JP7090365B1 - Clamping device, fixing jig, 3D measuring machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten calibration work and improve work efficiency. SOLUTION: A clamp device 50 for fixing a locked portion having a locked end portion having an inclined fixing surface sandwiches the inclined fixing surface and pulls the locked portion in a pulling direction to set a locking position. It has two locking pieces 51A and 51B having locking protrusions 57A and 57B and a driving part 52, and the locking pieces have columnar portions 53A and 53B and base ends 54A and 54B. The first regulatory surface 58Aa and the second regulatory surface 58Bb, the first regulatory surface and the second regulatory surface 58Ab, and the third regulatory surface 58Ac and the third regulatory surface 58Bc slide on each other. Move. [Selection diagram] FIG. 10

Description

The present invention relates to a clamping device, a fixing jig, a coordinate measuring machine, a rotating axis calibration jig, and a rotating axis calibration method, and particularly to a technique suitable for three-dimensional measurement using a rotating table.

Conventionally, a three-dimensional measuring machine that measures the surface shape of a work by using a contactor that comes into contact with the work (object to be measured) is known. In such a three-dimensional measuring machine, the work is placed on a rotary table (rotary table) for measurement (see, for example, Patent Documents 1 and 2).
In such a three-dimensional measuring machine, when measuring using a rotary table, it is necessary to register the coordinate system of the rotary table in advance.
As shown in FIG. 16 in Patent Document 2, a master ball 9 (reference sphere) fixed to a point (reference point) near the outer periphery of the surface of the rotary table 50 is usually used for registering the coordinate system of the rotary table 50. Be done. The master ball 9 is fixed to the surface of the rotary table 50 by screwing a supporting shaft portion into a screw hole or the like.

When registering the coordinate system of the rotary table 50 using such a master ball 9, the rotary table 50 is rotated to three or more angle positions (for example, 0 degrees, 120 degrees, 240 degrees), and each angle. At the position, the center position (center position in space coordinates) of the master ball 9 is measured. Normally, in order to measure the center position of the master ball 9, the tip ball 17A of the probe 17 is sequentially brought into contact with four points on the equator and one apex on the surface of the master ball 9, and a total of five point measurements are performed.
As shown in FIG. 17 in Patent Document 2, if three or more reference points (S1 to S3) can be measured, one circle can be specified by these reference points, and the center position of this circle is set to the coordinates of the rotary table 50. The origin O _t is set, the X axis (X _t ) and the Y axis (Y _t ) are set along the plane including this circle, and the normal of the same plane passing through the origin O _t is set as the Z axis (Z _t ). Set. When performing such work, it is customary to remove elements other than the master ball on the rotary table.

Japanese Unexamined Patent Publication No. 2001-264048 Japanese Unexamined Patent Publication No. 2012-083192 Japanese Patent Laid-Open No. 2021-008030

In the registration of the coordinate system of the rotation table described above, in order to measure the reference point, that is, the center position of the master ball at three or more angle positions, it is necessary to measure at least 15 points, which causes a problem that the measurement time becomes long. be.
In addition, probing errors (errors due to the measurement accuracy of the probe) are unavoidable in each point measurement on the surface of the master ball, and there are many points in the measurement of the center position of the master ball in which such point measurement is performed at multiple points. Accumulation of errors is inevitable. As a result, when the above-mentioned procedure for registering the rotary table coordinate system is used, there is a problem that the accuracy as the rotary table coordinate system becomes insufficient even if the probing error in each point measurement is small.

Furthermore, although it is assumed that the rotation axis of the rotary table is located in the vertical direction, it is not realistically accurate in the vertical direction, which causes an error in the surface shape measurement of the work. At the same time, there is a problem that the registration of the coordinate system of the rotation table may not be accurate in the first place.
When a chuck is used to calibrate the rotary axis of the rotary table, it is necessary to apply a radial load to the rotary shaft as described in Patent Document 3, thereby further rotating the rotary table. There was a problem that the axis line could shift.

In addition, every time the workpiece to be measured is fixed and placed on the rotary table, it is necessary to register and / or calibrate the coordinate system of this rotary table, so there is a request to shorten this. was there.

The present invention has been made in view of the above circumstances. With a simple configuration, the number of work steps and the work time required for calibration of the rotary table of the coordinate measuring machine are shortened, the measurement efficiency is improved, and the measurement accuracy is improved. It is intended to achieve the purpose of providing a clamping device, a fixing jig, and a coordinate measuring machine that enable improvement.

The invention according to claim 1 as a means for solving the above problems
A clamp device for positioning and fixing a locked portion having a locked end having an inclined fixing surface whose diameter expands toward the end on a cylindrical outer peripheral surface.
Two having a locking convex portion that regulates the locking position by sandwiching the inclined fixing surface from both outer sides in the radial direction and pulling the locked portion in the tensile direction in which the inclined fixing surface expands in diameter around the axis. Locking piece and
A drive unit that brings the locking pieces closer to and away from each other,
Have,
The locking piece
A columnar portion having the locking convex portion provided at the tip and extending along the tensile direction, and a columnar portion.
The locking piece portion provided at the base end position of the columnar portion enables the locking piece portion to move in the moving direction in the radial direction, and the locking piece portion in the thickness direction orthogonal to the pulling direction and the moving direction. The movement control department that regulates the movement of
Equipped with
The movement control section
The first regulatory plane along the moving direction and the thickness direction,
A second regulatory surface that slides against the first regulatory surface of the corresponding locking piece
A third regulatory plane that follows the movement direction, intersects the tensile direction, and is orthogonal to the first regulatory plane.
Is formed,
The movement restricting portion has a substantially rectangular parallelepiped that is unevenly distributed in the thickness direction as half the thickness of the locking convex portion and extends in the movement direction.
In the movement restricting portion, the third restricting surface is formed at the center position in the thickness direction at the base end position of each of the columnar portions and faces each other.
In the movement restricting portion, the first restricting surface extends from the proximal end position of one columnar portion toward the proximal end position of the other columnar portion, and the second restricting surface extends from the proximal end position of the other columnar portion, and the second restricting surface extends from the other locking surface. At the base end position of the convex portion, facing the first regulation surface in the tensile direction,
In the two movement control sections, the third regulation surface slides on each other, and one of the first regulation surfaces and the other second regulation surface slide on each other.
Clamping device.
The invention described in claim 2 is
The clamp device according to claim 1.
The drive unit
A female screw portion extending coaxially along the moving direction at the base end position of each of the columnar portions, and a female screw portion.
A male threaded portion in which a reverse screw is formed at both ends and screwed into the female threaded portion, respectively.
Have.
The invention described in claim 3 is
The clamp device according to claim 1 or 2.
The movement restricting portion has a protruding portion extending outward in the thickness direction and extending in the moving direction, and the protruding portion has a fourth regulation for restricting the movement of the locking piece portion in the tensile direction. A surface is provided,
Clamping device.
The invention according to claim 4 is the invention.
A fixing jig provided with the clamp device according to claim 3.
A fixing base portion having a restricting groove extending in the moving direction so that the clamp device can be fitted so that the locking convex portion and the columnar portion project in the tensile direction, and being attached to a rotary table.
The locked end portion is fixed to the fixed base portion by the locking convex portion while the locking piece portion covers the locking piece portion so that the locking piece portion can move along the regulation groove. A fixed hole with a possible through hole and
A rotation restricting portion that enables rotation regulation of the locked portion with respect to the fixing hole portion when the locked end portion is inserted into the fixing hole portion.
Have,
The restricting groove of the fixing base portion has a widening portion inside the tensile direction that allows the protruding portion to move along the moving direction when the clamping device is fitted.
fixing jig.
The invention according to claim 5 is
A three-dimensional measuring machine provided with the fixing jig according to claim 4.
It has a rotary table to which the fixed base is attached.
The through hole in the fixing hole portion of the fixing jig is installed so as to coincide with the rotation axis of the rotary table.
CMM.

According to the first aspect of the present invention, the two locking pieces are brought into contact with each other by the driving portion, so that the locked end is pulled along the inclination of the inclined fixing surface. Pulled in the direction. Thereby, the locked portion can be positioned.
At this time, by sliding the first regulation surface and the second regulation surface to each other, the moving direction of the two locking pieces is restricted in the direction along the first regulation surface and the second regulation surface. .. Similarly, by sliding the third regulating surface to each other, the moving direction of the two locking pieces is restricted in the direction along the third regulating surface. As a result, the moving direction of the two locking pieces is restricted to the moving direction which is the diameter direction of the columnar locked end.
At the same time, the first regulation surface is formed on the extending surface of the columnar portion in the tensile direction in the substantially rectangular parallelepiped whose movement regulation portion is half in the thickness direction, and the second regulation surface is the columnar surface in which the columnar portion in the thickness direction is half in the thickness direction without the substantially rectangular parallelepiped. The two locking pieces are formed at the base end position of the portion, and the first regulating surface in one locking piece portion is slidable in contact with the second regulating surface in the other locking piece portion. The portions do not change their postures when they rotate about each other in the thickness direction. Therefore, while maintaining the postures of the two locking pieces, the drive unit can perform an operation of separating from each other and an operation of approaching each other.
In this state, the third regulation surface is formed at the center position in the thickness direction at the base end position of each of the columnar portions, and the third regulation surface of the two locking pieces slides against each other. It is possible to prevent the movement of the two locking pieces in the moving direction from being tilted with respect to the moving direction.

According to the second aspect of the present invention, the two locking pieces can be brought close to each other and separated from each other in the moving direction only by rotating the male screw portion in the drive portion. Therefore, it is not necessary to apply an extra load other than the rotation of the male screw portion to the clamp device. That is, since it is not necessary to rotate the clamp device as a whole or apply an unnecessary load in the radial direction of the columnar locked end, the measured portion or the comparison is applied to the rotary table of the coordinate measuring machine. Even if extremely precise fixing is required when fixing a corrective jig or the like, it is possible to prevent the measurement inaccuracy from increasing due to an excessive load applied to the rotary table or the measurement portion. ..

