JPH05196411A - Method for measuring parallelism error between rotary axis center and straightness of roundness measuring machine - Google Patents
Method for measuring parallelism error between rotary axis center and straightness of roundness measuring machineInfo
- Publication number
- JPH05196411A JPH05196411A JP857292A JP857292A JPH05196411A JP H05196411 A JPH05196411 A JP H05196411A JP 857292 A JP857292 A JP 857292A JP 857292 A JP857292 A JP 857292A JP H05196411 A JPH05196411 A JP H05196411A
- Authority
- JP
- Japan
- Prior art keywords
- master
- roundness
- measuring
- axis
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は回転直動機能形真円度測
定機の回転軸心と真直度軸心との平行度誤差の測定方法
およびその誤差を除く真円度補正方法に関する。回転直
動機能形真円度測定機は、回転台に円筒状ワークを載置
し、回転台の回転軸心に略平行な軸心を持つコラムを上
下する検出器によりワーク表面の位置を測定して、ワー
クの真円度、円筒度、真直度、または径差を求めるもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring a parallelism error between a rotation axis and a straightness axis of a rotation / linear motion type roundness measuring machine, and a roundness correction method for eliminating the error. The rotation / linear motion function circularity measuring machine measures the position of the work surface by placing a cylindrical work on the turntable and moving up and down a column with an axis substantially parallel to the rotation axis of the turntable. Then, the roundness, cylindricity, straightness, or diameter difference of the work is obtained.
【０００２】この場合、コラムの軸心（真直度軸心と称
する）と回転台の回転軸心とは、必ずしも正確に平行に
なってはいない。そこで、ワークの径差または円筒度を
測定するにあたり、回転軸心とコラムの軸心との平行か
らのずれを考慮しなければならない。In this case, the axis of the column (referred to as straightness axis) and the axis of rotation of the turntable are not always exactly parallel. Therefore, when measuring the diameter difference or cylindricity of the work, it is necessary to consider the deviation from the parallel between the rotation axis and the column axis.
【０００３】[0003]
【従来の技術】以下の説明では、同一参照番号は同一物
を示す。従来はワークの径差または円筒度を測定する前
に、手作業でコラムの軸心を回転軸心に平行になるよう
にしていた。図１１は従来のコラム調整方法の一つの説
明図である。同図において、１は回転台、２はコラム、
３はコラム２の支点、４は調整用ネジである。調整用ネ
ジを回転させることにより、コラム２は支点３を中心に
任意の方向に傾き量の調整ができ、それによりコラムの
軸心５を回転軸心６に平行にする。In the following description, the same reference numbers indicate the same items. Conventionally, before measuring the diameter difference or cylindricity of a work, the axis of the column is manually made parallel to the axis of rotation. FIG. 11 is an explanatory view of a conventional column adjusting method. In the figure, 1 is a turntable, 2 is a column,
3 is a fulcrum of the column 2 and 4 is an adjusting screw. By rotating the adjusting screw, the tilt amount of the column 2 can be adjusted in any direction around the fulcrum 3, thereby making the axis 5 of the column parallel to the axis 6 of rotation.
【０００４】図１２は従来のコラム調整方法の他の一つ
説明図である。同図においては、コラム２の高さを調節
するためのシム７をコラム２の下部に挿入することによ
り、コラム２の軸心５を回転軸心６に平行にしている。FIG. 12 is an explanatory view of another conventional column adjusting method. In the figure, a shaft 7 of the column 2 is made parallel to the rotation shaft 6 by inserting a shim 7 for adjusting the height of the column 2 into the lower portion of the column 2.
