JP7152086B1 - Rotation axis calibration jig, rotation axis calibration method, maintenance jig - Google Patents

Abstract

An object of the present invention is to shorten calibration work and improve work efficiency. A calibration jig registers a coordinate system of a rotary table of a three-dimensional measuring machine. The calibration jig has a cylindrical measurement portion 71 extending along the rotation axis of the rotary table, and a flange portion 72 extending radially outward around the proximal end of the measurement cylindrical portion 71 . A distal measurement cylindrical surface 74 is formed at the distal end of the cylindrical measurement portion 71 . A proximal measurement cylinder surface 75 is formed at the proximal end of the measurement cylinder portion 71 . A measurement flange plane is formed on the side of the flange portion 72 close to the measurement cylindrical portion 71 . The flange portion 72 serves as a base portion for installing the cylindrical measurement portion 71 on the rotary table. [Selection drawing] Fig. 23

Description

The present invention relates to a rotation axis calibrating jig, a rotation axis calibrating method , and a maintenance jig , and more particularly to a technology suitable for three-dimensional measurement using a rotary table.

2. Description of the Related Art Conventionally, there is known a three-dimensional measuring machine that measures the surface shape of a work (object to be measured) using a contact that contacts the work. In such a three-dimensional measuring machine, a workpiece is placed on a rotary table and measured (see Patent Documents 1 and 2, for example).
In such a three-dimensional measuring machine, when performing measurement using a turntable, it is necessary to register the coordinate system of the turntable in advance.
As shown in FIG. 16 in Patent Document 2, a master ball 9 (reference sphere) fixed to a point (reference point) near the outer circumference of the surface of the rotary table 50 is usually used for registration of the coordinate system of the rotary table 50 . be done. The master ball 9 is fixed to the surface of the rotary table 50 by, for example, screwing a supporting shaft into a screw hole.

When registering the coordinate system of the rotary table 50 using such a master ball 9, the rotary table 50 is rotated to three or more angular positions (for example, 0 degrees, 120 degrees, and 240 degrees), and each angle is At the position, the center position of the master ball 9 (center position in spatial coordinates) is measured. Normally, to measure the center position of the master ball 9, the tip sphere 17A of the probe 17 is brought into contact with four points on the equator and one point on the vertex of the surface of the master ball 9 in sequence, and point measurements are performed a total of five times.
As shown in FIG. 17 in Patent Document 2, if three or more reference points (S1 to S3) can be measured, one circle can be specified by these reference points, and the center position of this circle can be determined from the coordinates of the rotary table 50. The origin Ot is set, the X-axis (Xt) and Y-axis (Yt) are set along the plane containing this circle, and the normal to the same plane passing through the origin Ot is set as the Z-axis (Zt). When performing such work, it is customary to remove elements other than the master ball from the rotary table.

Japanese Patent Application Laid-Open No. 2001-264048 JP 2012-083192 A Japanese Unexamined Patent Application Publication No. 2021-008030

In the registration of the rotary table coordinate system described above, in order to measure the reference point, that is, the master ball center position at three or more angular positions, it is necessary to measure at least 15 points, resulting in a problem of long measurement time. be.
In addition, each point measurement on the surface of the master ball cannot avoid probing errors (errors due to the measurement accuracy of the probe). Accumulation of errors is unavoidable. As a result, when the procedure for registering the rotary table coordinate system described above is used, there is a problem that the accuracy of the rotary table coordinate system becomes insufficient even if the probing error in each point measurement is slight.

Furthermore, although the axis of rotation of the rotary table is assumed to be positioned vertically, in reality, it is not exactly vertical, which causes errors in surface profile measurement of the workpiece. In addition, there is a problem that the registration of the coordinate system of the rotary table may not be accurate in the first place.
When a chuck is used to calibrate the rotation axis of the rotary table, it is necessary to apply a load in the radial direction to the rotary shaft, as described in Patent Document 3, thereby further rotating the rotary table. There was a problem that the axis line could be misaligned.

In addition, every time the workpiece to be measured is fixed and placed on the rotary table, it is necessary to register and/or calibrate the coordinate system of the rotary table. was there.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and is intended to reduce the number of work steps and work time required for calibrating a rotary table of a three-dimensional measuring machine with a simple configuration, improve the measurement efficiency, and improve the measurement accuracy. An object of the present invention is to provide a clamping device, a fixing jig, a rotational axis calibrating jig, a rotational axis calibrating method , and a maintenance jig for a three-dimensional measuring machine , all of which can be improved.

As a means for solving the above problems, the invention described in claim 1,
A calibration jig for registering a coordinate system of a rotary table of a three-dimensional measuring machine,
a measuring cylinder extending along the axis of rotation of the rotary table;
a flange portion that expands radially outward around the proximal end of the measurement cylinder;
has
a tip measurement cylinder surface formed at the tip of the measurement cylinder part;
a proximal measurement cylindrical surface formed at the proximal end of the measurement cylindrical portion;
has
The flange portion serves as a base portion for installing the measurement cylinder portion on the rotary table,
Rotational axis calibration jig.
The invention described in claim 2,
A method for calibrating the rotation axis of a rotary table when registering the coordinate system of the rotary table of a three-dimensional measuring machine using the rotary axis calibration jig according to claim 1, comprising:
a step of installing the rotary axis calibrating jig on the rotary table;
a step of reading the rotation axis of the rotation axis calibrating jig;
rotating the rotary table by a predetermined angle;
a step of reading the rotation axis of the rotation axis calibrating jig after rotating the rotary table by a predetermined angle;
a step of calculating the rotation axis of the rotary table from the rotation axis of the rotation axis calibrating jig read a plurality of times;
having
Rotation axis calibration method.
The invention described in claim 3 is
In the step of reading the rotation axis of the rotation axis calibration jig,
reading the coordinate position of the tip measurement cylindrical surface;
reading the coordinate position of the proximal measurement cylinder surface;
having
3. The rotation axis calibrating method according to claim 2.
The invention described in claim 4,
A maintenance jig used when removing the rotational axis calibrating jig according to claim 1 or the rotational axis calibrating jig used in the rotational axis calibrating method according to claim 2 or 3 from the rotary table,
The base portion of the jig for calibrating the rotational axis line is provided with a locked portion having a locked end portion having an inclined fixing surface that expands in diameter toward the end portion on a cylindrical outer peripheral surface,
The rotary table is provided with a fixing jig having a clamp device for positioning and fixing the locked portion,
The clamping device
Two locking protrusions that hold the inclined fixing surface from both diametrically outer sides and pull the locked portion in a tensile direction in which the inclined fixing surface expands around the axis to regulate the locking position. a locking piece;
a drive unit for moving the locking pieces toward and away from each other;
has
The locking piece is
a columnar portion provided with the locking convex portion at the tip thereof and extending along the pulling direction;
The locking piece is provided at the base end position of the columnar portion to enable movement of the locking piece in the moving direction that is the diametrical direction, and to move the locking piece in the thickness direction orthogonal to the pulling direction and the moving direction. a movement regulation unit that regulates the movement of
with
The movement control unit includes:
a first regulating surface along the moving direction and the thickness direction;
a second regulating surface that slides against the first regulating surface of the corresponding locking piece;
a third restricting surface along the moving direction, intersecting the pulling direction and orthogonal to the first restricting surface;
is formed,
the movement restricting portion has a substantially rectangular parallelepiped that is unevenly distributed in the thickness direction with a half thickness of the locking protrusion and extends in the movement direction;
in the movement restricting portion, the third restricting surface is formed at a central position in the thickness direction at the base end position of each of the columnar portions and faces each other;
In the movement restricting portion, the first restricting surface extends from the proximal position of one of the columnar portions toward the proximal position of the other columnar portion, and the second restricting surface extends from the locking position of the other columnar portion. facing the first restricting surface in the tensile direction at the base end position of the convex portion;
In the two movement restricting portions, the respective third restricting surfaces slide on each other, and one of the first restricting surfaces and the other of the second restricting surfaces slide on each other,
The movement restricting portion has a projecting portion that projects outward in the thickness direction and extends in the moving direction, and the projecting portion includes a fourth restriction that restricts movement of the locking piece portion in the pulling direction. A face is provided,
The fixing jig is
a fixed base portion having a restricting groove extending in the moving direction so that the clamping device can be fitted so that the locking projection and the columnar portion protrude in the pulling direction, and which is attached to the rotary table;
The locked end portion is fixed by the locking convex portion in a state where the locking piece portion is covered with respect to the fixed base portion so that the locking piece portion can move along the regulation groove. a fixing hole having a possible through hole;
a rotation restricting portion that can restrict rotation of the locked portion with respect to the fixing hole when the locked end is inserted into the fixing hole;
has
The restricting groove of the fixing base has a widened portion inside in the pulling direction that allows the protrusion to move along the moving direction when the clamping device is fitted therein,
The maintenance jig has a cylindrical portion, a hook portion, and an extrusion portion,
The columnar portion is insertable from a lower end portion into the through hole of the fixing hole portion, and accommodates therein the push-out portion that can protrude downward from the lower end portion. A storage recess is formed in the
The hook portion is arranged in the storage recess, and is housed inside the storage recess so as not to protrude radially outward from the outer peripheral surface of the cylindrical portion. It is possible to transition to a protruding state that protrudes radially outward from the outer peripheral surface,
maintenance fixtures.

