JPH05184993A - Ultrasonic spray apparatus - Google Patents

Abstract

PURPOSE:To give satisfaction from the viewpoints of spray efficiency, a large amt. of spraying, fineness and uniformity of particles and the cost of a driving electric source. CONSTITUTION:When an ultrasonic oscillator consisting of a piezoelectric oscillator 1 and an oscillating plate 2 is driven, the piezoelectric oscillator 1 is oscillated and the oscillation is transmitted to the oscillating plate 2. The flow rate of a liq. in a liq. storing room 5 is adjusted by means of a valve 9 and the liq. temp. is set by means of a heater 11 and it passes through a liq. feeding tube 7 and reaches a liq. holding material 13 and is fed to the lower face of the oscillating plate 2 being brought into contact with the liq. holding material 13. The liq. is sprayed through a hole provided on the oscillating plate 2 by oscillation of the oscillating plate 2. By switching a switch, a composite of the piezoelectric oscillator 3 and the oscillating plate 4 is driven to be able to produce particles with different sizes. Therefore, it is possible to realize a simple structure with a small size and weight-saving.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic atomizer for atomizing a liquid by elastic vibration generated by an ultrasonic exciter.

[0002]

2. Description of the Related Art Conventional ultrasonic atomizers include ultrasonic atomizers and nebulizers to which a bolted Langevin type vibrator is applied. The atomization device using a bolted Langevin type vibrator uses ultrasonic waves with a frequency of several tens of kHz, and has the advantage of being able to generate a large amount of fog, but it also has the disadvantages of a complicated structure and a large-scale device. Hold. On the other hand, the nebulizer uses ultrasonic waves in the MHz range and has the advantage that the particles are minute and has excellent uniformity, but it has the disadvantage that atomization efficiency is poor and it is difficult to generate a large amount of fog with low power. Hold. That is, in the conventional ultrasonic atomization device, atomization efficiency, a large amount of atomization,
Difficulties have been either in particle size or drive power cost.

[0003]

DISCLOSURE OF THE INVENTION It is an object of the present invention to provide atomization efficiency, large amount atomization, fineness and uniformity of particles, small and lightweight device, simple structure and driving power supply cost. An object of the present invention is to provide an ultrasonic atomizing device that is satisfactory from any aspect of the body.

[0004]

An ultrasonic atomizer according to claim 1 is an ultrasonic atomizer for atomizing a liquid by elastic vibration generated by an ultrasonic exciter having a vibration plate fixed to a piezoelectric vibrator. In the sonic atomization device, the piezoelectric vibrator includes a piezoelectric ceramic and electrodes formed on both end faces perpendicular to the thickness direction of the piezoelectric ceramic, and the vibrating plate has electrodes of the piezoelectric vibrator. The vibrating unit has a fixing portion integrally fixed on at least one end surface and a vibrating portion projecting outward of the piezoelectric vibrator substantially parallel to the end surface of the piezoelectric vibrator. The portion is provided with a large number of holes, and the means for supplying the liquid to the vibrating portion includes a support that supports the ultrasonic exciter, a liquid storage chamber that stores the liquid, and a sponge or other liquid absorbing material. A liquid-retaining material made of a substance having a large capacity and absorbing the liquid The supporting device holds the ultrasonic exciter in a predetermined position with respect to a fixed object, or floats the ultrasonic exciter in the liquid by buoyancy, and contacts at least the ultrasonic exciter of the supporting device. The portion to be made of styrofoam or other substance having a lower acoustic impedance than the piezoelectric vibrator, the vibrating portion contacts the liquid retaining material to atomize the liquid absorbed in the liquid retaining material. Is characterized by.

An ultrasonic atomizing device according to a second aspect is characterized in that one opening area of the diaphragm in the hole is different from the other opening area of the diaphragm.

In the ultrasonic atomizing device according to a third aspect of the present invention, the electrode formed on at least one of the both end faces is divided into two parts which are insulated from each other. And

An ultrasonic atomizing device according to a fourth aspect of the present invention is characterized in that the resonance frequency of the piezoelectric vibrator is substantially equal to the resonance frequency of the composite of the piezoelectric vibrator and the diaphragm.

An ultrasonic atomizing device according to a fifth aspect is characterized in that the piezoelectric vibrator is a rectangular prism having a dimensional ratio of thickness to width close to 1 and not equal to 1.

In the ultrasonic atomizing device according to a sixth aspect of the present invention, the resonance frequency of the piezoelectric vibrator is substantially equal to an intermediate value between two resonance frequencies of the composite body of the piezoelectric vibrator and the vibration plate. Characterize.

An ultrasonic atomizing device according to a seventh aspect of the present invention is characterized in that the piezoelectric vibrator is a rectangular plate having a dimensional ratio of length to width close to 1 and not equal to 1.

[0011]

When the ultrasonic atomizing device according to claim 1 is used, an AC signal having a frequency substantially equal to the resonance frequency of the composite of the piezoelectric vibrator and the vibration plate is applied to the piezoelectric vibrator. The piezoelectric vibrator is excited. Excitation of the piezoelectric vibrator vibrates the diaphragm. A part of the liquid retaining material is in contact with the vibrating plate, and the liquid in the liquid storage chamber is sucked up by the liquid retaining material, and then the liquid retaining material in the portion in contact with the diaphragm is transferred to the vibrating plate. It is supplied sequentially.
The liquid supplied to the diaphragm is atomized through holes provided in the diaphragm. The atomization through the holes promotes the fineness and uniformity of the particles, and can increase the atomization efficiency. In addition, since the atomization efficiency is high, a large amount of atomization can be realized with low power consumption, and the size of the device can be easily reduced. Since self-excited driving is also possible and driving with a battery is easy, driving with low power consumption is possible in a form that can cope with environmental changes. Furthermore, according to the present invention, by using the liquid retaining material, it is possible to always realize a stable liquid supply without being affected by the increase or decrease of the liquid in the liquid storage chamber and the change of the liquid level due to the vibration. Since the liquid can be efficiently supplied without waste, the atomization efficiency can be increased.

The piezoelectric vibrator comprises a piezoelectric ceramic and electrodes formed on both end faces perpendicular to the thickness direction of the piezoelectric ceramic. An alternating voltage is applied to the piezoelectric vibrator via the electrodes, and the piezoelectric vibrator is excited. By adopting the piezoelectric vibrator having such a simple structure, the ultrasonic atomizing device can be downsized, and the liquid atomizing device can atomize the liquid with high efficiency.

Since the vibrating plate is integrally fixed to at least one end surface of the piezoelectric vibrator in a continuous manner, the vibrating portion has a bending vibration in the form of a cantilever having the fixed portion as a fixed end. Therefore, the liquid supplied to the vibrating plate is atomized by the elastic vibration and is diffused as a mist toward the upper side perpendicular to the vibrating plate.

The support holds the ultrasonic exciter at a predetermined position with respect to a fixed object or floats the ultrasonic exciter in the liquid by buoyancy. At this time, by using a material having a lower acoustic impedance than that of the piezoelectric vibrator such as styrofoam as a portion of the supporting tool that is in contact with at least the ultrasonic exciter, the vibration of the piezoelectric vibrator is supported by the supporting tool itself. Alternatively, the atomization efficiency can be increased because the vibration plate can be efficiently vibrated because it can be prevented from being propagated and scattered in the fixed object or the liquid. By adopting a structure in which the ultrasonic exciter floats in the liquid by buoyancy, without being affected by an increase or decrease in the amount of the liquid stored in the liquid storage chamber,
Since an appropriate amount of liquid is supplied to the diaphragm at all times, efficient atomization can be realized, and thus a large amount of atomization can be realized with low power consumption, and at the same time, the device can be easily downsized. it can. Efficient atomization can also be realized by holding the ultrasonic exciter at a predetermined position with respect to the fixed object by the support and then supplying an appropriate amount of liquid to the vibrating section.