【０００５】[0005]
【発明が解決しようとする課題】図１１の従来方法で
は、調整ネジ４により一旦調整しても、僅かな振動等で
容易に調整が狂い、何度も調整をしなければならなず煩
雑であるという問題がある。また、支点３の剛性を高く
することが、材料上の理由から困難なので、外部の振動
に対して弱く、容易に調整が狂うという問題もある。In the conventional method shown in FIG. 11, even if the adjustment screw 4 is once adjusted, the adjustment is easily disturbed by a slight vibration and the like, and the adjustment must be repeated many times. There is a problem. Further, since it is difficult to increase the rigidity of the fulcrum 3 due to a material reason, there is a problem that the fulcrum 3 is vulnerable to external vibration and the adjustment is easily changed.
【０００６】図１２の従来方法では、正確に軸心を平行
にするためには、シム７の形状を厳密にしなければなら
ないが、これは困難であるので、いくつかのシムを挿入
したり取り外したりすることにより、トライアンドエラ
ーで最適のシムを挿入するようにする。このため、複数
回の高さ調整が必要となり、工数がかかるという問題が
ある。特に、平行度は極めて高いものが要求され、例え
ば、１〜２μｍ／数百ｍｍの平行度を出すためには、数
度の高さ調整が必要となり工数が多くなる。In the conventional method shown in FIG. 12, the shape of the shim 7 must be made precise in order to accurately make the axes parallel, but this is difficult, and therefore some shims are inserted or removed. By doing so, try and insert the optimum shim by trial and error. Therefore, it is necessary to adjust the height a plurality of times, which requires a lot of man-hours. In particular, extremely high parallelism is required, and for example, in order to obtain parallelism of 1 to 2 μm / several hundreds of millimeters, height adjustment of several degrees is required and the number of steps is increased.
【０００７】本発明の目的は、コラムの軸心の回転軸心
に対する傾斜度を予め測定して記憶しておき、ワークの
真円度や円筒度の測定に際してこの傾斜度により測定値
を補正するという構想に基づき、コラムの機械的調整を
不要とし、簡単且つ信頼性の高い補正を可能とすること
にある。An object of the present invention is to measure and store beforehand the inclination of the axis of the column with respect to the axis of rotation, and correct the measured value by this inclination when measuring the roundness and cylindricity of the work. Based on this concept, there is no need for mechanical adjustment of the column, and simple and highly reliable correction is possible.
【０００８】[0008]
【課題を解決するための手段】図１および図２はそれぞ
れ本発明の第１および第２の原理説明図である。図１お
よび図２において、回転直動機能形真円度測定機のワー
クを載置する回転台の回転軸心と、該ワークの各断面の
真円度を測定する検出器を上下するためのコラムの検出
器送り方向の真直度軸心との平行度誤差を測定する本発
明による一つ方法および他の方法がそれぞれ示されてい
る。FIGS. 1 and 2 are explanatory views of the first and second principles of the present invention, respectively. In FIGS. 1 and 2, a rotary axis center of a rotary table on which a work of a rotary / linear motion type roundness measuring machine is placed and a detector for measuring the roundness of each cross section of the work are moved up and down. One method and another method according to the invention for measuring the parallelism error of the column in the detector feed direction with the straightness axis are respectively shown.
【０００９】図１において、ステップ１１では回転台に
円筒度が許容範囲にあるように予め加工された円筒マス
ターを載置し、ステップ１２では回転軸心と円筒マスタ
ーの軸心とが平行になるように円筒マスターの傾きを調
整し、そしてステップ３では円筒マスターの表面の２点
間で検出器により円筒マスターの表面をトレースするこ
とによりコラムの真直度軸心の該回転軸心に対する傾斜
量を求め、この傾斜量を平行度誤差とする。In FIG. 1, in step 11, a cylinder master preprocessed so that the cylindricity is within an allowable range is placed on the turntable, and in step 12, the axis of rotation and the axis of the cylinder master are parallel to each other. The tilt of the cylinder master is adjusted as described above, and in step 3, the surface of the cylinder master is traced by a detector between two points on the surface of the cylinder master to determine the tilt amount of the straightness axis of the column with respect to the rotation axis. Then, this tilt amount is taken as a parallelism error.
