JPH05160567A - Method of manufacturing wiring board - Google Patents

Method of manufacturing wiring board

Info

Publication number
JPH05160567A
JPH05160567A JP32302491A JP32302491A JPH05160567A JP H05160567 A JPH05160567 A JP H05160567A JP 32302491 A JP32302491 A JP 32302491A JP 32302491 A JP32302491 A JP 32302491A JP H05160567 A JPH05160567 A JP H05160567A
Authority
JP
Japan
Prior art keywords
hole
catalyst
electroless plating
resist
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32302491A
Other languages
Japanese (ja)
Inventor
Yorio Iwasaki
順雄 岩崎
Shin Takanezawa
伸 高根沢
Hiroyuki Fukai
弘之 深井
Shigeru Nonaka
繁 野中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Lincstech Circuit Co Ltd
Original Assignee
Hitachi AIC Inc
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi AIC Inc, Hitachi Chemical Co Ltd filed Critical Hitachi AIC Inc
Priority to JP32302491A priority Critical patent/JPH05160567A/en
Publication of JPH05160567A publication Critical patent/JPH05160567A/en
Pending legal-status Critical Current

Links

Landscapes

  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To improve the copper plating deposition property of the inner wall of a through hole by a method wherein more than one kind of metals are mixed in glass particles, which are soluble in a fluorine compound, and a liquid, which consists of a chromic acid compound, a sulfuric acid and sodium fluoride or a chromic acid compound and borofluoride, is used as a chemically roughening liquid. CONSTITUTION:A bonding agent layer containing a catalyst for electroless plating use is formed on the surface of an insulating board containing a catalyst for electroless plating use, which is obtained by adding 0.05 to 1% of more than one kind of metals, such as palladium, gold, platinum or silver, to glass particles, which are soluble in a fluorine compound. Then, a hole which is used as a through hole is bored in the board. Then, a resist for electroless plating use is formed on a part other than the hole and a part to be used as a circuit part of the board. Then, the board is dipped in a chemically roughening liquid, which consists of a chromic acid compound, a sulfuric acid and sodium fluoride or a chromic acid and a borofluoric acid, and the surfaces of the parts, on which the resist is not formed, are selectively roughened. Then, copper plating is applied to the hole and the circuit part.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、高密度のアディティブ
法印刷配線板の製造法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a high density additive printed wiring board.

【0002】[0002]

【従来の技術】配線板として、経済的に優れた瀬製造法
として無電解めっきを析出させるためにパラジウム等の
無電解めっき用触媒を含有する接着剤層を表面に形成し
その中にも同様の無電解めっき用触媒を含有する絶縁板
に回路部となるベき箇所以外の部分に無電解めっき用レ
ジストを設け、クロム酸等の化学粗化液に浸漬してレジ
ストが形成されていない箇所の表面を選択的に粗化し、
無電解めっき液に浸漬して回路パタ一ンを形成するいわ
ゆるアディテイブ法がある。
2. Description of the Related Art As a wiring board, an adhesive layer containing a catalyst for electroless plating such as palladium is formed on the surface in order to deposit electroless plating as an economical method for producing electroless plating. Where the electroless plating resist is provided on the insulating plate containing the catalyst for electroless plating other than the place to be the circuit part, and the resist is not formed by dipping it in a chemical roughening solution such as chromic acid Selectively roughens the surface of
There is a so-called additive method of forming a circuit pattern by immersing it in an electroless plating solution.

