JPH05200406A - Production of aluminum foil for electrolytic capacitor - Google Patents

Production of aluminum foil for electrolytic capacitor

Info

Publication number
JPH05200406A
JPH05200406A JP4011908A JP1190892A JPH05200406A JP H05200406 A JPH05200406 A JP H05200406A JP 4011908 A JP4011908 A JP 4011908A JP 1190892 A JP1190892 A JP 1190892A JP H05200406 A JPH05200406 A JP H05200406A
Authority
JP
Japan
Prior art keywords
aluminum foil
rolling
foil
aluminum
final
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4011908A
Other languages
Japanese (ja)
Other versions
JP3186160B2 (en
Inventor
Tadao Fujihira
忠雄 藤平
Yutaka Kato
豊 加藤
Eizo Isoyama
永三 礒山
Kenji Goshiyona
健司 御所名
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Aluminum Can Corp
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP01190892A priority Critical patent/JP3186160B2/en
Publication of JPH05200406A publication Critical patent/JPH05200406A/en
Application granted granted Critical
Publication of JP3186160B2 publication Critical patent/JP3186160B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To contrive producing the aluminum foil for electrolytic capacitors with which excellent etching performance and the high electrostatic capacity are obtainable and which is free from the fluctuation in the electrostatic capacity in a transverse direction. CONSTITUTION:An aluminum slab having >=99.9% purity is used and before the slab is subjected to final finish rolling after hot rolling, the aluminum foil base is subjected to at least one pass of washing for removing the surface layers, by which the flaw-like recessed parts and inclusions, such as Al oxides and carbon, on the foil surfaces are removed. As a result, the generation of the coarse etching pits by the unavoidable local concn. of these recessed parts and inclusions is obviated and the uniform etching pits are formed. In addition, the aluminum foil un-coiled from a coil is continuously subjected to a low-temp. heating treatment prior to final annealing after foil rolling and, therefore, the thickness in the transverse direction of the oxide films formed on the surfaces of the aluminum foil is previously uniformalized and the fluctuation in the electrostatic capacity is prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は電解コンデンサ用アル
ミニウム箔の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an aluminum foil for electrolytic capacitors.

【0002】[0002]

【従来の技術】アルミニウム電解コンデンサ用電極材と
して一般に用いられるAl箔には、その実効面積を拡大
して単位面積当りの静電容量を増大するため、通常、電
気化学的あるいは化学的エッチング処理が施される。
2. Description of the Related Art Al foil, which is generally used as an electrode material for aluminum electrolytic capacitors, is usually subjected to an electrochemical or chemical etching treatment in order to expand its effective area and increase the capacitance per unit area. Is given.

【0003】しかし、箔を単にエッチング処理するのみ
では十分な静電容量が得られない。このため、一般的に
は箔圧延後の最終焼鈍工程において、立方体方位を多く
有する集合組織にして箔のエッチング特性を向上させる
べく、450℃程度以上の高温加熱処理が施されている
が、昨今の電解コンデンサの高静電容量化の要求に対し
て十分な満足を得るものではなかった。
However, a sufficient capacitance cannot be obtained by simply etching the foil. Therefore, generally, in the final annealing step after foil rolling, a high temperature heat treatment of about 450 ° C. or more is performed in order to improve the etching characteristics of the foil with a texture having many cubic orientations, but recently However, it was not possible to obtain sufficient satisfaction for the requirement for high capacitance of the electrolytic capacitor.

【0004】そこで、最近では、箔圧延工程の前及び/
又は後に硝酸を主成分とする洗浄剤でアルミニウム箔地
を脱脂して電解コンデンサ用アルミニウム箔となすこと
が提案されている(特開昭60−92489号)。
Therefore, recently, before the foil rolling process and / or
Alternatively, it has been proposed to degrease the aluminum foil with a cleaning agent containing nitric acid as a main component to form an aluminum foil for electrolytic capacitors (Japanese Patent Laid-Open No. 60-92489).

【0005】この提案によれば、硝酸を主成分とする洗
浄剤で脱脂するため、アルミニウム箔地の表面溶解を押
さえつつ表面に付着している圧延油が除去され、エッチ
ング処理後に大きな静電容量が得られるとされている。
According to this proposal, since degreasing is performed with a cleaning agent containing nitric acid as a main component, the rolling oil adhering to the surface of the aluminum foil is suppressed while the surface dissolution of the aluminum foil is suppressed, resulting in a large electrostatic capacity after etching. Is said to be obtained.

【0006】[0006]

【発明が解決しようとする課題】しかし、かかる先行提
案によってもなお、静電容量の増大には限界があった。
しかも、高温加熱処理による最終焼鈍を経たアルミニウ
ム箔にエッチングを施すと、アルミニウム箔の幅方向で
静電容量にバラツキを生じるという欠点もあった。
However, even with this prior proposal, there is still a limit to the increase in capacitance.
Moreover, when the aluminum foil that has undergone the final annealing by the high-temperature heat treatment is subjected to etching, there is a drawback that the capacitance varies in the width direction of the aluminum foil.

【0007】この発明は、かかる事情に鑑みてなされた
ものであって、エッチング性能に優れ、ひいては高静電
容量を得ることができ、かつ幅方向における静電容量の
バラツキを改善し得る電解コンデンサ用アルミニウム箔
の製作提供を目的とするものである。
The present invention has been made in view of the above circumstances, and is an electrolytic capacitor which is excellent in etching performance, can obtain a high capacitance, and can improve the variation in the capacitance in the width direction. The purpose is to provide and provide aluminum foil for use.