In the ultrasonic atomizing device according to the second aspect, since one opening area of the diaphragm in the hole is larger than the opening area of the other, one of the openings is an inlet side and the other is an outlet side. By doing so, the passage area of the liquid in the hole decreases from the inlet side toward the outlet side, so that when the liquid passes through the hole, the liquid is subjected to the throttling action by the hole. As a result, the atomizing action of the liquid is promoted by the synergistic effect of the throttling action and the vibration of the vibrating section, the amount of fog generated is increased, and the particle diameter is made uniform.

In the ultrasonic atomizing device according to a third aspect of the present invention, the electrodes formed on at least one of the both end faces are divided into two parts which are insulated from each other. The electrode provided on one of the portions can be used as an electrode for a self-excited power source.
Therefore, the ultrasonic atomizing device of the present invention can be driven with low power consumption in a form that can cope with changes in environment such as temperature.

In the ultrasonic atomizing device according to a fourth aspect of the present invention, the voltage when the resonance frequency of the piezoelectric vibrator is substantially equal to the resonance frequency of the composite of the piezoelectric vibrator and the vibration plate is the piezoelectric element. When applied to the vibrator, the diaphragm is efficiently excited, atomization efficiency is promoted, and the amount of fog generated is further increased.

In the ultrasonic atomizing device according to a fifth aspect, the piezoelectric vibrator according to the fourth aspect is a rectangular prism having a dimensional ratio of thickness to width close to 1 and not equal to 1. Thereby, the combined vibration of the composite body of the piezoelectric vibrator and the vibration plate is enhanced, and the atomization efficiency is promoted.

In the ultrasonic atomizing device according to the present invention, when the resonance frequency of the piezoelectric vibrator becomes substantially equal to the intermediate value between the two resonance frequencies of the composite of the piezoelectric vibrator and the vibration plate. Is applied to the piezoelectric vibrator, the diaphragm is efficiently excited, atomization efficiency is promoted, and the amount of fog generated is further increased.

In the ultrasonic atomizing device according to claim 7, the piezoelectric vibrator according to claim 6 is a rectangular plate having a dimensional ratio of length to width close to 1 and not equal to 1. Thereby, the combined vibration of the composite body of the piezoelectric vibrator and the vibration plate is enhanced, and the atomization efficiency is promoted.

[0021]

FIG. 1 is a sectional view showing a first embodiment of the ultrasonic atomizing device of the present invention. In this embodiment, the piezoelectric vibrator 1, the vibration plate 2, the piezoelectric vibrator 3, the vibration plate 4, the liquid storage chamber 5,
Liquid storage chamber 6, liquid supply tube 7, liquid supply tube 8, valve 9, valve 10, heater 11, heater 12, liquid retaining material 13, liquid retaining material 14, and support 1
5 and are housed inside the body.
Terminals P and Q made of copper foil are attached to the piezoelectric vibrator 1. The terminal P is similarly attached to the piezoelectric vibrator 2, but the terminal Q is shared with the piezoelectric vibrator 1, and the terminal Q is sandwiched between the piezoelectric vibrator 1 and the piezoelectric vibrator 2. There is. The piezoelectric vibrator 1 includes a vibration plate 2 and a piezoelectric vibrator 3
A vibration plate 4 is provided in the piezoelectric vibrator 1, and the piezoelectric vibrator 1 and the piezoelectric vibrator 3 are pressed against each other by a support 15. A power supply unit for supplying an alternating voltage to the piezoelectric vibrators 1 and 3 via terminals P and Q is provided in the power supply chamber, and a switch is provided between the piezoelectric vibrators 1 and 3. Is provided, and an alternating voltage is supplied to the piezoelectric vibrator 1 or the piezoelectric vibrator 3 by switching the switch. However, in FIG. 1, the power supply circuit for supplying an alternating voltage to the piezoelectric vibrator 1 and the piezoelectric vibrator 3, the switch and the terminals P and Q are omitted, and in use, the liquid storage chamber 5 and the liquid storage chamber 6 are shown. Fill with a suitable amount of liquid. The terminals P and Q are respectively fixed to the piezoelectric vibrator 1 and the piezoelectric vibrator 3 with a conductive adhesive. The liquid retaining material 13 is provided at the tip of the liquid supply tube 7, and the liquid retaining material 13 is in contact with the lower surface of the diaphragm 2.
The liquid retaining material 14 is provided at the tip of the liquid supply tube 8, and the liquid retaining material 14 is in contact with the lower surface of the vibration plate 4.

FIG. 2 is a sectional view showing a second embodiment of the ultrasonic atomizing device of the present invention. In this embodiment, the piezoelectric vibrator 1
Vibration plate 2, vibration plate 20, liquid retaining material 21, and liquid retaining material 22
A main body liquid storage chamber 23, a main body liquid storage chamber 24, and a support 25
And a support tool 26. In the power supply room, the piezoelectric vibrator 1
Is provided with a power supply unit for supplying an AC voltage via terminals P and Q. However, in FIG. 2, the power supply circuit for supplying an alternating voltage to the piezoelectric vibrator 1 and the terminals P and Q are omitted, and in use, the main body liquid storage chamber 23 or the main body liquid storage chamber 24 is used.
Fill with a suitable amount of liquid. The piezoelectric vibrator 1 is provided with a vibration plate 2 and a vibration plate 20, and the piezoelectric vibrator 1 is supported by a support member 25. The liquid retaining material 21 has a columnar shape, the lower portion of the liquid retaining material 21 is immersed in the liquid in the main body liquid storage chamber 23, and the upper portion of the liquid retaining material 21 is brought into contact with or separated from the lower surface of the vibration plate 20 by the support 26. It is possible to make them. Similarly, the liquid-retaining material 22 is also columnar, the lower part of the liquid-retaining material 22 is immersed in the liquid in the main body liquid storage chamber 24, and the upper part of the liquid-retaining material 22 is attached to the lower surface of the diaphragm 2 by the support 26. It can be brought into and out of contact. Support tool 2 by switching the switch
6 can be operated to bring the liquid retaining material 21 or 22 into contact with the corresponding diaphragm 20 or diaphragm 2, respectively.

FIG. 3 is a sectional view showing a third embodiment of the ultrasonic atomizing device of the present invention. In this embodiment, the piezoelectric vibrator 1
Two diaphragms 30, a main body liquid storage chamber 31, and a liquid retaining material 32
And a support 33. In the power supply room, the piezoelectric vibrator 1
Is provided with a power supply unit for supplying an AC voltage via terminals P and Q. However, in FIG. 3, the power supply circuit for supplying the AC voltage to the piezoelectric vibrator 1 and the terminals P and Q are omitted, and the main body liquid storage chamber 31 is filled with an appropriate amount of liquid during use. The piezoelectric vibrator 1 is provided with two vibrating plates 30, the piezoelectric vibrator 1 is supported by a part of the support 33, and the support 33 can be detached from the main body liquid storage chamber 31. The liquid-retaining material 32 has a columnar shape, the lower part of the liquid-retaining material 32 is immersed in the liquid in the main body liquid storage chamber 31, and the upper part of the liquid-retaining material 32 is supported by the support 33 on the lower surface of one of the diaphragms 30. It can be contacted.

