cellular or honeycomb holding support It has an end plate and a number of open guide grooves penetrate the holder starting from the connecting surface of the mirror surface. Of a light reflecting mirror (Japanese Patent Laid-Open No. 56-17302) and front and rear plates of quartz glass. Having a support grid made of quartz glass fixedly connected to these plates between A lightweight mirror with ventilation holes in each room (Japanese Patent Laid-Open No. 57-6802) 6), and a single-sided lightweight mirror as shown in FIG. 7 is disclosed (JP-A-61-161). 223702 publication).
【0003】[0003]
しかし、充実式の場合、両面が使用できるが石英ガラスで全体が充実されてい るため重量があり、取扱が不便となる欠点がある。 However, in the case of the full type, both sides can be used, but the whole is full of quartz glass. Therefore, there is a drawback that it is heavy and inconvenient to handle.
【0004】 このため、取扱に便利な前記軽量鏡が使用されるようになってきたが、これら は図7に示すように裏面が開放されていたり、換気孔を設けていたりして(図6 )、いずれも片面しか使用できず裏面からのモニター等が行なえなかった。[0004] For this reason, the lightweight mirrors, which are convenient to handle, have come to be used. As shown in Fig. 7, the back side is open or has ventilation holes (Fig. 6 ), All of them could only be used on one side and could not monitor from the back side.
【0005】 また、例えば、図6や図7に示すように支持格子により各部屋が独立されてい ると各部屋ごとに温度差や雰囲気が異なり石英ガラス製のものは、熱膨張率が小 さいとは言え、部屋毎の微妙な温度差により熱的な面の歪が生じやすくなり、熱 伝導、熱放散が小さいため温度に対して不安定で、さらに内部応力の発生に伴い 要求される高度な表面平滑度が悪化し精密な測定ができなくなる。また、石英ガ ラスは熱伝導率が悪いので、幅が厚くなるほど歪が生じやすくなる欠点があった 。[0005] Further, for example, as shown in FIG. 6 and FIG. 7, each room is independent by a support grid. Then, the temperature difference and atmosphere are different in each room, and the quartz glass made has a small coefficient of thermal expansion. However, due to the subtle temperature differences between rooms, thermal distortion is likely to occur and It is unstable with respect to temperature due to small conduction and heat dissipation. The required high degree of surface smoothness deteriorates, making precise measurement impossible. In addition, quartz Lath has poor thermal conductivity, so the thicker it is, the more easily distortion occurs. .
【0006】 このことは特に製品が大型になればなるほど顕著で、大型製品ほど誤差が大き くなり、時間的安定性、周囲温度の変化に対する形状・寸法安定性を厳密に要求 される大型鏡での精度の高いミラーの開発が望まれていた。[0006] This is especially noticeable as the product size increases, and the error increases as the product size increases. Strictly demanding stability over time, shape and dimensional stability against changes in ambient temperature It has been desired to develop a highly accurate mirror for the large mirrors used.
【0007】 本考案は、軽量で取扱が容易、かつ両面使用が可能で、また各部屋の雰囲気が 均一となり、大型製品においても歪の生じない軽量鏡を提供することを目的とす る。[0007] The present invention is lightweight, easy to handle, can be used on both sides, and the atmosphere of each room is The objective is to provide a lightweight mirror that is uniform and does not cause distortion even in large products. It
【0008】[0008]
そこで、本考案者らは、前記目的を解決するため、鋭意研究を重ねた結果、上 下の鏡面を支えるリム部分の断面形状を円または多角形のハニカム構造にし、か つ各リム面に導通孔を設ければ前記問題点が解決できるとの知見を得て本考案を 完成した。 Therefore, the inventors of the present invention have conducted extensive studies to solve the above-mentioned object, and as a result, The rim supporting the lower mirror surface has a circular or polygonal honeycomb structure in cross section, Based on the knowledge that the above problems can be solved by providing a through hole on each rim surface, the present invention was realized. completed.
【0009】 以下、本考案の一実施態様を図面を用いて説明する。 図1は、本考案の両面使用石英ガラス製軽量ミラーの上下ミラー部の一部を切 り欠いて示した斜視図である。また、図2は、その平面図、図3は図2のA−A 線による断面図である。[0009] An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic view of a part of the upper and lower mirror parts of the quartz glass lightweight mirror of the present invention used for both sides. It is the perspective view which lacked and was shown. 2 is a plan view thereof, and FIG. 3 is AA of FIG. It is sectional drawing by a line.
