JPH0515933B2 - - Google Patents
Info
- Publication number
- JPH0515933B2 JPH0515933B2 JP57008852A JP885282A JPH0515933B2 JP H0515933 B2 JPH0515933 B2 JP H0515933B2 JP 57008852 A JP57008852 A JP 57008852A JP 885282 A JP885282 A JP 885282A JP H0515933 B2 JPH0515933 B2 JP H0515933B2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- work
- passage
- air
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 description 22
- 238000004378 air conditioning Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 11
- 230000003749 cleanliness Effects 0.000 description 10
- 238000012423 maintenance Methods 0.000 description 8
- 238000009423 ventilation Methods 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 238000011045 prefiltration Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 238000004887 air purification Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009435 building construction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57008852A JPS58127034A (ja) | 1982-01-25 | 1982-01-25 | 清浄作業室 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57008852A JPS58127034A (ja) | 1982-01-25 | 1982-01-25 | 清浄作業室 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5326809A Division JP2580990B2 (ja) | 1993-12-24 | 1993-12-24 | 清浄作業室 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58127034A JPS58127034A (ja) | 1983-07-28 |
JPH0515933B2 true JPH0515933B2 (US06826419-20041130-M00005.png) | 1993-03-03 |
Family
ID=11704261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57008852A Granted JPS58127034A (ja) | 1982-01-25 | 1982-01-25 | 清浄作業室 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58127034A (US06826419-20041130-M00005.png) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2846100B2 (ja) * | 1990-10-24 | 1999-01-13 | 株式会社日立製作所 | 空気清浄システム |
DE4219125C2 (de) * | 1992-06-11 | 1996-01-11 | Meissner & Wurst | Vorrichtung zur Erzeugung von Reinraumbereichen |
JP6481283B2 (ja) * | 2014-08-19 | 2019-03-13 | 株式会社大林組 | 手術室 |
CN105546709B (zh) * | 2016-02-04 | 2019-01-04 | 山东格瑞德集团有限公司 | 孔板送风布风系统 |
-
1982
- 1982-01-25 JP JP57008852A patent/JPS58127034A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58127034A (ja) | 1983-07-28 |
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