【0003】[0003]

【発明が解決しようとする課題】現在、工業的に行われ
ている製造法では、化学粗化液への浸漬工程に於いて、
無電解めっき用触媒のパラジウムが粗化液に溶解・脱落
したり、パラジウムの触媒活性が劣化するため、スル−
ホ一ル内壁のぬっき銅が析出し始める時間(テイイクイ
ム)は、約2時間を要している。配線板としてはpH約
12のアルカリめっき浴中に長時間浸漬されることは、
銅ふりの現象を多発させ、また耐熱性及び絶縁部分の絶
縁性を低下させる。本発明は、このようなめっき析出速
度の低下の抑制に優れた無電解めっき方法を提供するも
のである。
At present, in the manufacturing method which is industrially performed, in the immersion step in the chemical roughening solution,
As the electroless plating catalyst palladium dissolves in the roughening solution and falls off, and the catalytic activity of palladium deteriorates,
It takes about 2 hours to start the deposition of the wet copper on the inner wall of the hall (Teiquim). As a wiring board, if it is immersed in an alkaline plating bath having a pH of about 12 for a long time,
The phenomenon of copper pretend is frequently generated, and the heat resistance and the insulating property of the insulating portion are deteriorated. The present invention provides an electroless plating method which is excellent in suppressing such a decrease in plating deposition rate.

【0004】[0004]

【問題点を解決するための手段】本発明の無電解めっき
触媒は、フッ素系化合物に溶解可能なガラス粒子にパラ
ジウム、金、白金あるいは銀など、1種以上の金属を総
和で0.05〜1%含有させたこと、及び化学粗化液と
して、クロム酸化合物と硫酸とフッ化ナトリウム系ある
いはクロム酸化合物とホウフッ酸よりなるものを使用し
たこと、並びに上記示した化学粗化酸によりガラス粒子
が溶解して、パラジウム、金、白金あるいは銀などの触
媒金属が表面に露出することを特徴とした、以下に示す
工程よりなる配線板の製造工程である。
The electroless plating catalyst of the present invention comprises a glass particle soluble in a fluorine compound and one or more metals such as palladium, gold, platinum or silver in a total amount of 0.05 to 0.05. 1%, and as the chemical roughening liquid, one containing a chromic acid compound, sulfuric acid, and a sodium fluoride system or a chromic acid compound and borofluoric acid was used, and glass particles were produced by the above chemical roughening acid. Is dissolved and a catalytic metal such as palladium, gold, platinum or silver is exposed on the surface, which is a process for producing a wiring board comprising the following steps.

【0005】a.触媒入り絶縁樹脂積層板の製造工程。 本発明に用いる無電解めっき触媒は、フッ素系化合物に
溶解可能な微粉砕ガラス粒子を、パラジウム、金、白金
あるいは銀などの塩化物、硫酸化合物、フッ化物もしく
は硝酸化合物等の粉体を混練りしたのち、上記混合液を
電気炉中において、1000℃で1時間加熱し、塩素イ
オン、硫酸イオン、フッ素イオンあるいは硝酸イオンを
昇華させる。生成したガラス粒子を室温で冷却、粉砕
し、再び1000℃の電気炉中で1時間ガラス粒子を溶
解させた後、冷却、粉砕して無電解用めっき触媒とし
た。ガラス粒子の直径は、20μm以下が好ましく、2
0μmより大きくなると樹脂溶液ヘの分散性が低下す
る。ここで、パラジウムの含有量を0.05〜1%とし
たが、0.05%以下にすると触媒の活性点が少なくな
り、めっき析出性が低下する。また、1%以上にした場
合においても、分散性が低下し、良好なめっき析出性は
見られないため、パラジウムの含有愚量は、0.05〜
1%が好ましい。
A. Manufacturing process of insulating resin laminated board with catalyst. The electroless plating catalyst used in the present invention is obtained by kneading finely pulverized glass particles that can be dissolved in a fluorine-based compound with powder of chloride such as palladium, gold, platinum or silver, sulfuric acid compound, fluoride or nitric acid compound. After that, the mixed solution is heated in an electric furnace at 1000 ° C. for 1 hour to sublimate chlorine ions, sulfate ions, fluorine ions or nitrate ions. The generated glass particles were cooled and crushed at room temperature, and the glass particles were melted again in an electric furnace at 1000 ° C. for 1 hour, then cooled and crushed to obtain an electroless plating catalyst. The diameter of the glass particles is preferably 20 μm or less, 2
If it is larger than 0 μm, the dispersibility in the resin solution decreases. Here, the content of palladium is set to 0.05 to 1%, but if it is 0.05% or less, the active sites of the catalyst are reduced and the plating depositability is lowered. Further, even when the content is 1% or more, the dispersibility decreases and good plating depositability is not observed. Therefore, the palladium content is 0.05 to
1% is preferable.