【0008】[0008]

【課題を解決するための手段】上記目的において、発明
者は鋭意研究を重ねた結果、まず、静電容量の増大化の
阻害要因は箔表面の付着圧延油ではなく、圧延工程にお
いてアルミニウム箔地表面に形成される疵状の凹部や表
面に埋込まれたAl酸化物、カーボン等埋込物の存在に
専ら起因していることを知見した。つまり、アルミニウ
ム箔表面に存在する疵状の凹部や埋込物は、電解コンデ
ンサ用アルミニウム箔に一般に施すエッチング処理にお
いてエッチングピットの開始点を形成する一要因となる
ため、これを均一に分散させることができればエッチン
グピットを均一に発生させることができ静電容量の増大
に寄与し得る。しかし凹部や埋込物を均一に分散させる
こと自体実際上極めて困難であり、部分的な局部集中を
不可避的に生じる。かかる局部集中があるとその周辺が
粗大なエッチングピットとなり、却って十分な拡面率ひ
いては大きな静電容量を得られないことがわかった。即
ち、凹部や埋込物がエッチングピットの均一発生を却っ
て阻害しており、むしろ凹凸や埋込物はこれをできるだ
け少なくした方がエッチングピットを均一に発生させる
ことができ、十分な拡面率ひいては大きな静電容量が得
られることがわかった。
In order to solve the above problems, the inventors of the present invention have conducted extensive studies, and as a result, first of all, the factor inhibiting the increase in capacitance is not the rolling oil adhered to the foil surface, but the aluminum foil material in the rolling process. It was found that it is due exclusively to the presence of flaw-like recesses formed on the surface and embedded materials such as Al oxide and carbon embedded in the surface. In other words, the flaw-like recesses and embeddings present on the surface of the aluminum foil are one of the factors that form the starting point of the etching pit in the etching process that is generally applied to the aluminum foil for electrolytic capacitors, so disperse them evenly. If it is possible, etching pits can be uniformly generated, which can contribute to an increase in capacitance. However, it is actually extremely difficult to disperse the recesses and the embedded material in a uniform manner, and local concentration is inevitably caused. It has been found that when such local concentration is present, a rough etching pit is formed around it, and on the contrary, a sufficient surface expansion ratio and thus a large electrostatic capacity cannot be obtained. That is, the recesses and the embedded materials rather hinder the uniform generation of the etching pits. Rather, the unevenness and the embedded materials should be reduced as much as possible so that the etching pits can be generated uniformly, and the surface expansion ratio is sufficient. As a result, it was found that a large capacitance can be obtained.

【0009】一方、アルミニウム箔の幅方向にバラツキ
を生じる原因についても、発明者は実験と研究の結果、
かかるバラツキはアルミニウム箔表面に形成された酸化
皮膜の厚さに起因するものであることを知見した。即
ち、実生産においては、アルミニウム箔は圧延後最終焼
鈍に至るまでコイル状に巻かれた状態で取扱われる関係
上、コイルの幅方向の両端部分が中央部よりも環境(温
度、湿度等)の影響を受けやすく、従って幅方向両端部
において酸化皮膜が厚く中央部が薄く形成される。この
ため、エッチングの際にアルミニウム箔の端部と中央部
とで溶解形態に差を生じ、これが静電容量のバラツキと
なって表れるものであった。そして、酸化皮膜厚さの幅
方向のバラツキは、最終焼鈍のときだけに起こるもので
はなく、むしろ該処理工程に入る前の保管時においてそ
の大部分がすでに生じており、この時のバラツキが最終
焼鈍においてもそのまま維持されることがわかった。
On the other hand, as for the cause of the variation in the width direction of the aluminum foil, the inventor has found by experiments and studies that
It was found that such variations are due to the thickness of the oxide film formed on the surface of the aluminum foil. That is, in actual production, since the aluminum foil is handled in a coiled state after rolling until final annealing, both end portions in the width direction of the coil are more environmentally friendly (temperature, humidity, etc.) than the central portion. It is easily affected, so that the oxide film is thick and the central portion is thin at both ends in the width direction. Therefore, during etching, a difference occurs in the dissolution form between the end portion and the central portion of the aluminum foil, which appears as a variation in electrostatic capacitance. And, the widthwise variation of the oxide film thickness does not occur only during the final annealing, but rather, most of it has already occurred during storage before entering the treatment step, and the variation at this time is the final variation. It was found that it was maintained even during annealing.

【0010】この発明は、かかる種々の知見に基いてな
されたものであって、純度99.9%以上のアルミニウ
ムスラブに、熱間圧延、冷間圧延を実施した後、さらに
最終仕上圧延を含む箔圧延を実施し、その後最終焼鈍を
実施して電解コンデンサ用アルミニウム箔を製造するに
際し、前記熱間圧延後最終仕上圧延前に、アルミニウム
箔地に対して少なくとも1回の表面層除去洗浄を実施
し、かつ前記箔圧延後最終焼鈍前にコイルから巻き戻し
たアルミニウム箔を連続的に低温加熱処理することを特
徴とする電解コンデンサ用アルミニウム箔の製造方法を
要旨とする。
The present invention has been made on the basis of such various findings, and further includes hot rolling and cold rolling of an aluminum slab having a purity of 99.9% or more, and further includes final finishing rolling. When manufacturing aluminum foil for electrolytic capacitors by carrying out foil rolling and then final annealing, at least one surface layer removal cleaning is performed on the aluminum foil after the hot rolling and before the final finishing rolling. A method for producing an aluminum foil for electrolytic capacitors is characterized in that the aluminum foil unwound from the coil after the foil rolling and before the final annealing is continuously subjected to a low temperature heat treatment.

【0011】まず、アルミニウム箔の純度が99.9%
以上に規定されるのは、99.9%未満の純度では電解
エッチング時にエッチングピットの成長が多くの不純物
の存在によって阻害され、均一なピットを形成できず、
従って静電容量の増大効果が得られないからである。
First, the purity of aluminum foil is 99.9%.
What is defined above is that if the purity is less than 99.9%, the growth of etching pits during electrolytic etching is hindered by the presence of many impurities, and uniform pits cannot be formed.
Therefore, the effect of increasing the capacitance cannot be obtained.