FIG. 4 is a sectional view showing a fourth embodiment of the ultrasonic atomizing device of the present invention. In this embodiment, the piezoelectric vibrator 1
The piezoelectric vibrator 1 and the vibrating plate 3 which are composed of two vibrating plates 30, a supporting member 33, a liquid storage chamber 40, and a liquid retaining material 41 and which are supported by the supporting member 33 in the third embodiment of FIG.
An ultrasonic exciter consisting of 0 and 0 is floated in a liquid storage chamber 40 filled with liquid. A power supply unit that supplies an alternating voltage to the piezoelectric vibrator 1 via terminals P and Q is provided in the power supply chamber. However, in FIG. 4, the power supply circuit for supplying an AC voltage to the piezoelectric vibrator 1 and the terminals P and Q are omitted. The lower portion of the liquid retaining material 41 is immersed in the liquid in the liquid storage chamber 40, and the upper portion of the liquid retaining material 41 can be brought into contact with the lower surface of one of the vibrating plates 30 by the support 33. There is.

FIG. 5 is a side view of an ultrasonic exciter composed of the piezoelectric vibrator 1 and the diaphragm 2 in the first embodiment of FIG. 1, and FIG. 6 is a plan view of the ultrasonic exciter of FIG. Piezoelectric vibrator 1
Has a rectangular plate-shaped piezoelectric ceramic 50, and the material of the piezoelectric ceramic 50 is TDK72A material (product name), and the length is 22 mm, the width is 20 mm, and the thickness is 1 mm. Since the TDK72A material has a large electromechanical coupling coefficient, it is used in this example. The direction of the polarization axis of the piezoelectric ceramic 50 coincides with the thickness direction, and the Au electrode 51 and the Au electrode 52 are formed on both end faces perpendicular to this thickness direction. The Au electrode 51 covers one end surface of the piezoelectric ceramic 50, and the Au electrode 52 covers the other end surface of the piezoelectric ceramic 50. Au electrode 51
Has a terminal P attached thereto, and the Au electrode 52 has a terminal Q attached thereto. Terminal P and terminal Q are piezoelectric ceramics 5
It is arranged at one edge along the 0 width direction. A tongue-shaped diaphragm 2 is attached to one end surface of the piezoelectric vibrator 1. The vibrating plate 2 is made of nickel and is fixed integrally with the piezoelectric vibrator 1 at the long and thin plate-shaped fixing portion 53. The vibrating plate 2 protruding from the piezoelectric vibrator 1 forms the vibrating portion 54. ing. The fixed portion 53 is adhered to the piezoelectric vibrator 1 via the Au electrode 51 with an adhesive.
The diaphragm 2 has a length of 20 mm, a width of 20 mm and a thickness of 0.05 mm. The fixed part 53 has a length of 3 mm, a width of 20 mm, and a thickness of 0.05 mm.
Is. The vibrating portion 54 extends and protrudes outward from an edge portion along the width direction of the piezoelectric vibrator 1 in parallel to the plate surface of the piezoelectric vibrator 1. The vibrating portion 54 has a length of 17 mm, a width of 20 mm, and a thickness of 0.05 mm.

FIG. 7 is a view showing a cross section of the vibrating portion 54 when it is cut along a plane perpendicular to the plate surface. The vibrating portion 54 is provided with a large number of fine holes 60 penetrating in the thickness direction thereof. FIG. 7 shows the vertical cross-sectional shape and size of the hole 60. The shape of the hole 60 is a mortar shape, and one having an opening area larger than the opening area of the other is used in this embodiment, and one opening is an inlet side and the other is an outlet side. The diameter of the inlet side is 0.1 mm, the diameter of the outlet side is 0.02 mm, and the holes 60 are arranged at the same pitch.

FIG. 8 is a partially enlarged plan view of the vibrating portion 54. FIG. 8 shows the shape, arrangement, and dimensions of the holes 60 when viewed from the same direction as FIG.

In the ultrasonic exciter composed of the piezoelectric vibrator 3 and the vibration plate 4 in the first embodiment of FIG. 1, the piezoelectric vibrator 3 has a pair of electrodes similar to the piezoelectric vibrator 1 and a piezoelectric vibration. It is composed of a piezoelectric ceramic having the same material as the child 1, and the piezoelectric ceramic has a length of 22 mm, a width of 20 mm and a thickness of 2 mm.
The diaphragm 4 has a length of 30 mm, a width of 20 mm and a thickness of 0.05 mm. The diaphragm 4 is made of the same material as the diaphragm 2, and is fixed to the piezoelectric vibrator 3 in the same manner as the diaphragm 2. The diaphragm 4 is also provided with a large number of fine holes having the same shape as the diaphragm 2 as shown in FIGS. 7 and 8, but its size is different from that of the diaphragm 2, and the diameter on the inlet side is 0. 0.2 mm, outlet diameter is 0.05 mm.

FIG. 9 is a plan view of an ultrasonic exciter including the piezoelectric vibrator 1, the diaphragm 2 and the diaphragm 20 in the second embodiment of FIG. The vibration plate 20 has the same size as the vibration plate 2, and the vibration plate 20 includes a fixing portion 70 and a vibration portion 71 having the same size as the vibration plate 2. The diaphragm 20 is provided with a large number of fine holes having the same shape and size as the diaphragm 4. The vibration plate 20 is fixed to the edge portion of the piezoelectric vibrator 1 facing the vibration plate 2 on the end surface of the piezoelectric vibrator 1 to which the vibration plate 2 is fixed. Terminals P and Q are provided on both end surfaces of the piezoelectric vibrator 1, and the terminals P and Q are arranged at one edge portion along the length direction of the piezoelectric vibrator 1. However, in FIG. 9, the terminals P and Q are omitted.

FIG. 10 shows the piezoelectric vibrator 1 and two diaphragms 30 in the third embodiment of FIG. 3 and the fourth embodiment of FIG.
It is a top view of the ultrasonic exciter which consists of. The diaphragm 30 has a length of 20 mm, a width of 9.5 mm and a thickness of 0.05 mm. The vibrating plate 30 includes a fixing portion 72 and a vibrating portion 73. Fixed part 7
2 has a length of 3 mm, a width of 9.5 mm, and a thickness of 0.05 mm, and the vibrating portion 73 has a length of 17 mm, a width of 9.5 mm, and a thickness of 0.05 mm. One diaphragm 30 is provided with a large number of fine holes having the same shape and size as the diaphragm 2, and the other diaphragm 30
Is provided with a large number of fine holes having the same shape and size as the diaphragm 4. The two vibrating plates 30 are fixed to one end face of the piezoelectric vibrator 1 with a distance of 1 mm from each other. Terminals P and Q are provided on both end faces of the piezoelectric vibrator 1, respectively.
And the terminal P and the terminal Q are arranged at one edge portion along the width direction of the piezoelectric vibrator 1 similarly to the ultrasonic exciter of FIGS. 5 and 6. However, in FIG. 10, the terminals P and Q are omitted.