According to the third aspect of the present invention, when the two locking pieces are close to each other and the locked end is pulled in the tensile direction, the fourth regulating surface of the protrusion is the two locking pieces. The fourth regulatory surface of the protrusion can be pulled by the tensile force applied to the two locking pieces to pull the locked end. Thereby, the locked portion can be easily positioned.

According to the fourth aspect of the present invention, the moving direction of the movement restricting portion can be restricted in the moving direction by the regulating groove, and the widening portion of the regulating groove is applied to the two locking pieces of the protruding portion. The locked end can be pulled by receiving the tensile force. At this time, when the locked end portion is inserted into the fixing hole portion, the rotation restricting portion makes it possible to regulate the rotation position of the locked portion with respect to the fixing hole portion, so that the fixing jig can be controlled. The locked portion can be accurately positioned and easily fixed.

According to the invention described in claim 5, the rotating table is provided by installing a rotating axis calibration jig, a work to be measured, or the like via a fixing jig on the rotating table of the coordinate measuring machine. It is possible to attach / detach the rotating axis calibration jig, the workpiece to be measured, or the like without applying a large load to the fixing jig in the radial direction of the axis. This is because when attaching / detaching with the clamp device, the locked end can be attached / detached simply by rotating the male screw portion of the drive unit, so that the locked end can be attached / detached in the radial direction of the axis with respect to the rotary table or fixing jig. This is because it is not necessary to apply a large load. Therefore, the rotary axis of the rotary table, the fixing jig, the rotary axis calibration jig, the work to be measured, and the like does not move or shift, and accurate measurement can be performed by the coordinate measuring machine.

According to the present invention, a clamping device and fixing that can shorten the number of work steps and work time required for calibration of a rotary table of a coordinate measuring machine with a simple configuration, improve measurement efficiency, and improve measurement accuracy. It is possible to achieve the effect of being able to provide jigs and coordinate measuring machines .

It is a perspective view which shows the 1st Embodiment of the 3D measuring machine which concerns on this invention. It is a perspective view which shows the 1st Embodiment of the fixing jig which concerns on this invention. It is a perspective view which shows the locked part to be locked to the 1st Embodiment of the fixing jig which concerns on this invention. It is sectional drawing which shows the inserted state of the locked part in 1st Embodiment of the fixing jig which concerns on this invention. It is sectional drawing which shows 1st Embodiment of the fixing jig which concerns on this invention. It is sectional drawing which shows the fixing hole part in 1st Embodiment of the fixing jig which concerns on this invention. It is a perspective view which shows the state which separated the fixing hole part in 1st Embodiment of the fixing jig which concerns on this invention. It is a top view which shows the fixing base part in 1st Embodiment of the fixing jig which concerns on this invention. It is sectional drawing which shows the fixing base part in 1st Embodiment of the fixing jig which concerns on this invention. It is a perspective view which shows the 1st Embodiment of the clamp device which concerns on this invention. It is sectional drawing which shows the 1st Embodiment of the clamp device which concerns on this invention. It is an exploded perspective view which shows the 1st Embodiment of the clamp device which concerns on this invention. It is a front view which shows the locking piece part in 1st Embodiment of the clamp device which concerns on this invention. It is a side view which shows the locking piece part in 1st Embodiment of the clamp device which concerns on this invention. It is a right sectional view which shows the locking piece part in 1st Embodiment of the clamp device which concerns on this invention. It is a bottom view which shows the 1st Embodiment of the clamp device which concerns on this invention. It is a rear view which shows the 1st Embodiment of the clamp device which concerns on this invention. It is a top view which shows the 1st Embodiment of the clamp device which concerns on this invention. It is a front view which shows the 1st Embodiment of the clamp device which concerns on this invention. It is a left side view which shows the 1st Embodiment of the clamp device which concerns on this invention. It is a right side view which shows the 1st Embodiment of the clamp device which concerns on this invention. It is a perspective view which shows the state which the 2nd Embodiment of the rotary axis calibration jig which concerns on this invention is attached to a fixing jig. It is a perspective view which shows the state which the 2nd Embodiment of the rotary axis calibration jig which concerns on this invention is removed from a fixing jig. It is a perspective view which shows the maintenance jig for removing the fixing hole part in 3rd Embodiment of the fixing jig which concerns on this invention. It is a top view which shows the maintenance jig for removing the fixing hole part in 3rd Embodiment of the fixing jig which concerns on this invention. It is sectional drawing which shows the maintenance jig for removing the fixing hole part in 3rd Embodiment of the fixing jig which concerns on this invention. It is sectional drawing which shows the maintenance jig for removing the fixing hole part in 3rd Embodiment of the fixing jig which concerns on this invention. It is sectional drawing which shows the state which inserted the maintenance jig for removing the fixing hole part in 3rd Embodiment of the fixing jig which concerns on this invention. It is sectional drawing which shows the state which removes the fixing hole part by the maintenance jig in the 3rd Embodiment of the fixing jig which concerns on this invention.

Hereinafter, the first embodiment of the clamp device, the fixing jig, and the coordinate measuring machine according to the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing a three-dimensional measuring machine according to the present embodiment, and in the figure, reference numeral 1 is a three-dimensional measuring machine.

As shown in FIG. 1, the three-dimensional measuring machine 1 according to the present embodiment drives and controls the rotary table 5 and the three-dimensional measuring machine 1 to capture necessary measured values and perform arithmetic processing necessary for shape processing. It is composed of a computer 2 to be executed and a computer 2 to be executed.

The coordinate measuring machine 1 has a surface plate 11 having a horizontal upper surface, the surface plate 11 is supported by a seismic isolation table 10, and a rotary table 5 on which a work W or the like can be placed is placed on the surface plate 11. And a moving mechanism 19 that supports the contact probe 17 and can move to an arbitrary position are installed.
The rotary table 5 is supported by a rotation drive mechanism (not shown) installed in the surface plate 11, and can rotate to an arbitrary rotation angle position around an axis perpendicular to the upper surface of the surface plate 11. The rotation drive mechanism has a function of detecting the rotation angle of the rotary table 5 with respect to the surface plate 11.

The moving mechanism 19 has beam supports 12A and 12B erected on both ends of the surface plate 11, and a beam 13 extending in the X-axis direction from the upper end of each is supported. The lower end of the beam support 12A is driven in the Y-axis direction by the Y-axis drive mechanism 14. The lower end of the beam support 12B is movably supported on the surface plate 11 in the Y-axis direction by an air bearing. A column 15 extending in the vertical direction (Z-axis direction) is supported by the beam 13, and the column 15 is driven in the X-axis direction along the beam 13. A spindle 16 is supported by the column 15, and the spindle 16 is driven along the column 15 in the Z-axis direction. The drive mechanism of each axis has a function of detecting a position or a movement amount in each axis.

The probe 17 is attached to the lower end of the spindle 16. At the tip of the probe 17, for example, a tip sphere 17A, which is a spherical contactor, is formed. The probe 17 is moved by the moving mechanism 19, and the tip ball 17A can be brought into contact with an arbitrary surface such as a work W placed on the rotary table 5. It is possible to automatically replace the probe 17 with a probe having another shape / orientation such as a horizontal orientation (not shown) to perform detection work.

The computer 2 includes a computer main body, a keyboard for operation, a display device, an output unit such as a printer, and the like.
The computer body includes an arithmetic processing device and a storage device (not shown), and is connected to the probe 17 via an interface (not shown).
The computer 2 is started by an external operation, controls the operation of the coordinate measuring machine 1 by executing the recorded program, processes the signal from the probe 17, and can output the specified measurement result. There is.

In the present embodiment, the probe 17 is three-dimensionally moved with respect to the surface plate 11 by the moving mechanism 19, and the work W and the like are further rotated by the rotary table 5. In such a configuration, prior to detecting the contact position of the tip sphere 17A with respect to the work W or the like, the coordinates between the platen 11 and the moving mechanism 19 are set, the rotation center of the rotary table 5 is set, and the rotation angle position is set. It is necessary to set the related coordinate system such as setting, setting of the placement position and posture of the work W and the like. Aiming at the work W measurement using the rotary table 5, it is required to prepare a lateral probe 17 calibrated with the probe 17 as a reference.

[fixing jig]
FIG. 2 is a perspective view showing the fixing jig 20 in the present embodiment. FIG. 3 is a perspective view showing the locked portion W1 in the present embodiment. FIG. 4 is a cross-sectional view showing a state in which the locked portion W1 in the present embodiment is inserted into the fixing jig 20.
As shown in FIG. 1, the fixing jig 20 is attached and fixed to the upper surface of the rotary table 5. The fixing jig 20 attaches the work W and others to the rotary table 5 so as to be detachable.
As shown in FIG. 2, the fixing jig 20 has a fixing base portion 21, a fixing hole portion 22, and a clamping device 50.

The fixing base portion 21 is attached and fixed to the rotary table 5. As shown in FIG. 2, the fixed base portion 21 has a columnar base portion 21a. A fixed flange 21b to be attached to the rotary table 5 is formed at the lower end of the outer circumference of the base portion 21a. The diameter of the fixed flange 21b is expanded outward with respect to the base portion 21a. The fixing flange 21b is formed with a mounting hole 21c for attaching the fixing base portion 21 to the rotary table 5 through a bolt B or the like. A plurality of mounting holes 21c are formed so as to be spaced apart from each other in the circumferential direction of the fixed flange 21b.
The base portion 21a supports the clamp device 50 as described later.
A ridge 21d is provided around the upper edge of the base 21a.