【0006】b.触媒入り絶縁樹脂積層板の製造工程。 ガラス布もしくはアラミド、テトロン、ナイロンなどの
有機繊維によりなる布もしくは紙、ガラス紙、セラミッ
ク紙に前記無電解用めっき触媒を混入したエポキシ樹
脂、ポリエステル樹脂、ポリアミド樹脂、フェノ−ル樹
脂、ポリアミドイミド樹脂、ポリテトラフルオロエチレ
ン樹脂、ポリエチレン樹脂等を塗布したことを特徴とす
るプリプレグ及び上記プリプレグを用いて、加圧加熱一
体化した積層板を作製する。
B. Manufacturing process of insulating resin laminated board with catalyst. Glass cloth or cloth or paper made of organic fibers such as aramid, tetron, nylon, glass paper, ceramic paper mixed with the above electroless plating catalyst epoxy resin, polyester resin, polyamide resin, phenol resin, polyamideimide resin A prepreg characterized by being coated with a polytetrafluoroethylene resin, a polyethylene resin, or the like, and a laminated plate integrated with pressure and heating are produced using the prepreg.

【0007】c.触媒入り絶縁樹脂積層板に、触媒入り
接着剤を塗布する工程。 上記のめっき触媒入り接着剤を上記めっき触媒入り絶縁
樹脂積層板の両面に、乾燥後の接着剤膜厚が約25μm
となるように浸漬塗布する製造工程である。接着剤とし
ては、メタクリル酸グリシジルを有するアクリロニトリ
ルブタジエンゴムのような合成ゴムと、アルキルフェノ
−ル樹脂とエポキシ樹脂とを同時に架橋する3フッ化ホ
ウ素アミン錯体化合物等の架橋剤と、充填材として珪酸
ジルコニウム、シリカ、炭酸カルシウム、水酸化アルミ
ニウム等を成分とし、また、光開始剤を投入して光硬化
させてもよい。
C. A step of applying a catalyst-containing adhesive to a catalyst-containing insulating resin laminated plate. The plating catalyst-containing adhesive described above is applied to both sides of the plating catalyst-containing insulating resin laminated plate so that the adhesive film thickness after drying is about 25 μm.
This is a manufacturing process in which dip coating is performed so that As the adhesive, a synthetic rubber such as acrylonitrile butadiene rubber having glycidyl methacrylate, a cross-linking agent such as a boron trifluoride amine complex compound that simultaneously cross-links an alkylphenol resin and an epoxy resin, and silicic acid as a filler. Zirconium, silica, calcium carbonate, aluminum hydroxide or the like may be used as a component, and a photoinitiator may be added for photocuring.

【0008】d.スル一ホ一ルとなる穴をあける。 スル−ホ−ルとなる穴は、パンチ、ドリル等一般的に配
線板の穴あけに用いられる装置であれば、どのようなも
のでも用いることができる。e.スル一ホ−ルと回路部
となるベき部分以外の部分に、無電解めっき用レジスト
を形成する。めっきレジストとしては、光硬化による樹
脂をフィルム状にした紫外線硬化型レジストフィルムや
紫外線硬化型レジストインク、熱硬化型レジストインク
等をスクリ−ン印刷によって塗布できるもの等があげら
れ、無電解ニッケルめっき液、銅めっき液及び、その前
処理、後処理等の工程中に用いる化学液とその使用条件
において、剥離等の発生しないものでなければならな
い。
D. Make a hole that will be a whole hole. As the holes serving as through holes, any device such as a punch or a drill, which is generally used for boring a wiring board, can be used. e. A resist for electroless plating is formed on a portion other than the through-hole and the circuit portion which is to be the circuit portion. Examples of the plating resist include a UV-curable resist film formed by photo-curing a resin into a film, a UV-curable resist ink, and a thermosetting resist ink that can be applied by screen printing. Electroless nickel plating Solution, copper plating solution, chemical solution used in the process of pretreatment, posttreatment, etc. and its usage conditions must not cause peeling.