When the ultrasonic atomizing device of FIG. 1 is driven, an AC signal having a frequency substantially equal to the resonance frequency of the composite of the piezoelectric vibrator 1 and the diaphragm 2 is piezoelectrically vibrated via the terminals P and Q. When applied to the child 1, the piezoelectric vibrator 1 is excited. At this time, the frequency of the AC signal substantially matches one of the resonance frequencies of the piezoelectric vibrator 1. Diaphragm 2
Since the structure in which at least one surface of the piezoelectric vibrator 1 is integrally connected and fixed is adopted, the vibration plate 2 causes the fixed portion 53 of the vibration plate 2 to serve as a fixed end in association with the excitation of the piezoelectric vibrator 1. It is vibrated in the form of a cantilever. The vibration generated in the vibrating portion 54 is bending vibration, and the elastic vibration of the vibrating portion 54 effectively functions to atomize the liquid. Similarly, in the composite body of the piezoelectric vibrator 3 and the diaphragm 4, if an AC signal having a frequency substantially equal to the resonance frequency of the composite body is applied to the piezoelectric vibrator 3 via the terminals P and Q. , The piezoelectric vibrator 3 is excited, and the vibration plate 4 is accompanied by the excitation of the piezoelectric vibrator 3.
Vibrate, and the elastic vibration of the vibrating portion of the diaphragm 4 effectively functions for atomizing the liquid. The piezoelectric vibrator 1 and the piezoelectric vibrator 3 are pressed against each other by the support tool 15 in such a manner that the end faces to which the vibrating plate 2 or the vibrating plate 4 is not fixed are brought into contact with each other. The vibrator 3 is fixed to the main body as an integrated structure. The contact portion of the support 15 with the piezoelectric vibrator 1 and the piezoelectric vibrator 3 is made of styrofoam, and has a lower acoustic impedance than the piezoelectric vibrator 1 and the piezoelectric vibrator 3, and therefore is used in this embodiment. .. Since the contact portion of the support tool 15 with the piezoelectric vibrator is made of expanded polystyrene, the ultrasonic waves from the piezoelectric vibrator 1 and the piezoelectric vibrator 3 are suppressed from propagating to the support tool 15 itself and being lost, and the vibration plate. 2 or the diaphragm 4 is efficiently vibrated. On the other hand, when the liquid in the liquid storage chamber 5 passes through the liquid supply tube 7, the liquid amount is adjusted by the valve 9 and supplied to the liquid retaining material 13, and the lower surface of the diaphragm 2 in contact with the liquid retaining material 13 Has reached. The liquid-retaining material 13 is made of sponge and has a large liquid-absorbing ability, and since it has a lower acoustic impedance than the piezoelectric vibrator 1, it is used in this embodiment. Since the liquid retaining material 13 is made of sponge, the ultrasonic waves from the piezoelectric vibrator 1 are suppressed from propagating into the liquid through the liquid retaining material 13 and being scattered, and the diaphragm 2 is vibrated efficiently. Similarly, when the liquid in the liquid storage chamber 6 passes through the liquid supply tube 8, the liquid amount is adjusted by the valve 10 and supplied to the liquid retaining material 14, and the diaphragm 3 in contact with the liquid retaining material 14 Reach the underside of. The liquid-retaining material 14 is made of sponge and has a large liquid-absorbing ability, and since it has a lower acoustic impedance than the piezoelectric vibrator 3, it is used in this embodiment. Since the liquid retaining material 14 is made of sponge, the ultrasonic wave from the piezoelectric vibrator 3 is suppressed from propagating into the liquid through the liquid retaining material 14 and being scattered, and the diaphragm 4 is vibrated efficiently.

In the ultrasonic atomizer of FIG. 1, the piezoelectric vibrator 1
And when operating the ultrasonic exciter consisting of the diaphragm 2,
Along with the vibration of the vibrating portion 54, the liquid amount is adjusted from the liquid storage chamber 5 by the valve 9 through the liquid supply tube 7 and the liquid retaining material 13
The liquid that has reached the point is introduced into each hole 60 by the capillary phenomenon. When the liquid passes through each hole 60, the passage area of the liquid in each hole 60 decreases from the inlet side to the outlet side, so that the liquid is subjected to the squeezing action by the holes 60, and fine and uniform particles are obtained. And flows out to the upper part of the vibrating portion 54. As a result, the diaphragm action, the elastic vibration of the vibrating portion 54,
The liquid flowing out from the hole 60 is efficiently atomized by the liquid amount control action of the valve 9 on the diaphragm 2. In this embodiment, the frequency is 11 when the applied voltage is 9.8V.
The amount of atomization becomes maximum at 4.6 kHz, at which time the power consumption is 294 mW and the current is 30 mA. The power consumption of the entire device including the power supply is 588 mW and the current is 60 mA. In this way, by adopting a rectangular plate-like structure in which the dimensional ratio of the length and the width is close to 1 and not equal to 1 as the piezoelectric vibrator, the combined vibration of the composite of the piezoelectric vibrator and the vibration plate is reduced. As it increases, the amount of fog generated increases. In addition, the piezoelectric vibrator 3 and the diaphragm 4 can be switched by switching the switches.
When the ultrasonic exciter composed of and is operated, the liquid that has reached the liquid retaining material 14 through the liquid supply tube 8 whose liquid amount has been adjusted by the valve 10 from the liquid storage chamber 6 reaches the vibrating plate 4 by the capillary phenomenon. It is guided to a large number of fine holes provided and atomized. Since the size of the holes is different from the size of the holes 60, it is possible to generate a mist having particles of a size different from the size of the mist particles atomized through the holes 60. In this way, not only particles of different sizes can be generated by switching the switches, but also different kinds of liquids can be stored in the liquid storage chamber 5 and the liquid storage chamber 6 so that they are different from each other. It is possible to generate fogs with different types of particles of different sizes. Further, the heater 11 provided in the liquid storage chamber 5 and the liquid storage chamber 6
By operating the heater 12 provided in the liquid storage chamber 5, the temperature of the liquid in the liquid storage chamber 5 or the liquid storage chamber 6 can be set according to the application. Since the atomization amount increases as the applied voltage increases, the atomization amount can be freely changed by changing the voltage according to the purpose.

FIG. 11 is a characteristic diagram showing the relationship between the length of the vibrating portion 54 and the atomization amount when the length of the vibrating portion 54 is changed in the ultrasonic exciter shown in FIGS. 5 and 6. is there. The maximum atomization amount is 2 when the length of the vibrating part is 17 mm.
It shows 7.5 ml / min. FIG. 12 is a characteristic diagram showing the relationship between the length of the vibrating portion 54 shown in FIGS. 5 and 6 and the height of the mist jet. However, the height at this time is the value that is what is ejected in the oblique direction converted to the value above vertically. Vibration part 54
The height of the fog reached a maximum of 112 cm when the length was 17 mm.

FIG. 13 is a characteristic diagram showing the relationship between the phase and frequency of the impedance of the piezoelectric vibrator 1 shown in FIGS. 5 and 6, and FIG. 14 is the piezoelectric vibrator 1 shown in FIGS.
FIG. 6 is a characteristic diagram showing a relationship between impedance phases and frequencies for a composite of the diaphragm 2 and the diaphragm 2. Since the value of the frequency when the phase is 0 degree indicates the resonance frequency, the piezoelectric vibrator 1 has four resonance frequencies in FIG. fa represents an intermediate value of two resonance frequencies of the four resonance frequencies. In FIG. 14, the peak near fa is divided into two, and resonance frequencies fb1 and fb2 are generated, and the intermediate value fo indicates the frequency when the atomization amount is maximum, and fo substantially matches fa. By adopting such a structure that the intermediate value of the two resonance frequencies in the composite of the piezoelectric vibrator and the diaphragm is substantially equal to the resonance frequency of the piezoelectric vibrator alone, the piezoelectric vibrator and the diaphragm are separated. Since the combined vibration of the complex of 1 is enhanced, the amount of fog generated is further increased. As the length of the vibrating portion 54 is shortened, fb1 and fb2 shift to the high frequency side and move away from fa, so the atomization amount decreases.