【0012】電解コンデンサ用アルミニウム箔は、一般
に、熱間圧延、冷間圧延、最終仕上圧延を含む箔圧延の
各圧延工程を実施したのち、最終焼鈍を実施することに
より製作される。而して、上記圧延工程においては、ア
ルミニウム箔の表面に、圧延方向を長さ方向とする細長
いあるいは長円形状の多数の疵状凹部が生じる。この主
な原因は、Al2 3 等のアルミニウム酸化物や炭化し
た圧延油のカーボンが圧延ロールによってアルミニウム
箔表面上を引きずられるためであると考えられる。しか
も、これら酸化物やカーボンは疵状凹部の原因となるの
みならず、圧延によってアルミニウム箔表面に多数埋め
込まれる。従って、一般に圧延後のアルミニウム箔表面
には、前記疵状凹部とアルミニウム酸化物、カーボン等
の埋込物とが多数併存し、しかも部分的に局部集中を生
じた状態となっている。この凹部や埋込物の局部集中箇
所にはその後に実施するエッチング処理において粗大な
エッチングピットが形成され、静電容量の増大を却って
阻害する。
The aluminum foil for electrolytic capacitors is generally manufactured by carrying out each rolling step of hot rolling, cold rolling, and foil rolling including final finishing rolling, and then carrying out final annealing. Thus, in the rolling step, a large number of elongated recesses having an elongated or elliptical shape with the rolling direction being the length direction are formed on the surface of the aluminum foil. It is considered that the main reason for this is that aluminum oxide such as Al 2 O 3 or carbon of the carbonized rolling oil is dragged on the surface of the aluminum foil by the rolling roll. Moreover, these oxides and carbon not only cause flaw-like recesses, but are also embedded in the aluminum foil surface in large numbers by rolling. Therefore, generally, on the surface of an aluminum foil after rolling, a large number of the flaw-like recesses and embedded materials such as aluminum oxide and carbon coexist, and furthermore, local concentration is partially caused. Coarse etching pits are formed in the recesses and the locally concentrated portions of the embedded material in an etching process to be performed later, which rather hinders the increase of the capacitance.

【0013】そこでこの発明では、上記のような凹部や
埋込物を除去すべく、アルミニウム箔地の表面層の除去
洗浄を実施する。この洗浄によって除去される表面層の
厚さは0.01μm以上とするのが良い。0.01μm
未満では表面の凹部や埋込物の除去効果に乏しいからで
ある。また、除去厚さが5μmを越える処理はもはや凹
部や埋込物の存在量が少なくなっているため無益であ
り、従って0.01〜3μm程度の除去厚さに設定する
のが良い。最も好ましい除去厚さは0.1〜1μmであ
る。
Therefore, in the present invention, the surface layer of the aluminum foil is removed and washed in order to remove the above-mentioned recesses and embedded objects. The thickness of the surface layer removed by this cleaning is preferably 0.01 μm or more. 0.01 μm
If it is less than the above range, the effect of removing the recesses and the embedded substances on the surface is poor. Further, the treatment in which the removal thickness exceeds 5 μm is useless because the existing amount of the recesses and the embedded substances is already small, and therefore it is preferable to set the removal thickness to about 0.01 to 3 μm. The most preferable removal thickness is 0.1 to 1 μm.

【0014】表面層除去洗浄の具体的処理方法は特に限
定されないが、アルカリや酸による化学的溶解洗浄が処
理の簡便性の面から好ましい。この化学的溶解洗浄の望
ましい条件を挙げると、洗浄液としては濃度1〜7%、
液温40〜70℃の苛性ソーダや、濃度10〜30%、
液温70〜90℃の硫酸を用い、浸漬時間:10秒〜1
0分程度に設定するのが良い。
The specific treatment method for the surface layer removal cleaning is not particularly limited, but chemical dissolution cleaning with an alkali or an acid is preferable from the viewpoint of the ease of processing. As a desirable condition of this chemical dissolution cleaning, the concentration of the cleaning liquid is 1 to 7%,
Caustic soda with a liquid temperature of 40-70 ° C, a concentration of 10-30%,
Using sulfuric acid with a liquid temperature of 70 to 90 ° C., immersion time: 10 seconds to 1
It is good to set it to about 0 minutes.

