JPH05195984A - Turbo-vacuum pump - Google Patents
Turbo-vacuum pumpInfo
- Publication number
- JPH05195984A JPH05195984A JP889092A JP889092A JPH05195984A JP H05195984 A JPH05195984 A JP H05195984A JP 889092 A JP889092 A JP 889092A JP 889092 A JP889092 A JP 889092A JP H05195984 A JPH05195984 A JP H05195984A
- Authority
- JP
- Japan
- Prior art keywords
- rotating speed
- pressure
- back pressure
- turbo
- rotation speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ターボ型真空ポンプに
関し、特に自動制御によるターボポンプに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a turbo vacuum pump, and more particularly to a turbo pump with automatic control.
【０００２】[0002]
【従来の技術】図２（ａ）及び（ｂ）は従来のターボ型
真空ポンプの一例を説明するための（ａ）は構成を示す
ブロック図、（ｂ）は動作を説明するための流れ図であ
る。従来のターボ型真空ポンプは、図２（ａ）に示すよ
うに、ポンプの排気側の圧力を測定する圧力測定部５
と、設定圧力以下になったら翼を高速で回転させる為の
駆同制御部６と、翼及び翼を回転する駆動部をもつポン
プ本体４とで構成されていた。2. Description of the Related Art FIGS. 2 (a) and 2 (b) are block diagrams showing a structure for explaining an example of a conventional turbo vacuum pump, and FIG. 2 (b) is a flow chart for explaining an operation. is there. As shown in FIG. 2A, the conventional turbo vacuum pump has a pressure measuring unit 5 for measuring the pressure on the exhaust side of the pump.
And a pump body 4 having a drive control unit 6 for rotating the blades at a high speed when the pressure becomes equal to or lower than a set pressure, and a pump body 4 having a drive unit for rotating the blades and the blades.
【０００３】次に、このターボ型真空ポンブの動作につ
いて説明する。まず、図２（ｂ）に示すように、大気圧
からポンプ本体４の翼が回転に、圧力測定部５でポンプ
内の前段の圧力を測定し、その測定値が設定圧力以下、
例えば数Ｔｏｒｒ以下になると駆動制御部６より回転信
号が出力され、翼が数万ｒｐｍという高速で回転し、さ
らに高真空状態をつくりだす。Next, the operation of this turbo type vacuum pump will be described. First, as shown in FIG. 2 (b), the blade of the pump body 4 rotates from atmospheric pressure, the pressure of the preceding stage in the pump is measured by the pressure measuring unit 5, and the measured value is equal to or lower than the set pressure.
For example, when the pressure becomes several Torr or less, a rotation signal is output from the drive control unit 6, and the blades rotate at a high speed of tens of thousands rpm to create a further high vacuum state.
【０００４】また、こと高速回転に切替える駆動制御部
６は、圧力計予め設定された圧力信号で切替えるスイッ
チング機構をもつ簡単な構造のものであった。Further, the drive control unit 6 for switching to the high speed rotation has a simple structure having a switching mechanism for switching the pressure gauge according to a preset pressure signal.
【０００５】[0005]
【発明が解決しようとする課題】この従来のターボ型真
空ポンブでは、翼が高速回転に切替るときに急激に回転
させ排気するので、前段の圧力が低く逆に背圧が高くな
り、翼がこの圧力差でしばしば破損するという問題があ
った。In this conventional turbo-type vacuum pump, when the blade is switched to high speed rotation, the blade rapidly rotates and exhausts, so that the pressure in the preceding stage is low and conversely the back pressure is high. There is a problem that the pressure difference often causes damage.
【０００６】本発明の目的は、かかる問題を解消すべく
急激に上昇する背圧を緩和し、翼の破損を起こすことな
く大気から高真空まで円滑に真空排気出来るターポ型真
空ポンプを提供することにある。An object of the present invention is to provide a terpo type vacuum pump which can alleviate a back pressure which rises rapidly in order to solve such a problem and can smoothly perform vacuum exhaust from the atmosphere to a high vacuum without damaging the blade. It is in.
【０００７】[0007]
【課題を解決するための手段】本発明のターボポンプ
は、圧力信号を入力して翼の回転数を算出する比較演算
部と、算出した回転数に応じて、翼の回転数を制御する
制御部と、ポンプ部とを備えている。SUMMARY OF THE INVENTION A turbo pump according to the present invention comprises a comparison calculation unit for inputting a pressure signal to calculate the blade rotation speed, and a control for controlling the blade rotation speed according to the calculated rotation speed. And a pump section.
【０００８】[0008]
【実施例】次に本発明について図面を参照して説明す
る。The present invention will be described below with reference to the drawings.
【０００９】図１（ａ）及び（ｂ）は本発明のターボ型
真空ポンプの一実施例を説明するための（ａ）は構成を
示すブロック図、（ｂ）は動作を説明するための流れ図
である。圧力測定部でポンプの背圧を測定しこの圧力測
定信号を入力し適正回転数に対応する信号と比較し、設
定回転を設定する信号を出力する比較演算部２と、この
比較演算部２の出力によりポップ本体４の回転数を制御
する回転数制御部３とを設けたことである。それ以外は
従来例と同じである。FIGS. 1 (a) and 1 (b) are block diagrams showing a configuration for explaining an embodiment of a turbo vacuum pump of the present invention, and FIG. 1 (b) is a flow chart for explaining the operation. Is. The back pressure of the pump is measured by the pressure measurement unit, this pressure measurement signal is input, compared with the signal corresponding to the proper rotation speed, and the comparison calculation unit 2 for outputting the signal for setting the set rotation and the comparison calculation unit 2 That is, the rotation speed control unit 3 that controls the rotation speed of the pop body 4 by the output is provided. Otherwise, it is the same as the conventional example.