As shown in FIG. 2, the fixing hole portion 22 is fitted and fixed to the fixing base portion 21 in a state of covering the base portion 21a of the fixing base portion 21. The fixing hole portion 22 has a columnar shape having the same diameter as the base portion 21a. A notch 22d is provided around the lower edge of the fixing hole portion 22. The notch 22d fits the fixing hole portion 22 into the fixing base portion 21 corresponding to the protrusion 21d of the base portion 21a, and makes it possible to fix the fixing hole portion 22 and the fixing base portion 21 to the inlay.

The fixing hole portion 22 is a through portion that allows the locked portion W1 to be fixed to the fixing jig 20 by inserting the locked end portion W3 formed in the locked portion W1 which is a work W or the like described later. It has a hole 23. The through hole 23 is formed in the vertical direction at the center of the fixing hole portion 22. The through hole 23 is coaxially opened at the center position of the upper surface 22a of the fixing hole portion 22. A fixing jig 20 is installed in the through hole 23 so that the axis of the through hole 23 coincides with the rotation axis of the rotary table 5.

The upper surface 22a of the fixing hole portion 22 is formed in a planar shape along the PT direction. The upper surface 22a of the fixing hole 22 has a circular contour when viewed in the Z direction.
As shown in FIG. 2, the fixing hole portion 22 has a rotation restricting portion 24 that allows the locked portion W1 to rotate around the through hole 23. The rotation restricting portion 24 is formed as a ridge on the upper surface 22a of the fixing hole portion 22. The rotation restricting portion 24 is formed by fitting a key member having a predetermined width into a groove formed in the upper surface 22a of the fixing hole portion 22.

A plurality of rotation restricting portions 24 are formed radially along the radial direction of the fixing hole portions 22. The rotation restricting portion 24 is provided with, for example, four in a substantially cross shape around the through hole 23 with the through hole 23 as the center. The rotation restricting portion 24 extends over the entire radial direction of the fixing hole portion 22. The rotation restricting portion 24 extends from the through hole 23 to the peripheral edge portion on the upper surface 22a of the fixing hole portion 22. The rotation control unit 24 is formed to have the same width in its entire length. The rotation restricting unit 24 is set to have the same height dimension protruding from the upper surface 22a in the Z direction in the total length thereof.

[Locked part]
As shown in FIG. 3, the locked portion W1 is formed on the lower side of the work W and others in order to attach the work W and others to the upper surface of the rotary table 5. The locked portion W1 has a flange portion W2 and a locked end portion W3.

The flange portion W2 is placed on the upper surface 22a of the fixing hole portion 22. The lower surface W2b of the flange portion W2 is formed in a planar shape. At the center position of the lower surface W2b of the flange portion W2, the locked end portion W3 is formed so as to project downward. The diameter of the flange portion W2 can be formed to be the same as that of the fixing hole portion 22. The diameter of the flange portion W2 is not particularly limited as long as it can be fixed to the locked portion W1 to a measurable degree with respect to the fixing hole portion 22.

On the lower surface W2b of the flange portion W2, a regulation groove portion W4 is formed so as to correspond to the rotation regulation portion 24. The regulation groove portion W4 is formed in a slit shape on the lower surface W2b of the flange portion W2. Four restricting groove portions W4 are formed radially outward from the locked end portion W3. The restricting groove portion W4 has a width direction dimension and a radial length that can be positioned and regulated by fitting with the rotation restricting portion 24.

The locked end portion W3 has a columnar outer peripheral surface as shown in FIGS. 3 and 4. The diameter of the locked end portion W3 can be inserted into the through hole 23. The diameter of the locked end W3 is slightly smaller than that of the through hole 23 so that it can be inserted into the through hole 23.
A reduced-diameter peripheral groove W5a is provided on the outer peripheral surface of the locked end portion W3 close to the lower end W3a. On the lower end W3a side of the peripheral groove W5a, an inclined fixing surface W5 whose diameter increases toward the lower end (end) W3a is provided around the circumference.

[Fixing jig and clamp device]
FIG. 5 is a cross-sectional view showing the fixing jig 20 in the present embodiment. FIG. 6 is a cross-sectional view showing the fixing hole portion 22 in the present embodiment.
As shown in FIGS. 4 to 6, the fixing hole portion 22 is a storage portion 26 having an enlarged diameter at a position close to the fixing base portion 21 in which the through hole 23 is lower than the diameter dimension opened in the upper surface 22a. Have.
The storage portion 26 is coaxial with the through hole 23 and opens facing the fixed base portion 21. A ceiling portion 26a, which is a step, is formed between the storage portion 26 and the through hole 23. The ceiling portion 26a is formed as a surface parallel to the upper surface 22a. The clamp device 50 is stored in the storage unit 26 as described later. The diameter of the storage portion 26 is such that the clamp device 50 can be moved as described later. The contour shape of the storage portion 26 in a plan view is circular like the through hole 23, but is not limited to this as long as a space in which the clamp device 50 can move is secured.

FIG. 7 is a perspective view showing the fixed base portion 21 in the present embodiment. FIG. 8 is a plan view showing the fixed base portion 21 in the present embodiment. FIG. 9 is a cross-sectional view showing the fixed base portion 21 in the present embodiment.
As shown in FIGS. 5 and 7 to 9, a restricting groove 25 that movably supports the clamp device 50 is formed in the fixed base portion 21. The regulation groove 25 passes through the center of the base portion 21a and extends linearly in the radial direction. The regulation groove 25 extends on both sides in the radial direction with respect to the center of the base portion 21a. The regulating groove 25 regulates the moving direction of the clamp device 50 with respect to the base portion 21a in the direction along the regulating groove 25. It is preferable that the center of the regulation groove 25 in the width direction in the T direction coincides with the center of the base portion 21a.

The regulation groove 25 has an opening 25a in which one end thereof in a plan view opens to the side peripheral surface of the base portion 21a. The other end of the regulation groove 25 in a plan view does not reach the ridge 21d of the base portion 21a and does not open to the side peripheral surface . In the regulation groove 25, the opening width on the upper surface 21e of the base portion 21a is set to be substantially equal in the total length.

In the regulating groove 25, a widening portion 25d that allows the protruding portions 56A and 56B of the clamp device 50, which will be described later, to be movable in the direction along the regulating groove 25 is formed at a position separated from the upper surface 21e in the vertical direction.
The widening portion 25d is formed to have a width dimension in the T direction larger than the opening width of the regulation groove 25 on the upper surface 21e of the base portion 21a. The widening portion 25d is formed over the entire length of the regulation groove 25 in the P direction. The widened portion 25d is formed as having the same width dimension and the same height dimension in the total length in the P direction.

A lower groove 26d is formed on the lower surface of the fixing hole 22 from the opening 25a of the regulation groove 25 to the storage portion 26 along the regulation groove 25. The width dimension of the lower groove 26d is set to be substantially equal to the width dimension of the regulation groove 25.

[Clamp device]
FIG. 10 is a perspective view showing the clamp device 50 in the present embodiment. FIG. 11 is a cross-sectional view showing the clamp device 50 in the present embodiment. FIG. 12 is an exploded perspective view showing the clamp device 50 in the present embodiment.
The clamp device 50 positions the locked portion W1 having the locked end portion W3 having the inclined fixing surface W5 and fixes it to the fixing jig 20.
As shown in FIGS. 10 to 12, the clamp device 50 includes two locking piece portions 51A and a locking piece portion 51B, and a male screw portion 52 for screwing them together.

The two locking piece portions 51A and the locking piece portion 51B have the same shape and are symmetrically combined with respect to the center point of the male screw portion 52. The two locking piece portions 51A and the locking piece portion 51B are separated from each other in the P direction along the axis of the male screw portion 52. Further, the two locking piece portions 51A and the locking piece portion 51B do not move to each other in the Z direction, which is the vertical direction. The two locking piece portions 51A and the locking piece portion 51B do not move with each other in the T direction orthogonal to the P direction.

Hereinafter, the locking piece portion 51A will be described. As for the locking piece portion 51B, the subscript A of the code is replaced with B, and the description thereof will be omitted. The differences between the locking piece portion 51A and the locking piece portion 51B will be described to that effect.
FIG. 13 is a front view showing the locking piece portion 51A in the present embodiment. FIG. 14 is a side view showing the locking piece portion 51A in the present embodiment. FIG. 15 is a front sectional view of the locking piece portion 51A in the present embodiment as viewed from the back surface.

As shown in FIGS. 10 to 15, the locking piece portion 51A has a columnar portion 53A in which a locking convex portion 57A abutting on the inclined fixing surface W5 is provided close to the upper end, and a base end portion of the columnar portion 53A. It includes a (base end) 54A, a movement restricting portion 55A which is a substantially rectangular parallelepiped provided below the base end portion 54A, and a protruding portion 56A provided at the lower end of the movement restricting portion 55A.

The columnar portion 53A is erected in the Z direction. The columnar portion 53A has a substantially uniform thickness dimension in the T direction. A locking convex portion 57A is formed on the upper portion of the columnar portion 53A at a position facing the other locking piece portion 51B.

The locking convex portion 57A projects in the P direction so as to be closer to the locking piece portion 51B facing the lower side of the columnar portion 53A. The lower side of the locking convex portion 57A is inclined at an angle equal to the inclined fixing surface W5. Alternatively, the lower side of the locking convex portion 57A may be inclined at an angle larger than the inclination angle of the inclined fixing surface W5. In the columnar portion 53A, the locking convex portion 57A can enter the peripheral groove W5a at the height position where the locking convex portion 57A is formed downward from the upper end of the columnar portion 53A in the Z direction. Moreover, the locking convex portion 57A is set so as to be able to abut on the inclined fixing surface W5.

The base end portion 54A is the lower end of the columnar portion 53A and protrudes in the P direction from the upper portion of the columnar portion 53A. The base end portion 54A has substantially the same thickness dimension in the T direction as the columnar portion 53A. The base end portion 54A has a substantially uniform thickness dimension in the T direction, similarly to the columnar portion 53A. A through hole penetrating in the P direction is formed in the base end portion 54A, and a female screw portion 52A is formed on the inner surface thereof.