【0010】 図1に示す本考案の両面使用石英ガラス製軽量ミラー1は、表面板(表面鏡) 2、リム部4、裏面部(裏面鏡)3及び外周リング6より構成されている。[0010] The light-weight mirror 1 made of quartz glass of the present invention shown in FIG. 1 is a surface plate (surface mirror). 2, a rim portion 4, a back surface portion (back surface mirror) 3, and an outer peripheral ring 6.
【0011】 リム部4は、上下の石英ガラス製ミラーを支える支柱で、断面形状を円または 多角形のハニカム構造にすることによって、平面度、球面度に歪が発生しずらく 、かつ強度的に安定できる。また、図面では、リム部の断面形状を六角形とした が、適宜円柱または多角柱とすることもできる。[0011] The rim portion 4 is a pillar that supports the upper and lower quartz glass mirrors, and has a circular cross section or a cross section. By using a polygonal honeycomb structure, distortion in flatness and sphericity is less likely to occur. And stable in strength. In addition, in the drawing, the cross-sectional shape of the rim is hexagonal. However, a cylinder or a polygonal prism can be used as appropriate.
【0012】 該リム部4には、各面の任意の箇所に導通孔5が設けてある。導通孔5を設け ることにより、リムで仕切られた各部屋においても温度条件等の雰囲気が均一に 保たれ、部屋毎に雰囲気が異なることによって生ずる歪を防止することができ、 また鏡面の両面使用が可能になる。[0012] The rim portion 4 is provided with a conduction hole 5 at an arbitrary position on each surface. Provide a through hole 5 By doing so, the atmosphere such as temperature conditions will be uniform even in each room partitioned by rims. It can be maintained and prevent distortion caused by different atmospheres in each room, Also, it becomes possible to use both sides of the mirror surface.
【0013】 また、導通孔の位置は、特に定められないが各リム面の中央部に設けるのが各 部屋の雰囲気を調整する上で好ましい。[0013] The position of the through hole is not particularly specified, but it is preferable to provide it at the center of each rim surface. Good for adjusting the atmosphere in the room.
【0014】 リム部4は、当初より一体成形することによっても、また図4に示す中空部を 有する六角柱を減圧成形し、各面に導通孔を設けた後、六角柱を連設組み合わせ ハニカム構造とすることによって、または図5に示すような2つの六角柱を平板 によって連結したものを組み合わせ、図2に示すハニカム構造にすることもでき る。[0014] The rim portion 4 can be formed integrally from the beginning so that the hollow portion shown in FIG. After forming the hexagonal column that has the pressure reduction and forming the through hole on each surface, combine the hexagonal columns in series. A honeycomb structure or two hexagonal columns as shown in FIG. The honeycomb structure shown in FIG. It
【0015】 また、リム部4には補強用の外周リング6を設ければ、外周部のクラックを防 止することができ、強度を強め、かつ取扱も容易になるが、外周リングにも導通 孔を設けることが好ましい。[0015] Further, if the outer peripheral ring 6 for reinforcement is provided on the rim portion 4, cracks on the outer peripheral portion can be prevented. It can be stopped, strengthens strength and is easy to handle, but also conducts to the outer ring. It is preferable to provide holes.
【0016】 本考案の両面使用石英ガラス製軽量ミラーは、ハニカム構造のリム部または外 周リングに設置したリム部に上下板を接合することによって得られる。なお、リ ム部、上下の鏡面部の材質は、全て石英ガラスによることが好ましい。[0016] The double-sided quartz glass lightweight mirror of the present invention is used for the rim part or the outer part of the honeycomb structure. It is obtained by joining the upper and lower plates to the rim portion installed on the circumferential ring. In addition, It is preferable that the glass portion and the upper and lower mirror surface portions are all made of quartz glass.
【0017】 また本考案の両面使用石英ガラス製軽量ミラーは、両面使用が可能なため、両 面を平面または球面、片方を球面にして利用することができるが、球面にすると きはリムの長さを予め調整したり、またはリム部をハニカム構造体とした後、片 面を平面加工、片面を球面加工とした後、同じ曲率の上下板をリム部に接合し最 終的に精密な平面叉は球面に研磨加工して作成することができる。[0017] In addition, the double-sided quartz glass lightweight mirror of the present invention can be used on both sides. The surface can be used as a flat surface or a spherical surface and one surface as a spherical surface. After adjusting the rim length in advance, or after making the rim part a honeycomb structure, After the surface has been processed into a flat surface and one surface has been processed into a spherical surface, the upper and lower plates with the same curvature are joined to the rim section. Finally, it can be made by polishing a precise plane or spherical surface.