FIG. 15 shows a piezoelectric vibrator 1 and a vibration plate 30 in place of a composite body composed of the piezoelectric vibrator 1, the vibration plate 2, the piezoelectric vibrator 3 and the vibration plate 4 in the first embodiment of FIG. FIG. 3 is a perspective view showing an example of a composite body composed of This embodiment includes two piezoelectric vibrators 1 and two diaphragms 30. The vibrating plate 30 is fixed to one end face of the piezoelectric vibrator 1 at a corner of an edge portion along the width direction of the piezoelectric vibrator 1. Two
The two piezoelectric vibrators 1 are pressed against each other via the end face of the vibrating plate 30 which is not fixed. Two diaphragms 30
Are arranged so that they do not overlap each other when viewed from the thickness direction of the piezoelectric vibrator 1. One diaphragm 30 is provided with a large number of fine holes having the same shape and dimensions as the diaphragm 2, and the other diaphragm 30 is provided with a large number of fine holes having the same shape and dimensions as the diaphragm 4. It is provided. Piezoelectric vibrator 1
Two terminals P and a terminal Q on one edge along the width direction of the
And are arranged. The terminal P is the diaphragm 3 of the piezoelectric vibrator 1.
Each of them is provided on the end surface having 0, and the terminal Q is provided between the two piezoelectric vibrators 1. By supplying an AC voltage via one of the terminals P and Q, the piezoelectric vibrator 1 provided with the terminals P can be driven. In this way, either piezoelectric vibrator 1 can be driven. By using this embodiment as well, the atomization effect similar to that obtained when the composite body including the piezoelectric vibrator 1, the vibration plate 2, the piezoelectric vibrator 3, and the vibration plate 4 in the first embodiment of FIG. 1 is used. It was observed.

FIG. 16 is a piezoelectric vibrator 80 having a length of 20 mm, a width of 5 mm and a thickness of 6 mm shown in place of the examples of FIGS. 5 and 6, and a vibration having a length of 10.5 mm, a width of 5 mm and a thickness of 0.04 mm. FIG. 8 is a perspective view showing an embodiment of an ultrasonic exciter including a portion 86 and a diaphragm 85 having a fixed portion 87 having a length of 1.5 mm, a width of 5 mm and a thickness of 0.04 mm. The vibrating plate 85 is provided with a large number of fine holes having the same shape as the vibrating plate 2, and the diameter on the inlet side is 0.08 mm and the diameter on the outlet side is 0.007 mm.
In the present embodiment, electrodes 82, 83, 84 are formed on both end faces perpendicular to the polarization axis of the piezoelectric ceramic 81. The electrodes 82 and 83 are provided on the same surface and are insulated from each other. The electrode 82 covers a portion 15 mm from the end in the length direction of the piezoelectric ceramic and is used as an electrode for applying an alternating voltage to the piezoelectric vibrator 80. Electrode 83 is 1 mm from electrode 82
It covers the rest of the distance and is used as an electrode for a self-excited power supply. The electrode 84 is used as a ground electrode. It was confirmed that the atomization amount was maximum at a frequency of about 100 kHz and that the particles of the fog were even finer and more uniform when this example was used. In this way, by adopting a rectangular prismatic structure in which the dimensional ratio of the thickness and the width is close to 1 and is not equal to 1 as the piezoelectric vibrator, the combined vibration of the composite of the piezoelectric vibrator and the vibration plate is obtained. , The amount of fog generated will further increase. Also, by providing two electrodes in an insulated state on one end face perpendicular to the polarization axis of the piezoelectric ceramic, one electrode can be used as an electrode for a self-excited power source, so that it is stable and efficient. It is possible to provide an atomizing device that can be driven with low power consumption.

FIG. 17 shows a length 10 instead of the example of FIG.
mm, width 5 mm, thickness 6 mm piezoelectric vibrator 90 and length 11 m
It is a perspective view which shows one Example of the ultrasonic exciter provided with the diaphragm 95 of m, width 5mm, and thickness 0.04mm. The piezoelectric vibrator 90 includes a piezoelectric ceramic 91, an electrode 92, an electrode 93, and an electrode 94. The electrode 92 covers a portion 4.5 mm from the end of the piezoelectric ceramic 91 in the length direction, and is used as an electrode for applying an AC voltage to the piezoelectric vibrator 90. The electrode 93 covers the remaining portion 1 mm apart from the electrode 92,
Are used as electrodes for self-excited power supplies. Electrode 94
Is used as a ground electrode. The vibrating plate 95 includes a vibrating portion 96 and a fixed portion 97, and the vibrating plate 95 is provided below the piezoelectric vibrator 90. The vibrating portion 96 has a length of 5.5.
The fixed portion 97 has a length of 1.5 mm, a width of 5 mm and a thickness of 0.04 mm. Diaphragm 9
5 is provided with a large number of fine holes having the same shape and size as the diaphragm 85. Also in this embodiment, as in the case of FIG. 16, it is possible to provide a stable and efficient atomizing device capable of driving with low power consumption.

FIG. 18 is a characteristic diagram showing the relationship between impedance phase and frequency for the ultrasonic exciter shown in FIG. The dotted line in FIG. 18 shows the characteristics of the piezoelectric vibrator 90 alone, and the solid line shows the characteristics of the composite body of the piezoelectric vibrator 90 and the vibration plate 95. fo represents the frequency at which the atomization amount becomes maximum when the composite is used in the atomizing device of the present invention. fo is 245.7 kHz, and the piezoelectric vibrator 90
It is almost the same as the resonance frequency of the single unit. By adopting such a structure that the resonance frequency in the composite of the piezoelectric vibrator and the diaphragm is substantially equal to the resonance frequency of the single piezoelectric vibrator, the combination of the composite of the piezoelectric vibrator and the diaphragm is combined. Since the vibration is enhanced, the amount of fog generated is further increased.

FIG. 19 is a characteristic diagram showing the relationship between the length of the vibrating portion 96 and the atomization amount when the length of the vibrating portion 96 is changed in the ultrasonic exciter shown in FIG. When the length of the vibrating part is 5.5 mm, the atomization amount shows a maximum value of 72 ml / h, and the power consumption at that time is 1 W.