The female screw portion 52A of the locking piece portion 51A and the female screw portion 52B of the locking piece portion 51B are arranged so as to have the same diameter and coaxial with each other. The axis of the female screw portion 52A of the locking piece portion 51A and the female screw portion 52B of the locking piece portion 51B both extend in the P direction. The female screw portion 52A of the locking piece portion 51A and the female screw portion 52B of the locking piece portion 51B are formed as reverse threads. A male threaded portion 52 is screwed into the female threaded portion 52A and the female threaded portion 52B (see FIGS. 10 to 13).

The male screw portion 52 has a columnar shape extending in the P direction, and male screws 52a and 52b which are opposite threads are formed on the outer peripheral surfaces of both ends. A tool insertion hole 52d is formed at one end of the male screw portion 52. The tool insertion hole 52d is shown at the lower position of the columnar portion 53A of the locking convex portion 57A in FIG. 11, but the tool insertion hole 52d is the lower side of the columnar portion 53B of the locking convex portion 57B. It can also be a position. As will be described later, the tool insertion hole 52d is arranged so as to be close to the opening 25a of the regulation groove 25 in the P direction.
The male screw portion 52, the female screw portion 52A, and the female screw portion 52B form a drive unit.

The movement restricting portion 55A is located below the base end portion 54A. The movement restricting portion 55A has a thickness dimension that is half that of the columnar portion 53A and the base end portion 54A. The movement restricting portion 55A is arranged on one side of the center of the columnar portion 53A and the proximal end portion 54A in the T direction. The movement control unit 55A is a substantially rectangular parallelepiped. The movement restricting portion 55A protrudes in the P direction from the proximal end portion 54A when viewed in the T direction.

The protruding portion 56A is formed at the lower end of the movement restricting portion 55A. The protruding portion 56A protrudes in the T direction from the movement restricting portion 55A. The protruding portion 56A extends over the entire lower end of the movement restricting portion 55A in the P direction. The protrusion 56A is set so that the dimension of protrusion in the T direction is equal to the total length in the P direction from the vertical surface facing the T direction in which the movement restricting portion 55A, the columnar portion 53A, and the base end portion 54A are flush with each other. The protrusion 56A is set so that the dimension in the Z direction is equal to the total length in the P direction.

In the locking piece portion 51A, the movement restricting portion 55A, the columnar portion 53A, and the base end portion 54A are flush with each other on the upright surface opposite to the locking piece portion 51B in the P direction. In the locking piece portion 51A, the columnar portion 53A immediately above the base end portion 54A is separated from the locking piece portion 51B most on the surface facing the locking piece portion 51B in the P direction, and then the locking convex portion. 57A is in close proximity to the locking piece 51B, then the proximal end 54A is in close proximity to the locking piece 51B, and the movement restricting portion 55A is closest to the locking piece 51B.

A first regulation surface 58Aa, a second regulation surface 58Ab, a third regulation surface 58Ac, and a fourth regulation surface 58Ad are formed on the locking piece portion 51A. The first regulation surface 58Aa, the second regulation surface 58Ab, the third regulation surface 58Ac, and the fourth regulation surface 58Ad are all formed as planes along the P direction. The first regulatory surface 58Aa, the second regulatory surface 58Ab, and the fourth regulatory surface 58Ad are formed in parallel with each other. The first regulation surface 58Aa, the second regulation surface 58Ab, the fourth regulation surface 58Ad, and the third regulation surface 58Ac are formed orthogonal to each other.

The first regulatory surface 58Aa is formed along the T direction. The first restricting surface 58Aa is formed on an upper surface protruding in the P direction from the base end portion 54A of the movement restricting portion 55A. The first regulation surface 58Aa has the same width dimension in the T direction as the movement regulation portion 55A. The first regulatory surface 58Aa has a half T-direction width dimension of the columnar portion 53A and the proximal end portion 54A. The first regulating surface 58Aa when viewed in the Z direction has the same rectangular contour as the portion protruding in the P direction from the proximal end portion 54A of the movement restricting portion 55A.

The second regulatory surface 58Ab is formed along the T direction. The second regulation surface 58Ab is formed on the lower surface of the base end portion 54A. The second regulatory surface 58Ab is formed so as to be substantially flush with the first regulatory surface 58Aa. The second regulation surface 58Ab has the same length dimension in the P direction as the lower end of the base end portion 54A. The second regulation surface 58Ab has a width dimension in the T direction that is half that of the columnar portion 53A. The second regulation surface 58Ab has the same width dimension in the T direction as the first regulation surface 58Aa. The second regulatory surface 58Ab has a shorter PT direction length dimension than the first regulatory surface 58Aa. The second regulatory surface 58Ab has a length dimension in the PT direction that is about half that of the first regulatory surface 58Aa. The second regulatory surface 58Ab when viewed in the Z direction has the same rectangular contour as half of the proximal end portion 54A.

The third regulatory surface 58Ac is formed along the Z direction. The third regulation surface 58Ac is formed on the vertical surface of the movement regulation portion 55A which is the central position of the columnar portion 53A and the base end portion 54A in the T direction. The third regulation surface 58Ac has the same height dimension in the Z direction as the movement regulation portion 55A. The third regulation surface 58Ac has the same length dimension in the P direction as the movement regulation portion 55A. The third restricting surface 58Ac when viewed in the T direction has the same rectangular contour as the movement restricting portion 55A.

The fourth regulatory surface 58Ad is formed along the T direction. The fourth regulation surface 58Ad is formed on the upper surface of a portion where the protrusion 56A protrudes from the movement regulation portion 55A when viewed in the Z direction. The fourth regulation surface 58Ad has the same width dimension in the T direction as the protrusion 56A. The fourth regulation surface 58Ad has the same length dimension in the P direction as the protrusion 56A. The fourth regulation surface 58Ad has the same length dimension in the P direction as the movement regulation portion 55A.

FIG. 16 is a bottom view showing a disassembled state of the clamp device 50 in the present embodiment. FIG. 17 is a rear view showing an exploded state of the clamp device 50 in the present embodiment. FIG. 18 is a top view showing a disassembled state of the clamp device 50 in the present embodiment. FIG. 19 is a front view showing a disassembled state of the clamp device 50 in the present embodiment. FIG. 20 is a left side view showing a disassembled state of the clamp device 50 in the present embodiment. FIG. 21 is a right side view showing the disassembled state of the clamp device 50 in the present embodiment.
As shown in FIGS. 10 to 21, the clamp device 50 in the present embodiment has two locking piece portions 51A and a locking piece portion 51B combined with a male screw portion 52 for screwing them together. The stop piece portion 51A and the locking piece portion 51B are close to each other and separated from each other in the P direction.
In the locking piece portion 51A and the locking piece portion 51B, the locking convex portion 57A and the locking convex portion 57B are assembled so as to face each other and face each other.

Specifically, in the assembled locking piece portion 51A and the locking piece portion 51B, the first regulating surface 58Aa of the locking piece portion 51A and the second regulating surface 58Bb of the locking piece portion 51B are formed. They are in contact with each other so as to be slidable. Similarly, the second regulating surface 58Ab of the locking piece portion 51A and the first regulating surface 58Ba of the locking piece portion 51B are slidably in contact with each other. Further, the third regulating surface 58Ac of the locking piece portion 51A and the third regulating surface 58Bc of the locking piece portion 51B are slidably in contact with each other.

In this state, the locking piece portion 51A and the locking piece portion 51B have the movement restricting portion 55A of the locking piece portion 51A located below the base end portion 54B of the locking piece portion 51B. Similarly, the movement restricting portion 55B of the locking piece portion 51B is located below the base end portion 54A of the locking piece portion 51A. Further, the movement control unit 55A and the movement control unit 55B are half of each other in the T direction.

That is, the locking piece portion 51A and the locking piece portion 51B are the first regulation surface 58Aa and the second regulation surface 58Bb, the first regulation surface 58Ba and the second regulation surface 58Ab, and the third regulation surface 58Ac and the third regulation surface. When 58Bc are in contact with each other, they can move in the P direction. Further, since the movement restricting unit 55A and the movement restricting unit 55B, which are half in the T direction, are combined in opposite directions in the P direction, the relative posture of the locking piece portion 51A and the locking piece portion 51B can be maintained. They can move in the P direction with each other without changing.

At this time, according to the relative movement of the locking piece portion 51A and the locking piece portion 51B in the P direction, the first regulating surface 58Aa and the second regulating surface 58Bb, the first regulating surface 58Ba and the second regulating surface 58Ab, and the third The regulation surface 58Ac and the third regulation surface 58Bc slide on each other.

Further, in the locking piece portion 51A, the movement restricting portion 55A is located below the proximal end portion 54B on one side in the T direction, and the proximal end portion 54A is located on the upper side of the movement restricting portion 55B on the other side in the T direction. Therefore, it is possible to restrict the relative rotation of the locking piece portion 51A and the locking piece portion 51B in the direction along the ZP plane.
Similarly, in the locking piece portion 51B, the movement restricting portion 55B is located below the proximal end portion 54A on one side in the T direction, and the proximal end portion 54B is located on the upper side of the movement restricting portion 55A on the other side in the T direction. Therefore, it is possible to restrict the relative rotation of the locking piece portion 51A and the locking piece portion 51B in the direction along the ZP plane.

Further, in the locking piece portion 51A and the locking piece portion 51B, the male screws 52a and 52b of the male screw portion 52 are screwed into the female screw portion 52A and the female screw portion 52B, respectively. At the position where the locking piece portion 51A and the locking piece portion 51B are in close contact with each other, the male screw portion 52 has a length that does not protrude from the through hole. When the locking piece portion 51A and the locking piece portion 51B are in close contact with each other, the base end portion 54A and the base end portion 54B come into contact with each other.