The present invention described in (1) is
A clamp device for positioning and fixing a locked portion having a locked end portion having an inclined fixing surface that expands in diameter toward the end portion on a cylindrical outer peripheral surface, the clamp device comprising:
Two locking protrusions that hold the inclined fixing surface from both diametrically outer sides and pull the locked portion in a tensile direction in which the inclined fixing surface expands around the axis to regulate the locking position. a locking piece;
a drive unit for moving the locking pieces toward and away from each other;
has
The locking piece is
a columnar portion provided with the locking convex portion at the tip thereof and extending along the pulling direction;
The locking piece is provided at the base end position of the columnar portion to enable movement of the locking piece in the moving direction that is the diametrical direction, and to move the locking piece in the thickness direction orthogonal to the pulling direction and the moving direction. a movement regulation unit that regulates the movement of
with
The movement control unit includes:
a first regulating surface along the moving direction and the thickness direction;
a second regulating surface that slides against the first regulating surface of the corresponding locking piece;
a third restricting surface along the moving direction, intersecting the pulling direction and orthogonal to the first restricting surface;
is formed,
the movement restricting portion has a substantially rectangular parallelepiped that is unevenly distributed in the thickness direction with a half thickness of the locking protrusion and extends in the movement direction;
in the movement restricting portion, the third restricting surface is formed at a central position in the thickness direction at the base end position of each of the columnar portions and faces each other;
In the movement restricting portion, the first restricting surface extends from the proximal position of one of the columnar portions toward the proximal position of the other columnar portion, and the second restricting surface extends from the locking position of the other columnar portion. facing the first restricting surface in the tensile direction at the base end position of the convex portion;
In the two movement restricting portions, the respective third restricting surfaces slide on each other, and one of the first restricting surfaces and the other of the second restricting surfaces slide on each other.
clamping device.
According to the invention described in ( 1 ) , the two locking pieces are brought into contact with the locking protrusions that are brought close to each other by the drive unit, so that the locked end is pulled along the inclination of the inclined fixing surface. direction. Thereby, the locked portion can be positioned.
At this time, the first restricting surface and the second restricting surface slide against each other, thereby restricting the moving direction of the two locking pieces in the direction along the first restricting surface and the second restricting surface. . Similarly, the sliding of the third restricting surfaces restricts the movement of the two locking pieces in the direction along the third restricting surfaces. As a result, the direction in which the two locking pieces move is restricted to the movement direction that is the diameter direction of the cylindrical locked end.
At the same time, the first restricting surface is formed on the surface of the substantially rectangular parallelepiped that is half the thickness direction of the movement restricting portion, and the columnar portion in the tensile direction extends, and the second restricting surface is the columnar shape that is half the thickness direction without the substantially rectangular parallelepiped. The first regulating surface of one of the locking pieces is slidable in contact with the second regulating surface of the other locking piece, so that the two locking pieces There is no change in the attitude of the parts rotating about the axis in the thickness direction. Therefore, while the postures of the two locking pieces are maintained, it is possible to perform the operation of separating from each other and the operation of approaching each other by the drive unit.
In this state, the third restricting surface is formed at the center position in the thickness direction of the base end position of each of the columnar portions, and the third restricting surfaces of the two locking pieces slide against each other, Movement of the two locking pieces in the movement direction can be prevented from being inclined with respect to the movement direction.

The invention described in (2) is
The clamping device according to (1) above,
The drive unit
a female screw portion coaxially formed to extend along the movement direction at base end positions of the columnar portions of each other;
a male threaded portion having reverse threads formed on both ends thereof and screwed into the female threaded portion;
have
According to the invention described in ( 2 ) , it is possible to move the two locking pieces toward and away from each other in the movement direction only by rotating the male threaded portion of the driving portion. Therefore, there is no need to apply an extra load to the clamping device other than the rotation of the male threaded portion. In other words, there is no need to rotate the clamping device as a whole or apply an unnecessary load in the radial direction of the cylindrical end to be locked. Even if extremely precise fixation is required when fixing a correcting jig, etc., it is possible to prevent an excessive load from being applied to the rotary table or the measuring part, which would increase the inaccuracy of the measurement. .

The invention described in (3) is
The clamping device according to (1) or (2) above,
The movement restricting portion has a projecting portion that projects outward in the thickness direction and extends in the moving direction, and the projecting portion includes a fourth restriction that restricts movement of the locking piece portion in the pulling direction. faces are provided,
clamping device.
According to the invention described in ( 3 ) , when the two locking pieces approach each other and pull the locked end portion in the pulling direction, the fourth restricting surface of the projecting portion engages the two locking pieces. While restricting the movement of the projection, the fourth restricting surface of the projecting portion can receive the tensile force applied to the two locking pieces to pull the locked end portion. This makes it possible to easily position the locked portion.

The invention described in (4) is
A fixture comprising the clamping device according to (3) above,
a fixing base portion that has a restriction groove extending in the moving direction so that the clamping device can be fitted so that the locking projection and the columnar portion protrude in the pulling direction and that is attached to the rotary table;
The locked end portion is fixed by the locking convex portion in a state where the locking piece portion is covered with respect to the fixed base portion so that the locking piece portion can move along the regulation groove. a fixing hole having a possible through hole;
a rotation restricting portion that can restrict rotation of the locked portion with respect to the fixing hole when the locked end is inserted into the fixing hole;
has
The restricting groove of the fixing base has a widened portion inside in the pulling direction that allows the protrusion to move along the moving direction when the clamping device is fitted therein,
fixing jig.
According to the invention described in ( 4 ) , the restricting groove can restrict the moving direction of the movement restricting portion to the moving direction, and the widened portion of the restricting groove can apply pressure to the two locking pieces of the projecting portion. The locked end can be pulled under the tensile force applied. At this time, when the locked end portion is inserted into the fixing hole portion, the rotational position of the locked portion can be restricted with respect to the fixing hole portion by the rotation restricting portion. The locked portion can be accurately positioned and easily fixed.

The invention described in (5) is
A three-dimensional measuring machine comprising the fixture according to (4) above,
Having a rotary table to which the fixed base is attached,
A through hole in the fixing hole of the fixing jig is installed so as to be aligned with the rotation axis of the rotary table.
CMM.
According to the invention described in ( 5 ) , the rotation axis calibrating jig and the workpiece, which is the object to be measured, are installed on the rotation table of the three-dimensional measuring machine via the fixing jig. Without applying a large load in the radial direction of the axis to the fixing jig, it is possible to attach and detach the rotating axis calibrating jig and the workpiece to be measured. This is because when attaching and detaching using a clamp device, the locked end portion can be attached and detached simply by rotating the male screw portion of the driving portion. This is because there is no need to apply a large load. Therefore, the rotary table, the fixing jig, the rotary axis calibrating jig, the rotary axis relative to the work to be measured, etc. are not shaken or deviated, and accurate measurement can be performed by the three-dimensional measuring machine.

According to the first aspect of the invention, when registering the coordinate system of the rotary table of the three-dimensional measuring machine, the rotary axis calibrating jig is installed on the rotary table and the rotary axis of the rotary axis calibrating jig is read. , the rotary table is rotated by a predetermined angle, the rotary axis of the rotary axis calibration jig is read again, and the coordinate system of the rotary axis of the rotary table is obtained from the read data. Without going back and calibrating the rotation axis of the rotary table, it is possible to accurately acquire the surface shape data of the work by the three-dimensional measuring machine. As a result, it is possible to reduce the work procedure in the calibration process, shorten the calibration time, and greatly shorten the work time in the three-dimensional measurement. Since there is no need to temporarily remove the items on the rotary table during the work for rotating axis calibration, simply remove the rotating axis calibration jig and replace it with the plate jig on which the work is set, and it can be used for measurement once. In the case of a workpiece whose coordinate system has been established, measurement can be performed immediately.
Moreover, since the above-described locked end portion is formed coaxially with the cylindrical portion for measurement, it is possible to easily install the jig for calibrating the rotational axis line on the rotary table using the above-described fixing jig equipped with the clamping device. As a result, it becomes possible to calibrate the rotation axis accurately.
In addition, in the case of the movable rotary table, which has been selected by many users recently, it is easy to establish the rotation axis after moving the table, so there is no reason to hesitate to move the rotary table due to the necessity of setup. .

According to the second aspect of the invention, when registering the coordinate system of the rotary table of the three-dimensional measuring machine, the rotary table is rotated by a predetermined angle and the rotary axis of the rotary axis calibration jig is read a plurality of times. It is possible to obtain the rotation axis coordinates of the rotary table by calculating the central axis of the plurality of intersecting jig rotation axis data. At this time, on the premise that the rotation axis of the turntable is deviated from the actual vertical direction, a method of calibrating this is used to obtain the rotation axis coordinates of the turntable. It is possible to accurately acquire the surface shape data of the workpiece by the three-dimensional measuring machine without calibrating the rotation axis of the rotary table. In particular, even when the work that is the object to be measured is exchanged and a new measurement is performed, the previously acquired rotation axis coordinates of the rotary table can be used. Therefore, it is not necessary to reacquire the rotation axis coordinates of the rotary table. As a result, it is possible to reduce the work procedure in the calibration process, shorten the calibration time, and greatly shorten the work time in the three-dimensional measurement.

According to the third aspect of the invention, the rotation axis of the rotation axis calibration jig is determined by the operation of bringing the probe of the three-dimensional measuring machine into contact with the cylindrical surface for measurement at the distal end and the cylindrical surface for measurement at the proximal end and reading the coordinate positions. Make it easy to read. This makes it easier to read the rotation axis of the rotation axis calibrating jig a plurality of times, making it possible to easily acquire the rotation axis coordinates of the turntable.

According to the present invention, a clamping device and a fixing device capable of reducing the number of work steps and work time required for calibration of a rotary table of a three-dimensional measuring machine, improving measurement efficiency, and improving measurement accuracy with a simple configuration. It is possible to provide a jig, a rotation axis calibrating jig, a rotation axis calibrating method , and a maintenance jig for a three-dimensional measuring machine.

1 is a perspective view showing a first embodiment of a three-dimensional measuring machine according to the present invention; FIG. BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows 1st Embodiment of the fixing jig which concerns on this invention. FIG. 2 is a perspective view showing a locked portion to be locked to the first embodiment of the fixture according to the present invention; FIG. 4 is a cross-sectional view showing an inserted state of a locked portion in the fixing jig according to the first embodiment of the present invention; BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing which shows 1st Embodiment of the fixing jig which concerns on this invention. It is a sectional view showing the fixing hole in a 1st embodiment of the fixing jig concerning the present invention. 1 is a perspective view showing a state in which a fixing hole is detached in a first embodiment of a fixing jig according to the present invention; FIG. It is a top view which shows the fixing base part in 1st Embodiment of the fixing jig which concerns on this invention. It is a sectional view showing a fixed base part in a 1st embodiment of a fixture concerning the present invention. BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows 1st Embodiment of the clamp apparatus which concerns on this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is a cross-sectional perspective view which shows 1st Embodiment of the clamp device which concerns on this invention. 1 is an exploded perspective view showing a first embodiment of a clamping device according to the present invention; FIG. FIG. 4 is a front view showing a locking piece portion in the first embodiment of the clamping device according to the present invention; FIG. 4 is a side view showing a locking piece portion in the first embodiment of the clamp device according to the present invention; 1 is a front cross-sectional view showing a locking piece portion in a first embodiment of a clamp device according to the present invention; FIG. It is a bottom view showing a first embodiment of a clamping device according to the present invention. It is a rear view showing a first embodiment of a clamping device according to the present invention. It is a top view showing a 1st embodiment of a clamping device concerning the present invention. It is a front view showing a first embodiment of a clamping device according to the present invention. It is a left side view showing a 1st embodiment of a clamping device concerning the present invention. It is a right side view showing a 1st embodiment of a clamping device concerning the present invention. FIG. 7 is a perspective view showing a state where the second embodiment of the rotation axis calibrating jig according to the present invention is attached to a fixing jig; FIG. 6 is a perspective view showing a state in which the second embodiment of the rotation axis calibrating jig according to the present invention is removed from the fixing jig; FIG. 11 is a perspective view showing a maintenance jig for removing the fixing hole in the fixing jig according to the third embodiment of the present invention; FIG. 11 is a top view showing a maintenance jig for removing the fixing hole in the fixing jig according to the third embodiment of the present invention; FIG. 11 is a cross-sectional view showing a maintenance jig for removing the fixing hole in the fixing jig according to the third embodiment of the present invention; FIG. 11 is a cross-sectional view showing a maintenance jig for removing the fixing hole in the fixing jig according to the third embodiment of the present invention; FIG. 11 is a cross-sectional view showing a state in which a maintenance jig for removing the fixing hole is inserted in the fixing jig according to the third embodiment of the present invention; FIG. 11 is a cross-sectional view showing a state in which a fixing hole is removed by a maintenance jig in the fixing jig according to the third embodiment of the present invention;

A first embodiment of a clamping device, a fixture, and a three-dimensional measuring machine according to the present invention will be described below with reference to the drawings.
FIG. 1 is a perspective view showing a three-dimensional measuring machine according to this embodiment. In the drawing, reference numeral 1 denotes a three-dimensional measuring machine.