【0015】かかるアルミニウム箔地の表面層除去洗浄
は熱間圧延後に行わなければならない。この理由は、前
述の凹部や埋込物の多くが熱間圧延によって生じるから
である。また、最終圧延工程である箔圧延の終了後に行
ってはならない。この理由は次のとおりである。即ち、
エッチングピットの発生は凹部や埋込物のみならず箔表
面の転位密度とも関連しており、最終の箔圧延後に表面
層の除去洗浄を行うと表面層の高転位密度部が除去され
てしまいエッチングピットが少なくなって拡面率ひいて
は静電容量の増大を図れないからである。このため、圧
延終了後においても高転位密度部をアルミニウム箔表面
に残存させるために、箔地の表面層除去後にさらに圧延
を行う必要がある。従って、表面層除去洗浄は熱間圧延
後箔圧延工程における最終仕上圧延工程前に実施しなけ
ればならない。具体的には、熱間圧延後、箔圧延前に行
っても良く(以下、前洗浄という)、箔圧延の途中に行
っても良い(以下、中間洗浄という)。また、前洗浄の
時期も熱間圧延と冷間圧延との間、冷間圧延の途中、冷
間圧延と箔圧延との間のいずれでも良い。また、中間洗
浄の時期も、箔圧延後最終仕上圧延前であればいずれで
も良い。また、表面層除去洗浄の回数も前洗浄ないし中
間洗浄を1回のみ実施しても良く、前洗浄を2回以上実
施しても良く、中間洗浄を2回以上実施しても良く、さ
らには前洗浄と中間洗浄とを取り混ぜて1回ずつあるい
は複数回実施しても良い。好ましくは埋込物等を効果的
に除去すべく、箔圧延の途中に中間洗浄を行うのが良
く、最も好ましくは、最終仕上圧延直前に中間洗浄を実
施するのが、凹部や埋込物の十分な除去と箔表面におけ
る高転位密度部の形成とを効果的に実現しうる点で望ま
しい。
The cleaning for removing the surface layer of the aluminum foil must be performed after hot rolling. The reason for this is that many of the above-mentioned recesses and embedded materials are generated by hot rolling. Moreover, it should not be performed after the foil rolling, which is the final rolling step, is completed. The reason for this is as follows. That is,
The generation of etching pits is related not only to the recesses and embedded materials but also to the dislocation density on the foil surface.If the surface layer is removed and washed after the final foil rolling, the high dislocation density portion on the surface layer is removed and etching This is because the number of pits is reduced and the surface expansion ratio and thus the capacitance cannot be increased. Therefore, in order to leave the high dislocation density portion on the surface of the aluminum foil even after the completion of rolling, it is necessary to further perform rolling after removing the surface layer of the foil. Therefore, the cleaning for removing the surface layer must be performed after the hot rolling and before the final finishing rolling step in the foil rolling step. Specifically, it may be performed after hot rolling and before foil rolling (hereinafter referred to as pre-cleaning) or during foil rolling (hereinafter referred to as intermediate cleaning). The pre-cleaning may be performed between hot rolling and cold rolling, during cold rolling, or between cold rolling and foil rolling. Further, the time of the intermediate cleaning may be any after the foil rolling and before the final finish rolling. Moreover, the number of times of cleaning for removing the surface layer may be such that the pre-cleaning or the intermediate cleaning is performed only once, the pre-cleaning may be performed twice or more, the intermediate cleaning may be performed two or more times, and The pre-cleaning and the intermediate cleaning may be mixed and performed once or multiple times. Preferably, in order to effectively remove embeddings and the like, it is preferable to perform intermediate cleaning during the foil rolling, and most preferably, intermediate cleaning is performed immediately before final finish rolling, in which recesses and embeddings are It is desirable in that sufficient removal and formation of high dislocation density portions on the foil surface can be effectively realized.

【0016】なお、圧延終了後に最終圧延で付着した油
分や圧延時に生成された酸化膜等の除去のための洗浄
(以下、後洗浄という)を実施することも、後述の低温
加熱処理によって生成される酸化皮膜をより均一化しえ
て静電容量を増大させ得る点で推奨される。ただし、こ
の後洗浄による表面除去厚さが厚すぎると、アルミニウ
ム箔表面に形成されている高転位密度部が除去されてし
まうため、後洗浄を実施する場合の除去厚さは300オ
ングストローム以下とするのが良い。かかる脱脂洗浄も
例えば濃度:0.01〜1%、液温:30〜60℃の苛
性ソーダを用い、5〜200秒浸漬することにより行え
ば良い。
It should be noted that, after the completion of rolling, a cleaning process (hereinafter referred to as a post-cleaning process) for removing an oil component adhered in the final rolling process or an oxide film produced during the rolling process (hereinafter referred to as a post-cleaning process) is also generated by a low temperature heat treatment described later. It is recommended that the oxide film can be made more uniform and the capacitance can be increased. However, if the thickness of the surface removed by this post-cleaning is too thick, the high dislocation density portion formed on the surface of the aluminum foil will be removed. Therefore, the thickness of the post-cleaning removed should be 300 angstroms or less. Is good. Such degreasing cleaning may be carried out, for example, by using caustic soda having a concentration of 0.01 to 1% and a liquid temperature of 30 to 60 ° C. and immersing it for 5 to 200 seconds.