Here, a predetermined tool is inserted into the tool insertion hole 52d from the opening 25a through the regulation groove 25 and the lower groove 26d, and the male screw portion 52 is rotated to obtain the locking piece portion 51A and the locking piece portion 51B. Can move in the P direction with each other. By switching the rotation direction of the male screw portion 52 between forward rotation and reverse rotation, the locking piece portion 51A and the locking piece portion 51B can be brought close to each other or separated from each other. That is, the male screw portion 52 is a drive unit that relatively drives the locking piece portion 51A and the locking piece portion 51B by its rotation.

Further, by screwing the male screw portion 52 into the locking piece portion 51A and the locking piece portion 51B, the locking piece portion 51A and the locking piece portion 51B rotate relative to each other with respect to the axis in the P direction. It can also be regulated.
The locking piece 51A and the locking piece 51B are brought close to each other and separated from each other by the rotation of the male screw portion 52, so that the locking convex portion 57A and the locking convex portion 57B remain facing each other. , Proximate and separate from each other in the P direction.
As described above, the clamp device 50 is engaged in a state in which the moving direction and the moving posture are regulated by the first regulating surface 58Aa, the second regulating surface 58Ab, the third regulating surface 58Ac, and the fourth regulating surface 58Ad. The stop piece portion 51A and the locking piece portion 51B are close to each other and separated from each other in the P direction.

As shown in FIGS. 4, 5, and 7, in the fixing jig 20, the clamp device 50 is arranged so that the male screw portion 52 is parallel to the regulation groove 25 of the fixing base portion 21 in the P direction. It is inserted in the P direction. At this time, the movement restricting portion 55A and the movement restricting portion 55B are located inside the restricting groove 25, and at least the columnar portions 53A and 53B project upward in the Z direction from the upper surface 21e of the fixed base portion 21. That is, the base end portions 54A and 54B are located at the same Z-direction positions as the opening of the regulation groove 25 on the upper surface 21e.
Here, the opening dimension of the regulation groove 25 in the upper surface 21e in the T direction and the width dimension of the base end portions 54A and 54B in the T direction are equal to each other.

At the same time, the protrusions 56A and 56B are housed inside the widening portion 25d. The protrusions 56A and 56B are slidable with respect to the inner surface of the widening portion 25d.
Comparing the T-direction dimension in which the protrusion 56A protrudes from the movement restricting portion 55A and the T-direction dimension in which the widening portion 25d is larger than the T-direction dimension opened in the regulation groove 25 on the upper surface 21e, these are equal. Or, the widening portion 25d is larger. Similarly, comparing the T-direction dimension in which the protrusion 56B protrudes from the movement restricting portion 55B and the T-direction dimension in which the widening portion 25d is larger than the T-direction dimension opened in the regulation groove 25 on the upper surface 21e. These are equal or larger in the widened portion 25d.
Further, the Z-direction dimension of the protruding portions 56A and 56B and the Z-direction dimension of the widening portion 25d are equal.
As a result, the fourth regulation surfaces 58Ad and 58Bd slide with the upper surface of the widening portion 25d, so that the clamp device 50 is restricted from moving in the Z direction with respect to the regulation groove 25.

In this state, the clamp device 50 can move along the regulation groove 25, but the movement is restricted in the Z direction and the T direction.
Therefore, in the clamp device 50, the locking convex portion 57A and the locking convex portion 57B are brought close to each other and separated from each other in the P direction only by inserting a predetermined tool into the tool insertion hole 52d and rotating the male screw portion 52.
At the same time, due to the inclination of the inclined fixing surface W5 of the locked end portion W3, the locking convex portion 57A and the locking convex portion 57B are positioned in the PT direction with respect to the regulation groove 25.

The clamp device 50 is not fixed to the center of the fixed base portion 21 or the center of the rotary table 5. By inserting the locked end portion W3 into the through hole 23, the Z-direction axis of the locked end portion W3 follows the axis of the through hole 23, and positioning is performed.
At this time, in the fixing jig 20, the locking convex portion 57A and the locking convex portion 57B are close to and separated from each other in the P direction with respect to the locked end portion W3 inserted into the through hole 23 of the fixing hole portion 22. do.

When the locking convex portion 57A and the locking convex portion 57B are close to each other in the P direction, the locking convex portion 57A and the locking convex portion 57B enter the peripheral groove W5a from both sides in the P direction. Further, the locking convex portion 57A and the locking convex portion 57B, which are close to each other, abut on the inclined fixing surface W5 from both sides in the P direction. When the locking convex portion 57A and the locking convex portion 57B are further close to each other, the inclined fixing surface W5 expands in diameter toward the end portion W3a in the Z direction, so that the locking convex portion 57A and the locking convex portion 57B Moves in the direction in which the contact position is reduced in diameter along the inclined fixing surface W5, that is, in the upward position of the peripheral groove W5a.

At this time, the clamp device 50 does not move in the Z direction because the protrusions 56A and 56B are located inside the widening portion 25d in the regulation groove 25. Therefore, a tensile force acts downward in the Z direction on the inclined fixing surface W5. At the same time, the reaction force against the fourth regulation surface 58Ad and 58Bd is received on the upper surface of the widening portion 25d. As a result, the locked end portion W3 is pulled downward in the Z direction.

Here, since the locking piece portion 51A and the locking piece portion 51B are connected by the male screw portion 52, if the male screw portion 52 is not rotated, the locking convex portion 57A and the locking convex portion 57B Do not separate from each other in the P direction. That is, the locked state of the locked end portion W3 by the locking convex portion 57A and the locking convex portion 57B is not released. Therefore, the tension state of the locked end portion W3 by the clamp device 50 is not released.

When the locked end portion W3 is inserted into the through hole 23 of the fixing hole portion 22, the lower surface W2b of the flange portion W2 comes into contact with the upper surface 22a of the fixing hole portion 22. As a result, the locked portion W1 is positioned so that the lower surface W2b is parallel to the plane defined by the upper surface 22a.
At the same time, on the lower surface W2b of the flange portion W2, the regulation groove portion W4 is fitted to the corresponding rotation regulation portion 24.

Here, the rotation restricting portion 24 composed of the key member is arranged radially around the through hole 23 in the P direction and the T direction, and the restricting groove portion W4 meshes with the rotation restricting portion 24. The P-direction position and T-direction position of the flange portion W2 with respect to the fixing hole portion 22 and the rotation position of the flange portion W2 with respect to the Z-direction axis of the through hole 23 are position-controlled.
As a result, the posture and positioning of the locked end portion W3 with respect to the fixing jig 20 in the PT direction are performed.

In the present embodiment, while maintaining the postures of the two locking pieces 51A and 51B, the clamp device 50 and the clamp device 50 are maintained in the postures of the clamp device 50 that is moved toward and separated from each other in the P direction by the drive unit 52. A regulating groove 25 is provided to regulate the movement in the Z direction while allowing the clamp device 50 to move in the P direction, and the position of the locked end portion W3 is set by the through hole 23 and the rotation restricting portion 24. The possible fixing jig 20 makes it possible to easily position the locked portion W1 and pull it downward in the Z direction to fix it.

Moreover, the positioning of the locked portion W1 and the downward tension fixing of the locked end portion W3 in the Z direction can be performed only by rotating the male screw portion 52. As a result, the locked portion W1 can be easily fixed and removed, and workability in three-dimensional measurement can be easily improved.
At the same time, it is possible to reduce the application of the thrust load or the radial load to the rotary shaft of the rotary table 5 and easily maintain the accuracy in the three-dimensional measurement.
As a result, it is possible to improve workability in measurement while maintaining the measurement accuracy of the coordinate measuring machine 1.

Hereinafter, a second embodiment of the clamp device, the fixing jig, the coordinate measuring machine, and the rotating axis calibration jig according to the present invention will be described with reference to the drawings.
FIG. 22 is a perspective view showing a state in which the rotary axis calibration jig according to the present embodiment is attached to the fixing jig. FIG. 23 is a perspective view showing a state in which the rotary axis calibration jig in the present embodiment is removed from the fixing jig.
In this embodiment, the difference from the above-mentioned first embodiment is that the jig for rotating axis line calibration is used, and the other configurations corresponding to the above-mentioned first embodiment are designated by the same reference numerals. The explanation is omitted.

The rotary axis calibration jig 70 of the present embodiment is attached to the rotary table 5 of the coordinate measuring machine 1 and is used for calibration of the rotary axis.
As shown in FIGS. 22 and 23, the rotation axis calibration jig 70 has a measuring cylinder portion 71 extending along the Z direction and a diameter expanded outward in the radial direction around the base end of the measuring cylinder portion 71. It has a flange portion 72 and a flange portion 72.

The measurement cylinder portion 71 is a cylinder that is vertically erected at the time of measurement calibration. The measuring cylinder portion 71 has a predetermined length in the Z direction and has the same diameter dimension in the total length in the Z direction. The measuring cylinder portion 71 is made of metal and is made of, for example, stainless steel. The measurement columnar portion 71 may have a cylindrical shape on the outer peripheral surface, and may be hollow or medium-dense as long as it satisfies the required strength.

The flange portion 72 is formed at the base end of the measurement column portion 71. The flange portion 72 is a base for installing the measurement cylinder portion 71 on the rotary table 5. The flange portion 72 may be formed integrally with the measurement column portion 71. In this case, the flange portion 72 and the measuring cylinder portion 71 can be formed by cutting out or the like. The upper surface 76 of the flange portion 72 is formed in a planar shape.
A flange portion W2 is attached to the lower side of the flange portion 72 in the Z direction. The flange portion 72 and the flange portion W2 have the same diameter. The flange portion 72 and the flange portion W2 may be integrally formed. At the center position of the lower surface W2b of the flange portion W2, the locked end portion W3 is formed so as to project downward. On the lower surface W2b of the flange portion W2, a regulation groove portion W4 is formed so as to correspond to the rotation regulation portion 24.