【0018】 両面使用石英ガラス製軽量ミラーの形状は、一般的にはリムと表面板、裏面板 の厚さ、及びリムの形状、大きさとの組み合わせにより、構造体の固有剛性や、 強度を保持する観点から決められ、用途に応じて適宜決定することができるが、 高さと直径との比が1:10〜1:15程度であることが自重変形、たわみを防 止する上で好ましい。[0018] The shape of the quartz glass lightweight mirror used on both sides is generally rim, front plate, and back plate. Depending on the thickness of the rim and the shape and size of the rim, the inherent rigidity of the structure, It is determined from the viewpoint of maintaining strength, and can be appropriately determined according to the application. A ratio of height to diameter of about 1:10 to 1:15 prevents self-weight deformation and bending. It is preferable for stopping.
【0019】[0019]
ミラー全体を充実式にした場合と比べ、リムによる中空方式で軽量化をはかり 、充実式に比べ重量で70%以上の減となり、クランプ及び取扱いが容易となり 作業性が向上する。 Compared to the case where the entire mirror is made full, the weight is reduced by the hollow method with the rim. The weight is reduced by 70% or more compared to the full type, making clamping and handling easier. Workability is improved.
【0020】 また、ハニカム構造により、構造が堅固なので、研磨、コーティング等の加工 時、使用時においても変形が生じない。[0020] Also, due to the honeycomb structure, the structure is solid, so processing such as polishing and coating Deformation does not occur even when used.
【0021】 さらに、リム部を断面形状が円または多角形のハニカム構造とし、かつ、各リ ム面に導通孔を設けることにより、製作時においては、ガス抜きができ、研磨時 においては、温度差、内圧が一定のため平面度が出しやすく、また、使用におい ても各リムによって仕切られる部屋の内外温度差が均一であるため、平面度及び 球面度に歪みが発生しない。このため、大型製品においても時間的安定性、周囲 温度の変化に対する形状・寸法安定性が飛躍的に向上し、しかも表裏面の2面が 使用出きるようになり、レーザー核融合、天文学用等に使用できる大口径ミラー や、プリズム型等の大型品に、また裏面から光のモニタリングを行なうことがで きる。また表裏面を異なる形状面とすることができ、例えば、表面を平面鏡、裏 面を球面鏡とするなどの多機能的使用も可能になる。[0021] Furthermore, the rim portion has a honeycomb structure with a circular or polygonal cross section, and By providing a through hole on the surface, it is possible to vent gas during production and during polishing. , The temperature difference and the internal pressure are constant, so flatness is easy to obtain. However, since the temperature difference inside and outside the room partitioned by each rim is uniform, the flatness and No distortion in sphere. Therefore, even for large products, time stability and ambient Dramatically improved shape and dimensional stability against temperature changes, and A large-diameter mirror that can be used for laser fusion, astronomy, etc. Also, it is possible to monitor the light from the back of a large product such as a prism type. Wear. Also, the front and back surfaces can have different shapes, for example, the front surface can be a flat mirror and the back surface can be Multi-functional use such as making the surface a spherical mirror is also possible.
【図1】本考案の両面使用石英ガラス製軽量ミラーの上
下ミラー部の一部を切り欠いて示した斜視図。FIG. 1 is a perspective view in which a part of upper and lower mirror parts of a lightweight mirror made of quartz glass for use in the present invention is cut away.
【図2】図1の平面図。FIG. 2 is a plan view of FIG.
【図3】図3は図2のA−A線による断面図。3 is a sectional view taken along the line AA of FIG.
【図4】リム部の一実施態様を示す斜視図。FIG. 4 is a perspective view showing an embodiment of a rim portion.
【図5】リム部の一実施態様を示す平面図。FIG. 5 is a plan view showing an embodiment of a rim portion.
【図6】従来の軽量鏡。FIG. 6 is a conventional lightweight mirror.
【図7】従来の軽量鏡。FIG. 7 is a conventional lightweight mirror.