When the ultrasonic atomizer of FIG. 2 is driven, an AC signal having a frequency substantially equal to the resonance frequency of the composite of the piezoelectric vibrator 1, the diaphragm 2 and the diaphragm 20 is supplied to the terminals P and Q. When applied to the piezoelectric vibrator 1 via
Is excited. At this time, the frequency of the AC signal substantially matches one of the resonance frequencies of the piezoelectric vibrator 1. Since the vibrating plate 2 and the vibrating plate 20 are integrally connected and fixed to at least one surface of the piezoelectric vibrator 1, the vibrating plate 2 and the vibration are accompanied by the vibration of the piezoelectric vibrator 1. The plate 20 is vibrated in the form of a cantilever having the fixed portions 53 and the fixed portions 70 as fixed ends.
The vibration generated in the vibrating portion 54 and the vibrating portion 71 is bending vibration, and the elastic vibration of the vibrating portion 54 and the vibrating portion 71 effectively functions for atomizing the liquid. Since the contact portion of the support tool 25 that supports the piezoelectric vibrator 1 and is fixed to the main body with the piezoelectric vibrator 1 is made of expanded polystyrene and has a lower acoustic impedance than the piezoelectric vibrator 1, the present embodiment will be described below. I am using. Since the contact portion of the support tool 25 with the piezoelectric vibrator 1 is made of styrofoam, the ultrasonic wave from the piezoelectric vibrator 1 is suppressed from propagating to the support tool 25 itself and being lost, and the vibration plate 2 and the vibration plate. 20 is vibrated efficiently. on the other hand,
The liquid in the main body liquid storage chamber 23 is sucked up by the liquid retaining material 21 and reaches the upper portion of the liquid retaining material 21. The liquid in the main body liquid storage chamber 24 is sucked up by the liquid retaining material 22 and reaches the upper portion of the liquid retaining material 22. By switching the switch, the support tool 26 can be operated to bring the upper part of the liquid retaining material 21 into contact with the lower surface of the diaphragm 20, or to bring the upper portion of the liquid retaining material 22 into contact with the lower surface of the diaphragm 2. Liquid retaining material 2
1 and the liquid-retaining material 22 are made of sponge and have a large liquid-absorbing ability, and also have a low acoustic impedance as compared with the piezoelectric vibrator 1, and therefore are used in this embodiment. Liquid retaining material 2
1 and the liquid retaining material 22 are made of sponge, ultrasonic waves from the piezoelectric vibrator 1 are retained by the liquid retaining material 21 or the liquid retaining material 22.
It is suppressed that the light is propagated in the liquid through the liquid and is lost, and the diaphragm 2 or the diaphragm 20 is efficiently vibrated.

In the ultrasonic atomizer of FIG. 2, when the liquid retaining material 22 is in contact with the vibrating plate 2 and the liquid retaining material 21 is not in contact with the vibrating plate 20, vibrations of the vibrating portion 54 and the vibrating portion 71 occur. The liquid that has been absorbed by the liquid retaining material 22 from the main body liquid storage chamber 24 and has reached the lower surface of the diaphragm 2 is accompanied by the capillary phenomenon.
Lead to zero. When the liquid passes through each hole 60, the passage area of the liquid in each hole 60 decreases from the inlet side to the outlet side, so that the liquid is subjected to the squeezing action by the holes 60, and fine and uniform particles are obtained. And flows out to the upper part of the vibrating portion 54. As a result, the liquid flowing out from the hole 60 is efficiently atomized by the diaphragm action and the elastic vibration of the vibrating portion 54. Further, when the liquid retaining material 21 is in contact with the diaphragm 20 and the liquid retaining material 22 is not in contact with the diaphragm 2, it reaches the lower surface of the diaphragm 20 from the main body liquid storage chamber 23 via the liquid retaining material 21. The liquid is guided to a large number of fine holes provided in the diaphragm 20 by a capillary phenomenon and atomized. Since the size of the holes is different from the size of the holes 60, it is possible to generate a mist having particles of a size different from the size of the mist particles atomized through the holes 60. In this way, by switching the switch, the support tool 26 can be actuated to generate a mist of particles of different sizes. Moreover, by putting different kinds of liquids in the main body liquid storage chamber 23 and the main body liquid storage chamber 24, it is possible to generate mists having particles of different types and different sizes. In this way, also in this embodiment, the atomization effect similar to that of the first embodiment of FIG. 1 was observed. Note that in this embodiment, FIG.
Although the ultrasonic exciter shown in FIG. 9 is used, the ultrasonic exciter shown in FIG. 9 is installed on the other end face of the piezoelectric vibrator 1 so as not to face the vibrating plate 2. Even when the ultrasonic exciter was used, the atomization effect similar to that when the ultrasonic exciter of FIG. 9 was used was observed.

When the ultrasonic atomizer of FIG. 3 is driven, an AC signal having a frequency substantially equal to the resonance frequency of the composite of the piezoelectric vibrator 1 and the two diaphragms 30 is applied to the terminals P and Q.
When applied to the piezoelectric vibrator 1 via the, the piezoelectric vibrator 1 is excited. At this time, the frequency of the AC signal substantially matches one of the resonance frequencies of the piezoelectric vibrator 1. Two
Since the two vibrating plates 30 are integrally and continuously fixed to at least one surface of the piezoelectric vibrator 1, the two vibrating plates 30 are excited as the piezoelectric vibrator 1 is excited.
Are vibrated in the form of a cantilever whose fixed ends 72 are fixed ends. The vibration generated in the two vibrating portions 73 is bending vibration, and the elastic vibration of the vibrating portion 73 effectively functions for atomizing the liquid. The support 33 that supports the piezoelectric vibrator 1 and is fixed to the main body is made of styrofoam, and has a lower acoustic impedance than the piezoelectric vibrator 1 and is used in this embodiment. Since the support tool 33 is made of styrofoam, it is possible to prevent ultrasonic waves from the piezoelectric vibrator 1 from propagating to the support tool 33 itself and being lost, so that the two diaphragms 30 are efficiently vibrated. On the other hand, the liquid in the main body liquid storage chamber 31 is sucked up by the liquid retaining material 32 and reaches the upper portion of the liquid retaining material 32. The upper portion of the liquid retaining material 32 can be brought into contact with the lower surface of either one of the diaphragms 30 by the support 33. The liquid-retaining material 32 is made of sponge and has a large liquid-absorbing ability, and since it has a lower acoustic impedance than the piezoelectric vibrator 1, it is used in this embodiment. Since the liquid retaining material 32 is made of sponge, the ultrasonic waves from the piezoelectric vibrator 1 are suppressed from propagating into the liquid through the liquid retaining material 32 and being scattered, and the diaphragm 30 is vibrated efficiently.

In the ultrasonic atomizer of FIG. 3, the liquid that is absorbed by the liquid retaining material 32 from the main body liquid storage chamber 31 and reaches the lower surface of the vibrating plate 30 due to the vibration of the vibrating part 73 is caused by the capillary phenomenon. It is guided to a large number of fine holes provided in. When the liquid passes through each of the holes, the passage area of the liquid in each of the holes decreases from the inlet side to the outlet side, so that the liquid is subjected to the throttling action by the holes, and fine and uniform particles. And flows out to the upper part of the vibrating portion 73. As a result, the liquid flowing out from the hole is efficiently atomized by the diaphragm action and the elastic vibration of the vibrating portion 73.
Further, since the sizes of the holes provided in the two diaphragms 30 are different, it is possible to generate a mist of particles having different sizes depending on which diaphragm 30 the liquid retaining material 32 is brought into contact with. In this way, the support 33 holds the liquid retaining material 32.
Depending on which diaphragm 30 is contacted with, the fog of particles of different sizes can be generated. In this way, also in this embodiment, the atomization effect similar to that of the first embodiment of FIG. 1 was observed. Although the ultrasonic exciter shown in FIG. 10 was used in the present embodiment, the two vibrating plates 30 in the ultrasonic exciter shown in FIG. Even when the ultrasonic exciter provided in the same arrangement as the two diaphragms 30 is used,
The atomization effect similar to the case of using the ultrasonic excitation device of 0 was seen.