As shown in FIG. 1, the three-dimensional measuring machine 1 according to the present embodiment includes a rotary table 5 and a rotary table 5. The three-dimensional measuring machine 1 is drive-controlled to take in necessary measured values and perform arithmetic processing necessary for shape processing. and a computer 2 for executing.

The three-dimensional measuring machine 1 has a surface plate 11 with a horizontal upper surface. and a moving mechanism 19 that supports the contact-type probe 17 and can move to any position.
The rotary table 5 is supported by a rotation driving mechanism (not shown) installed in the surface plate 11 and is rotatable about an axis perpendicular to the upper surface of the surface plate 11 to any rotational angular position. The rotation drive mechanism has a function of detecting the rotation angle of the turntable 5 with respect to the surface plate 11 .

The moving mechanism 19 has beam supports 12A and 12B erected on both end sides of the surface plate 11, and beams 13 extending in the X-axis direction are supported from the upper ends of the support members 12A and 12B. The lower end of the beam support 12A is driven in the Y-axis direction by the Y-axis drive mechanism 14. As shown in FIG. The lower end of the beam support 12B is supported by an air bearing on the surface plate 11 so as to be movable in the Y-axis direction. A column 15 extending in the vertical direction (Z-axis direction) is supported by the beam 13, and the column 15 is driven along the beam 13 in the X-axis direction. A spindle 16 is supported by the column 15 and driven along the column 15 in the Z-axis direction. The drive mechanism for each axis has a function of detecting the position or amount of movement on each axis.

A probe 17 is attached to the lower end of the spindle 16 . A tip ball 17A, which is a spherical contact, is formed at the tip of the probe 17, for example. The probe 17 is moved by a moving mechanism 19, and the tip ball 17A can be brought into contact with an arbitrary surface such as a work W placed on the rotary table 5. FIG. In addition, the probe 17 can be automatically replaced with a probe having a different shape and orientation, such as a laterally facing shape (not shown), to perform the detection work.

The computer 2 includes a computer main body, a keyboard for operation, a display device, and an output section such as a printer.
The computer main body includes an arithmetic processing unit and a storage device (not shown), and is connected to the probe 17 via an interface (not shown).
The computer 2 is activated by an external operation, executes a recorded program to control the operation of the three-dimensional measuring machine 1, processes signals from the probe 17, and outputs specified measurement results. there is

In this embodiment, the probe 17 is three-dimensionally moved with respect to the surface plate 11 by the moving mechanism 19 , and the workpiece W and the like are rotated by the rotary table 5 . In such a configuration, prior to detecting the contact position of the tip ball 17A with respect to the workpiece W or the like, the coordinates between the surface plate 11 and the moving mechanism 19 are set, the rotation center of the rotary table 5 is set, and the rotation angle position is determined. It is necessary to set a related coordinate system, such as setting, setting of the placement position and attitude of the workpiece W, and the like. In order to measure the workpiece W using the rotary table 5, it is required to prepare the horizontal probe 17 calibrated with the probe 17 as a reference.

[fixing jig]
FIG. 2 is a perspective view showing the fixing jig 20 in this embodiment. FIG. 3 is a perspective view showing the locked portion W1 in this embodiment. FIG. 4 is a cross-sectional view showing a state in which the locked portion W1 in this embodiment is inserted into the fixture 20. As shown in FIG.
The fixing jig 20 is attached and fixed to the upper surface of the rotary table 5, as shown in FIG. The fixture 20 detachably attaches the work W and others to the rotary table 5 .
The fixing jig 20 has a fixing base portion 21, a fixing hole portion 22, and a clamp device 50, as shown in FIG.

The fixed base portion 21 is attached and fixed to the rotary table 5 . The fixed base portion 21 has a cylindrical base portion 21a, as shown in FIG. A fixed flange 21b to be attached to the rotary table 5 is formed at the outer peripheral lower end of the base portion 21a. The fixed flange 21b is expanded in diameter outward from the base portion 21a. Mounting holes 21c for mounting the fixed base portion 21 to the rotary table 5 with bolts B or the like are formed through the fixed flange 21b. A plurality of mounting holes 21c are formed at intervals in the circumferential direction of the fixed flange 21b.
The base portion 21a supports the clamp device 50 as described later.
A ridge 21d is provided around the upper edge of the base portion 21a.

As shown in FIG. 2, the fixing hole portion 22 is fitted and fixed to the fixing base portion 21 while covering the base portion 21a of the fixing base portion 21. As shown in FIG. The fixing hole portion 22 has a cylindrical shape with the same diameter as the base portion 21a. A notch 22 d is provided around the lower edge of the fixing hole 22 . The notch 22d corresponds to the protrusion 21d of the base portion 21a, and the fixing hole portion 22 is fitted into the fixing base portion 21, so that the fixing hole portion 22 and the fixing base portion 21 can be fixed to the spigot.

The fixing hole portion 22 is a through hole through which a locked end portion W3 formed on a locked portion W1, which is a work W or the like, which will be described later, can be inserted to fix the locked portion W1 to the fixing jig 20. It has holes 23 . The through hole 23 is vertically formed in the center of the fixing hole portion 22 . The through hole 23 is coaxially opened at the center position of the upper surface 22 a of the fixing hole portion 22 . The fixing jig 20 is installed in the through hole 23 so that the axis of the through hole 23 coincides with the rotation axis of the rotary table 5 .

An upper surface 22a of the fixing hole portion 22 is formed in a planar shape along the PT direction. The upper surface 22a of the fixing hole 22 has a circular contour when viewed in the Z direction.
As shown in FIG. 2, the fixed hole portion 22 has a rotation restricting portion 24 around the through hole 23 that restricts the rotation of the locked portion W1. The rotation restricting portion 24 is formed as a ridge on the upper surface 22 a of the fixing hole portion 22 . The rotation restricting portion 24 is formed by fitting a key member having a predetermined width into a groove formed in the upper surface 22 a of the fixing hole portion 22 .

A plurality of rotation restricting portions 24 are formed radially along the radial direction of the fixing hole portion 22 . For example, four rotation restricting portions 24 are provided in a substantially cross shape around the through hole 23 with the through hole 23 as the center. The rotation restricting portion 24 extends over the entire radial length of the fixing hole portion 22 . The rotation restricting portion 24 extends from the through hole 23 to the peripheral portion on the upper surface 22 a of the fixing hole portion 22 . The rotation restricting portion 24 is formed to have a uniform width over its entire length. The rotation restricting portion 24 is set to have the same height dimension protruding from the upper surface 22a in the Z direction over its entire length.

[Locked part]
As shown in FIG. 3, the engaged portion W1 is formed below the work W and others in order to attach the work W and others to the upper surface of the rotary table 5. As shown in FIG. The locked portion W1 has a flange portion W2 and a locked end portion W3.

The flange portion W<b>2 is placed on the upper surface 22 a of the fixing hole portion 22 . A lower surface W2b of the flange portion W2 is formed in a planar shape. A locked end portion W3 is formed in a central position of the lower surface W2b of the flange portion W2 so as to protrude downward. The diameter dimension of the flange portion W<b>2 can be formed to the same extent as the fixing hole portion 22 . The diameter dimension of the flange portion W2 is not particularly limited as long as it can be fixed to the locked portion W1 to the fixing hole portion 22 to a measurable degree.

The lower surface W2b of the flange portion W2 is formed with restriction groove portions W4 that are fitted in correspondence with the rotation restriction portions 24, respectively. The restriction groove portion W4 is formed in a slit shape on the lower surface W2b of the flange portion W2. Four restriction groove portions W4 are formed radially outward from the locked end portion W3. The restricting groove portion W4 has a width dimension and a radial length that enable position restriction by fitting with the rotation restricting portion 24 .

As shown in FIGS. 3 and 4, the locked end portion W3 has a cylindrical outer peripheral surface. The diameter dimension of the locked end portion W3 is such that it can be inserted into the through hole 23 . The diameter of the locked end W3 is slightly smaller than the through hole 23 so that it can be inserted into the through hole 23 .
A circumferential groove W5a having a reduced diameter is provided on the outer peripheral surface of the locked end portion W3 near the lower end W3a. At the lower end W3a side of the circumferential groove W5a, an inclined fixing surface W5 whose diameter increases toward the lower end (end portion) W3a is provided.

[Fixing jig and clamping device]
FIG. 5 is a cross-sectional view showing the fixing jig 20 in this embodiment. FIG. 6 is a cross-sectional view showing the fixing hole portion 22 in this embodiment.
As shown in FIGS. 4 to 6, the fixing hole portion 22 has a storage portion 26 whose diameter is enlarged at a position close to the fixing base portion 21 which is below the diameter of the opening of the through hole 23 on the upper surface 22a. have.
The storage portion 26 is coaxial with the through-hole 23 and opens to face the fixed base portion 21 . A stepped ceiling portion 26 a is formed between the storage portion 26 and the through hole 23 . The ceiling portion 26a is formed as a plane parallel to the upper surface 22a. A clamp device 50 is housed in the housing portion 26 as will be described later. The diameter dimension of the storage portion 26 is a dimension that allows the clamping device 50 to move as described later. The contour shape of the storage portion 26 in plan view is circular like the through hole 23, but is not limited to this as long as a space in which the clamp device 50 can move is secured.

FIG. 7 is a perspective view showing the fixing base portion 21 in this embodiment. FIG. 8 is a plan view showing the fixing base portion 21 in this embodiment. FIG. 9 is a cross-sectional view showing the fixing base portion 21 in this embodiment.
As shown in FIGS. 5 and 7 to 9, the fixed base portion 21 is formed with a regulation groove 25 for movably supporting the clamp device 50. As shown in FIGS. The restriction groove 25 extends linearly in the radial direction through the center of the base portion 21a. The restricting groove 25 extends on both sides in the radial direction with respect to the center of the base portion 21a. The restricting groove 25 restricts the moving direction of the clamp device 50 with respect to the base portion 21 a to the direction along the restricting groove 25 . It is preferable that the center of the restriction groove 25 in the width direction, which is the T direction, coincides with the center of the base portion 21a.

