JPH0516523Y2 - - Google Patents
Info
- Publication number
- JPH0516523Y2 JPH0516523Y2 JP1987005079U JP507987U JPH0516523Y2 JP H0516523 Y2 JPH0516523 Y2 JP H0516523Y2 JP 1987005079 U JP1987005079 U JP 1987005079U JP 507987 U JP507987 U JP 507987U JP H0516523 Y2 JPH0516523 Y2 JP H0516523Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- incident
- movable body
- light source
- incident light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987005079U JPH0516523Y2 (cs) | 1987-01-16 | 1987-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987005079U JPH0516523Y2 (cs) | 1987-01-16 | 1987-01-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63174050U JPS63174050U (cs) | 1988-11-11 |
| JPH0516523Y2 true JPH0516523Y2 (cs) | 1993-04-30 |
Family
ID=30786329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987005079U Expired - Lifetime JPH0516523Y2 (cs) | 1987-01-16 | 1987-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516523Y2 (cs) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3902805A (en) * | 1973-09-17 | 1975-09-02 | Vishay Intertechnology Inc | Automatic birefringence measuring apparatus |
| JPS59120845A (ja) * | 1982-12-27 | 1984-07-12 | Shimadzu Corp | 自動原子吸光分析装置 |
-
1987
- 1987-01-16 JP JP1987005079U patent/JPH0516523Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63174050U (cs) | 1988-11-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4880232B2 (ja) | 位置情報を取得するためのシステムおよび方法 | |
| KR102205870B1 (ko) | 방사선 소스 | |
| US7304775B2 (en) | Actively stabilized, single input beam, interference lithography system and method | |
| JP7124205B2 (ja) | コンパクトなアライメントセンサ配置 | |
| TWI547685B (zh) | 量測方法、量測裝置、微影裝置及器件製造方法 | |
| US6509971B2 (en) | Interferometer system | |
| US11275313B2 (en) | Metrology apparatus with radiation source having multiple broadband outputs | |
| CN211740135U (zh) | 测量系统 | |
| US20050002033A1 (en) | Multiple beam ellipsometer | |
| JPH0516523Y2 (cs) | ||
| JP3209390B2 (ja) | 透過型干渉計 | |
| JP2000266666A (ja) | エリプソメータ | |
| US20030072003A1 (en) | System and method for recording interference fringes in a photosensitive medium | |
| US10942461B2 (en) | Alignment measurement system | |
| JP3564205B2 (ja) | 多軸測長機 | |
| JP2002286409A (ja) | 干渉計装置 | |
| JP2003021508A (ja) | ローリング角度測定装置 | |
| JPH0634486A (ja) | ビーム形状測定装置 | |
| US6504613B1 (en) | Optical interferometer with a casing and an optical part that is movable with respect to the casing | |
| JP2000018912A (ja) | 斜入射干渉計 | |
| JP3053135B2 (ja) | 高精度座標測定器 | |
| JPS62227590A (ja) | レ−ザ加工機のレ−ザ光路変換器 | |
| JP3212655B2 (ja) | 干渉計 | |
| CA2359190A1 (en) | System and method for recording interference fringes in a photosensitive medium | |
| JPH04290906A (ja) | 形状測定装置 |