JPH05157724A - Carbon dioxide gas sensor - Google Patents

Carbon dioxide gas sensor

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Publication number
JPH05157724A
JPH05157724A JP3318940A JP31894091A JPH05157724A JP H05157724 A JPH05157724 A JP H05157724A JP 3318940 A JP3318940 A JP 3318940A JP 31894091 A JP31894091 A JP 31894091A JP H05157724 A JPH05157724 A JP H05157724A
Authority
JP
Japan
Prior art keywords
gas
electrode layer
carbon dioxide
catalyst
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3318940A
Other languages
Japanese (ja)
Inventor
Yuichiro Ito
雄一郎 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Ecology Systems Co Ltd
Original Assignee
Matsushita Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Seiko Co Ltd filed Critical Matsushita Seiko Co Ltd
Priority to JP3318940A priority Critical patent/JPH05157724A/en
Publication of JPH05157724A publication Critical patent/JPH05157724A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To enable interference gas dependency of output and durability of a solid electrolyte type carbon dioxide gas sensor to be improved. CONSTITUTION:An interference gas dependency is improved according to the catalyst operation by adding a catalyst substance 1 to a detection pole layer 103. Also, by coating the detection pole layer 103 with a gas-transmission film where the catalyst substance 1 is added, the detection pole layer 103 and a measurement atmosphere are shielded by catalyst operation and influence of interference gas is eliminated for preventing interference gas dependency of output, thus preventing deterioration due to corrosion gas, etc., of the detection pole layer 103. Therefore, a stable output can be obtained over a long period of time, thus obtaining a highly reliable carbon dioxide gas sensor.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、施設園芸、環境衛生、
防災用、工業用などの炭酸ガス濃度を計測し制御する場
所に使用する固体電解質型の炭酸ガスセンサに関するも
のである。
The present invention relates to facility horticulture, environmental hygiene,
The present invention relates to a solid electrolyte type carbon dioxide gas sensor used in a place for measuring and controlling carbon dioxide concentration for disaster prevention, industrial use and the like.

【0002】[0002]

【従来の技術】近年、空調、農畜産分野を中心に炭酸ガ
スセンサに対するニーズが高まり、種々の方式のセンサ
の開発、実用化が進められている。しかし、実用上、そ
の信頼性に多くの課題が残されている。
2. Description of the Related Art In recent years, there has been a growing need for carbon dioxide sensors mainly in the fields of air conditioning and agriculture and livestock, and various types of sensors have been developed and put into practical use. However, in practice, many problems remain in its reliability.

【0003】以下、従来の炭酸ガスセンサの例について
図5を参照しながら説明する。図に示すように、固体電
解質である薄板状のNAXS(ナトリウムイオン伝導
体)板101は、その両端に1対の電極層102である
検知極層103、基準極層104を備え、検知極層10
3は、Auを用いた電極層内に1種類もしくは2種類以
上を混合した金属炭酸塩105(例えば、炭酸ナトリウ
ムや炭酸ナトリウムと炭酸バリウムの混合物)が分散し
て添加、形成されており、基準極層104はAuを用い
た電極層で形成され、ガス感知部106を構成してい
た。ガス感知部106の片面下部に加熱部107が接着
剤108によって固定され、ガス感知部106を測定温
度に加熱している。また、センサ出力は検知極層10
3、基準極層104それぞれから取り出したリード線1
09a、109bを介して取り出している。
An example of a conventional carbon dioxide gas sensor will be described below with reference to FIG. As shown in the figure, a thin plate-shaped NAXS (sodium ion conductor) plate 101, which is a solid electrolyte, is provided with a pair of electrode layers 102, a detection electrode layer 103 and a reference electrode layer 104, at both ends thereof. 10
3 is formed by dispersing and adding a metal carbonate 105 (for example, sodium carbonate or a mixture of sodium carbonate and barium carbonate) in the electrode layer using Au in a mixture of one kind or two kinds or more. The electrode layer 104 was formed of an electrode layer using Au and constituted the gas sensing unit 106. A heating unit 107 is fixed to the lower part of one surface of the gas sensing unit 106 with an adhesive 108 to heat the gas sensing unit 106 to a measurement temperature. The sensor output is the detection electrode layer 10
3. Lead wire 1 taken out from each of the reference electrode layers 104
It is taken out through 09a and 109b.