The rotary axis calibration jig 70 is provided with a tip measuring cylinder surface 74 and a base end measuring cylinder surface 75. The tip measurement cylinder surface 74 and the base end measurement cylinder surface 75 are in contact with the probe 17 in the coordinate measuring machine 1 and are tertiary using a lateral probe (not shown) calibrated using the probe 17. Measure the original position.
The tip measurement cylinder surface 74 is formed on the tip outer peripheral surface of the measurement cylinder portion 71. The tip measurement cylinder surface 74 is formed on the entire peripheral surface at the tip of the measurement cylinder portion 71. The tip measurement cylindrical surface 74 is a cylindrical surface having an axis in the Z direction.

The base end measurement cylinder surface 75 is formed on the base end outer peripheral surface of the measurement cylinder portion 71. The base end measurement cylinder surface 75 is formed on the entire peripheral surface at the base end of the measurement cylinder portion 71. The base end measurement cylindrical surface 75 is a cylindrical surface having an axis in the Z direction.
The diameter dimension of the tip measurement cylinder surface 74 and the diameter dimension of the base end measurement cylinder surface 75 are set to be equal to each other. The tip measurement cylinder surface 74 and the base end measurement cylinder surface 75 may be continuous in the Z direction on the outer peripheral surface of the measurement cylinder portion 71.

Here, the tip measurement columnar surface 74 and the base end measurement columnar surface 75 both have the same surface roughness. Specifically, the tip measurement columnar surface 74 and the base end measurement columnar surface 75 can be, for example, in the range of surface roughness Ra of about 0.4 μm to 0.8 μm.

Hereinafter, a method for calibrating the rotary axis of the rotary table 5 when registering the coordinate system of the rotary table 5 in the coordinate measuring machine 1 by using the rotary axis calibration jig 70 will be described.

The rotary axis calibration jig 70 of the present embodiment is attached to the fixing jig 20 on the rotary table 5 as a pre-process of the calibration process when the rotary axis of the rotary table 5 is calibrated. At this time, as described in the first embodiment, the locked end portion W3 at the lower end of the rotary axis calibration jig 70 is inserted into the through hole 23, the drive portion 52 is rotated, and the clamp device 50 engages with the clamp device 50. The toe portion W3 is positioned and fixed while being pulled downward in the Z direction.

In this state, the calibration process is started.
First, a first reading step of reading the rotation axis of the rotation axis calibration jig 70 is performed.
In the first reading step, the probe 17 is three-dimensionally moved with respect to the surface plate 11 by the moving mechanism 19 of the coordinate measuring machine 1, and the probe 17 is brought into contact with the surface of the rotary axis calibration jig 70. At this time, as the probe 17, a stylus oriented in the horizontal direction can be used. In particular, a lateral probe calibrated with the probe 17 can be used.

First, as the first tip reading step, the coordinate position of the tip measurement cylindrical surface 74 is read. In the first tip reading step, the curvature of the tip measurement cylindrical surface 74, which is a cylindrical surface, is calculated, or a predetermined height position on the central axis of the tip measurement column surface 74, which is a cylindrical surface, is calculated. Therefore, in the first tip reading step, the coordinate positions of at least three points or more are read in the circumferential direction of the tip measuring cylindrical surface 74. Further, reading of the coordinate position in the circumferential direction of the tip measurement cylindrical surface 74 may be added as a different height position.

Next, as the first base end reading step, the coordinate position of the base end measurement cylindrical surface 75 is read. In the first base end reading step, the curvature of the base end measurement cylindrical surface 75, which is a cylindrical surface, is calculated, or a predetermined height position on the central axis of the base end measurement cylindrical surface 75, which is a cylindrical surface, is calculated. .. Therefore, in the first base end reading step, the coordinate positions of at least three points or more are read in the circumferential direction of the base end measurement cylindrical surface 75. Further, reading of the coordinate position in the circumferential direction of the base end measurement cylinder surface 75 may be added as a different height position.

As the first reading step, the position and inclination in three dimensions are calculated from the coordinate positions read in the first tip reading step and the first base end reading step, with the axis of the measurement cylinder portion 71 as the first calculation axis.
As the first reading step, the first tip reading step and the first base end reading step are simultaneously performed to measure the upper arc shape and the lower arc shape at the same time, and the axis of the measurement cylinder portion 71 is calculated. You can also do it.

Next, as a rotation step, the rotary table 5 is rotated by a predetermined angle. In this step, the rotary table 5 and the rotary axis calibration jig 70 placed on the rotary table 5 are rotated by a predetermined angle in preparation for reading in the next second reading step.

Here, in the rotation process of the present embodiment, the rotation angle is set to 180 deg. When the rotation angle is 180 deg, the step of reading the rotation axis of the rotation axis calibration jig 70 is performed twice.

Next, a second reading step of reading the rotation axis of the rotation axis calibration jig 70 is performed.
In the second reading step, as in the first reading step, the probe 17 is three-dimensionally moved with respect to the surface plate 11 by the moving mechanism 19 of the coordinate measuring machine 1, and the probe 17 is moved to the rotation axis calibration jig 70. Contact the surface of.

First, as the second tip reading step, the coordinate position of the tip measuring cylindrical surface 74 is read in the same manner as in the first tip reading step. In the second tip reading step, the curvature of the tip measurement cylindrical surface 74, which is a cylindrical surface, is calculated, or a predetermined height position on the central axis of the tip measurement column surface 74, which is a cylindrical surface, is calculated. Therefore, in the second tip reading step, the coordinate positions of at least three points or more are read in the circumferential direction of the tip measuring cylindrical surface 74. Further, reading of the coordinate position in the circumferential direction of the tip measurement cylindrical surface 74 may be added as a different height position. In the second tip reading step, the setting can be changed as appropriate as long as the same accuracy as that of the first tip reading step can be maintained.

Next, as the second base end reading step, the coordinate position of the base end measurement cylindrical surface 75 is read in the same manner as in the first base end reading step. In the second base end reading step, the curvature of the base end measurement cylindrical surface 75, which is a cylindrical surface, is calculated, or a predetermined height position on the central axis of the base end measurement cylindrical surface 75, which is a cylindrical surface, is calculated. .. Therefore, in the second unit reading step, the coordinate positions of at least three points or more are read in the circumferential direction of the base end measurement cylindrical surface 75. Further, reading of the coordinate position in the circumferential direction of the base end measurement cylinder surface 75 may be added as a different height position. In the second base reading step, the setting can be changed as appropriate as long as the same accuracy as that of the first base reading step can be maintained.

As the second reading step, the position and inclination in three dimensions are calculated from the coordinate positions read in the second tip reading step and the second base end reading step, with the axis of the measurement cylinder portion 71 as the second calculation axis.
As the second reading step, the second tip reading step and the second base end reading step are simultaneously performed to measure the upper arc shape and the lower arc shape at the same time, and the axis of the measurement cylinder portion 71 is calculated. You can also do it.

Next, as a calculation step, the spatial coordinates of the actual rotation axis, which is the actual rotation axis of the rotary table 5, from the first calculation axis calculated in the first reading process and the second calculation axis calculated in the second reading step. Calculate the system. By extracting the symmetric elements of the two elements, the coordinates and (machine coordinate system) tilt of the rotary table 5 can be determined.

Here, in the present embodiment, the actual rotation axis is calculated as a straight line obtained by calculating each symmetry element from the first calculation axis and the second calculation axis. Moreover, since the actual rotation axis is calculated by calculating the symmetry element, it is not assumed that the two elements intersect in the derivation. At this time, the coordinate measuring machine 1 incorporates this element into the machine coordinate system created by the reference stylus. Here, the actual rotation axis is taken into the machine coordinate system at the point where Z intersects the plane of zero. Therefore, in the rotation axis calibration jig 70, only the axis of the measurement cylinder portion 71 needs to be measured and only the actual rotation axis may be calculated.
Further, in the rotary axis calibration jig 70, the difference in height distance between the two circular elements can be measured as 190 mm or more. As a result, the measurement axis length in the reading process can be increased to improve the accuracy of the calculated axis / coordinate system. Therefore, the correction accuracy can be further improved.

Here, the cylinder of the reference axis measuring cylinder 70 is measured under the same conditions at the positions of the rotary table 5 at 0 degrees and 180 degrees while maintaining the machine coordinate system. At this time, the only difference in measurement is the angle of the rotary table 5. Then, the target elements of the two elements for measuring the two cylindrical axes can be read as the rotation axes in the machine coordinate system in the rotary table 5. In order to select a symmetry element, it is essential that the two angular conditions face each other.
Conceptually, when the first calculation axis and the second calculation axis intersect at one point, the angle bisector formed by the first calculation axis and the second calculation axis passing through this intersection. May be calculated as the actual rotation axis. When the first calculation axis and the second calculation axis do not intersect, a straight line equidistant from the first calculation axis and the second calculation axis in the Z direction may be calculated as the actual rotation axis.

Here, in the real world, no matter how precise the calibration is performed, the rotation axis of the rotary table 5 does not match the exact vertical straight line. Therefore, if the three-dimensional measurement using the rotary table 5 is performed on the premise that the rotation axis is oriented in the vertical direction, it is not possible to prevent a measurement error from occurring.

However, the actual rotation axis obtained in the present embodiment is the rotation axis itself in the actual rotation table 5. Therefore, even if the actual rotation axis is tilted with respect to the vertical direction, if the actual tilt can be accurately grasped, the accuracy is guaranteed extremely precisely in the three-dimensional measurement using the rotary table 5. be able to.

Further, since the actual rotation axis of the rotary table 5 can be accurately obtained, it is not necessary to perform the actual rotation axis measurement in the coordinate measuring machine 1 for each of the mounted workpieces W.

That is, in the conventional coordinate measuring machine 1, every time the work W, which is the object to be measured, is placed on the rotary table 5, the actual rotation axis measurement is included in the measurement program, but in the machine coordinate system. The measurement necessary for establishing the datum for establishing the coordinate system of the work W may be performed, and the measurement of the rotation axis can be excluded in each work W measurement. That is, it is possible to omit the calibration step that has to be performed every time.