1 両面使用石英ガラス製軽量ミラー 2 表面板(表面鏡) 3 裏面部(裏面鏡) 4 リム部 5 導通孔 6 外周リング 1 Double-sided quartz glass lightweight mirror 2 Surface plate (surface mirror) 3 Back side (back side mirror) 4 rim part 5 through holes 6 outer ring
Claims (2)
され、上下の鏡面を支えるリム部4の断面形状が円また
は多角形のハニカム構造で、かつ各リム面に導通孔5を
設けてなる両面使用石英ガラス製軽量ミラー。1. A honeycomb structure having a front surface mirror 2, a rim portion 4 and a back surface mirror 3, and a rim portion 4 supporting the upper and lower mirror surfaces has a circular or polygonal cross section, and a through hole 5 is formed on each rim surface. A double-sided quartz glass lightweight mirror provided.
リング6より構成され、上下の鏡面を支えるリム部4の
断面形状が円または多角形のハニカム構造で、かつ各リ
ム面に導通孔5を設けてなる両面使用石英ガラス製軽量
ミラー。2. A honeycomb structure having a front surface mirror 2, a rim portion 4, a back surface mirror 3 and an outer peripheral ring 6 and having a circular or polygonal cross-sectional shape of the rim portion 4 for supporting the upper and lower mirror surfaces, and each rim surface has A double-sided quartz glass lightweight mirror with a through hole 5.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP057193U JPH052102U (en) | 1991-06-26 | 1991-06-26 | Double-sided quartz glass lightweight mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP057193U JPH052102U (en) | 1991-06-26 | 1991-06-26 | Double-sided quartz glass lightweight mirror |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH052102U true JPH052102U (en) | 1993-01-14 |
Family
ID=13048654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP057193U Pending JPH052102U (en) | 1991-06-26 | 1991-06-26 | Double-sided quartz glass lightweight mirror |
Country Status (1)
Country | Link |
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JP (1) | JPH052102U (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010049257A (en) * | 2008-08-21 | 2010-03-04 | Schott Ag | Substrate for mirror support with reduced weight and mirror provided with mirror support with reduced weight |
JP2010066291A (en) * | 2008-09-08 | 2010-03-25 | Mitsubishi Electric Corp | Double-sided reflecting mirror and method for manufacturing the same |
JP2010243683A (en) * | 2009-04-03 | 2010-10-28 | Mitsubishi Electric Corp | Mirror element |
CN112285875A (en) * | 2020-11-18 | 2021-01-29 | 中国科学院上海技术物理研究所 | Integral type double faced mirror |
WO2021106557A1 (en) * | 2019-11-28 | 2021-06-03 | 京セラ株式会社 | Mirror |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS503655A (en) * | 1973-05-12 | 1975-01-16 | ||
JPS5617302A (en) * | 1979-07-21 | 1981-02-19 | Heraeus Schott Quarzschmelze | Method of making light reflector |
JPS576802A (en) * | 1980-05-16 | 1982-01-13 | Heraeus Schott Quarzschmelze | Light weight mirror and method of manufacturing same |
-
1991
- 1991-06-26 JP JP057193U patent/JPH052102U/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS503655A (en) * | 1973-05-12 | 1975-01-16 | ||
JPS5617302A (en) * | 1979-07-21 | 1981-02-19 | Heraeus Schott Quarzschmelze | Method of making light reflector |
JPS576802A (en) * | 1980-05-16 | 1982-01-13 | Heraeus Schott Quarzschmelze | Light weight mirror and method of manufacturing same |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010049257A (en) * | 2008-08-21 | 2010-03-04 | Schott Ag | Substrate for mirror support with reduced weight and mirror provided with mirror support with reduced weight |
JP2010066291A (en) * | 2008-09-08 | 2010-03-25 | Mitsubishi Electric Corp | Double-sided reflecting mirror and method for manufacturing the same |
JP2010243683A (en) * | 2009-04-03 | 2010-10-28 | Mitsubishi Electric Corp | Mirror element |
WO2021106557A1 (en) * | 2019-11-28 | 2021-06-03 | 京セラ株式会社 | Mirror |
JPWO2021106557A1 (en) * | 2019-11-28 | 2021-06-03 | ||
CN112285875A (en) * | 2020-11-18 | 2021-01-29 | 中国科学院上海技术物理研究所 | Integral type double faced mirror |
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