【0004】上記構成において、ガス感知部106は以
下の電池を構成する。すなわち
In the above structure, the gas sensing section 106 constitutes the following battery. Ie

【0005】[0005]

【化1】 [Chemical 1]

【0006】このような電池を構成するガス感知部10
6を加熱部107により測定温度に加熱すると、検知極
層103および基準極層104において以下のような電
池反応が起き
[0006] The gas sensing unit 10 which constitutes such a battery
When 6 is heated to the measurement temperature by the heating unit 107, the following battery reaction occurs in the detection electrode layer 103 and the reference electrode layer 104.

【0007】[0007]

【化2】 [Chemical 2]

【0008】両電極間には次式で表される起電力が発生
する。
An electromotive force represented by the following equation is generated between both electrodes.

【0009】[0009]

【数1】 [Equation 1]

【0010】ここで、E0は定数、Rは気体定数、Tは
絶対温度、Fはファラデー定数、αNa2O、αNa2CO3はそ
れぞれNa2OおよびNa2CO3の活量、PCO2は空気中のCO2
圧を示す。αNa2CO3は、通常の安定な状態では1と置く
ことができ、αNa2OはNAXSの組成によって決定する
ため定数とみなすことができる。よって、センサの動作
温度であるTが一定ならば起電力E(出力)はPCO2
みの関数となる。よって、検知極層103、基準極層1
04よりリード線109a、109bを介してこの起電
力E(出力)を取り出すことによりCO2濃度を求めるこ
とができる。
Here, E 0 is a constant, R is a gas constant, T is an absolute temperature, F is a Faraday constant, αNa 2 O and αNa 2 CO 3 are the activities of Na 2 O and Na 2 CO 3 , respectively, and PCO 2 Indicates the partial pressure of CO 2 in the air. α Na 2 CO 3 can be set to 1 in a normal stable state, and α Na 2 O can be regarded as a constant because it is determined by the composition of NAXS. Therefore, if T, which is the operating temperature of the sensor, is constant, the electromotive force E (output) is a function of PCO 2 . Therefore, the detection electrode layer 103 and the reference electrode layer 1
The CO 2 concentration can be obtained by taking out this electromotive force E (output) from No. 04 via the lead wires 109a and 109b.

【0011】[0011]

【発明が解決しようとする課題】しかしながら、上記の
ような構成では以下のような問題を有していた。すなわ
ち、測定雰囲気中の炭酸ガス以外のガス(以下干渉ガス
と称する)が存在すると検知極層103の(化2)に示
す電極反応に干渉ガスが関与していた。そのため、測定
雰囲気中の干渉ガス濃度が変化するとその変化に応じて
起電力すなわちセンサ出力が変化するという出力の干渉
ガス依存性があり、正確な炭酸ガス濃度を測定できなか
った。
However, the above-mentioned structure has the following problems. That is, when a gas other than carbon dioxide gas (hereinafter referred to as an interference gas) in the measurement atmosphere was present, the interference gas was involved in the electrode reaction shown in Chemical formula 2 of the detection electrode layer 103. Therefore, when the interference gas concentration in the measurement atmosphere changes, the electromotive force, that is, the sensor output changes in accordance with the change, which has an output dependency on the interference gas, and the carbon dioxide concentration cannot be accurately measured.

【0012】また、雰囲気中に硫化水素等の腐食性ガス
が存在すると検知極層103が汚染され劣化の原因とな
っていた。
Further, if a corrosive gas such as hydrogen sulfide is present in the atmosphere, the detection electrode layer 103 is contaminated and causes deterioration.