【００１０】図２において、ステップ２１で回転台に球
状の真円度マスターを載置し、ステップ２２で真円度マ
スターの第１の測定点で真円度マスターの径を検出器に
より測定してその測定値を記憶し、ステップ２３で真円
度マスターと回転台の間に所定の長さのスペーサを挿入
し、ステップ２４でスペーサが挿入された状態で真円度
マスターの第２の測定点で真円度マスターの径を該検出
器により測定してその測定値を記憶し、ステップ２５で
第１の測定点での真円度マスターの径と第２の測定点で
の真円度マスターの径との径差とスペーサの高さとから
コラムの真直度軸心の回転軸心に対する傾斜量を求め、
この傾斜量を平行度誤差とする。In FIG. 2, in step 21, a spherical roundness master is placed on the turntable, and in step 22, the diameter of the roundness master is measured by the detector at the first measurement point of the roundness master. The measured value is stored in step 23, a spacer having a predetermined length is inserted between the roundness master and the rotary base in step 23, and the second measurement of the roundness master is performed in the state where the spacer is inserted in step 24. The diameter of the circularity master at the point is measured by the detector and the measured value is stored, and in step 25, the diameter of the circularity master at the first measuring point and the circularity at the second measuring point are stored. From the diameter difference from the diameter of the master and the height of the spacer, find the amount of inclination of the straightness axis of the column with respect to the rotation axis,
This tilt amount is taken as a parallelism error.
【００１１】図３は本発明の第３の原理説明図であっ
て、回転直動機能形真円度測定機による円筒度または径
差の補正方法が示されている。ステップ３１で回転台に
ワークを載置し、ステップ３２で指定位置においてワー
クの円筒形状または径差を検出器により測定し、ステッ
プ３３で測定された円筒度または径差から該指定位置に
対応する前記傾斜量を差し引くことにより円筒度または
径差の補正をする。FIG. 3 is an explanatory view of a third principle of the present invention, and shows a method of correcting cylindricity or a diameter difference by a rotary / linear motion type roundness measuring machine. In step 31, the work is placed on the rotary table, and in step 32, the cylindrical shape or the diameter difference of the work is measured by the detector at the designated position, and the cylindricity or the diameter difference measured in step 33 corresponds to the designated position. The cylindricity or the diameter difference is corrected by subtracting the inclination amount.
【００１２】[0012]
【作用】本発明の第１および第２の原理によれば、円筒
マスターまたは真円度マスターを用いて、コラムの傾斜
量を予め測定し、その測定値を記憶しておく。そして、
本発明の第３の原理により、実際のワークの測定値を記
憶されている傾斜量で補正することにより、正確な径差
又は円筒度が得られる。機械的な調整は不要なので、径
差または円筒度の測定が極めて簡単且つ正確になる。According to the first and second principles of the present invention, the amount of tilt of the column is measured in advance using the cylindrical master or the circularity master, and the measured value is stored. And
According to the third principle of the present invention, by correcting the actual measured value of the work with the stored inclination amount, an accurate diameter difference or cylindricity can be obtained. Since no mechanical adjustment is required, measuring the difference in diameter or cylindricity is extremely simple and accurate.
【００１３】[0013]
【実施例】以下、本発明の実施例を詳述する。図４は本
発明の第１の実施例の説明図、図５は図４のコラム２の
平行度の説明図、図６は第１の実施例におけるマイクロ
プロセッサによる処理を説明するフローチャートであ
る。図４において、コラム２の軸心５は回転軸心６に対
して傾いている様子を誇張して描いてある。コラム２の
軸心５に平行に移動可能な検出器４１がコラム２に設け
られており、検出器４１の先端部に位置検出センサ４２
がワークの表面に当接するようになっている。EXAMPLES Examples of the present invention will be described in detail below. FIG. 4 is an explanatory diagram of the first embodiment of the present invention, FIG. 5 is an explanatory diagram of the parallelism of the column 2 of FIG. 4, and FIG. 6 is a flowchart for explaining the processing by the microprocessor in the first embodiment. In FIG. 4, the axis 5 of the column 2 is exaggeratedly drawn with respect to the rotation axis 6. A detector 41 that is movable in parallel with the axis 5 of the column 2 is provided in the column 2, and a position detection sensor 42 is provided at the tip of the detector 41.