The restricting groove 25 has an opening 25a at one end in a plan view that opens to the side peripheral surface of the base portion 21a. The other end of the restricting groove 25 in plan view does not reach the ridge 21d of the base portion 21a and does not open on the side peripheral surface. The restricting groove 25 is set so that the opening width of the upper surface 21e of the base portion 21a is substantially equal over the entire length.

The restricting groove 25 is formed with a widened portion 25d vertically spaced apart from the upper surface 21e so that projecting portions 56A and 56B of the clamp device 50, which will be described later, can move along the restricting groove 25. As shown in FIG.
The widened portion 25d is formed to have a width dimension in the T direction larger than the opening width of the regulation groove 25 on the upper surface 21e of the base portion 21a. The widened portion 25d is formed along the entire length of the regulation groove 25 in the P direction. The widened portion 25d is formed to have the same width dimension and the same height dimension over the entire length in the P direction.

A lower groove 26 d is formed along the regulation groove 25 from the opening 25 a of the regulation groove 25 to the storage section 26 on the lower surface of the fixing hole 22 . The width dimension of the lower groove 26 d is set substantially equal to the width dimension of the regulation groove 25 .

[Clamp device]
FIG. 10 is a perspective view showing the clamp device 50 in this embodiment. FIG. 11 is a cross-sectional view showing the clamp device 50 according to this embodiment. FIG. 12 is an exploded perspective view showing the clamp device 50 according to this embodiment.
The clamp device 50 positions and fixes to the fixing jig 20 the locked portion W1 having the locked end portion W3 having the inclined fixing surface W5.
As shown in FIGS. 10 to 12, the clamp device 50 is composed of two locking piece portions 51A and 51B, and a male screw portion 52 for screwing them together.

The two locking piece portions 51A and 51B have the same shape and are combined symmetrically with respect to the center point of the male screw portion 52 . The two locking piece portions 51A and 51B are spaced apart from each other in the P direction along the axis of the male screw portion 52 . Also, the two locking piece portions 51A and 51B do not move relative to each other in the Z direction, which is the vertical direction. The two locking piece portions 51A and 51B do not move relative to each other in the T direction perpendicular to the P direction.

The locking piece portion 51A will be described below. The description of the locking piece portion 51B is omitted, assuming that the suffix A of the reference numeral is replaced with B. In addition, the different portions between the locking piece portion 51A and the locking piece portion 51B will be described accordingly.
FIG. 13 is a front view showing the locking piece portion 51A in this embodiment. FIG. 14 is a side view showing the locking piece portion 51A in this embodiment. FIG. 15 is a front cross-sectional view of the locking piece portion 51A in the present embodiment as seen from the back side.

As shown in FIGS. 10 to 15, the locking piece 51A includes a columnar portion 53A having a locking convex portion 57A close to its upper end and a proximal end portion of the columnar portion 53A. (Base end) 54A, a movement restricting portion 55A having a substantially rectangular parallelepiped shape provided below the base end portion 54A, and a projecting portion 56A provided at the lower end of the movement restricting portion 55A.

The columnar portion 53A is erected in the Z direction. The columnar portion 53A has a substantially uniform thickness dimension in the T direction. A locking projection 57A is formed on the upper portion of the columnar portion 53A at a position facing the other locking piece portion 51B.

57 A of latching convex parts protrude in a P direction so that it may approach the latching piece part 51B which opposes rather than the lower side of 53 A of columnar parts. The lower side of the locking projection 57A is inclined at the same angle as the inclined fixing surface W5. Alternatively, the lower side of the locking projection 57A may be inclined at an angle larger than the inclination angle of the inclined fixing surface W5. In the columnar portion 53A, the height position where the locking convex portion 57A is formed downward in the Z direction from the upper end of the columnar portion 53A is such that the locking convex portion 57A can enter the circumferential groove W5a. Moreover, the engaging projection 57A is set so as to be able to abut against the inclined fixed surface W5.

The base end portion 54A is the lower end of the columnar portion 53A and protrudes in the P direction from the upper portion of the columnar portion 53A. The base end portion 54A has substantially the same thickness dimension in the T direction as that of the columnar portion 53A. The base end portion 54A has a substantially uniform thickness dimension in the T direction, like the columnar portion 53A. A through hole penetrating in the P direction is formed in the base end portion 54A, and a female screw portion 52A is formed on the inner surface thereof.

The female screw portion 52A of the locking piece portion 51A and the female screw portion 52B of the locking piece portion 51B are arranged so as to have the same diameter and be coaxial. Both the female threaded portion 52A of the locking piece portion 51A and the female threaded portion 52B of the locking piece portion 51B extend in the P direction. The female threaded portion 52A of the locking piece portion 51A and the female threaded portion 52B of the locking piece portion 51B are formed as reverse threads to each other. The male threaded portion 52 is screwed into the female threaded portion 52A and the female threaded portion 52B (see FIGS. 10 to 13).

The male threaded portion 52 has a columnar shape extending in the direction P, and male threads 52a and 52b that are reverse threads are formed on the outer peripheral surfaces of both ends. A tool insertion hole 52d is formed at one end of the male screw portion 52 . Although the tool insertion hole 52d is shown below the columnar portion 53A of the locking projection 57A in FIG. 11, the tool insertion hole 52d is located below the columnar portion 53B of the locking projection 57B. It can also be a position. 52 d of tool insertion holes are arrange|positioned so that it may adjoin the opening part 25a of the control groove 25 in a P direction so that it may mention later.
The male threaded portion 52, the female threaded portion 52A, and the female threaded portion 52B constitute a driving portion.

The movement restricting portion 55A is positioned below the base end portion 54A. The movement restricting portion 55A has a thickness dimension half that of the columnar portion 53A and the base end portion 54A. The movement restricting portion 55A is arranged on one side of the center of the columnar portion 53A and the base end portion 54A in the T direction. 55 A of movement control parts are made into a substantially rectangular parallelepiped. The movement restricting portion 55A protrudes in the P direction from the base end portion 54A when viewed in the T direction.

56 A of protrusion parts are formed in the lower end of 55 A of movement control parts. The protruding portion 56A protrudes in the T direction more than the movement restricting portion 55A. The projecting portion 56A extends over the entire length of the lower end of the movement restricting portion 55A in the P direction. The projecting portion 56A is set so that the length of the projecting portion 56A projecting in the T direction from the upright surface facing the T direction where the movement restricting portion 55A, the columnar portion 53A, and the base end portion 54A are flush with each other is the same over the entire length in the P direction. The protruding portion 56A is set so that the dimension in the Z direction is the same over the entire length in the P direction.

In the locking piece portion 51A, the movement restricting portion 55A, the columnar portion 53A, and the base end portion 54A have flush surfaces on the side opposite to the locking piece portion 51B in the P direction. In the locking piece portion 51A, on the surface facing the locking piece portion 51B in the P direction, the columnar portion 53A immediately above the base end portion 54A is the most separated from the locking piece portion 51B, and then the locking convex portion 57A comes closest to the locking piece 51B, then the base end 54A comes next to the locking piece 51B, and the movement restricting portion 55A comes closest to the locking piece 51B.

A first restricting surface 58Aa, a second restricting surface 58Ab, a third restricting surface 58Ac, and a fourth restricting surface 58Ad are formed on the locking piece portion 51A. The first restricting surface 58Aa, the second restricting surface 58Ab, the third restricting surface 58Ac, and the fourth restricting surface 58Ad are all formed as planes along the P direction. The first regulation surface 58Aa, the second regulation surface 58Ab, and the fourth regulation surface 58Ad are formed parallel to each other. The first restricting surface 58Aa, the second restricting surface 58Ab, the fourth restricting surface 58Ad, and the third restricting surface 58Ac are formed orthogonal to each other.

The first regulation surface 58Aa is formed along the T direction. The first restricting surface 58Aa is formed on the upper surface protruding in the P direction from the base end portion 54A of the movement restricting portion 55A. The first restricting surface 58Aa has the same T-direction width dimension as the movement restricting portion 55A. The first restricting surface 58Aa has a T-direction width dimension that is half that of the columnar portion 53A and the base end portion 54A. When viewed in the Z direction, the first restricting surface 58Aa has the same rectangular outline as the portion projecting in the P direction from the base end portion 54A of the movement restricting portion 55A.

The second regulation surface 58Ab is formed along the T direction. The second restricting surface 58Ab is formed on the lower surface of the base end portion 54A. The second restricting surface 58Ab is formed substantially flush with the first restricting surface 58Aa. The second restricting surface 58Ab has the same P-direction length dimension as the lower end of the base end portion 54A. The second restricting surface 58Ab has a T-direction width dimension that is half that of the columnar portion 53A. The second restricting surface 58Ab has the same T-direction width dimension as the first restricting surface 58Aa. The second restricting surface 58Ab has a length dimension in the PT direction shorter than that of the first restricting surface 58Aa. The second restricting surface 58Ab has a length dimension in the PT direction that is approximately half that of the first restricting surface 58Aa. When viewed in the Z direction, the second restricting surface 58Ab has the same rectangular contour as half of the base end portion 54A.

The third regulation surface 58Ac is formed along the Z direction. The third restricting surface 58Ac is formed on the vertical surface of the movement restricting portion 55A, which is the central position between the columnar portion 53A and the base end portion 54A in the T direction. The third restricting surface 58Ac has the same Z-direction height dimension as the movement restricting portion 55A. The third restricting surface 58Ac has the same P-direction length dimension as the movement restricting portion 55A. When viewed in the T direction, the third restricting surface 58Ac has the same rectangular contour as the movement restricting portion 55A.

The fourth regulation surface 58Ad is formed along the T direction. The fourth restricting surface 58Ad is formed on the upper surface of a portion of the projecting portion 56A protruding from the movement restricting portion 55A as viewed in the Z direction. The fourth restricting surface 58Ad has the same width dimension in the T direction as that of the projecting portion 56A. The fourth restricting surface 58Ad has the same P-direction length dimension as that of the projecting portion 56A. The fourth restricting surface 58Ad has the same P-direction length dimension as the movement restricting portion 55A.

FIG. 16 is a bottom view showing an exploded state of the clamp device 50 in this embodiment. FIG. 17 is a rear view showing an exploded state of the clamp device 50 according to this embodiment. FIG. 18 is a top view showing an exploded state of the clamping device 50 according to this embodiment. FIG. 19 is a front view showing an exploded state of the clamp device 50 according to this embodiment. FIG. 20 is a left side view showing an exploded state of the clamp device 50 according to this embodiment. FIG. 21 is a right side view showing an exploded state of the clamp device 50 according to this embodiment.
As shown in FIGS. 10 to 21, the clamp device 50 according to the present embodiment includes two locking piece portions 51A and 51B, and a male screw portion 52 for screwing them together. The stopping piece portion 51A and the locking piece portion 51B move toward and away from each other in the P direction.
In the locking piece portion 51A and the locking piece portion 51B, the locking convex portion 57A and the locking convex portion 57B are assembled so as to face each other.