【００１０】次に、このターボ型真空ポンプの動作を説
明する。まず、ステップＡでポンプ本体４の背圧を測定
する。次にステップＢで比較演算部２で測定圧力に対応
する回転数を演算し適正回転数設定信号を出力する。次
に、ステップＣで回転制御部３は適正回転数設定信号を
入力し、この信号に対応する出力を翼回転用駆動源に供
給する。次に、ステップ２で翼が回転し、真空排気を行
う。次にステップＥで背圧をチェックし、異常な圧力か
否かを判定する。もし、問題なければ、ステップＡに戻
り、同様の動作を行う。また異常ならば停止する。Next, the operation of this turbo type vacuum pump will be described. First, in step A, the back pressure of the pump body 4 is measured. Next, in step B, the comparison calculation unit 2 calculates the rotation speed corresponding to the measured pressure and outputs an appropriate rotation speed setting signal. Next, in step C, the rotation control unit 3 inputs an appropriate rotation speed setting signal and supplies an output corresponding to this signal to the blade rotation drive source. Next, in step 2, the blade is rotated and vacuum exhaust is performed. Next, in step E, the back pressure is checked to determine whether or not the pressure is abnormal. If there is no problem, return to step A and perform the same operation. If it is abnormal, stop.
【００１１】このように常にポンプの背圧を監視しなが
ら回転数を上げて行くので、翼を破壊することなく大気
圧から高真空まで排気出来る。Since the number of revolutions is increased while constantly monitoring the back pressure of the pump in this way, it is possible to exhaust from atmospheric pressure to high vacuum without breaking the blades.
【００１２】[0012]
【発明の効果】以上説明したように本発明は、背圧を常
に監視し、その圧力に応じて適正回転数を演算する比較
演算部と、この比較演算部の設定回転数で翼回転駆動源
を制御する回転数制御部とを設けることによって、急激
な回転数の増加に伴う背圧上昇による翼の破損がなくな
り、きわめて円滑に大気から高真空まで排気できるター
ポ型真空ポンブが得られるという効果がある。As described above, according to the present invention, the back pressure is constantly monitored, and the proper rotation speed is calculated according to the pressure, and the blade rotation drive source is set at the rotation speed set by the comparison calculation unit. By providing a rotation speed control unit for controlling the rotation speed, it is possible to eliminate the damage to the blades due to a rise in back pressure due to a sudden increase in rotation speed, and to obtain a terpo type vacuum pump that can evacuate from atmosphere to high vacuum very smoothly. There is.
【図１】本発明のターボ型真空ポンプの一実施例を説明
するための（ａ）は構成を示すブロック図、（ｂ）は動
作を説明するための流れ図である。FIG. 1A is a block diagram showing a configuration for explaining an embodiment of a turbo vacuum pump of the present invention, and FIG. 1B is a flow chart for explaining an operation.
【図２】従来のターボ型真空ポンプの一例を説明するた
めの（ａ）は構成を示すブロック図、（ｂ）は動作を説
明するための流れ図である。2A is a block diagram showing a configuration for explaining an example of a conventional turbo vacuum pump, and FIG. 2B is a flow chart for explaining an operation.
１，５ 圧力測定部 ２ 比較演算部 ３ 回転数制御部 ４ ポンプ本体 ６ 駆動制御部 1, 5 Pressure measurement unit 2 Comparison calculation unit 3 Rotation speed control unit 4 Pump body 6 Drive control unit
Claims (1)
と、この背圧に応じて回転数を演算する比較演算部と、
算出された回転数により前記ポンプの翼の回転数を制御
する制御部とを備えることを特徴とするターボ型真空ポ
ンプ。1. A pressure measuring section for measuring a back pressure of a pump body, and a comparison calculating section for calculating a rotational speed according to the back pressure.
A turbo-type vacuum pump, comprising: a control unit that controls the rotation speed of the blades of the pump according to the calculated rotation speed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP889092A JPH05195984A (en) | 1992-01-22 | 1992-01-22 | Turbo-vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP889092A JPH05195984A (en) | 1992-01-22 | 1992-01-22 | Turbo-vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05195984A true JPH05195984A (en) | 1993-08-06 |
Family
ID=11705275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP889092A Withdrawn JPH05195984A (en) | 1992-01-22 | 1992-01-22 | Turbo-vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05195984A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999060272A1 (en) * | 1998-05-20 | 1999-11-25 | Ebara Corporation | Device and method for evacuation |
| CN110173422A (en) * | 2019-05-23 | 2019-08-27 | 国家电网有限公司 | Vacuum pump Internet of Things on-line monitoring system, method and terminal device |
-
1992
- 1992-01-22 JP JP889092A patent/JPH05195984A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999060272A1 (en) * | 1998-05-20 | 1999-11-25 | Ebara Corporation | Device and method for evacuation |
| US6474949B1 (en) | 1998-05-20 | 2002-11-05 | Ebara Corporation | Evacuating unit with reduced diameter exhaust duct |
| CN110173422A (en) * | 2019-05-23 | 2019-08-27 | 国家电网有限公司 | Vacuum pump Internet of Things on-line monitoring system, method and terminal device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990408 |