【0009】f.化学粗化液に浸漬し、レジストが形成
されていない部分の表面を選択的に粗化する。 化学粗化液としては、クロム酸化合物と硫酸とフッ化ナ
トリウムよりなる水溶液あるいは、クロム酸化合物とホ
ウフッ酸よりなる水溶液を使用することが好ましい。た
とえば、アルカリ性過マンガン酸塩の水溶液で粗化した
場合、めっき析出開始時間が極めて遅くなる。
F. The surface of the part where the resist is not formed is selectively roughened by immersing it in a chemical roughening liquid. As the chemical roughening liquid, it is preferable to use an aqueous solution containing a chromic acid compound, sulfuric acid and sodium fluoride, or an aqueous solution containing a chromic acid compound and borofluoric acid. For example, when roughening with an aqueous solution of alkaline permanganate, the plating deposition start time becomes extremely slow.

【0010】g.無電解銅めっき液に浸漬し、回路部に
銅めっきを施す。 無電解銅めっき液としては、特に限定するものではな
く、CC−41めっき液(日立化成工業株式会社製、商
品名)等、通常の無電解銅めっき液が使用できる。 なお、スル一ホ一ル内壁のテイクタイムを短縮するため
に、無電解銅めっき液に浸漬する前に、ホルマリン/水
酸化ナトリウム、ジメチルアミンボラン/水酸化ナトリ
ウムなどの還元性水溶液に浸漬してもよい。
G. Dip in an electroless copper plating solution to apply copper plating to the circuit section. The electroless copper plating solution is not particularly limited, and a normal electroless copper plating solution such as CC-41 plating solution (trade name, manufactured by Hitachi Chemical Co., Ltd.) can be used. In order to reduce the take time of the inner wall of the through hole, dip it in a reducing aqueous solution such as formalin / sodium hydroxide or dimethylamine borane / sodium hydroxide before dipping in the electroless copper plating solution. Good.

【0011】[0011]

【実施例】実施例1 無電解めっき触媒としては、まず、フッ素化合物に溶解
可能なA−ガラス(東芝バロティ−ニ製、商品名) 1
0g、塩化パラジウム0.04gを混練りし、粉砕し
た。その後、上記混合物を電気炉中において1000℃
で1時間加熱して塩酸イオンを昇華させた後、パラジウ
ム含有ガラスを室温で冷却、粉砕し、再び1000℃の
電気炉中で1時間、ガラス粒子を溶融させる。その後、
室温で冷却、粉砕して無電解用めっき触媒とした。
EXAMPLES Example 1 As an electroless plating catalyst, first, A-glass (trade name, manufactured by Toshiba Ballotini) which can be dissolved in a fluorine compound was used.
0 g and 0.04 g of palladium chloride were kneaded and ground. Then, the mixture is heated to 1000 ° C. in an electric furnace.
After heating for 1 hour to sublimate the hydrochloric acid ions, the palladium-containing glass is cooled and crushed at room temperature, and the glass particles are melted again in an electric furnace at 1000 ° C. for 1 hour. afterwards,
It was cooled at room temperature and pulverized to obtain an electroless plating catalyst.