Touches the surface of the work.
【００１４】本実施例では、まず円筒マスター４３を回
転台１の上に載置する。円筒マスター４３は、円筒度が
許容範囲にあるように予め加工されており、理想的な円
筒度を有する。この円筒マスター４３の表面の点Ａと点
Ｂの位置で回転軸心６と円筒マスター４３の軸心を一致
させる。この一致は、回転台１に設けられている調整ネ
ジ４４を調整する等により行う。調整ネジ４４の調整に
より、回転台１の上部４５の円盤のみの傾きを変化させ
ることができるが、回転台１の下部４６は固定されたま
まである。In this embodiment, first, the cylindrical master 43 is placed on the rotary table 1. The cylinder master 43 is preprocessed so that the cylindricity is within an allowable range, and has an ideal cylindricity. At the positions of points A and B on the surface of the cylindrical master 43, the rotation axis 6 and the axis of the cylindrical master 43 are aligned. This matching is performed by adjusting the adjusting screw 44 provided on the rotary table 1. By adjusting the adjusting screw 44, the inclination of only the disk of the upper part 45 of the rotary table 1 can be changed, but the lower part 46 of the rotary table 1 remains fixed.
【００１５】次いで、図６に示すように、検出器４１の
センサー４２により円筒マスター４３の表面を点Ａから
点Ｂまで直動測定によりトレースして、各点での位置デ
ータを採取する（ステップ６１）。ステップ６２では採
取したデータをもとに最小自乗法により、コラム２の軸
心５の傾斜量を算出する。そして、ステップ６３で算出
した傾斜量を平行度補正量としてメモリ（図示せず）に
格納する。平行度補正量は、図５に示すように、点Ａと
点Ｂにおける円筒マスター４３の表面の測定位置のずれ
ｅを、点Ａと点Ｂの間の距離Ｌで割った値となる。Then, as shown in FIG. 6, the sensor 42 of the detector 41 traces the surface of the cylindrical master 43 from the point A to the point B by the linear motion measurement, and the position data at each point is collected (step. 61). In step 62, the amount of inclination of the axis 5 of the column 2 is calculated by the least squares method based on the collected data. Then, the tilt amount calculated in step 63 is stored in a memory (not shown) as a parallelism correction amount. As shown in FIG. 5, the parallelism correction amount is a value obtained by dividing the displacement e of the measurement position on the surface of the cylindrical master 43 at the points A and B by the distance L between the points A and B.
【００１６】このように、コラム２の軸心５の回転軸心
６に対する平行度補正量を予め測定して記憶しておくこ
とにより、従来のようにコラム２の軸心５を回転軸心６
に平行になるように機械的に調整する必要はなくなる。
図７は本発明の第２の実施例の説明図、図８は図７のコ
ラム２の平行度の説明図、図９は第２の実施例における
マイクロプロセッサによる処理を説明するフローチャー
トである。図７（ａ）および（ｂ）において、図４と同
様にコラム２の軸心５は回転軸心６に対して傾いている
様子を誇張して描いてある。As described above, the parallelism correction amount of the shaft center 5 of the column 2 with respect to the rotation shaft center 6 is measured and stored in advance, whereby the shaft center 5 of the column 2 is rotated as in the conventional case.
There is no need for mechanical adjustment to be parallel to.