Specifically, in the assembled locking piece portion 51A and locking piece portion 51B, the first restricting surface 58Aa of the locking piece portion 51A and the second restricting surface 58Bb of the locking piece portion 51B are They are in slidable contact with each other. Similarly, the second restricting surface 58Ab of the locking piece portion 51A and the first restricting surface 58Ba of the locking piece portion 51B are slidably in contact with each other. Further, the third restricting surface 58Ac of the locking piece portion 51A and the third restricting surface 58Bc of the locking piece portion 51B are in slidable contact with each other.

In this state, between the locking piece portion 51A and the locking piece portion 51B, the movement restricting portion 55A of the locking piece portion 51A is positioned below the base end portion 54B of the locking piece portion 51B. Similarly, the movement restricting portion 55B of the locking piece portion 51B is positioned below the base end portion 54A of the locking piece portion 51A. Further, the movement restricting portion 55A and the movement restricting portion 55B are half of each other in the T direction.

That is, the locking piece portion 51A and the locking piece portion 51B are divided into the first restricting surface 58Aa and the second restricting surface 58Bb, the first restricting surface 58Ba and the second restricting surface 58Ab, and the third restricting surface 58Ac and the third restricting surface. Since 58Bc are in contact with each other, they are mutually movable in the P direction. In addition, the movement restricting portion 55A and the movement restricting portion 55B, which are halves in the T direction, are combined in opposite directions in the P direction, so that the relative postures of the locking piece portions 51A and 51B are changed. They can be moved in the P direction relative to each other without change.

At this time, according to the relative movement in the P direction between the locking piece portion 51A and the locking piece portion 51B, the first restricting surface 58Aa and the second restricting surface 58Bb, the first restricting surface 58Ba and the second restricting surface 58Ab, the third The restricting surface 58Ac and the third restricting surface 58Bc slide on each other.

Furthermore, in the locking piece portion 51A, the movement restricting portion 55A is positioned below the proximal end portion 54B on one side in the T direction, and the proximal end portion 54A is located above the movement restricting portion 55B on the other side in the T direction. With this arrangement, it is possible to restrict relative rotation of the locking piece portion 51A and the locking piece portion 51B in the direction along the ZP plane.
Similarly, in the locking piece portion 51B, the movement restricting portion 55B is positioned below the base end portion 54A on one side in the T direction, and the base end portion 54B is positioned above the movement restricting portion 55A on the other side in the T direction. By doing so, it is possible to restrict relative rotation of the locking piece portion 51A and the locking piece portion 51B in the direction along the ZP plane.

The male threads 52a and 52b of the male threaded section 52 are screwed into the female threaded section 52A and the female threaded section 52B of the locking piece section 51A and the locking piece section 51B, respectively. The length of the male screw portion 52 is such that it does not protrude from the through hole at the position where the locking piece portion 51A and the locking piece portion 51B are closest to each other. When the locking piece portion 51A and the locking piece portion 51B are closest to each other, the base end portion 54A and the base end portion 54B come into contact with each other.

Here, by inserting a predetermined tool into the tool insertion hole 52d from the opening 25a through the restriction groove 25 and the lower groove 26d, and rotating the male screw portion 52, the locking piece portion 51A and the locking piece portion 51B are engaged. are movable relative to each other in the P direction. By switching the rotation direction of the male screw portion 52 between forward rotation and reverse rotation, the locking piece portion 51A and the locking piece portion 51B can be brought closer to each other or separated from each other. In other words, the male threaded portion 52 is a driving portion that relatively drives the locking piece portion 51A and the locking piece portion 51B by its rotation.

Further, by screwing the male threaded portion 52 to the locking piece portion 51A and the locking piece portion 51B, the locking piece portion 51A and the locking piece portion 51B rotate relative to each other with respect to the axis in the P direction. can also be regulated.
By rotating the male threaded portion 52, the locking piece portion 51A and the locking piece portion 51B move toward or away from each other, so that the locking convex portion 57A and the locking convex portion 57B are kept facing each other. , approach and separate from each other in the P direction.
In this manner, the clamp device 50 is engaged in a state where the moving direction and the moving attitude are restricted by the first restricting surface 58Aa, the second restricting surface 58Ab, the third restricting surface 58Ac, and the fourth restricting surface 58Ad. The stopping piece portion 51A and the locking piece portion 51B move toward and away from each other in the P direction.

As shown in FIGS. 4, 5, and 7, the clamping device 50 is arranged such that the male screw portion 52 is parallel to the P direction with respect to the regulation groove 25 of the fixing base portion 21 in the fixing jig 20. It is inserted in the P direction. At this time, the movement restricting portion 55A and the movement restricting portion 55B are positioned inside the restricting groove 25, and at least the columnar portions 53A and 53B protrude upward in the Z direction from the upper surface 21e of the fixed base portion 21. As shown in FIG. That is, the base ends 54A and 54B are positioned at the same Z-direction position as the opening of the restriction groove 25 on the upper surface 21e.
Here, the T-direction opening dimension of the restriction groove 25 in the upper surface 21e is equal to the T-direction width dimension of the base ends 54A and 54B.

At the same time, the projecting portions 56A and 56B are accommodated inside the widened portion 25d. The projecting portions 56A and 56B are slidable on the inner surface of the widened portion 25d.
When comparing the T-direction dimension in which the projecting portion 56A protrudes from the movement restricting portion 55A and the T-direction dimension in which the widened portion 25d is larger than the T-direction dimension of the opening in the restricting groove 25 on the upper surface 21e, they are equal. Alternatively, the widened portion 25d is larger. Similarly, comparing the T-direction dimension in which the protruding portion 56B protrudes from the movement restricting portion 55B and the T-direction dimension in which the widened portion 25d is larger than the T-direction dimension in which the restriction groove 25 opens on the upper surface 21e, They are equal or the widened portion 25d is larger.
Also, the Z-direction dimension of the projecting portions 56A and 56B is equal to the Z-direction dimension of the widened portion 25d.
As a result, the movement of the clamp device 50 in the Z direction with respect to the regulation groove 25 is regulated by the fourth regulation surfaces 58Ad and 58Bd sliding on the upper surface of the widened portion 25d.

In this state, the clamping device 50 can move along the restricting groove 25, but its movement in the Z direction and the T direction is restricted.
Therefore, only by inserting a predetermined tool into the tool insertion hole 52d and rotating the male screw portion 52, the locking projections 57A and 57B of the clamping device 50 approach and separate in the P direction.
At the same time, due to the inclination of the inclined fixed surface W5 of the locked end portion W3, the locking convex portion 57A and the locking convex portion 57B are positioned with respect to the regulation groove 25 in the PT direction.

Note that the clamp device 50 is not fixed to the center of the fixed base portion 21 or the center of the rotary table 5 . By inserting the locked end W3 into the through hole 23, the Z-direction axis of the locked end W3 follows the axis of the through hole 23, and positioning is performed.
At this time, in the fixing jig 20, the locking convex portion 57A and the locking convex portion 57B approach and separate in the P direction with respect to the locked end portion W3 inserted into the through hole 23 of the fixing hole portion 22. do.

When the locking projections 57A and 57B approach each other in the P direction, the locking projections 57A and 57B enter the circumferential groove W5a from both sides in the P direction. Further, the locking projections 57A and the locking projections 57B, which are close to each other, both come into contact with the inclined fixing surface W5 from both sides in the P direction. When the locking projections 57A and 57B are closer to each other, the inclined fixing surface W5 expands in the Z direction toward the end W3a, so that the locking projections 57A and 57B , the abutment position moves along the inclined fixing surface W5 in the direction of diameter reduction, that is, to the position upward of the circumferential groove W5a.

At this time, the clamping device 50 does not move in the Z direction because the protruding portions 56A and 56B are positioned inside the widened portion 25d of the restricting groove 25 . Therefore, a tensile force acts downward in the Z direction on the inclined fixed surface W5. At the same time, the reaction force against the fourth restricting surfaces 58Ad and 58Bd is received by the upper surface of the widened portion 25d. As a result, the locked end portion W3 is pulled downward in the Z direction.

Here, since the locking piece portion 51A and the locking piece portion 51B are connected by the male screw portion 52, if the male screw portion 52 is not rotated, the locking convex portion 57A and the locking convex portion 57B will be separated. do not separate from each other in the P direction. That is, the locked state of the locked end portion W3 by the locking projections 57A and 57B is not released. Therefore, the tensioned state of the locked end portion W3 by the clamp device 50 is not released either.

When the locked end portion W3 is inserted into the through hole 23 of the fixing hole portion 22, the lower surface W2b of the flange portion W2 contacts the upper surface 22a of the fixing hole portion 22. As shown in FIG. Thereby, the locked portion W1 is positioned such that the lower surface W2b is parallel to the plane defined by the upper surface 22a.
At the same time, on the lower surface W2b of the flange portion W2, the restriction groove portions W4 are fitted to the corresponding rotation restriction portions 24, respectively.

Here, the rotation restricting portion 24 composed of a key member is arranged radially around the through hole 23 perpendicularly to the P direction and the T direction. The P-direction position and T-direction position of the flange portion W2 with respect to the fixed hole portion 22 and the rotational position of the flange portion W2 with respect to the Z-direction axis of the through hole 23 are regulated.
With these, the attitude and positioning of the locked end portion W3 with respect to the fixture 20 in the PT direction are performed.

In the present embodiment, the clamping device 50 is moved toward and away from each other in the P direction by the drive unit 52 while the postures of the two locking pieces 51A and 51B are maintained, and the posture of the clamping device 50 is maintained. While restricting movement in the Z direction and allowing movement of the clamp device 50 in the P direction, a restriction groove 25 is provided. With the available fixing jig 20, it is possible to easily position the locked portion W1 and pull it downward in the Z direction to fix it.

Moreover, it is possible to position the engaged portion W1 and pull and fix the engaged end portion W3 downward in the Z direction simply by rotating the male screw portion 52 . As a result, it is possible to easily fix and remove the locked portion W1, and to easily improve workability in three-dimensional measurement.
At the same time, application of a thrust load or radial load to the rotating shaft of the rotary table 5 can be reduced, and accuracy in three-dimensional measurement can be easily maintained. As a result, it is possible to improve workability in measurement while maintaining the measurement accuracy of the three-dimensional measuring machine 1 .

A second embodiment of a clamping device, a fixing jig, a three-dimensional measuring machine, and a rotation axis calibrating jig according to the present invention will be described below with reference to the drawings.
FIG. 22 is a perspective view showing a state in which the rotation axis calibrating jig in this embodiment is attached to the fixing jig. FIG. 23 is a perspective view showing a state in which the rotation axis calibrating jig in this embodiment is removed from the fixing jig.
This embodiment differs from the above-described first embodiment in that it relates to a jig for calibrating the rotation axis, and other configurations corresponding to those of the above-described first embodiment are denoted by the same reference numerals. Description is omitted.