【0012】上記めっき触媒を含有するガラス布エポキ
シ樹脂積層板に、これと同質の無電解めっき触媒を含有
する接着剤でアクリロニトリルブタジエンゴムを主成分
とし、アルキルフェノ一ル樹脂、エポキシ樹脂、無機充
填材としてシリカ、珪酸ジルコニウムを溶媒中で配合し
た接着剤を塗布、乾燥し、加熱硬化した接着剤によっ
て、表面を覆った絶縁基板を作製した。次いで、高速ド
リルマシンにより穴あけし、感光牲レジストフィルムを
貼り、選択的に露光、現像してめっきレジストを形成し
た。
[0012] A glass cloth epoxy resin laminated plate containing the above-mentioned plating catalyst, an acrylonitrile butadiene rubber as a main component with an adhesive containing the same electroless plating catalyst as the main component, an alkylphenol resin, an epoxy resin, an inorganic filling An insulating substrate whose surface was covered with an adhesive prepared by coating silica, zirconium silicate in a solvent as a material, drying, and heat curing was prepared. Then, holes were formed by a high speed drill machine, a photosensitive resist film was attached, and the resist was selectively exposed and developed to form a plating resist.

【0013】このレジスト形成後の基板をフッ化ナトリ
ウム系粗化液(CrO3 25g、濃硫酸200ml、フ
ッ化ナトリウム30gを水で希釈し、全体を1lとした
液)に40℃、15分感浸漬し、回路部接着剤面を選択
的に化学粗化し、水洗、中和した。この基板を無電解め
っき液としてCC−41めっき液(日立化成工業株式会
社、商品名)に70℃で浸漬して20μmの銅めっきを
析出させた後、スル一ホ−ル以外の基板表面にソルダレ
ジストをスクリ−ン印刷法により印刷塗布して加熱硬化
し、試験用印刷配線板とした。
The substrate after this resist formation was exposed to a sodium fluoride-based roughening liquid (25 g of CrO 3 , 200 ml of concentrated sulfuric acid, 30 g of sodium fluoride diluted with water to make 1 l in total) at 40 ° C. for 15 minutes. The surface of the adhesive of the circuit portion was selectively roughened by immersion, washed with water and neutralized. This substrate was immersed in a CC-41 plating solution (Hitachi Chemical Co., Ltd., trade name) as an electroless plating solution at 70 ° C. to deposit a copper plating of 20 μm, and then on a substrate surface other than the through hole. A solder resist was printed and applied by a screen printing method and heat-cured to obtain a test printed wiring board.

【0014】実施例2 無電解めっき触媒としては、まず、フッ素系化合物に溶
融可能なE−ガラス(東芝バロティ−ニ製、商品名)1
0gと塩化白金を混練りし、粉砕した。その後の工程は
実施例1と同様に行い、無電解めっき用触媒を作製し
た。このようにして得られためっき触媒を用いて、実施
例1と同様の方法により試験用印刷配線板を作製した。
Example 2 As the electroless plating catalyst, first, E-glass (trade name, manufactured by Toshiba Ballotini) which can be melted in a fluorine compound is used.
0 g and platinum chloride were kneaded and ground. Subsequent steps were performed in the same manner as in Example 1 to prepare a catalyst for electroless plating. Using the plating catalyst thus obtained, a test printed wiring board was prepared in the same manner as in Example 1.

【0015】[0015]

【表1】 [Table 1]

【0016】[0016]

【発明の効果】以上説明したように、本発明の効果とし
て、無電解銅めっきの前処理工程である化学粗化によ
り、ガラスが溶解して、無電解銅めっきの活性点である
金属触媒が表面に露出することを特徴とする。これらの
ことから、スル一ホ−ル内壁の銅めっき析出性を向上す
ることができたと推測する。
As described above, as an effect of the present invention, the glass is melted by the chemical roughening which is the pretreatment step of the electroless copper plating, and the metal catalyst which is the active point of the electroless copper plating is It is characterized by being exposed on the surface. From these facts, it is presumed that the depositability of copper plating on the inner wall of the through hole could be improved.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 深井 弘之 茨城県下館市大字小川1500番地 日立化成 工業株式会社下館工場内 (72)発明者 野中 繁 栃木県芳賀郡二宮町久下田4133番地 日立 エーアイシー株式会社二宮工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Hiroyuki Fukai, 1500 Ogawa, Shimodate, Ibaraki Prefecture Shimodate, Hitachi Chemical Co., Ltd. Shimodate factory (72) Inventor Shigeru Nonaka 4133, Hisashida, Ninomiya Town, Haga-gun, Tochigi Prefecture Company Ninomiya factory

