JPH0517652B2 - - Google Patents
Info
- Publication number
- JPH0517652B2 JPH0517652B2 JP58234243A JP23424383A JPH0517652B2 JP H0517652 B2 JPH0517652 B2 JP H0517652B2 JP 58234243 A JP58234243 A JP 58234243A JP 23424383 A JP23424383 A JP 23424383A JP H0517652 B2 JPH0517652 B2 JP H0517652B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- electron
- electron gun
- anode
- field emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims 1
- 230000004075 alteration Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58234243A JPS60127645A (ja) | 1983-12-14 | 1983-12-14 | 電界放射形電子銃 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58234243A JPS60127645A (ja) | 1983-12-14 | 1983-12-14 | 電界放射形電子銃 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60127645A JPS60127645A (ja) | 1985-07-08 |
| JPH0517652B2 true JPH0517652B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-03-09 |
Family
ID=16967921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58234243A Granted JPS60127645A (ja) | 1983-12-14 | 1983-12-14 | 電界放射形電子銃 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60127645A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2775071B2 (ja) * | 1989-02-22 | 1998-07-09 | 日本電信電話株式会社 | 荷電粒子ビーム発生装置 |
| JP3900792B2 (ja) * | 2000-04-26 | 2007-04-04 | 株式会社日立製作所 | 電子銃 |
| US11227740B2 (en) | 2017-09-07 | 2022-01-18 | Hitachi High-Tech Corporation | Electron gun and electron beam application device |
-
1983
- 1983-12-14 JP JP58234243A patent/JPS60127645A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60127645A (ja) | 1985-07-08 |