The rotary axis calibrating jig 70 of this embodiment is attached to the rotary table 5 of the three-dimensional measuring machine 1 and used to calibrate its rotary axis.
As shown in FIGS. 22 and 23, the rotational axis calibrating jig 70 has a cylindrical measurement portion 71 extending along the Z direction and a diameter expanding radially outward around the base end of the cylindrical measurement portion 71. and a flange portion 72 .

The measurement cylinder part 71 is a cylinder that stands vertically during measurement calibration. The measurement cylindrical portion 71 has a predetermined length in the Z direction and has the same diameter dimension over the entire length in the Z direction. The measurement cylinder part 71 is made of metal, for example, stainless steel. The measuring cylindrical portion 71 may have a cylindrical outer peripheral surface, and may be hollow or dense as long as the required strength is satisfied.

The flange portion 72 is formed at the proximal end of the cylindrical measurement portion 71 . The flange portion 72 serves as a base portion for installing the measurement cylinder portion 71 on the rotary table 5 . The flange portion 72 may be formed integrally with the measurement cylinder portion 71 . In this case, the flange portion 72 and the cylindrical measurement portion 71 can be formed by cutting or the like. An upper surface 76 of the flange portion 72 is formed flat.
A flange portion W2 is attached to the lower side of the flange portion 72 in the Z direction. The flange portion 72 and the flange portion W2 have the same diameter dimension. The flange portion 72 and the flange portion W2 may be formed integrally. A locked end portion W3 is formed in a central position of the lower surface W2b of the flange portion W2 so as to protrude downward. The lower surface W2b of the flange portion W2 is formed with restriction groove portions W4 that are fitted in correspondence with the rotation restriction portions 24, respectively.

The rotation axis calibrating jig 70 is provided with a distal measurement cylindrical surface 74 and a proximal measurement cylindrical surface 75 . The distal measurement cylindrical surface 74 and the proximal measurement cylindrical surface 75 are brought into contact with the probe 17 in the three-dimensional measuring machine 1, and are calibrated using the probe 17. Measure the original position.
The tip measurement cylinder surface 74 is formed on the tip outer peripheral surface of the measurement cylinder portion 71 . The tip measurement cylinder surface 74 is formed on the entire peripheral surface of the tip of the measurement cylinder portion 71 . The tip measuring cylindrical surface 74 is a cylindrical surface having an axis in the Z direction.

The proximal measurement cylindrical surface 75 is formed on the proximal outer peripheral surface of the measurement cylindrical portion 71 . The proximal measurement cylindrical surface 75 is formed on the entire peripheral surface of the proximal end of the measurement cylindrical portion 71 . The proximal measurement cylindrical surface 75 is a cylindrical surface having an axis in the Z direction.
The diameter dimension of the distal measurement cylindrical surface 74 and the diameter dimension of the proximal measurement cylindrical surface 75 are set to be equal. The distal measurement cylindrical surface 74 and the proximal measurement cylindrical surface 75 may be continuous in the Z direction on the outer peripheral surface of the measurement cylindrical portion 71 .

Here, both the distal measurement cylindrical surface 74 and the proximal measurement cylindrical surface 75 have the same surface roughness. Specifically, the distal measurement cylindrical surface 74 and the proximal measurement cylindrical surface 75 can have a surface roughness Ra of about 0.4 μm to 0.8 μm, for example.

A method for calibrating the rotation axis of the turntable 5 when registering the coordinate system of the turntable 5 in the three-dimensional measuring machine 1 using the rotation axis calibrating jig 70 will be described below.

When calibrating the rotation axis of the turntable 5, the rotation axis calibrating jig 70 of the present embodiment is attached to the fixing jig 20 on the turntable 5 as a pre-process of the calibration process. At this time, as described in the first embodiment, the locked end portion W3 at the lower end of the rotation axis calibration jig 70 is inserted into the through hole 23, the driving portion 52 is rotated, and the clamp device 50 is engaged. Position and fix while pulling the toe W3 downward in the Z direction.

In this state, the calibration process is started.
First, a first reading step of reading the rotation axis of the rotation axis calibrating jig 70 is performed. In the first reading step, the probe 17 is three-dimensionally moved with respect to the surface plate 11 by the moving mechanism 19 of the three-dimensional measuring machine 1 to bring the probe 17 into contact with the surface of the rotation axis calibrating jig 70 . At this time, a horizontally oriented stylus can be used as the probe 17 . In particular, a lateral probe calibrated using probe 17 can be used.

First, as a first tip reading step, the coordinate position of the tip measurement cylindrical surface 74 is read. In the first tip reading step, the curvature of the tip measurement cylindrical surface 74, which is a cylindrical surface, is calculated, or a predetermined height position on the central axis line of the tip measurement cylindrical surface 74, which is a cylindrical surface, is calculated. Therefore, in the first leading end reading step, at least three coordinate positions are read in the circumferential direction of the leading end measurement cylindrical surface 74 . Furthermore, reading of coordinate positions in the circumferential direction of the tip measurement cylindrical surface 74 may be added as different height positions.

Next, as a first proximal reading step, the coordinate position of the proximal measurement cylindrical surface 75 is read. In the first proximal reading step, the curvature of the proximal measurement cylindrical surface 75, which is a cylindrical surface, is calculated, or a predetermined height position on the central axis line of the proximal measurement cylindrical surface 75, which is a cylindrical surface, is calculated. . Therefore, in the first proximal reading step, at least three coordinate positions are read in the circumferential direction of the proximal measurement cylindrical surface 75 . Furthermore, reading of coordinate positions in the circumferential direction of the proximal measurement cylindrical surface 75 may be added as different height positions.

As the first reading step, the three-dimensional position and inclination are calculated from the coordinate positions read in the first leading end reading step and the first base end reading step, with the axis of the measurement cylindrical portion 71 as the first calculation axis.
As the first reading step, the first leading end reading step and the first base end reading step are simultaneously performed to measure the upper arc shape and the lower arc shape at the same time, thereby calculating the axis of the cylindrical portion 71 to be measured. can also

Next, as a rotating step, the turntable 5 is rotated by a predetermined angle. In this step, the rotary table 5 and the rotary axis calibrating jig 70 mounted on the rotary table 5 are rotated by a predetermined angle in preparation for reading in the next second reading step.

Here, in the rotation process of this embodiment, the rotation angle is set to 180 degrees. When the rotation angle is 180 degrees, the step of reading the rotation axis of the rotation axis calibrating jig 70 is performed twice.

Next, a second reading step of reading the rotation axis of the rotation axis calibrating jig 70 is performed. In the second reading process, similarly to the first reading process, the moving mechanism 19 of the three-dimensional measuring machine 1 moves the probe 17 three-dimensionally with respect to the surface plate 11, and moves the probe 17 to the rotation axis calibration jig 70. surface.

First, as the second tip reading step, the coordinate position of the tip measurement cylindrical surface 74 is read in the same manner as the first tip reading step. In the second tip reading step, the curvature of the tip measurement cylindrical surface 74, which is a cylindrical surface, is calculated, or a predetermined height position on the central axis line of the tip measurement cylindrical surface 74, which is a cylindrical surface, is calculated. Therefore, in the second tip reading step, at least three coordinate positions are read in the circumferential direction of the tip measurement cylindrical surface 74 . Furthermore, reading of coordinate positions in the circumferential direction of the tip measurement cylindrical surface 74 may be added as different height positions. In addition, in the second leading edge reading step, the setting can be changed as appropriate as long as the same accuracy as in the first leading edge reading step can be maintained.

Next, as a second proximal reading step, the coordinate position of the proximal measurement cylindrical surface 75 is read in the same manner as in the first proximal reading step. In the second proximal end reading step, the curvature of the proximal measurement cylindrical surface 75, which is a cylindrical surface, is calculated, or a predetermined height position on the central axis line of the proximal measurement cylindrical surface 75, which is a cylindrical surface, is calculated. . Therefore, in the second base reading step, at least three coordinate positions are read in the circumferential direction of the proximal measurement cylindrical surface 75 . Furthermore, reading of coordinate positions in the circumferential direction of the proximal measurement cylindrical surface 75 may be added as different height positions. In addition, in the second base end reading step, the setting can be changed as appropriate as long as the same accuracy as in the first base end reading step can be maintained.

As a second reading step, the three-dimensional position and inclination are calculated from the coordinate positions read in the second distal reading step and the second proximal reading step, using the axis of the cylindrical measurement portion 71 as a second calculation axis.
As the second reading step, the second leading end reading step and the second base end reading step are simultaneously performed to simultaneously measure the upper arc shape and the lower arc shape, thereby calculating the axis of the cylindrical portion 71 to be measured. can also

Next, as a calculation step, the spatial coordinates of the actual rotation axis, which is the actual rotation axis of the rotary table 5, are calculated from the first calculation axis calculated in the first reading step and the second calculation axis calculated in the second reading step. Calculate the system. Taking the symmetrical element of the two elements allows the coordinates and (machine coordinate system) tilt of the rotary table 5 to be determined.

Here, in the present embodiment, the actual rotational axis is calculated as a straight line obtained by calculating symmetrical elements from the first calculated axis and the second calculated axis. Also, since the actual axis of rotation is calculated by calculating the symmetrical element, the derivation does not assume that the two elements intersect. At this time, the three-dimensional measuring machine 1 incorporates this element into the machine coordinate system created by the reference stylus. Here, the actual axis of rotation is captured in the machine coordinate system at the point where it intersects the Z-zero plane. Therefore, in the rotation axis calibrating jig 70, only the axis of the measurement cylindrical portion 71 should be measured to calculate only the actual rotation axis.
Further, in the rotational axis calibrating jig 70, the difference in height distance between two circular elements can be measured as 190 mm or more. As a result, it is possible to increase the measurement axis length in the reading process and improve the accuracy of the calculated axis/coordinate system. Therefore, correction accuracy can be further improved.

Here, the cylinder of the reference axis measurement cylinder 70 is measured under the same conditions at the positions of 0 degree and 180 degrees of the rotary table 5 in the machine coordinate system. At this time, the only difference in measurement is the angle of the rotary table 5 . Then, the target elements of the two elements measuring the two cylinder axes can be read as the rotation axes in the machine coordinate system in the turntable 5 . In order to select a symmetrical element, it is essential that two angle conditions are opposed to each other.
Conceptually, when the first calculation axis line and the second calculation axis line intersect at one point, the bisector of the angle formed by the first calculation axis line and the second calculation axis line passing through this intersection point may be calculated as the actual axis of rotation. When the first calculated axis and the second calculated axis do not intersect, a straight line equidistant from the first calculated axis and the second calculated axis in the Z direction may be calculated as the actual rotation axis.

Here, in the real world, no matter how precise the calibration is, the rotation axis of the rotary table 5 does not exactly match the vertical straight line. Therefore, if three-dimensional measurement is performed using the rotary table 5 on the premise that the rotation axis is oriented in the vertical direction, the occurrence of measurement errors cannot be prevented.