When the ultrasonic atomizer of FIG. 4 is driven, an AC signal having a frequency substantially equal to the resonance frequency of the composite of the piezoelectric vibrator 1 and the two diaphragms 30 is applied to the terminals P and Q.
When applied to the piezoelectric vibrator 1 via the, the piezoelectric vibrator 1 is excited. At this time, the frequency of the AC signal substantially matches one of the resonance frequencies of the piezoelectric vibrator 1. Two
Since the two vibrating plates 30 are integrally and continuously fixed to at least one surface of the piezoelectric vibrator 1, the two vibrating plates 30 are excited as the piezoelectric vibrator 1 is excited.
Are vibrated in the form of a cantilever whose fixed ends 72 are fixed ends. The vibration generated in the two vibrating portions 73 is bending vibration, and the elastic vibration of the vibrating portion 73 effectively functions for atomizing the liquid. The support 33 that supports the piezoelectric vibrator 1 and is fixed to the main body is made of styrofoam, and has a lower acoustic impedance than the piezoelectric vibrator 1 and is used in this embodiment. Since the support tool 33 is made of styrofoam, it is possible to prevent ultrasonic waves from the piezoelectric vibrator 1 from propagating to the support tool 33 itself and being lost, so that the two diaphragms 30 are efficiently vibrated. On the other hand, the liquid in the liquid storage chamber 40 is sucked up by the liquid retaining material 41 and reaches the upper portion of the liquid retaining material 41. The upper portion of the liquid retaining material 41 can be brought into contact with the lower surface of either one of the diaphragms 30 by the support 33. The liquid-retaining material 41 is made of sponge and has a large liquid-absorbing ability, and since it has a lower acoustic impedance than the piezoelectric vibrator 1, it is used in this embodiment.
Since the liquid retaining material 41 is made of sponge, the ultrasonic waves from the piezoelectric vibrator 1 are suppressed from propagating into the liquid via the liquid retaining material 41 and being scattered, and the diaphragm 30 is efficiently vibrated. The ultrasonic exciter composed of the piezoelectric vibrator 1 and the vibration plate 30 supported by the support 33 is floated in the liquid storage chamber 40 filled with liquid by buoyancy, so that not only the liquid supply efficiency is increased, Without being affected by the increase or decrease of the liquid in the liquid storage chamber 40 or the change of the liquid surface due to the vibration,
A stable liquid supply can always be realized.

In the ultrasonic atomizer of FIG. 4, the liquid absorbed by the liquid retaining material 41 from the liquid storage chamber 40 and reaching the lower surface of the vibrating plate 30 due to the vibration of the vibrating part 73 is transferred to the vibrating plate 30 by the capillary phenomenon. It is guided to a large number of minute holes provided.
When the liquid passes through each of the holes, the passage area of the liquid in each of the holes decreases from the inlet side to the outlet side, so that the liquid is subjected to the throttling action by the holes, and fine and uniform particles. And flows out to the upper part of the vibrating portion 73.
As a result, the liquid flowing out from the hole is efficiently atomized by the diaphragm action and the elastic vibration of the vibrating portion 73. Further, since the sizes of the holes provided in the two diaphragms 30 are different, the fog of particles having different sizes is generated depending on which diaphragm 30 the liquid retaining material 41 is brought into contact with by the support 33. be able to. In this way, also in this embodiment, the atomization effect similar to that of the first embodiment of FIG. 1 was observed. Although the ultrasonic exciter shown in FIG. 10 was used in the present embodiment, the two vibrating plates 30 in the ultrasonic exciter shown in FIG. Even when the ultrasonic exciter provided in the same arrangement as the two vibrating plates 30 was used, the same atomization effect as when the ultrasonic exciter of FIG. 10 was used was observed.

[0046]

As described in detail above, according to the ultrasonic atomizing device of the present invention, the liquid is atomized while passing through the hole provided in the vibrating portion, so that the fineness of the mist particles, Uniformity can be promoted. Further, the liquid supply means includes a support for supporting the ultrasonic exciter, a liquid storage chamber, and a liquid retaining material for sucking up the liquid in the liquid retaining chamber and supplying it to the vibrating section. By adopting a substance that has a large liquid absorption capacity and an acoustic impedance lower than that of the piezoelectric vibrator, not only can liquid be supplied efficiently without waste, but also ultrasonic waves from the piezoelectric vibrator can be introduced into the liquid. Propagation is blocked and propagation of the vibration of the piezoelectric vibrator to the liquid retaining material itself is suppressed, so that the vibration of the piezoelectric vibrator can efficiently vibrate the diaphragm. Therefore, the atomization efficiency of the liquid can be improved, and a large amount of the liquid can be atomized with low power consumption, and at the same time, the miniaturization of the device can be easily realized.

By adopting a structure in which the support holds the ultrasonic exciter at a predetermined position with respect to the fixed object, or a structure in which the ultrasonic exciter is floated in the liquid by buoyancy, increase / decrease and vibration of the liquid in the liquid storage chamber Since it is possible to always realize a stable liquid supply without being affected by changes in the liquid surface due to
It is possible to provide an atomizing device that produces a uniform amount of atomization. Moreover,
Propagation of ultrasonic waves from the piezoelectric vibrator to the liquid is blocked by using styrene foam or other material that has a lower acoustic impedance than the piezoelectric vibrator for at least the portion of the support that contacts the ultrasonic exciter. Not only that, but also the propagation of the vibration of the piezoelectric vibrator to the support itself is suppressed, so that the vibration of the piezoelectric vibrator can vibrate the diaphragm efficiently. Therefore, the atomization efficiency can be increased.

By adopting a simple structure including a piezoelectric ceramic as the piezoelectric vibrator and electrodes formed on both end faces perpendicular to the thickness direction of the piezoelectric ceramic, the device can be downsized and high efficiency can be achieved. The liquid can be atomized with, and driving with low power consumption becomes possible.

By adopting the structure in which the vibrating plate is integrally connected and fixed to at least one end surface of the piezoelectric vibrator, the vibrating portion flexibly vibrates in the form of a cantilever having the fixed portion as a fixed end. The liquid supplied to the vibrating portion in the state of strong elastic vibration is atomized vertically upward. Also,
Since the opening area of one of the holes provided in the vibrating section is larger than the opening area of the other, the adoption of a structure in which one opening is on the inlet side and the other opening is on the outlet side makes The liquid is subjected to a throttling action by the hole as it passes through the hole, since it decreases from the inlet side to the outlet side of the hole. As a result, the atomizing action of the liquid is promoted by the synergistic effect of the throttling action and the vibration of the vibrating portion, the amount of fog generated is increased, and the particle diameter is made uniform.

As the applied voltage is increased, the atomization amount is also increased. Therefore, the atomization amount can be freely changed by changing the voltage according to the purpose.

By providing two electrodes which are insulative to each other on one end face perpendicular to the thickness direction of the piezoelectric ceramic, one electrode can be used as an electrode for a self-excited power source, so that it is stable and efficient. It is possible to provide an atomizing device that can drive with good power consumption and low power consumption.

By adopting a structure in which the resonance frequency of the composite of the piezoelectric vibrator and the diaphragm is substantially equal to the resonance frequency of the single piezoelectric vibrator, the combined vibration of the composite of the piezoelectric vibrator and the diaphragm is achieved. , The amount of fog generated will further increase.