【0017】その後、アルミニウム箔には最終焼鈍前に
低温加熱処理を実施する。この低温加熱処理は連続式加
熱処理、換言すればコイルから巻き戻したアルミニウム
箔を連続的に処理する方法で行うが、最終仕上圧延後に
コイルに巻き取ったアルミニウム箔を巻き戻しながら行
っても良く、あるいはコイルに巻き取ったアルミニウム
箔を巻き戻しながら最終仕上圧延を行い、そのまま連続
して低温加熱処理に移行させても良い。かかる加熱処理
前に、アルミニウム箔には既に自然酸化皮膜が形成され
ているが、連続的低温加熱処理を実施することにより箔
の全表面が雰囲気と直接接触した状態で加熱処理される
ことになり、特に酸化皮膜厚さの薄い幅方向中央部にお
いて酸化皮膜の成長が促進され、酸化皮膜はその厚さが
箔の幅方向において均一化される。かかる低温加熱を施
すのは、仕上げ圧延で形成したアルミニウム箔表面の転
移に対応して微欠陥を有した酸化皮膜をコイル幅方向に
均一に形成するためである。高温加熱では、転移密度が
減少してしまうので、低温でまず酸化皮膜を形成する。
即ち、低温加熱は皮膜の微欠陥形成に寄与し、連続処理
はコイル幅方向の酸化皮膜の均一化に寄与する。かかる
低温加熱は30〜300℃の温度で行うのが好ましい。
30℃未満では酸化皮膜の成長が遅く均一化を図れない
恐れがある。一方、300℃を越える温度では酸化皮膜
が過度に成長してエッチング性能を阻害する恐れがあ
る。特に好適には100〜200℃が良い。また、低温
加熱の雰囲気は酸化皮膜の形成を可能とするため酸化性
雰囲気とするのが良い。一例として、大気中雰囲気とか
酸素等を含む不活性ガス雰囲気等を挙げ得る。アルミニ
ウム箔の雰囲気中への滞留時間は5秒〜1時間程度に設
定するのが良い。5秒未満では酸化皮膜の成長が遅すぎ
結果的に均一な酸化皮膜を形成することができない恐れ
がある。一方、1時間を越える滞留時間では生産性が著
しく低下する恐れがある。最も好ましい滞留時間は10
秒〜5分である。このような連続式低温加熱処理は1回
のみ行っても良く、あるいは1回では均一な酸化皮膜の
形成が困難である場合には2回以上にわたって行っても
良い。
Thereafter, the aluminum foil is subjected to a low temperature heat treatment before the final annealing. This low-temperature heat treatment is performed by a continuous heat treatment, in other words, a method of continuously treating the aluminum foil unwound from the coil, but may be performed while unwinding the aluminum foil wound on the coil after the final finish rolling. Alternatively, final finishing rolling may be performed while unwinding the aluminum foil wound on the coil, and continuously transferred to the low temperature heat treatment as it is. Prior to such heat treatment, a natural oxide film has already been formed on the aluminum foil, but by carrying out continuous low-temperature heat treatment, the heat treatment will be performed with the entire surface of the foil in direct contact with the atmosphere. In particular, the growth of the oxide film is promoted especially in the widthwise central portion where the thickness of the oxide film is thin, and the thickness of the oxide film is made uniform in the width direction of the foil. The reason for applying such low temperature heating is to uniformly form an oxide film having fine defects in the coil width direction corresponding to the transition of the surface of the aluminum foil formed by finish rolling. Since heating at high temperature decreases the transition density, an oxide film is first formed at low temperature.
That is, the low-temperature heating contributes to the formation of fine defects in the coating, and the continuous treatment contributes to the uniformization of the oxide coating in the coil width direction. Such low temperature heating is preferably performed at a temperature of 30 to 300 ° C.
If the temperature is lower than 30 ° C, the oxide film may grow slowly and may not be uniformized. On the other hand, if the temperature exceeds 300 ° C., the oxide film may grow excessively and hinder the etching performance. Particularly preferably, the temperature is 100 to 200 ° C. Further, the atmosphere of low temperature heating is preferably an oxidizing atmosphere because it enables formation of an oxide film. As an example, an atmosphere in the air or an atmosphere of an inert gas containing oxygen or the like can be cited. The residence time of the aluminum foil in the atmosphere is preferably set to about 5 seconds to 1 hour. If it is less than 5 seconds, the oxide film grows too slowly, and as a result, a uniform oxide film may not be formed. On the other hand, if the residence time exceeds 1 hour, productivity may be significantly reduced. Most preferred residence time is 10
Seconds to 5 minutes. Such continuous low-temperature heat treatment may be performed only once, or may be performed twice or more when it is difficult to form a uniform oxide film once.

【0018】連続式低温加熱処理を終えたアルミニウム
箔には、続いて結晶粒を(100)面にそろえるための
高温最終焼鈍を実施する。この焼鈍処理において、箔組
織の改善がなされるとともに、前記低温加熱で形成され
た微欠陥を有する酸化皮膜が最終焼鈍においても継承さ
れるものと考えられる。最終焼鈍の加熱条件は従来から
行われている条件を適宜採択すれば良いが、好ましくは
温度450〜580℃、時間10秒〜30時間とするの
が良い。450℃未満の温度、10秒未満の時間では組
織の改善効果が少なく、一方温度が580℃を越えある
いは時間が30時間を越える処理を施しても該効果が飽
和しエネルギーの無駄を招くのみならず、酸化皮膜の過
度の成長を招いて却ってエッチング特性の向上を妨げる
恐れがあるからである。処理形態はバッチ式、連続式い
ずれでも良い。この高温加熱処理において、アルミニウ
ム箔の表面には前記低温加熱処理により形成された酸化
皮膜の上にさらに酸化皮膜が形成されるが、アルミニウ
ム箔の幅方向における酸化皮膜厚さのバラツキは主に連
続式低温加熱処理により影響され該低温加熱処理により
厚さの均一化された酸化皮膜が形成されているから、最
終焼鈍をバッチ式で行った場合にも最早酸化皮膜の厚さ
の幅方向における顕著なバラツキは生じない。しかし、
連続式低温加熱処理により形成された酸化皮膜厚さの均
一性をより完全に維持するために、連続式の処理を採用
するのが好ましい。
The aluminum foil that has been subjected to the continuous low-temperature heat treatment is then subjected to high-temperature final annealing for aligning the crystal grains on the (100) plane. It is considered that in this annealing treatment, the foil structure is improved and the oxide film having fine defects formed by the low temperature heating is inherited in the final annealing. As the heating conditions for the final annealing, conventionally used conditions may be appropriately adopted, but preferably the temperature is 450 to 580 ° C. and the time is 10 seconds to 30 hours. If the temperature is less than 450 ° C. and the time is less than 10 seconds, the effect of improving the structure is small. On the other hand, if the temperature is more than 580 ° C. or the time is more than 30 hours, the effect is saturated and energy is wasted. This is because there is a risk that excessive growth of the oxide film may be caused and the improvement of etching characteristics may be hindered. The processing form may be either batch type or continuous type. In this high temperature heat treatment, an oxide film is further formed on the surface of the aluminum foil on the oxide film formed by the low temperature heat treatment, but the variation of the oxide film thickness in the width direction of the aluminum foil is mainly continuous. Since an oxide film having a uniform thickness formed by the low temperature heat treatment is affected by the low temperature heat treatment, even when the final annealing is performed in a batch method, the thickness of the oxide film is no longer remarkable in the width direction. Variation does not occur. But,
In order to more completely maintain the uniformity of the oxide film thickness formed by the continuous low-temperature heat treatment, it is preferable to adopt the continuous treatment.