However, the actual rotation axis obtained in this embodiment is the actual rotation axis of the rotary table 5 itself. Therefore, even if the actual rotation axis is tilted with respect to the vertical direction, if the actual tilt can be accurately grasped, the accuracy can be ensured extremely precisely in the three-dimensional measurement using the turntable 5. be able to.

Furthermore, since the actual rotational axis of the rotary table 5 can be determined accurately, it is not necessary to measure the actual rotational axis of the three-dimensional measuring machine 1 for each workpiece W that has been remounted.

In other words, in the conventional three-dimensional measuring machine 1, each time the workpiece W, which is the object to be measured, is remounted on the rotary table 5, the actual rotation axis measurement is included in the measurement program. The measurement necessary for establishing the datum for establishing the coordinate system of the work W can be performed, and the measurement of the rotation axis can be eliminated in each work W measurement. In other words, it becomes possible to omit the calibration process that has to be performed each time.

That is, in the three-dimensional measuring machine 1 that has been started once, the calibration process described above is performed at the time of startup, and the coordinate system of the actual rotation axis line of the rotary table 5 is calculated. Without recalculation, the three-dimensional shape measurement, which requires rotating the workpiece W, can be continuously performed on different workpieces W while maintaining accuracy.

As a result, when the coordinate system of the rotary table 5 of the three-dimensional measuring machine 1 is registered, the rotary axis of the rotary table 5 can be calibrated using the rotary axis calibrating jig 70 of the present embodiment. It is possible to greatly reduce the number of processes related to the rotation axis calibration, and to greatly shorten the work time related to the process, thereby improving efficiency.

In this embodiment, it is possible to obtain the same effect as the above-described embodiment, and furthermore, by storing the coordinate system of the workpiece once measured in a computer or the like, when re-measuring various kinds of workpieces, it is possible to Automatic measurement can be performed by automatically recalling the previous value without re-measuring the coordinate system. can have the effect of becoming

A third embodiment of a clamping device, a fixing jig, a three-dimensional measuring machine, and a maintenance jig according to the present invention will be described below with reference to the drawings.
FIG. 24 is a perspective view showing a maintenance jig for fixing jigs in this embodiment. FIG. 25 is a top view showing a maintenance jig for fixing jigs in this embodiment. FIG. 26 is a cross-sectional view showing a maintenance jig for fixing jigs in this embodiment. FIG. 27 is a cross-sectional view showing a maintenance jig for fixing jigs in this embodiment.
This embodiment differs from the above-described first and second embodiments in terms of maintenance jigs, and other corresponding constituent elements are denoted by the same reference numerals and descriptions thereof are omitted.

The maintenance jig 90 of this embodiment is used to separate the fixing hole portion 22 from the fixing base portion 21 in the fixing jig 20 .
Specifically, the fixing hole portion 22 has a notch 22d at the lower edge and the protrusion 21d of the fixing base portion 21 are fitted. Therefore, the fixing hole 22 cannot be removed from the fixing base 21 unless the fixing hole 22 is moved vertically from the fixing base 21 without tilting.
Therefore, a maintenance jig 90 is used as a jig for easily removing the fixing hole portion 22 from the fixing base portion 21 .

The maintenance jig 90 of this embodiment has a cylindrical portion 91, hook portions 93a and 93b, and an extrusion portion 97, as shown in FIGS.
The columnar portion 91 has a diameter dimension substantially equal to that of the through hole 23 and can be inserted into the through hole 23 . The columnar portion 91 has an axial length that, when inserted into the through hole 23, the upper end portion 91b protrudes upward in the Z direction from the through hole 23 while the lower end portion 91a is in contact with the internal structure of the storage portion 26. have dimensions. The cylindrical portion 91 has substantially the same diameter over its entire length in the axial direction. A step 91d is formed in the middle of the cylindrical portion 91 in the axial direction. The diameter may be slightly reduced at a position closer to the upper end portion 91b than the step 91d.

The columnar portion 91 has a through hole 96 extending therethrough in the axial direction. The through hole 96 is formed coaxially with the cylindrical portion 91 . The diameter of the through-hole 96 on the upper end portion 91b side is larger than that on the lower end portion 91a side. A female screw is formed on the lower end portion 91a side of the through-hole 96, and a push-out portion 97, which is a male screw, is screwed therewith. The push-out portion 97 is housed inside the through-hole 96 . A tool insertion hole 97d is formed in the upper end surface of the push-out portion 97. As shown in FIG. By inserting a predetermined tool into the tool insertion hole 97 d and rotating the push-out portion 97 , the push-out portion 97 can protrude downward from the lower end portion 91 a of the cylindrical portion 91 .

Storage recesses 92a and 92b are formed on the outer peripheral surface of the cylindrical portion 91 near the lower end portion 91a. The storage recesses 92 a and 92 b are formed at two symmetrical positions with respect to the axis of the cylindrical portion 91 . The storage recesses 92a and 92b are formed at positions that do not come into contact with the lower end portion 91a. The storage recess 92a and the storage recess 92b are formed in shapes symmetrical to each other with respect to the axis of the cylindrical portion 91. As shown in FIG. A hooking portion 93a and a hooking portion 93b are arranged in the storage recessed portion 92a and the storage recessed portion 92b, respectively.

A hooking portion 93a of the recessed storage portion 92a and a hooking portion 93b of the recessed storage portion 92b are formed in shapes symmetrical to each other with respect to the axis of the cylindrical portion 91. As shown in FIG.
The hook portion 93a is provided inside the storage recess 92a so as to be rotatable by a rotating shaft 94a provided in the storage recess 92a. The rotating shaft 94a extends in a direction perpendicular to the axial direction of the cylindrical portion 91 at a position close to the lower end portion 91a of the storage recess 92a. The hooking portion 93a has a lower end in the Z direction supported by a rotating shaft 94a, and an upper end of the hooking portion 93a is rotatable around the rotating shaft 94a. An angle regulating portion 92c that regulates the rotational position of the hooking portion 93a is formed in the storage recessed portion 92a that is radially outward of the cylindrical portion 91 from the lower end of the hooking portion 93a. The angle regulation portion 92c regulates the angle so that the upper end of the hook portion 93a does not open beyond a predetermined angle.

When the direction from the lower end to the upper end of the hook portion 93a is in the direction along the axial direction of the cylindrical portion 91, the hook portion 93a is housed inside the storage recess portion 92a and has a diameter larger than the outer peripheral surface of the cylindrical portion 91. Do not protrude outside the direction. The state in which the hook portion 93a faces upward is referred to as a retracted state. Further, when the upper end of the hooking portion 93a rotates around the rotation shaft 94a and comes into contact with the angle regulating portion 92c, the upper end of the hooking portion 93a is radially larger than the outer peripheral surface of the columnar portion 91. It will protrude outside. A state in which the hooking portion 93a faces obliquely is referred to as a protruding state.

The hook portion 93b is provided inside the storage recess 92b so as to be rotatable by a rotating shaft 94b provided in the storage recess 92b. The rotating shaft 94b extends in a direction orthogonal to the axial direction of the cylindrical portion 91 at a position close to the lower end portion 91a of the storage recess 92b. The hook portion 93b has a lower end in the Z direction supported by a rotation shaft 94b, and an upper end of the hook portion 93b is rotatable about the rotation shaft 94b. An angle regulating portion 92d that regulates the rotational position of the hooking portion 93b is formed in the storage recessed portion 92b that is radially outward of the cylindrical portion 91 from the lower end of the hooking portion 93b. The angle regulation portion 92d regulates the angle so that the upper end of the hook portion 93b does not open beyond a predetermined angle.

When the lower end and the upper end of the hooking portion 93b are oriented along the axial direction of the columnar portion 91, the hooking portion 93b is housed inside the housing recess 92b and extends radially outward from the outer peripheral surface of the columnar portion 91. Do not stick out. The state in which the hook portion 93b faces upward is referred to as a retracted state. Further, when the upper end of the hooking portion 93b rotates around the rotation shaft 94b and comes into contact with the angle regulating portion 92d, the upper end of the hooking portion 93b is radially larger than the outer peripheral surface of the columnar portion 91. It will protrude outside. The state in which the hooking portion 93b faces obliquely is referred to as a protruding state.

A through hole 95a opens inside the storage recess 92a. The through hole 95a has a linear axis. The axis of the through-hole 95 a is formed at an oblique twisted position with respect to the axis of the cylindrical portion 91 . One end of the through hole 95a opens into the storage recess 92a, and the other end of the through hole 95a opens to the outer peripheral surface of the cylindrical portion 91 closer to the upper end portion 91b than the step 91d.
One end of the through hole 95a opens near the upper end of the hook portion 93a in the retracted state. As a result, by inserting a bar-shaped tool into the through hole 95a, it can be brought into contact with the vicinity of the upper end of the hook 93a in the housed state and rotated around the rotation shaft 94a. In other words, the through hole 95a allows a tool for moving the hook portion 93a from the stored state to the protruded state to communicate from the outer peripheral surface of the columnar portion 91 to the storage recessed portion 92a.

A through hole 95b opens inside the storage recess 92b. The through hole 95b has a linear axis. The axis of the through-hole 95b is formed at an obliquely twisted position with respect to the axis of the cylindrical portion 91 . One end of the through hole 95b opens into the storage recess 92b, and the other end of the through hole 95b opens to the outer peripheral surface of the cylindrical portion 91 closer to the upper end portion 91b than the step 91d.
One end of the through hole 95b opens near the upper end of the hook portion 93b in the retracted state. As a result, by inserting a rod-shaped tool into the through hole 95b, it can be brought into contact with the vicinity of the upper end of the hook portion 93b in the housed state and rotated around the rotation shaft 94b. In other words, the through hole 95b allows a tool for shifting the hook portion 93b from the stored state to the protruded state to communicate from the outer peripheral surface of the columnar portion 91 to the storage recessed portion 92b.

FIG. 28 is a cross-sectional view showing a state in which the maintenance jig in this embodiment is inserted into the fixing jig. FIG. 29 is a cross-sectional view showing a state in which the fixing hole portion of the fixing jig of the present embodiment is removed from the fixing base portion by the maintenance jig.
In the maintenance jig 90 of this embodiment, the hooking portion 93a is housed in the storage recessed portion 92a and the hooking portion 93b is housed in the storage recessed portion 92b in advance, so that both the hooking portions 93a and 93b extend from the outer peripheral surface of the cylindrical portion 91. are stored so as not to protrude radially outward.
At the same time, the maintenance jig 90 is in a state in which the push-out portion 97 is housed inside the through hole 96 in advance. At this time, the push-out portion 97 does not protrude downward from the lower end portion 91 a of the cylindrical portion 91 .