FIG. 7 is an explanatory diagram of the second embodiment of the present invention, FIG. 8 is an explanatory diagram of the parallelism of the column 2 in FIG. 7, and FIG. 9 is a flow chart for explaining the processing by the microprocessor in the second embodiment. 7 (a) and 7 (b), the shaft center 5 of the column 2 is exaggeratedly drawn with respect to the rotation shaft center 6 as in FIG.
【００１７】図７（ａ）では、回転台１の上に球状真円
度マスター載置台７１を直接載せて、その載置台７１の
上に球状真円度マスター７２を載せ、その球状真円度マ
スター７２の径を検出器４１により測定する。図７
（ｂ）では、回転台１の上に、長さＬのスペーサ７３を
載せ、そのスペーサ７３の上に図７（ａ）で使用したも
のと同一の球状真円度マスター載置台７１および球状真
円度マスター７２を載せ、この状態で球状真円度マスタ
ー７２の径を検出器４１により測定する。In FIG. 7A, the spherical roundness master mounting table 71 is directly placed on the rotary table 1, the spherical roundness master 72 is mounted on the mounting table 71, and the spherical roundness thereof is placed. The diameter of the master 72 is measured by the detector 41. Figure 7
In (b), a spacer 73 having a length L is placed on the rotary table 1, and the same spherical roundness master mounting table 71 and spherical spherical table as those used in FIG. 7A are mounted on the spacer 73. The circularity master 72 is placed, and in this state, the diameter of the spherical circularity master 72 is measured by the detector 41.
【００１８】図８に示すように、上記２つの径は２つの
円で表され、その半径差ｅをスペーサ７３の長さＬで割
った値が回転軸心６に対するコラム２の軸心５の平行度
補正量になる。図９により、上記の平行度補正量の算出
プロセスを詳述する。ステップ９１で点Ａで径の測定を
行いデータを採取してメモリに格納する。ステップ９２
で点Ｂで径測定を行いデータを採取してメモリに格納す
る。ステップ９３でＡ点のデータとＢ点のデータの半径
の差を算出しメモリに格納する。ステップ９４でＡ点の
データとＢ点のデータの高差Ｌとステップ９３で求めた
半径の差から、コラム２の軸心５の回転軸心６に対する
傾斜量を算出する。ステップ９５で、算出した傾斜量を
平行度補正量としてメモリに格納する。As shown in FIG. 8, the two diameters are represented by two circles, and the value obtained by dividing the radius difference e by the length L of the spacer 73 corresponds to the axis 5 of the column 2 with respect to the axis 6 of rotation. It is the parallelism correction amount. The calculation process of the parallelism correction amount will be described in detail with reference to FIG. In step 91, the diameter is measured at the point A, data is collected and stored in the memory. Step 92
At point B, the diameter is measured, data is collected and stored in the memory. In step 93, the difference in radius between the data at point A and the data at point B is calculated and stored in the memory. In step 94, the inclination amount of the shaft center 5 of the column 2 with respect to the rotation shaft center 6 is calculated from the height difference L between the data of the point A and the data of the point B and the difference in radius obtained in step 93. In step 95, the calculated tilt amount is stored in the memory as a parallelism correction amount.