That is, in the three-dimensional measuring machine 1 that has been started once, the above-mentioned calibration step is performed at the time of the start, and the coordinate system of the actual rotation axis of the rotary table 5 is calculated. It is possible to continuously perform three-dimensional shape measurement that requires rotation of the work W with different work W while maintaining accuracy without recalculation.

As a result, the rotary axis of the rotary table 5 is calibrated when the coordinate system of the rotary table 5 of the three-dimensional measuring machine 1 is registered by using the rotary axis calibration jig 70 of the present embodiment. It is possible to significantly reduce the number of steps related to the rotation axis calibration, and to significantly shorten the work time related to the steps and improve the efficiency.

In the present embodiment, the same effect as that of the above-described embodiment can be obtained, and further, by storing the coordinate system of the work once measured in a computer or the like, when re-measuring for many kinds of works, each time. Since the previous value can be automatically recalled and automatic measurement can be performed without measuring the coordinate system again, setup is not required for the second and subsequent measurements, and the work can be completed in less than half the time. It can play the effect of becoming.

Hereinafter, a third embodiment of the clamp device, the fixing jig, the coordinate measuring machine, and the maintenance jig according to the present invention will be described with reference to the drawings.
FIG. 24 is a perspective view showing a maintenance jig for the fixing jig in the present embodiment. FIG. 25 is a top view showing a maintenance jig for the fixing jig in the present embodiment. FIG. 26 is a cross-sectional view showing a maintenance jig for the fixing jig in the present embodiment. FIG. 27 is a cross-sectional view showing a maintenance jig for the fixing jig in the present embodiment.
In this embodiment, the difference from the first and second embodiments described above is in the maintenance jig, and the corresponding components other than the above are designated by the same reference numerals and the description thereof will be omitted.

The maintenance jig 90 of the present embodiment is used in the fixing jig 20 to separate the fixing hole portion 22 from the fixing base portion 21.
Specifically, in the fixing hole portion 22, the notch 22d at the lower edge and the ridge 21d of the fixing base portion 21 are fitted together. Therefore, the fixing hole portion 22 cannot be removed from the fixing base portion 21 unless the fixing hole portion 22 is accurately moved in the vertical direction from the fixing base portion 21 while maintaining the posture without tilting the fixing hole portion 22.
Therefore, a maintenance jig 90 is used as a jig for easily removing the fixing hole portion 22 from the fixing base portion 21.

As shown in FIGS. 24 to 27, the maintenance jig 90 of the present embodiment has a columnar portion 91, hooking portions 93a and 93b, and an extrusion portion 97.
The cylindrical portion 91 has a diameter dimension substantially equal to that of the through hole 23, and can be inserted into the through hole 23. When the columnar portion 91 is inserted into the through hole 23, the upper end portion 91b protrudes from the through hole 23 to the upper position in the Z direction in the axial direction with the lower end portion 91a in contact with the internal structure of the storage portion 26. Has dimensions. The columnar portion 91 has a diameter dimension that is substantially equal to the total length in the axial direction. A step 91d is formed in the cylindrical portion 91 at an intermediate position in the axial direction. The diameter may be slightly reduced at a position closer to the upper end portion 91b than the step 91d.

The columnar portion 91 has a through hole 96 penetrating in the axial direction. The through hole 96 is formed coaxially with the columnar portion 91. The diameter of the through hole 96 on the upper end 91b side is larger than the diameter on the lower end 91a side. A female screw is formed on the lower end 91a side of the through hole 96, and an extrusion portion 97, which is a male screw, is screwed. The extrusion portion 97 is housed inside the through hole 96. A tool insertion hole 97d is formed on the upper end surface of the extruded portion 97. By inserting a predetermined tool into the tool insertion hole 97d and rotating the extrusion portion 97, the extrusion portion 97 can be projected downward from the lower end portion 91a of the cylindrical portion 91.

Storage recesses 92a and 92b are formed on the outer peripheral surface of the cylindrical portion 91 close to the lower end portion 91a. The storage recesses 92a and 92b are formed at two positions symmetrical to the axis of the cylindrical portion 91. The storage recesses 92a and 92b are formed at positions where they do not come into contact with the lower end portion 91a. The storage recess 92a and the storage recess 92b are formed in a shape symmetrical to the axis of the cylindrical portion 91. A hook portion 93a and a hook portion 93b are arranged in the storage recess 92a and the storage recess 92b, respectively.

The hooking portion 93a of the storage recess 92a and the hooking portion 93b of the storage recess 92b are formed in a shape symmetrical to the axis of the cylindrical portion 91.
The hook portion 93a is provided inside the storage recess 92a so as to be rotatable by a rotation shaft 94a provided in the storage recess 92a. The rotation shaft 94a extends in a direction orthogonal to the axial direction of the cylindrical portion 91 at a position close to the lower end portion 91a of the storage recess 92a. The lower end of the hooking portion 93a in the Z direction is supported by the rotating shaft 94a, and the upper end of the hooking portion 93a can rotate around the rotating shaft 94a. An angle regulating portion 92c that regulates the rotation position of the hooking portion 93a is formed in the storage recess 92a that is radially outside the columnar portion 91 from the lower end of the hooking portion 93a. The angle regulating portion 92c regulates the angle so that the upper end of the hooking portion 93a does not open more than a predetermined angle.

When the direction from the lower end to the upper end of the hook portion 93a is directed along the axial direction of the columnar portion 91, the hook portion 93a is housed inside the storage recess 92a and has a diameter larger than the outer peripheral surface of the columnar portion 91. It does not stick out in the direction. The state in which the hooking portion 93a is turned upward is referred to as a stored state. Further, in the hooking portion 93a, when the upper end of the hooking portion 93a rotates around the rotation shaft 94a and comes into contact with the angle restricting portion 92c, the upper end of the hooking portion 93a is in the radial direction with respect to the outer peripheral surface of the cylindrical portion 91. It will be in a state of protruding to the outside. The state in which the hooking portion 93a faces diagonally is referred to as a protruding state.

The hook portion 93b is provided inside the storage recess 92b so as to be rotatable by a rotation shaft 94b provided in the storage recess 92b. The rotation shaft 94b extends in a direction orthogonal to the axial direction of the cylindrical portion 91 at a position close to the lower end portion 91a of the storage recess 92b. The lower end of the hooking portion 93b in the Z direction is supported by the rotating shaft 94b, and the upper end of the hooking portion 93b can rotate around the rotating shaft 94b. An angle regulating portion 92d that regulates the rotation position of the hooking portion 93b is formed in the storage recess 92b that is radially outside the columnar portion 91 from the lower end of the hooking portion 93b. The angle regulating portion 92d regulates the angle so that the upper end of the hooking portion 93b does not open more than a predetermined angle.

When the lower end and the upper end of the hook portion 93b are oriented in the direction along the axial direction of the cylindrical portion 91, the hook portion 93b is housed inside the storage recess 92b and is radially outward from the outer peripheral surface of the cylindrical portion 91. Does not stick out. The state in which the hooking portion 93b is turned upward is referred to as a stored state. Further, in the hooking portion 93b, when the upper end of the hooking portion 93b rotates around the rotation shaft 94b and comes into contact with the angle regulating portion 92d, the upper end of the hooking portion 93b is in the radial direction with respect to the outer peripheral surface of the cylindrical portion 91. It will be in a state of protruding to the outside. The state in which the hooking portion 93b faces diagonally is referred to as a protruding state.

A through hole 95a is opened inside the storage recess 92a. The through hole 95a has a linear axis. The axis of the through hole 95a is formed at a twisted position diagonally with respect to the axis of the cylindrical portion 91. One end of the through hole 95a opens inside the storage recess 92a, and the other end of the through hole 95a opens on the outer peripheral surface of the cylindrical portion 91 closer to the upper end portion 91b than the step 91d.
One end of the through hole 95a opens near the upper end of the hooked portion 93a in the stored state. As a result, by inserting a rod-shaped tool into the through hole 95a, it can come into contact with the vicinity of the upper end of the hooked portion 93a in the stored state and rotate around the rotation shaft 94a. That is, the through hole 95a allows the tool for shifting the hooking portion 93a from the stored state to the protruding state to communicate with the storage recess 92a from the outer peripheral surface of the cylindrical portion 91.

A through hole 95b is opened inside the storage recess 92b. The through hole 95b has a linear axis. The axis of the through hole 95b is formed at a twisted position diagonally with respect to the axis of the cylindrical portion 91. One end of the through hole 95b opens inside the storage recess 92b, and the other end of the through hole 95b opens on the outer peripheral surface of the cylindrical portion 91 closer to the upper end portion 91b than the step 91d.
One end of the through hole 95b opens near the upper end of the hooked portion 93b in the stored state. As a result, by inserting a rod-shaped tool into the through hole 95b, it can come into contact with the vicinity of the upper end of the hooked portion 93b in the stored state and rotate around the rotation shaft 94b. That is, the through hole 95b allows the tool for shifting the hooking portion 93b from the stored state to the protruding state to communicate with the storage recess 92b from the outer peripheral surface of the cylindrical portion 91.

FIG. 28 is a cross-sectional view showing a state in which the maintenance jig according to the present embodiment is inserted into the fixing jig. FIG. 29 is a cross-sectional view showing a state in which the fixing hole portion in the fixing jig of the present embodiment is removed from the fixing base portion by the maintenance jig.
In the maintenance jig 90 of the present embodiment, the hooking portion 93a is stored in the storage recess 92a in advance, the hooking portion 93b is stored in the storage recess 92b, and both the hooking portions 93a and 93b are from the outer peripheral surface of the cylindrical portion 91. Keep it in a stored state so that it does not protrude outward in the radial direction.
At the same time, the maintenance jig 90 is in a state in which the extrusion portion 97 is housed inside the through hole 96 in advance. At this time, the extruded portion 97 does not protrude downward from the lower end portion 91a of the cylindrical portion 91.