【0013】本発明は、上記課題を解決するもので、出
力の干渉ガス依存性を低減しさらに検知極層103の劣
化を防止し高い信頼性を有する炭酸ガスセンサを提供す
ることを目的とする。
An object of the present invention is to solve the above-mentioned problems, and an object thereof is to provide a carbon dioxide gas sensor having a high reliability by reducing the dependency of the output on the interference gas and preventing the deterioration of the detection electrode layer 103.

【0014】[0014]

【課題を解決するための手段】本発明の目的を達成する
ための第1の手段は、固体電解質からなるイオン伝導性
セラミックス板の両端に1対の電極層を設け、前記1対
の電極層のいずれか一方の電極層に、炭酸ガスと解離平
衡を形成する1種類もしくは2種類以上の金属炭酸塩の
混合物を添加して検知極層を形成し、前記検知極層に触
媒物質を添加して構成されるガス感知部と、前記ガス感
知部を測定温度に加熱する加熱部とで構成したものであ
る。
The first means for achieving the object of the present invention is to provide a pair of electrode layers on both ends of an ion conductive ceramics plate made of a solid electrolyte, and to provide the pair of electrode layers. To one of the electrode layers, a sensing electrode layer is formed by adding a mixture of one kind or two or more kinds of metal carbonates that form dissociation equilibrium with carbon dioxide gas, and a catalyst substance is added to the detecting electrode layer. And a heating unit for heating the gas sensing unit to a measurement temperature.

【0015】また、第2の手段は、固体電解質からなる
イオン伝導性セラミックス板の両端に1対の電極層を設
け、前記1対の電極層のいずれか一方の電極層に、炭酸
ガスと解離平衡を形成する1種類もしくは2種類以上の
金属炭酸塩の混合物を添加して検知層を形成し、前記検
知極層もしくは、前記検知極層を含む前記イオン伝導性
セラミックス板の表面の一部あるいは全部を触媒物質を
添加したガス透過性膜で被覆して構成したものである。
The second means is to provide a pair of electrode layers on both ends of an ion conductive ceramic plate made of a solid electrolyte, and dissociate carbon dioxide gas from carbon dioxide gas in any one electrode layer of the pair of electrode layers. A sensing layer is formed by adding a mixture of one or more kinds of metal carbonates that form an equilibrium, and the sensing electrode layer or a part of the surface of the ion conductive ceramics plate including the sensing electrode layer or The whole is covered with a gas permeable membrane to which a catalyst substance is added.

【0016】[0016]

【作用】本発明は上記した第1の手段の構成により、検
知極層に触媒物質を添加することにより、その触媒作用
により(化2)に示す電極反応時に検知極層内の触媒物
質が干渉ガスを分解することにより、検知極層に対する
雰囲気中の干渉ガスの影響を小さくし、出力の干渉ガス
依存性を低減することができるものである。
According to the present invention, by adding the catalyst substance to the detection electrode layer by the constitution of the above-mentioned first means, the catalyst substance in the detection electrode layer interferes during the electrode reaction shown in (Chemical Formula 2) due to the catalyst action. By decomposing the gas, the influence of the interference gas in the atmosphere on the detection electrode layer can be reduced, and the dependency of the output on the interference gas can be reduced.

【0017】また、第2の手段の構成により、検知極層
に触媒物質を添加したガス透過性膜で被覆することによ
り、干渉ガスがガス透過性膜を通過する時に触媒物質に
より分解されるため、検知極層を測定雰囲気中の干渉ガ
スから遮断し、雰囲気中の干渉ガスの影響による干渉ガ
ス依存性、また、腐食性ガスによる検知極層の劣化を防
止する事ができ、長期に渡り安定した出力が得られるも
のである。
Further, according to the structure of the second means, by covering the sensing electrode layer with the gas permeable film to which the catalytic substance is added, the interfering gas is decomposed by the catalytic substance when passing through the gas permeable film. By blocking the sensing electrode layer from the interfering gas in the measurement atmosphere, it is possible to prevent the dependency of the sensing electrode layer due to the influence of the interfering gas in the atmosphere and the deterioration of the sensing electrode layer due to corrosive gas, and it is stable for a long time The output is obtained.