When separating the fixing hole portion 22 from the fixing base portion 21 in the fixing jig 20, as shown in FIG. 28, the maintenance jig 90 is inserted into the through hole 23 from the lower end portion 91a. At this time, it is inserted so that the axis of the cylindrical portion 91 coincides with the axis of the through hole 23 .
Further, the cylindrical portion 91 is moved downward, and on the outer peripheral surface of the cylindrical portion 91, the storage recesses 92a and 92b enter the interior of the storage portion 26 rather than the ceiling portion 26a and become lower than the ceiling portion 26a in the Z direction. Insert up to It should be noted that at least the hooks 93a and 93b are inserted to a position where they can rotate around the rotary shafts 94a and 94b. That is, the upper ends of the hooking portions 93a and 93b can be positioned below the ceiling portion 26a in the Z direction.
At the same time, on the outer peripheral surface of the cylindrical portion 91, the step 91d is preferably positioned at the same height as the upper surface 22a or above the upper surface 22a. In addition, it is preferable that at least the openings of the through holes 95a and 95b on the outer peripheral surface of the cylindrical portion 91 are positioned above the upper surface 22a.
Alternatively, it may be inserted until the lower end portion 91a comes into contact with a member inside the storage portion 26. As shown in FIG.

Next, using a predetermined tool, the hooking portion 93a in the housed state is rotated around the rotating shaft 94a through the through hole 95a, thereby shifting the hooking portion 93a from the housed state to the protruding state. Similarly, using a predetermined tool, the hooking portion 93b in the housed state is rotated around the rotary shaft 94b through the through hole 95b, thereby moving the hooking portion 93b from the housed state to the protruding state. As a result, as shown in FIG. 29 , the hook portions 93 a and 93 b are in a state in which the diameters of the hook portions 93 a and 93 b are expanded more than the cylindrical portion 91 inside the storage portion 26 .

Next, a predetermined tool is inserted into the tool insertion hole 97d to rotate the pushing portion 97. As shown in FIG. The push-out portion 97 housed inside the through-hole 96 protrudes downward from the lower end portion 91a of the cylindrical portion 91 by being rotated.
Then, the lower end of the push-out portion 97 protruding from the lower end portion 91a abuts on the members positioned directly below the through hole 23, such as the driving portion 52 and the proximal end portions 54A and 54B of the clamp device 50. As shown in FIG. Further, when the push-out portion 97 is rotated, the dimension by which the push-out portion 97 protrudes from the lower end portion 91a increases, and the lower end of the push-out portion 97 presses the contacting member. Then, the cylindrical portion 91 rises in the Z direction due to the reaction force from the member with which the lower end of the pushing portion 97 abuts. That is, the cylindrical portion 91 is spaced upward from the fixed base portion 21 in the Z direction.

When the columnar portion 91 rises, the hooking portions 93a and 93b, which are radially outwardly enlarged from the columnar portion 91, come into contact with the ceiling portion 26a on the outer edge of the through hole 23. As shown in FIG.
The hook portion 93a is restricted from rotating about the rotation axis 94a at a predetermined angle by the angle restriction portion 92c. Regulated. Therefore, the ceiling portion 26a with which the hook portions 93a and 93b abut, that is, the fixing hole portion 22 is also separated from the fixing base portion 21 together with the cylindrical portion 91 upward in the Z direction.
At this time, the fixing hole portion 22 moves upward while maintaining its posture without being tilted with respect to the fixing base portion 21 .
Further, when the extrusion portion 97 is rotated, the ceiling portion 26a is pressed by the hook portions 93a and 93b, and the fixing hole portion 22 is moved along the contact surface between the protrusion 21d and the notch 22d. 21 rises. The fixing hole portion 22 can be removed from the fixing base portion 21 by separating the protrusion 21d and the notch 22d.

In the fixing jig 20, the maintenance jig 90 of the present embodiment can accurately move the fixing hole 22 in the vertical direction from the fixing base 21 while maintaining the posture without tilting the fixing hole 22. It can be separated from the fixed base portion 21 . As a result, the fixing hole portion 22 can be easily removed from the fixing base portion 21 without deforming the protrusion 21d and the notch 22d.

Note that the maintenance jig 90 can easily remove the fixing hole portion 22 from the fixing base portion 21 even when the clamp device 50 is not attached to the fixing base portion 21 . In this case, the lower end of the push-out portion 97 contacts and presses the upper surface 21e of the fixed base portion 21 .

As an example of utilization of the present invention, a special tool that can be applied to the work of disassembling shaft parts can be mentioned.

Reference Signs List 1 Three-dimensional measuring machine 5 Rotating table 20 Fixing jig 21 Fixing base 21a Base 21b Fixing flange 21c Hole 21d Projection 21e Upper surface 22 Fixing hole 22a Upper surface 23 Through hole 24... Rotation restricting part 25... Regulating groove 25a... Opening part 25d... Widening part 26... Storage part 26a... Ceiling part 26d... Lower groove 50... Clamp devices 51A, 51B... Locking piece part 52... Male screw part (drive part)
52d... Tool insertion holes 52A, 52B... Female threaded parts 53A, 53B... Columnar parts 54A, 54B... Base ends (base ends)
55A, 55B... Movement restricting parts 56A, 56B... Projecting parts 57A, 57B... Engagement convex parts 58Aa, 58Ba... First restricting surfaces 58Ab, 58Bb... Second restricting surfaces 58Ac, 58Bc... Third restricting surfaces 58Ad, 58Bd... 4 Regulating surface 70 Rotational axis calibration jig 71 Measurement cylindrical portion 72 Flange portion 74 Tip measurement cylindrical surface 75 Base end measurement cylindrical surface 90 Maintenance jig 91 Cylindrical portion 91a Lower end 91b Upper end 91d... Steps 92a, 92b... Storage recesses 92c, 92d... Angle regulating parts 93a, 93b... Hook parts 94a, 94b... Rotary shafts 95a, 95b... Through holes 96... Through holes 97... Extruding parts 97d... Tool insertion holes W... Work W1... Engaged portion W2... Flange portion W2a... Lower surface W2b... Lower surface W3... Engaged end W3a... Lower end (end)
W4... Regulating groove portion W5... Inclined fixed surface W5a... Peripheral groove

Claims (4)

A calibration jig for registering a coordinate system of a rotary table of a three-dimensional measuring machine,
a measuring cylinder extending along the axis of rotation of the rotary table;
a flange portion that expands radially outward around the proximal end of the measurement cylinder;
has
a tip measurement cylinder surface formed at the tip of the measurement cylinder part;
a proximal measurement cylindrical surface formed at the proximal end of the measurement cylindrical portion;
a measurement flange plane formed on a side of the flange portion adjacent to the measurement cylindrical portion;
has
The flange portion serves as a base portion for installing the measurement cylinder portion on the rotary table,
Rotational axis calibration jig. A method for calibrating the rotation axis of a rotary table when registering the coordinate system of the rotary table of a three-dimensional measuring machine using the rotary axis calibration jig according to claim 1, comprising:
a step of installing the rotary axis calibrating jig on the rotary table;
a step of reading the rotation axis of the rotation axis calibrating jig;
rotating the rotary table by a predetermined angle;
a step of reading the rotation axis of the rotation axis calibrating jig after rotating the rotary table by a predetermined angle;
a step of calculating the rotation axis of the rotary table from the rotation axis of the rotation axis calibrating jig read a plurality of times;
having
Rotation axis calibration method. In the step of reading the rotation axis of the rotation axis calibration jig,
reading the coordinate position of the tip measurement cylindrical surface;
reading the coordinate position of the proximal measurement cylinder surface;
reading the coordinate position of the measurement flange plane;
having
3. The rotation axis calibrating method according to claim 2. A maintenance jig used when removing the rotational axis calibrating jig according to claim 1 or the rotational axis calibrating jig used in the rotational axis calibrating method according to claim 2 or 3 from the rotary table,
The base portion of the jig for calibrating the rotational axis line is provided with a locked portion having a locked end portion having an inclined fixing surface that expands in diameter toward the end portion on a cylindrical outer peripheral surface,
The rotary table is provided with a fixing jig having a clamp device for positioning and fixing the locked portion,
The clamping device
Two locking protrusions that hold the inclined fixing surface from both diametrically outer sides and pull the locked portion in a tensile direction in which the inclined fixing surface expands around the axis to regulate the locking position. a locking piece;
a drive unit for moving the locking pieces toward and away from each other;
has
The locking piece is
a columnar portion provided with the locking convex portion at the tip thereof and extending along the pulling direction;
The locking piece is provided at the base end position of the columnar portion to enable movement of the locking piece in the moving direction that is the diametrical direction, and to move the locking piece in the thickness direction orthogonal to the pulling direction and the moving direction. a movement regulation unit that regulates the movement of
with
The movement control unit includes:
a first regulating surface along the moving direction and the thickness direction;
a second regulating surface that slides against the first regulating surface of the corresponding locking piece;
a third restricting surface along the moving direction, intersecting the pulling direction and orthogonal to the first restricting surface;
is formed,
the movement restricting portion has a substantially rectangular parallelepiped that is unevenly distributed in the thickness direction with a half thickness of the locking protrusion and extends in the movement direction;
in the movement restricting portion, the third restricting surface is formed at a central position in the thickness direction at the base end position of each of the columnar portions and faces each other;
In the movement restricting portion, the first restricting surface extends from the proximal position of one of the columnar portions toward the proximal position of the other columnar portion, and the second restricting surface extends from the locking position of the other columnar portion. facing the first restricting surface in the tensile direction at the base end position of the convex portion;
In the two movement restricting portions, the respective third restricting surfaces slide on each other, and one of the first restricting surfaces and the other of the second restricting surfaces slide on each other,
The movement restricting portion has a projecting portion that projects outward in the thickness direction and extends in the moving direction, and the projecting portion includes a fourth restriction that restricts movement of the locking piece portion in the pulling direction. A face is provided,
The fixing jig is
a fixed base portion having a restricting groove extending in the moving direction so that the clamping device can be fitted so that the locking projection and the columnar portion protrude in the pulling direction, and which is attached to the rotary table;
The locked end portion is fixed by the locking convex portion in a state where the locking piece portion is covered with respect to the fixed base portion so that the locking piece portion can move along the regulation groove. a fixing hole having a possible through hole;
a rotation restricting portion that can restrict rotation of the locked portion with respect to the fixing hole when the locked end is inserted into the fixing hole;
has
The restricting groove of the fixing base has a widened portion inside in the pulling direction that allows the protrusion to move along the moving direction when the clamping device is fitted therein,
The maintenance jig has a cylindrical portion, a hook portion, and an extrusion portion,
The columnar portion is insertable from a lower end portion into the through hole of the fixing hole portion, and accommodates therein the push-out portion that can protrude downward from the lower end portion. A storage recess is formed in the
The hook portion is arranged in the storage recess, and is housed inside the storage recess so as not to protrude radially outward from the outer peripheral surface of the cylindrical portion. It is possible to transition to a protruding state that protrudes radially outward from the outer peripheral surface,
maintenance fixtures.

Images