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 以下に示す工程よりなる配線板の製造
法。 a.フッ素系化合物で溶解可能なガラス粒子にパラジウ
ム、金、白金あるいは銀など1種類以上の金属を総和で
0.05〜1%含有させた無電解めっき用触媒を含む絶
縁基板表面に、上記した無電解めっき用触媒を含む接着
剤層を形成する。 b.スールホ一ルとなる穴をあける。 c.スル−ホ一ルと回路部となるベき以外の部分に、無
電解めっき用レジストを形成する。 c.クロム酸化合物と硫酸とフッ化ナトリウムよりなる
化学粗化液、あるいはクロム酸化合物とホウフッ酸より
なる化学粗化液に浸漬してレジストが形成されていない
部分の表面を選択的に粗化する。 e.無電解銅めっき液に浸漬し、スル−ホ−ルと回路部
に銅めっきを施す。
1. A method for manufacturing a wiring board, which comprises the following steps. a. On the surface of an insulating substrate containing an electroless plating catalyst in which one or more metals such as palladium, gold, platinum or silver are contained in a total amount of 0.05 to 1% in glass particles which can be dissolved by a fluorine compound, An adhesive layer containing a catalyst for electrolytic plating is formed. b. Drill a hole that will serve as a sur-wheel. c. A resist for electroless plating is formed on the portion other than the through hole and the circuit board. c. The surface of the portion where the resist is not formed is selectively roughened by immersion in a chemical roughening solution containing a chromic acid compound, sulfuric acid and sodium fluoride or a chemical roughening solution containing a chromic acid compound and borofluoric acid. e. It is dipped in an electroless copper plating solution and copper plating is applied to the through hole and the circuit part.
JP32302491A 1991-12-06 1991-12-06 Method of manufacturing wiring board Pending JPH05160567A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32302491A JPH05160567A (en) 1991-12-06 1991-12-06 Method of manufacturing wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32302491A JPH05160567A (en) 1991-12-06 1991-12-06 Method of manufacturing wiring board

Publications (1)

Publication Number Publication Date
JPH05160567A true JPH05160567A (en) 1993-06-25

Family

ID=18150273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32302491A Pending JPH05160567A (en) 1991-12-06 1991-12-06 Method of manufacturing wiring board

Country Status (1)

Country Link
JP (1) JPH05160567A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004108332A1 (en) * 2003-06-06 2004-12-16 Sumitomo Electric Industries, Ltd. Drilled porous resin base material, and method of manufacturing porous resin base material with conductive drilled inner wall surface
CN100398238C (en) * 2003-06-06 2008-07-02 住友电气工业株式会社 Drilled porous resin base material, and method of manufacturing porous resin base material with conductive drilled inner wall surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004108332A1 (en) * 2003-06-06 2004-12-16 Sumitomo Electric Industries, Ltd. Drilled porous resin base material, and method of manufacturing porous resin base material with conductive drilled inner wall surface
CN100398238C (en) * 2003-06-06 2008-07-02 住友电气工业株式会社 Drilled porous resin base material, and method of manufacturing porous resin base material with conductive drilled inner wall surface
US8147911B2 (en) 2003-06-06 2012-04-03 Sumitomo Electric Industries, Ltd. Perforated porous resin base material and production process of porous resin base with inner wall surfaces of perforations made conductive.

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