【0019】上記により製作したアルミニウム箔は、そ
の後化学的あるいは電気化学的なエッチング処理を実施
して電解コンデンサ電極箔として使用する。このエッチ
ング処理においては、箔表面の疵状の凹部やAl酸化物
等埋込物の局部集中は最早存在せず、箔表面に存在して
いた高転位密度部の対応位置に多数のエッチングピット
が形成される。また、アルミニウム箔の表面に形成され
た酸化皮膜は、幅方向全体にわたって厚さが均一化され
ているから、エッチングに際しても均一なエッチングが
施され、ひいてはバラツキのない安定した静電容量が得
られる。
The aluminum foil produced as described above is then subjected to a chemical or electrochemical etching treatment to be used as an electrolytic capacitor electrode foil. In this etching process, there are no longer any localized defects such as flaw-like recesses on the foil surface or embedded materials such as Al oxide, and many etching pits are formed at the corresponding positions of the high dislocation density portion on the foil surface. It is formed. In addition, since the oxide film formed on the surface of the aluminum foil has a uniform thickness over the entire width direction, uniform etching is performed during etching, and a stable capacitance without variation can be obtained. ..

【0020】なお、このアルミニウム箔は陽極用、陰極
用いずれに用いても良いが、Al純度を99.9%以上
とする関係上、一般に高Al純度が要請される陽極箔と
して用いるのが好ましい。
The aluminum foil may be used for either the anode or the cathode, but in view of the Al purity of 99.9% or more, it is generally preferable to use it as an anode foil which requires high Al purity. ..

【0021】[0021]

【実施例】次にこの発明の実施例を示す。Embodiments of the present invention will be described below.

【0022】(実施例1)純度99.99%のアルミニ
ウムスラブを常法に従い厚さ5mmまで熱間圧延したの
ち、さらに厚さ0.4mmまで冷間圧延し、続いて厚さ
0.2mmまで第1次箔圧延を行った。
(Example 1) An aluminum slab having a purity of 99.99% was hot-rolled to a thickness of 5 mm according to a conventional method, further cold-rolled to a thickness of 0.4 mm, and then to a thickness of 0.2 mm. Primary foil rolling was performed.

【0023】次に、得られたアルミニウム箔地を濃度5
%、温度50℃の苛性ソーダに90秒間浸漬して、表面
層除去のための中間洗浄を行った。この洗浄により除去
した表面層の厚さは1μmであった。
Next, the aluminum foil obtained was concentrated to a concentration of 5
% And a temperature of 50 ° C. for 90 seconds to perform intermediate cleaning for removing the surface layer. The thickness of the surface layer removed by this washing was 1 μm.

【0024】続いて、厚さ0.1mmまで最終仕上げ圧
延を行い幅500mmのアルミニウム箔コイルを得た。
Then, final finishing rolling was performed to a thickness of 0.1 mm to obtain an aluminum foil coil having a width of 500 mm.

【0025】次に、上記アルミニウム箔をコイルから巻
き戻しながら大気中にて120℃×5分連続的に低温加
熱した。
Next, the aluminum foil was unwound from the coil and continuously heated at low temperature in the atmosphere at 120 ° C. for 5 minutes.

【0026】次に、上記アルミニウム箔コイルにバッチ
式にて1×10-4Torr以下の真空中で500℃×5
時間の最終焼鈍処理を実施し最終箔を得た。
Next, the aluminum foil coil was batchwise applied to a vacuum of 1 × 10 −4 Torr or less at 500 ° C. × 5.
A final annealing treatment was performed for a time to obtain a final foil.

【0027】(実施例2)純度99.99%のアルミニ
ウムスラブを常法に従い厚さ5mmまで熱間圧延したの
ち、さらに厚さ0.4mmまで冷間圧延し、続いて厚さ
0.2mmまで第1次箔圧延を行った。
(Example 2) An aluminum slab having a purity of 99.99% was hot-rolled to a thickness of 5 mm by an ordinary method, further cold-rolled to a thickness of 0.4 mm, and then to a thickness of 0.2 mm. Primary foil rolling was performed.

【0028】次に、得られたアルミニウム箔地を濃度5
%、温度50℃の苛性ソーダに90秒間浸漬して、表面
層除去のための中間洗浄を行った。この洗浄により除去
した表面層の厚さは1μmであった。
Next, the aluminum foil obtained was concentrated to a concentration of 5
% And a temperature of 50 ° C. for 90 seconds to perform intermediate cleaning for removing the surface layer. The thickness of the surface layer removed by this washing was 1 μm.

【0029】続いて、厚さ0.1mmまで最終仕上げ圧
延を行いアルミニウム箔コイルを得た。
Then, final finishing rolling was performed to a thickness of 0.1 mm to obtain an aluminum foil coil.

【0030】次に、得られたアルミニウム箔を濃度0.
1%、温度50℃の苛性ソーダに10秒間浸漬して後洗
浄を行った。この洗浄により除去した表面層の厚さは1
00オングストロームであった。
Next, the obtained aluminum foil was treated with a density of 0.
Post-washing was carried out by immersing in 1% caustic soda at a temperature of 50 ° C. for 10 seconds. The thickness of the surface layer removed by this washing is 1
It was 00 angstrom.

【0031】次に、上記アルミニウム箔をコイルから巻
き戻しながら大気中にて120℃×5分連続的に低温加
熱した。
Next, the aluminum foil was unwound from the coil and continuously heated at a low temperature in the air at 120 ° C. for 5 minutes.

【0032】次に、上記アルミニウム箔コイルにバッチ
式にて1×10-4Torr以下の真空中で500℃×5
時間の最終焼鈍処理を実施し最終箔を得た。
Next, the aluminum foil coil was batch-processed at a temperature of 500 ° C. × 5 in a vacuum of 1 × 10 −4 Torr or less.
A final annealing treatment was performed for a time to obtain a final foil.