【００１９】この第２の実施例によっても、コラム２の
軸心５の回転軸心６に対する平行度補正量を予め測定し
て記憶しておくことにより、従来のようにコラム２の軸
心５を回転軸心６に平行になるように機械的に調整する
必要はなくなる。図１０は本発明の第３の実施例による
回転軸心と真直度軸心の平行度補正処理を説明するフロ
ーチャートである。同図において、マイクロプロセッサ
による回転台１に置かれたワークの表面の指定位置より
直動測定とその平行度補正が説明される。ステップ１０
１で検出器４１をコラム２に沿って移動させ、測定開始
位置に持ってくる。ステップ１０２で検出器４１による
測定データをマイクロプロセッサによりメモリに取り込
む。ステップ１０３で検出器４１のコラム２上の位置に
対応する平行度補正量を算出し、ステップ１０４て検出
器４１の出力データをこの平行度補正量により補正す
る。ステップ１０５で指定測定量が終了したかを判別
し、否であればステップ１０１〜１０４を繰り返す。Also according to the second embodiment, the parallelism correction amount of the shaft center 5 of the column 2 with respect to the rotation shaft center 6 is measured and stored in advance, so that the shaft center 5 of the column 2 as in the prior art. Need not be mechanically adjusted to be parallel to the axis of rotation 6. FIG. 10 is a flow chart for explaining the parallelism correction processing of the rotation axis and the straightness axis according to the third embodiment of the present invention. In the figure, the linear motion measurement and its parallelism correction will be described from the specified position on the surface of the workpiece placed on the rotary table 1 by the microprocessor. Step 10
At 1, the detector 41 is moved along the column 2 and brought to the measurement start position. In step 102, the measurement data from the detector 41 is loaded into the memory by the microprocessor. In step 103, the parallelism correction amount corresponding to the position of the detector 41 on the column 2 is calculated, and in step 104, the output data of the detector 41 is corrected by this parallelism correction amount. In step 105, it is determined whether or not the designated measurement amount has ended, and if not, steps 101 to 104 are repeated.
【００２０】[0020]
【発明の効果】以上の説明から明らかなように、本発明
によれば、円筒マスターまたは真円度マスターにより予
めコラムの補正量を求めておき、この補正量に基づきワ
ークの測定値をソフトウエア処理により補正するように
したので、コラムの平行度を機械的に調整する必要はな
くなるので、コラムの組立調整工数を短縮でき、回転直
動機能形真円度測定機の機種による誤差のばらつきによ
る測定値の信頼度の低下を防止できる。As is apparent from the above description, according to the present invention, the correction amount of the column is obtained in advance by the cylinder master or the circularity master, and the measured value of the workpiece is calculated by the software based on the correction amount. Since the correction is done by processing, it is not necessary to mechanically adjust the parallelism of the column, so the number of man-hours for adjusting and assembling the column can be shortened. It is possible to prevent a decrease in the reliability of the measured value.
【図１】本発明の第１の原理説明図である。FIG. 1 is a diagram illustrating a first principle of the present invention.
【図２】本発明の第２の原理説明図である。FIG. 2 is a diagram illustrating a second principle of the present invention.
【図３】本発明の第３の原理説明図である。FIG. 3 is a diagram illustrating a third principle of the present invention.
【図４】本発明の第１の実施例を説明する図である。FIG. 4 is a diagram illustrating a first embodiment of the present invention.
【図５】図４のコラム２の平行度の説明図である。5 is an explanatory diagram of parallelism of column 2 in FIG. 4. FIG.
【図６】第１の実施例におけるマイクロプロセッサによ
る処理を説明するフローチャートである。FIG. 6 is a flowchart illustrating processing performed by the microprocessor according to the first embodiment.
【図７】本発明の第２の実施例を説明する図である。FIG. 7 is a diagram illustrating a second embodiment of the present invention.
【図８】図７で説明した方法による平行度の説明図であ
る。FIG. 8 is an explanatory diagram of parallelism by the method described in FIG.
【図９】第２の実施例におけるマイクロプロセッサによ
る処理を説明するフローチャートである。FIG. 9 is a flowchart illustrating a process performed by a microprocessor according to the second embodiment.
【図１０】本発明の第３の実施例を説明するフローチャ
ートである。FIG. 10 is a flow chart illustrating a third embodiment of the present invention.
【図１１】従来のコラムの調整方法の説明図である。FIG. 11 is an explanatory diagram of a conventional column adjusting method.
【図１２】従来のラコムの他の調整方法の説明図であ
る。FIG. 12 is an explanatory diagram of another conventional adjustment method of a racom.
