JPH0516523Y2 - - Google Patents

Info

Publication number
JPH0516523Y2
JPH0516523Y2 JP1987005079U JP507987U JPH0516523Y2 JP H0516523 Y2 JPH0516523 Y2 JP H0516523Y2 JP 1987005079 U JP1987005079 U JP 1987005079U JP 507987 U JP507987 U JP 507987U JP H0516523 Y2 JPH0516523 Y2 JP H0516523Y2
Authority
JP
Japan
Prior art keywords
light
incident
movable body
light source
incident light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987005079U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63174050U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987005079U priority Critical patent/JPH0516523Y2/ja
Publication of JPS63174050U publication Critical patent/JPS63174050U/ja
Application granted granted Critical
Publication of JPH0516523Y2 publication Critical patent/JPH0516523Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP1987005079U 1987-01-16 1987-01-16 Expired - Lifetime JPH0516523Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987005079U JPH0516523Y2 (enrdf_load_stackoverflow) 1987-01-16 1987-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987005079U JPH0516523Y2 (enrdf_load_stackoverflow) 1987-01-16 1987-01-16

Publications (2)

Publication Number Publication Date
JPS63174050U JPS63174050U (enrdf_load_stackoverflow) 1988-11-11
JPH0516523Y2 true JPH0516523Y2 (enrdf_load_stackoverflow) 1993-04-30

Family

ID=30786329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987005079U Expired - Lifetime JPH0516523Y2 (enrdf_load_stackoverflow) 1987-01-16 1987-01-16

Country Status (1)

Country Link
JP (1) JPH0516523Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902805A (en) * 1973-09-17 1975-09-02 Vishay Intertechnology Inc Automatic birefringence measuring apparatus
JPS59120845A (ja) * 1982-12-27 1984-07-12 Shimadzu Corp 自動原子吸光分析装置

Also Published As

Publication number Publication date
JPS63174050U (enrdf_load_stackoverflow) 1988-11-11

Similar Documents

Publication Publication Date Title
KR102205870B1 (ko) 방사선 소스
US7304775B2 (en) Actively stabilized, single input beam, interference lithography system and method
JP2752003B2 (ja) 走査機能を備えた検査干渉計
JP7124205B2 (ja) コンパクトなアライメントセンサ配置
TWI547685B (zh) 量測方法、量測裝置、微影裝置及器件製造方法
EP2583300A2 (en) Discrete polarization scatterometry
US6509971B2 (en) Interferometer system
US11275313B2 (en) Metrology apparatus with radiation source having multiple broadband outputs
CN211651533U (zh) 测量系统
US20050002033A1 (en) Multiple beam ellipsometer
JPH0516523Y2 (enrdf_load_stackoverflow)
JP2000266666A (ja) エリプソメータ
US10942461B2 (en) Alignment measurement system
JP3564205B2 (ja) 多軸測長機
JP2003021508A (ja) ローリング角度測定装置
JPH0634486A (ja) ビーム形状測定装置
US6504613B1 (en) Optical interferometer with a casing and an optical part that is movable with respect to the casing
JP2000018912A (ja) 斜入射干渉計
JP3053135B2 (ja) 高精度座標測定器
JPS62227590A (ja) レ−ザ加工機のレ−ザ光路変換器
JP3212655B2 (ja) 干渉計
TWM606713U (zh) 測量系統
CN118981114A (zh) 一种高精度拉曼光束平行度调节装置
CA2359190A1 (en) System and method for recording interference fringes in a photosensitive medium
JPH04290906A (ja) 形状測定装置