【0033】(比較例1)実施例1における中間洗浄処
理、及び最終焼鈍前の連続的低温加熱処理を行わなかっ
た以外は、実施例1と同一条件でアルミニウム箔を製造
した。
(Comparative Example 1) An aluminum foil was produced under the same conditions as in Example 1 except that the intermediate cleaning treatment in Example 1 and the continuous low temperature heating treatment before final annealing were not performed.

【0034】上記により得た3種類のアルミニウム箔
を、5%塩酸、80℃中で電流密度を直流10A/dm
2 として7分間電解エッチング処理した。そして、その
後硼酸浴中で380℃に化成処理したのち、各電極箔の
幅方向中央部、両端部の静電容量を測定した。なお、両
端部の測定位置は箔端縁から50mm内方の位置とし
た。その結果を、比較例1の中央部の静電容量を100
とした場合の相対比較にて表1に示す。
The three types of aluminum foils obtained as described above were subjected to 5% hydrochloric acid at 80 ° C. and a current density of 10 A / dm for direct current.
2 was electrolytically etched for 7 minutes. Then, after performing chemical conversion treatment in a boric acid bath at 380 ° C., the capacitance of each electrode foil in the widthwise center and both ends was measured. In addition, the measurement position of both ends was a position 50 mm inward from the edge of the foil. The result shows that the capacitance of the central portion of Comparative Example 1 is 100
Table 1 shows the relative comparison in the case of.

【0035】[0035]

【表1】 表1の結果からわかるように、熱間圧延後最終仕上圧延
前に表面層除去洗浄を実施した本発明実施品は、比較品
に対して静電容量が増大していることがわかる。また連
続的低温加熱処理することで幅方向の静電容量のバラツ
キを改善し得ることがわかる。また、実施例1と実施例
2の比較から、最終仕上圧延後に後洗浄を実施すること
により、さらに静電容量を増大しうることがわかる。
[Table 1] As can be seen from the results in Table 1, the electrostatic capacity of the product of the present invention, which was subjected to the cleaning for removing the surface layer after the hot rolling and before the final finish rolling, increased in comparison with the comparative product. It is also understood that the continuous low-temperature heat treatment can improve the variation in the electrostatic capacitance in the width direction. Further, it is understood from the comparison between Example 1 and Example 2 that the electrostatic capacity can be further increased by performing the post-cleaning after the final finish rolling.

【0036】[0036]

【作用】熱間圧延後最終仕上圧延前に実施するアルミニ
ウム箔地の表面層除去洗浄により、圧延工程においてア
ルミニウム箔地表面に形成された疵状の凹部や表面に埋
込まれたAl酸化物、カーボン等埋込物が除去され、こ
れら凹部や埋込物の不可避的な局部集中が解消される。
従って、その後に施すエッチング処理において、凹部や
埋込物の局部集中に起因して発生していた粗大なエッチ
ングピットがなくなり、表面洗浄後に少なくとも実施さ
れる仕上圧延によって形成された高転位密度部に基くと
推測されるエッチングピットが均一に形成される。
[Function] By the surface layer removal cleaning of the aluminum foil material performed after the hot rolling and before the final finish rolling, flaw-like recesses formed on the surface of the aluminum foil material in the rolling step or Al oxide embedded in the surface, The embedded material such as carbon is removed, and the inevitable local concentration of these recesses and embedded material is eliminated.
Therefore, in the etching process to be performed thereafter, the coarse etching pits generated due to the local concentration of recesses and embedded materials are eliminated, and the high dislocation density portion formed by at least the finish rolling performed after the surface cleaning is eliminated. Etching pits supposed to be based are uniformly formed.

【0037】また、前記箔圧延後最終焼鈍前にコイルか
ら巻き戻したアルミニウム箔を連続的に低温加熱処理す
ることで、箔表面の酸化皮膜の厚さが均一化され、エッ
チング後の幅方向の静電容量のバラツキが抑制される。
By continuously heat-treating the aluminum foil unwound from the coil after the foil rolling and before the final annealing, the thickness of the oxide film on the foil surface is made uniform and the width direction after etching is reduced. Variations in capacitance are suppressed.

【0038】[0038]

【発明の効果】この発明は、上述の次第で、純度99.
9%以上のアルミニウムスラブに、熱間圧延、冷間圧延
を実施した後、さらに最終仕上圧延を含む箔圧延を実施
してアルミニウム箔を製造するに際し、前記熱間圧延後
最終仕上圧延前に、アルミニウム箔地に対して少なくと
も1回の表面層除去洗浄を実施するものであるから、圧
延工程においてアルミニウム箔地表面に形成される疵状
の凹部や表面に埋込まれたAl酸化物、カーボン等埋込
物を除去することができる。従って、従来エッチング処
理において均一なエッチングピットの形成を妨げていた
疵状の凹部や埋込物の局部集中に起因する粗大なエッチ
ングピットをなくすことができるから、エッチングピッ
トを均一に発生させることができ、太くて深いエッチン
グピットを箔表面全体に亘って均一高密度に形成するこ
とができる。その結果、アルミニウム箔の拡面率を格段
に増大でき、ひいては静電容量の増大を実現しうる。
According to the present invention, the purity of 99.
After performing hot rolling and cold rolling on an aluminum slab of 9% or more, when performing foil rolling including final finishing rolling to produce an aluminum foil, after the hot rolling and before final finishing rolling, Since the surface of the aluminum foil is removed and washed at least once, a flaw-like recess formed on the surface of the aluminum foil in the rolling step or an Al oxide, carbon, etc. embedded in the surface. The implant can be removed. Therefore, since it is possible to eliminate the rough etching pits caused by the localized concentration of the recessed recesses and the embedded material, which has hindered the formation of the uniform etching pits in the conventional etching process, it is possible to uniformly generate the etching pits. It is possible to form thick and deep etching pits uniformly and with high density over the entire foil surface. As a result, the surface expansion rate of the aluminum foil can be remarkably increased, which in turn can increase the capacitance.

