JPH0517632Y2 - - Google Patents

Info

Publication number
JPH0517632Y2
JPH0517632Y2 JP1986159668U JP15966886U JPH0517632Y2 JP H0517632 Y2 JPH0517632 Y2 JP H0517632Y2 JP 1986159668 U JP1986159668 U JP 1986159668U JP 15966886 U JP15966886 U JP 15966886U JP H0517632 Y2 JPH0517632 Y2 JP H0517632Y2
Authority
JP
Japan
Prior art keywords
pressure
tuning fork
sensing element
fork type
type crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986159668U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6363736U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986159668U priority Critical patent/JPH0517632Y2/ja
Publication of JPS6363736U publication Critical patent/JPS6363736U/ja
Application granted granted Critical
Publication of JPH0517632Y2 publication Critical patent/JPH0517632Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1986159668U 1986-10-17 1986-10-17 Expired - Lifetime JPH0517632Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986159668U JPH0517632Y2 (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986159668U JPH0517632Y2 (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Publications (2)

Publication Number Publication Date
JPS6363736U JPS6363736U (enrdf_load_stackoverflow) 1988-04-27
JPH0517632Y2 true JPH0517632Y2 (enrdf_load_stackoverflow) 1993-05-12

Family

ID=31084317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986159668U Expired - Lifetime JPH0517632Y2 (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPH0517632Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010169512A (ja) * 2009-01-22 2010-08-05 Nippon Soken Inc 圧力変化検出装置
FR3054666B1 (fr) * 2016-07-27 2018-07-20 Office National D'etudes Et De Recherches Aerospatiales (Onera) Resonateur mecanique optimise pour fonctionner dans un fluide

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658632A (en) * 1979-10-18 1981-05-21 Seikosha Co Ltd Pressure detecting device

Also Published As

Publication number Publication date
JPS6363736U (enrdf_load_stackoverflow) 1988-04-27

Similar Documents

Publication Publication Date Title
CA1232775A (en) Fluid density measurement apparatus and method
US7427819B2 (en) Film-bulk acoustic wave resonator with motion plate and method
US4836023A (en) Vibrational angular rate sensor
US4435986A (en) Pressure transducer of the vibrating element type
JPH0367210B2 (enrdf_load_stackoverflow)
JPH047459B2 (enrdf_load_stackoverflow)
US7194906B2 (en) Acceleration sensor having resonators with reduced height
EP0855583B1 (en) Device for measuring a pressure
US4691573A (en) Pressure sensor
JPH0517632Y2 (enrdf_load_stackoverflow)
US7017418B1 (en) System and method for sensing pressure
CA1273821A (en) At-cut crystal resonator presssure transducer
US4682502A (en) Pressure sensor
JP3095637B2 (ja) 超音波湿度センサ
WO2005003711A1 (ja) 水晶式圧力センサ、及びその製造方法
JPH0368828A (ja) 圧力測定装置
JPH0515975B2 (enrdf_load_stackoverflow)
JP2553471B2 (ja) 圧力検出器
CN222635654U (zh) 压电谐振式压力传感器及补偿系统
JPH01170824A (ja) 圧力検出器
CN222652409U (zh) 压电谐振式压力传感器及补偿系统
CN222635652U (zh) 压电谐振式压力传感器及补偿系统
JPS5967437A (ja) 水晶振動子圧力センサ
CN223243790U (zh) 压电谐振式压力传感器及补偿系统
CN118624067B (zh) 压电谐振式压力传感器、补偿系统及制备方法