JPH051992Y2 - - Google Patents

Info

Publication number
JPH051992Y2
JPH051992Y2 JP1986164159U JP16415986U JPH051992Y2 JP H051992 Y2 JPH051992 Y2 JP H051992Y2 JP 1986164159 U JP1986164159 U JP 1986164159U JP 16415986 U JP16415986 U JP 16415986U JP H051992 Y2 JPH051992 Y2 JP H051992Y2
Authority
JP
Japan
Prior art keywords
electrostrictive element
block
fixed
base
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986164159U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6370296U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986164159U priority Critical patent/JPH051992Y2/ja
Publication of JPS6370296U publication Critical patent/JPS6370296U/ja
Application granted granted Critical
Publication of JPH051992Y2 publication Critical patent/JPH051992Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Control Of Position Or Direction (AREA)
JP1986164159U 1986-10-23 1986-10-23 Expired - Lifetime JPH051992Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986164159U JPH051992Y2 (cs) 1986-10-23 1986-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986164159U JPH051992Y2 (cs) 1986-10-23 1986-10-23

Publications (2)

Publication Number Publication Date
JPS6370296U JPS6370296U (cs) 1988-05-11
JPH051992Y2 true JPH051992Y2 (cs) 1993-01-19

Family

ID=31093019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986164159U Expired - Lifetime JPH051992Y2 (cs) 1986-10-23 1986-10-23

Country Status (1)

Country Link
JP (1) JPH051992Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2858877B2 (ja) * 1990-05-28 1999-02-17 日本電気株式会社 圧電アクチュエータの駆動方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6042638B2 (ja) * 1977-09-26 1985-09-24 日本電気株式会社 圧電型アクチユエ−タ
JPS5972135A (ja) * 1982-10-18 1984-04-24 Hitachi Ltd 超精密ｘｙ移動装置
JPS6059981A (ja) * 1983-09-09 1985-04-06 Asahi Okuma Ind Co Ltd 駆動装置

Also Published As

Publication number Publication date
JPS6370296U (cs) 1988-05-11

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