When the fixing hole 22 is separated from the fixing base 21 in the fixing jig 20, the maintenance jig 90 is inserted into the through hole 23 from the lower end portion 91a as shown in FIG. 28. At this time, the cylinder portion 91 is inserted so that the axis line coincides with the axis line of the through hole 23.
Further, the cylindrical portion 91 is moved downward, and on the outer peripheral surface of the cylindrical portion 91, the storage recesses 92a and 92b enter the inside of the storage portion 26 rather than the ceiling portion 26a and become lower than the ceiling portion 26a in the Z direction. Insert up to. At least, the hooking portions 93a and 93b are inserted to a position where they can rotate around the rotation shafts 94a and 94b. That is, the upper ends of the hooking portions 93a and 93b can be positioned below the ceiling portion 26a in the Z direction.
At the same time, on the outer peripheral surface of the cylindrical portion 91, it is preferable that the step 91d is located at the same height as the upper surface 22a or above the upper surface 22a. It is preferable that at least the openings of the through holes 95a and 95b on the outer peripheral surface of the cylindrical portion 91 are located above the upper surface 22a.
Alternatively, the lower end portion 91a may be inserted until it comes into contact with the member in the storage portion 26.

Next, using a predetermined tool, the hooked portion 93a in the stored state is rotated around the rotation shaft 94a through the through hole 95a, and the hooked portion 93a is shifted from the stored state to the protruding state. Similarly, using a predetermined tool, the hooked portion 93b in the stored state is rotated around the rotation shaft 94b through the through hole 95b, and the hooked portion 93b is shifted from the stored state to the protruding state. As a result, as shown in FIG. 29, the hooking portion 93a and the hooking portion 93b are in a state of having a larger diameter than the cylindrical portion 91 inside the storage portion 26.

Next, a predetermined tool is inserted into the tool insertion hole 97d, and the extrusion portion 97 is rotated. The extruded portion 97 housed inside the through hole 96 projects downward from the lower end portion 91a of the cylindrical portion 91 by being rotated.
Then, the lower end of the extruded portion 97 protruding from the lower end portion 91a comes into contact with a member located directly below the through hole 23 such as the driving portion 52 of the clamp device 50 and the base end portions 54A and 54B. Further, when the extruded portion 97 is rotated, the dimension of the extruded portion 97 protruding from the lower end portion 91a increases, and the lower end of the extruded portion 97 presses the member in contact with the member. Then, the columnar portion 91 rises in the Z direction due to the reaction force from the member with which the lower end of the extruded portion 97 is in contact. That is, the columnar portion 91 is separated upward from the fixed base portion 21 in the Z direction.

When the columnar portion 91 rises, the hooking portion 93a and the hooking portion 93b whose diameters are expanded outward in the radial direction from the columnar portion 91 come into contact with the ceiling portion 26a on the outer edge of the through hole 23.
The hooking portion 93a is restricted from rotating around the rotation shaft 94a at a predetermined angle by the angle regulating portion 92c, and similarly, the hooking portion 93b rotates around the rotating shaft 94b at a predetermined angle by the angle regulating portion 92d. It is regulated. Therefore, the ceiling portion 26a with which the hooking portion 93a and the hooking portion 93b are in contact, that is, the fixing hole portion 22 is also separated from the fixing base portion 21 upward in the Z direction together with the cylindrical portion 91.
At this time, the fixing hole portion 22 moves upward while maintaining its posture without tilting with respect to the fixing base portion 21.
Further, when the extrusion portion 97 is rotated, the ceiling portion 26a is pressed against the hook portion 93a and the hook portion 93b, and the fixing hole portion 22 is provided with a fixing base portion along the contact surface between the protrusion 21d and the notch 22d. It rises against 21. Then, the fixing hole portion 22 can be removed from the fixing base portion 21 by separating the ridge 21d and the notch 22d.

The maintenance jig 90 of the present embodiment can accurately move the fixing hole portion 22 in the vertical direction from the fixing base portion 21 while maintaining the posture without tilting the fixing hole portion 22 in the fixing jig 20. It can be separated from the fixed base portion 21. As a result, the ridge 21d and the notch 22d are not deformed, and the fixing hole portion 22 can be easily removed from the fixing base portion 21.

The maintenance jig 90 can easily remove the fixing hole portion 22 from the fixing base portion 21 even when the clamp device 50 is not attached to the fixing base portion 21. In this case, the lower end of the extruded portion 97 abuts on the upper surface 21e of the fixed base portion 21 and presses it.

As an example of utilization of the present invention, a special tool that is useful for disassembling shaft parts can be mentioned.

1 ... Three-dimensional measuring machine 5 ... Rotating table 20 ... Fixing jig 21 ... Fixed base 21a ... Base 21b ... Fixed flange 21c ... Hole 21d ... Convex 21e ... Top surface 22 ... Fixed hole 22a ... Top surface 23 ... Through hole 24 ... Rotation regulation part 25 ... Restriction groove 25a ... Opening 25d ... Widening part 26 ... Storage part 26a ... Ceiling part 26d ... Lower groove 50 ... Clamp devices 51A, 51B ... Locking piece part 52 ... Male screw part (drive part)
52d ... Tool insertion hole 52A, 52B ... Female threaded portion 53A, 53B ... Columnar portion 54A, 54B ... Base end portion (base end)
55A, 55B ... Movement restricting portions 56A, 56B ... Protruding portions 57A, 57B ... Locking convex portions 58Aa, 58Ba ... First regulatory planes 58Ab, 58Bb ... Second regulatory planes 58Ac, 58Bc ... Third regulatory planes 58Ad, 58Bd ... 4 Regulatory surface 70 ... Rotating axis calibration tool 71 ... Measuring cylinder 72 ... Flange 74 ... Tip measuring cylinder surface 75 ... Base end measurement cylinder surface 90 ... Maintenance jig 91 ... Cylindrical portion 91a ... Lower end 91b ... Upper end 91d ... Step 92a, 92b ... Storage recess 92c, 92d ... Angle regulating part 93a, 93b ... Hooking part 94a, 94b ... Rotating shaft 95a, 95b ... Through hole 96 ... Through hole 97 ... Extruded part 97d ... Tool insertion hole W ... Work W1 ... Locked portion W2 ... Flange portion W2a ... Bottom surface W2b ... Bottom surface W3 ... Locked end portion W3a ... Lower end (end)
W4 ... Restriction groove W5 ... Inclined fixed surface W5a ... Circumferential groove

Claims (5)

A clamp device for positioning and fixing a locked portion having a locked end having an inclined fixing surface whose diameter expands toward the end on a cylindrical outer peripheral surface.
Two having a locking convex portion that regulates the locking position by sandwiching the inclined fixing surface from both outer sides in the radial direction and pulling the locked portion in the tensile direction in which the inclined fixing surface expands in diameter around the axis. Locking piece and
A drive unit that brings the locking pieces closer to and away from each other,
Have,
The locking piece
A columnar portion having the locking convex portion provided at the tip and extending along the tensile direction, and a columnar portion.
The locking piece portion provided at the base end position of the columnar portion enables the locking piece portion to move in the moving direction in the radial direction, and the locking piece portion in the thickness direction orthogonal to the pulling direction and the moving direction. The movement control department that regulates the movement of
Equipped with
The movement control section
The first regulatory plane along the moving direction and the thickness direction,
A second regulatory surface that slides against the first regulatory surface of the corresponding locking piece
A third regulatory plane that follows the movement direction, intersects the tensile direction, and is orthogonal to the first regulatory plane.
Is formed,
The movement restricting portion has a substantially rectangular parallelepiped that is unevenly distributed in the thickness direction as half the thickness of the locking convex portion and extends in the movement direction.
In the movement restricting portion, the third restricting surface is formed at the center position in the thickness direction at the base end position of each of the columnar portions and faces each other.
In the movement restricting portion, the first restricting surface extends from the proximal end position of one columnar portion toward the proximal end position of the other columnar portion, and the second restricting surface extends from the proximal end position of the other columnar portion, and the second restricting surface extends from the other locking surface. At the base end position of the convex portion, facing the first regulation surface in the tensile direction,
In the two movement control sections, the third regulation surface slides on each other, and one of the first regulation surfaces and the other second regulation surface slide on each other.
Clamping device. The drive unit
A female screw portion extending coaxially along the moving direction at the base end position of each of the columnar portions, and a female screw portion.
A male threaded portion in which a reverse screw is formed at both ends and screwed into the female threaded portion, respectively.
Have,
The clamp device according to claim 1. The movement restricting portion has a protruding portion extending outward in the thickness direction and extending in the moving direction, and the protruding portion has a fourth regulation for restricting the movement of the locking piece portion in the tensile direction. A surface is provided,
The clamp device according to claim 1 or 2. A fixing jig provided with the clamp device according to claim 3.
A fixing base portion having a restricting groove extending in the moving direction so that the clamp device can be fitted so that the locking convex portion and the columnar portion project in the tensile direction, and being attached to a rotary table.
The locked end portion is fixed to the fixed base portion by the locking convex portion while the locking piece portion covers the locking piece portion so that the locking piece portion can move along the regulation groove. A fixed hole with a possible through hole and
A rotation restricting portion that enables rotation regulation of the locked portion with respect to the fixing hole portion when the locked end portion is inserted into the fixing hole portion.
Have,
A fixing jig having a widening portion inside the fixing base portion so that the protruding portion can move along the moving direction when the clamping device is fitted. A three-dimensional measuring machine provided with the fixing jig according to claim 4.
It has a rotary table to which the fixed base is attached.
A coordinate measuring machine in which a through hole in the fixing hole portion of the fixing jig is installed so as to coincide with the rotation axis of the rotary table.

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