【0039】しかも、箔圧延後最終焼鈍前にコイルから
巻き戻したアルミニウム箔を連続的に低温加熱処理する
から、最終焼鈍前にアルミニウム箔の表面に形成される
酸化皮膜の幅方向の厚さを予め均一化することができ
る。従って、その後の最終焼鈍において酸化皮膜が成長
してももはや均一化された厚さを維持しつつ成長するか
ら、最終的に箔の幅方向における酸化皮膜厚さのバラツ
キの少ないアルミニウム箔となし得る。その結果、エッ
チング処理において均一なエッチングを施すことがで
き、静電容量のバラツキの少ない品質の安定した電解コ
ンデンサ用アルミニウム箔を得ることができる。
Moreover, since the aluminum foil unwound from the coil after the foil rolling and before the final annealing is continuously subjected to low-temperature heat treatment, the widthwise thickness of the oxide film formed on the surface of the aluminum foil before the final annealing is controlled. It can be homogenized in advance. Therefore, even if the oxide film grows in the subsequent final annealing, the oxide film grows while maintaining the uniform thickness, so that the final aluminum foil can be made with little variation in the oxide film thickness in the width direction of the foil. .. As a result, uniform etching can be performed in the etching process, and a stable aluminum foil for electrolytic capacitors with less variation in capacitance can be obtained.

【0040】また、表面層除去厚さを0.01μm以上
に設定した場合にはアルミニウム箔表面の凹部や埋込物
をさらに効果的に除去し得て、益々静電容量を増大する
ことができる。
Further, when the surface layer removal thickness is set to 0.01 μm or more, the recessed portions and embedded materials on the surface of the aluminum foil can be removed more effectively, and the capacitance can be increased more and more. ..

───────────────────────────────────────────────────── フロントページの続き (72)発明者 御所名 健司 大阪府堺市海山町6丁224番地 昭和アル ミニウム株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kenji Gosho 6-224 Kaiyamacho, Sakai City, Osaka Prefecture Showa Aluminum Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 純度99.9%以上のアルミニウムスラ
ブに、熱間圧延、冷間圧延を実施した後、さらに最終仕
上圧延を含む箔圧延を実施し、その後最終焼鈍を実施し
て電解コンデンサ用アルミニウム箔を製造するに際し、
前記熱間圧延後最終仕上圧延前に、アルミニウム箔地に
対して少なくとも1回の表面層除去洗浄を実施し、かつ
前記箔圧延後最終焼鈍前にコイルから巻き戻したアルミ
ニウム箔を連続的に低温加熱処理することを特徴とする
電解コンデンサ用アルミニウム箔の製造方法。
1. An aluminum slab having a purity of 99.9% or more is hot-rolled and cold-rolled, and then foil-rolling including final finishing rolling is performed, and then final annealing is performed for electrolytic capacitors. When manufacturing aluminum foil,
After the hot rolling and before the final finishing rolling, the aluminum foil is subjected to at least one surface layer removal cleaning, and the aluminum foil rewound from the coil after the foil rolling and before the final annealing is continuously cooled at a low temperature. A method for manufacturing an aluminum foil for an electrolytic capacitor, which comprises heat treatment.
【請求項2】 表面層除去厚さが0.01μm以上であ
る請求項1に記載の電解コンデンサ用アルミニウム箔の
製造方法。
2. The method for producing an aluminum foil for an electrolytic capacitor according to claim 1, wherein the surface layer removal thickness is 0.01 μm or more.
JP01190892A 1992-01-27 1992-01-27 Manufacturing method of aluminum foil for electrolytic capacitor Expired - Lifetime JP3186160B2 (en)

Priority Applications (1)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005015916A (en) * 2003-06-03 2005-01-20 Showa Denko Kk Method of producing aluminum material for electrolytic capacitor electrode, aluminum material for electrolytic capacitor electrode, method of producing electrode material for electrolytic capacitor and aluminum electrolytic capacitor
JP2006210894A (en) * 2004-12-27 2006-08-10 Showa Denko Kk Manufacturing method, aluminum material for electrolytic capacitor electrode, anode material for aluminum electrolytic capacitor, and the aluminum electrolytic capacitor of aluminum material for electrolytic capacitor electrode
CN112658624A (en) * 2020-12-31 2021-04-16 镇江龙源铝业有限公司 Preparation method of ultra-long aluminum strip for submarine optical cable
CN116445768A (en) * 2023-04-20 2023-07-18 天津忠旺铝业有限公司 Production process of 8021 alloy battery flexible package aluminum foil

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005015916A (en) * 2003-06-03 2005-01-20 Showa Denko Kk Method of producing aluminum material for electrolytic capacitor electrode, aluminum material for electrolytic capacitor electrode, method of producing electrode material for electrolytic capacitor and aluminum electrolytic capacitor
JP2006210894A (en) * 2004-12-27 2006-08-10 Showa Denko Kk Manufacturing method, aluminum material for electrolytic capacitor electrode, anode material for aluminum electrolytic capacitor, and the aluminum electrolytic capacitor of aluminum material for electrolytic capacitor electrode
CN112658624A (en) * 2020-12-31 2021-04-16 镇江龙源铝业有限公司 Preparation method of ultra-long aluminum strip for submarine optical cable
CN112658624B (en) * 2020-12-31 2024-03-29 镇江龙源铝业有限公司 Preparation method of ultra-long aluminum strip for submarine optical cable
CN116445768A (en) * 2023-04-20 2023-07-18 天津忠旺铝业有限公司 Production process of 8021 alloy battery flexible package aluminum foil

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