By adopting a rectangular prismatic structure having a thickness-width dimension ratio close to 1 and not equal to 1 as the piezoelectric vibrator, the combined vibration of the composite of the piezoelectric vibrator and the diaphragm is enhanced. Therefore, the amount of fog generated further increases.

2 in a composite of a piezoelectric vibrator and a diaphragm
By adopting a structure in which the intermediate value of the two resonance frequencies is approximately equal to the resonance frequency of the piezoelectric vibrator alone, the combined vibration of the composite of the piezoelectric vibrator and the diaphragm is enhanced, so the amount of fog generated is Further increase.

By adopting a rectangular plate-like structure in which the size ratio of the length and the width is close to 1 and not equal to 1 as the piezoelectric vibrator, the combined vibration of the composite of the piezoelectric vibrator and the diaphragm is enhanced. Therefore, the amount of fog generated further increases.

[Brief description of drawings]

FIG. 1 is a sectional view showing a first embodiment of an ultrasonic atomizing device of the present invention.

FIG. 2 is a sectional view showing a second embodiment of the ultrasonic atomizing device of the present invention.

FIG. 3 is a cross-sectional view showing a third embodiment of the ultrasonic atomizing device of the present invention.

FIG. 4 is a sectional view showing a fourth embodiment of the ultrasonic atomizing device of the present invention.

5 is a side view of an ultrasonic exciter including the piezoelectric vibrator 1 and the diaphragm 2 according to the first embodiment of FIG.

6 is a plan view of the ultrasonic exciter of FIG.

FIG. 7 is a cross-sectional view of the vibrating portion 54 that appears when cut along a plane perpendicular to the plate surface.

FIG. 8 is a partially enlarged plan view of a vibrating section 54.

9 is a piezoelectric vibrator 1 according to a second embodiment of FIG. 2,
The top view of the ultrasonic exciter which consists of the diaphragm 2 and the diaphragm 20.

10 is a plan view of an ultrasonic exciter including the piezoelectric vibrator 1 and two diaphragms 30 according to the third embodiment of FIG. 3 and the fourth embodiment of FIG.

FIG. 11 is a characteristic diagram showing the relationship between the length of the vibrating portion and the atomization amount when the length of the vibrating portion is changed in the ultrasonic exciter shown in FIGS. 5 and 6.

FIG. 12 is a characteristic diagram showing the relationship between the length of the vibrating portion 54 shown in FIGS. 5 and 6 and the height of mist ejection.

13 is a characteristic diagram showing the relationship between the phase of impedance and the frequency of the piezoelectric vibrator 1 shown in FIGS. 5 and 6. FIG.

14 is a characteristic diagram showing the relationship between impedance phase and frequency for the composite of the piezoelectric vibrator 1 and the diaphragm 2 shown in FIGS. 5 and 6. FIG.

FIG. 15 is a piezoelectric vibrator 1 according to the first embodiment of FIG.
FIG. 3 is a perspective view showing an example of a composite body composed of the piezoelectric vibrator 1 and the vibration plate 30 shown in place of the composite body composed of the vibration plate 2, the piezoelectric vibrator 3, and the vibration plate 4.

16 is a piezoelectric vibrator 80 shown in place of the examples of FIGS. 5 and 6, and a diaphragm 8 having a vibrating portion 86 and a fixing portion 87.
The perspective view which shows one Example of the ultrasonic exciter provided with 5 and 5.

FIG. 17 is a piezoelectric vibrator 90 shown in place of the example of FIG.
The perspective view which shows one Example of the ultrasonic exciter provided with the diaphragm 95.

FIG. 18 is a characteristic diagram showing the relationship between impedance phase and frequency for the ultrasonic exciter shown in FIG.

19 is a characteristic diagram showing the relationship between the length of the vibrating portion 96 and the atomization amount when the length of the vibrating portion 96 is changed in the ultrasonic exciter shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Piezoelectric vibrator 2 Vibration plate 3 Piezoelectric vibrator 4 Vibration plate 5 Liquid storage chamber 6 Liquid storage chamber 7 Liquid supply tube 8 Liquid supply tube 9 Valve 10 Valve 11 Heater 12 Heater 13 Liquid retaining material 14 Liquid retaining material 15 Support 20 Vibration plate 21 Liquid retaining material 23 Main body liquid storage chamber 24 Main body liquid storage chamber 25 Support tool 26 Support tool 30 Vibration plate 31 Main body liquid storage room 32 Liquid retention material 33 Support tool 40 Liquid storage chamber 41 Liquid retention material 50 Piezoelectric ceramic 51 Electrode 52 electrode 53 fixed part 54 vibrating part 60 hole 70 fixed part 71 vibrating part 72 fixed part 73 vibrating part 80 piezoelectric vibrator 81 piezoelectric ceramic 82 electrode 83 electrode 84 electrode 85 vibrating plate 86 vibrating part 87 fixed part 90 piezoelectric vibrator 91 piezoelectric Porcelain 92 Electrode 93 Electrode 94 Electrode 95 Vibrating plate 96 Vibrating part 97 Fixed part

Claims (7)

[Claims] 1. An ultrasonic atomizer for atomizing a liquid by elastic vibration generated by an ultrasonic exciter having a vibration plate fixed to a piezoelectric vibrator, wherein the piezoelectric vibrator includes a piezoelectric ceramic and a piezoelectric ceramic. The vibrating plate is formed on both end surfaces perpendicular to the thickness direction of the porcelain, and the vibrating plate is integrally fixed on at least one end surface having the electrodes of the piezoelectric vibrator, and a fixing portion. A vibrating portion that protrudes outwardly of the piezoelectric vibrator substantially parallel to the end surface of the piezoelectric vibrator, and the vibrating portion is provided with a large number of holes, and the liquid is supplied to the vibrating portion. The means for supplying the liquid is provided with a support for supporting the ultrasonic exciter, a liquid storage chamber for containing the liquid, and a liquid retaining material made of a sponge or other substance having a large liquid absorption capacity for absorbing the liquid. , The support is fixed to the ultrasonic exciter Then, the ultrasonic exciter is floated in the liquid by buoyancy while being held at a predetermined position, and at least the portion of the support tool that comes into contact with the ultrasonic exciter has a lower acoustic impedance than the piezoelectric vibrator. An ultrasonic atomizing device, comprising another substance, wherein the vibrating portion contacts the liquid retaining material to atomize the liquid absorbed in the liquid retaining material. 2. The ultrasonic atomizing device according to claim 1, wherein one opening area of the diaphragm and the other opening area of the hole are different from each other. 3. The super electrode according to claim 1, wherein the electrode formed on at least one of the both end faces is divided into two parts which are insulated from each other. Sonic atomizer. 4. The ultrasonic fog according to claim 1, 2 or 3, wherein a resonance frequency of the piezoelectric vibrator is substantially equal to a resonance frequency of a composite of the piezoelectric vibrator and the diaphragm. Device. 5. The ultrasonic atomizing device according to claim 4, wherein the piezoelectric vibrator is a rectangular prism having a dimensional ratio of thickness to width close to 1 and not equal to 1. 6. The resonance frequency of the piezoelectric vibrator is substantially equal to an intermediate value between two resonance frequencies of a composite of the piezoelectric vibrator and the diaphragm.
Or the ultrasonic atomizing device according to 3. 7. The ultrasonic atomizing device according to claim 6, wherein the piezoelectric vibrator is a rectangular plate having a dimensional ratio of length to width close to 1 and not equal to 1.