１…回転台 ２…コラム ３…支点 ４…調整ネジ ５…コラムの軸心 ５…回転軸心 ７…シム ４１…検出器 ４２…センサー ４３…円筒マスター ７２…真円度マスター 1 ... Rotating table 2 ... Column 3 ... Support point 4 ... Adjustment screw 5 ... Column axis 5 ... Rotation axis 7 ... Shim 41 ... Detector 42 ... Sensor 43 ... Cylindrical master 72 ... Roundness master
Claims (4)
該ワークの各断面の真円度を測定する検出器を上下する
ためのコラムの検出器送り方向の真直度軸心との平行度
誤差を測定する方法であって、 該回転台に円筒度が許容範囲にあるように予め加工され
た円筒マスターを載置し、 該回転軸心と該円筒マスターの軸心とが平行になるよう
に該円筒マスターの傾きを調整し、そして該円筒マスタ
ーの表面の２点間で該検出器により該円筒マスターの表
面をトレースすることにより該コラムの真直度軸心の該
回転軸心に対する傾斜量を求め、 該傾斜量を平行度誤差とすることを特徴とする、回転直
動機能形真円度測定機の回転軸心と真直度軸心の平行度
誤差の測定方法。1. A rotary shaft center of a rotary table on which a work is placed,
A method for measuring the roundness of the cross section of the workpiece and measuring the parallelism error with the straightness axis of the detector in the column for moving the detector up and down. A cylinder master preprocessed so as to be in an allowable range is placed, the inclination of the cylinder master is adjusted so that the rotation axis and the axis of the cylinder master are parallel, and the surface of the cylinder master is adjusted. By tracing the surface of the cylindrical master with the detector between the two points, the inclination amount of the straightness axis of the column with respect to the rotation axis is taken as the parallelism error. A method for measuring the parallelism error between the rotation axis and straightness axis of a rotation / linear motion type roundness measuring machine.
該ワークの各断面の真円度を測定する検出器を上下する
ためのコラムの検出器送り方向の真直度軸心との平行度
誤差を測定する方法であって、 該回転台に真円度が許容範囲にあるように予め加工され
た球状の真円度マスターを載置し、 該真円度マスターの第１の測定点で該真円度マスターの
径を該検出器により測定してその測定値を記憶し、 該真円度マスターと該回転台の間に所定の長さのスペー
サを挿入し、 該スペーサが挿入された状態で該真円度マスターの第２
の測定点で該真円度マスターの径を該検出器により測定
してその測定値を記憶し、 該第１の測定点での該真円度マスターの径と該第２の測
定点での該真円度マスターの径との径差と、該スペーサ
の高さとから該コラムの真直度軸心の該回転軸心に対す
る傾斜量を求め、 該傾斜量を平行度誤差とすることを特徴とする、回転直
動機能形真円度測定機の回転軸心と真直度軸心の平行度
誤差の測定方法。2. A rotary shaft center of a rotary table on which a work is placed,
A method for measuring the roundness of each cross section of the workpiece, a method of measuring the parallelism error with the axis of the detector of the column for moving the detector up and down, and the roundness of the rotary table. Is placed in a permissible range, a spherical roundness master preliminarily processed is placed, and the diameter of the roundness master is measured by the detector at the first measurement point of the roundness master. A measured value is stored, a spacer having a predetermined length is inserted between the roundness master and the rotary table, and the second roundness of the roundness master is maintained with the spacer inserted.
At the measuring point, the diameter of the circularity master is measured by the detector, and the measured value is stored, and the diameter of the circularity master at the first measuring point and the diameter of the circularity master at the second measuring point are stored. The inclination amount of the straightness axis of the column with respect to the rotation axis is obtained from the diameter difference from the diameter of the circularity master and the height of the spacer, and the inclination amount is defined as a parallelism error. A method for measuring the parallelism error between the rotation axis and straightness axis of a rotation / linear motion type roundness measuring machine.
い、 該回転台にワークを載置し、 指定位置において該ワークの円筒度を該検出器により測
定し、 該測定された円筒度から該指定位置に対応する前記傾斜
量を差し引くことにより平行度誤差を補正した正確な円
筒度の測定を行うことを特徴とする、回転直動機能形真
円度測定機による円筒度補正方法。3. The measuring method according to claim 1 or 2, wherein a work is placed on the rotary table, the cylindricity of the work is measured by the detector at a designated position, and the measured cylindricity is measured. A cylindricity correction method using a rotation / linear motion type roundness measuring machine, characterized in that the cylindricity is accurately measured by subtracting the inclination amount corresponding to the designated position from the parallelism error.
い、 該回転台にワークを載置し、 指定位置において該ワークの径差を該検出器により測定
し、 該測定された径差から該指定位置に対応する前記傾斜量
を差し引くことにより、平行度誤差を補正した正確な径
差測定を行うことを特徴とする、回転直動機能形真円度
測定機による径差補正方法。4. The measuring method according to claim 1 or 2, wherein a workpiece is placed on the rotary table, and a diameter difference of the workpiece is measured by the detector at a designated position, and the measured diameter difference is measured. A method for correcting a diameter difference by a rotation / linear motion type roundness measuring machine, characterized in that the diameter difference is corrected by correcting the parallelism error by subtracting the inclination amount corresponding to the designated position from the value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP857292A JP2774007B2 (en) | 1992-01-21 | 1992-01-21 | Measuring method of parallelism error between rotation axis and straightness axis of roundness measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP857292A JP2774007B2 (en) | 1992-01-21 | 1992-01-21 | Measuring method of parallelism error between rotation axis and straightness axis of roundness measuring machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05196411A true JPH05196411A (en) | 1993-08-06 |
| JP2774007B2 JP2774007B2 (en) | 1998-07-09 |
Family
ID=11696763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP857292A Expired - Fee Related JP2774007B2 (en) | 1992-01-21 | 1992-01-21 | Measuring method of parallelism error between rotation axis and straightness axis of roundness measuring machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2774007B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007240201A (en) * | 2006-03-06 | 2007-09-20 | Nsk Ltd | Taper angle measuring method and apparatus |
| JP2010032474A (en) * | 2008-07-31 | 2010-02-12 | Mitsutoyo Corp | Shape measuring apparatus and shape measuring technique |
| JP2010223865A (en) * | 2009-03-25 | 2010-10-07 | Mitsutoyo Corp | Corrected ball diameter calculating method and form measuring instrument |
| JP2011117841A (en) * | 2009-12-03 | 2011-06-16 | Tokyo Seimitsu Co Ltd | Method for calibrating measurement precision of roundness measuring machine |
| JP7152086B1 (en) * | 2021-07-30 | 2022-10-12 | 有限会社ピーシー・テクニクス | Rotation axis calibration jig, rotation axis calibration method, maintenance jig |
-
1992
- 1992-01-21 JP JP857292A patent/JP2774007B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007240201A (en) * | 2006-03-06 | 2007-09-20 | Nsk Ltd | Taper angle measuring method and apparatus |
| JP2010032474A (en) * | 2008-07-31 | 2010-02-12 | Mitsutoyo Corp | Shape measuring apparatus and shape measuring technique |
| EP2149775A3 (en) * | 2008-07-31 | 2014-04-16 | Mitutoyo Corporation | Profile measuring instrument and profile measuring method |
| JP2010223865A (en) * | 2009-03-25 | 2010-10-07 | Mitsutoyo Corp | Corrected ball diameter calculating method and form measuring instrument |
| JP2011117841A (en) * | 2009-12-03 | 2011-06-16 | Tokyo Seimitsu Co Ltd | Method for calibrating measurement precision of roundness measuring machine |
| JP7152086B1 (en) * | 2021-07-30 | 2022-10-12 | 有限会社ピーシー・テクニクス | Rotation axis calibration jig, rotation axis calibration method, maintenance jig |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2774007B2 (en) | 1998-07-09 |
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