【0018】[0018]

【実施例】以下、本発明の第1実施例について、図1お
よび図2を参照しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIGS.

【0019】なお、従来例と同一の部分には同一番号を
つけて説明は省略する。図1に示すように、ナトリウム
イオン伝導性セラミックスであるNAXS板101の両
端に1対の電極層102である基準極層104と検知極
層103が形成されている。検知極層103は電極材料
であるAuペーストに炭酸ナトリウムと炭酸バリウムの混
合物、即ち金属炭酸塩105を添加し、炭化水素異性化
触媒あるいは脱水性の触媒(例えば、Al2O3 )の粉末、
即ち触媒物質1を5〜30重量%添加し、混合してペー
スト状にしたものをスクリーン印刷もしくは塗布し、乾
燥後焼成したものである。
The same parts as those of the conventional example are designated by the same reference numerals and the description thereof will be omitted. As shown in FIG. 1, a pair of electrode layers 102, a reference electrode layer 104 and a detection electrode layer 103, are formed on both ends of a NAXS plate 101 made of sodium ion conductive ceramics. For the detection electrode layer 103, a mixture of sodium carbonate and barium carbonate, that is, a metal carbonate 105 is added to an Au paste which is an electrode material, and a hydrocarbon isomerization catalyst or a dehydrating catalyst (for example, Al 2 O 3 ) powder,
That is, 5 to 30% by weight of the catalyst substance 1 was added and mixed to form a paste, which was screen-printed or applied, dried and then baked.

【0020】以上のように構成された炭酸ガスセンサに
ついて以下その動作について説明する。上記構成におい
て、検知極層103に添加した触媒物質1の触媒作用に
より従来例で示した(化2)に及ぼす雰囲気中の干渉ガ
スの影響が緩和される。その結果、出力の雰囲気干渉ガ
ス依存性が低減する。
The operation of the carbon dioxide sensor having the above structure will be described below. In the above configuration, the effect of the interference gas in the atmosphere exerted on (Formula 2) shown in the conventional example is mitigated by the catalytic action of the catalytic substance 1 added to the detection electrode layer 103. As a result, the dependency of the output on the ambient interference gas is reduced.

【0021】このように本発明の第1の実施例の炭酸ガ
スセンサによれば、検知極層103への干渉ガスの影響
を低減することができ、出力の干渉ガス依存性を小さく
することができる。
As described above, according to the carbon dioxide gas sensor of the first embodiment of the present invention, the influence of the interference gas on the detection electrode layer 103 can be reduced and the dependence of the output on the interference gas can be reduced. ..

【0022】なお、本実施例では触媒物質1をAl2O3
したがB2O3ーAl2O3、H2B2O4、SiO2、SiO2ーAl2O3、SiO2-M
gO、CaO、MgO、Cu、Cu-Ni合金、Ag、ZnO、Gd2O3、Pr
2O3、Y2O 3、Nd2O3、Dy2O3、Sm2O3、ZnZrO3、V2O3、Cr2O
3(CrO3)、Mo、W、MoO3、WO3、UO2Re(-Pt)Fe2O3、Co 等
の炭化水素異性化触媒あるいは脱水性の触媒で(化2)
に示す検知極層103での反応を阻害しない物質であれ
ばどの様な物質でもよい。
In this embodiment, the catalyst substance 1 is Al2O3When
But B2O3ー Al2O3, H2B2OFour, SiO2, SiO2ー Al2O3, SiO2-M
gO, CaO, MgO, Cu, Cu-Ni alloy, Ag, ZnO, Gd2O3, Pr
2O3, Y2O 3, Nd2O3, Dy2O3, Sm2O3, ZnZrO3, V2O3, Cr2O
3(CrO3), Mo, W, MoO3, WO3, UO2Re (-Pt) Fe2O3, Co etc
Of hydrocarbon isomerization catalyst or dehydration catalyst (Chemical formula 2)
Any substance that does not interfere with the reaction in the sensing electrode layer 103 shown in
Any substance may be used.

【0023】次に、本発明第2実施例について、図3を
参照しながら説明する。なお、従来例と同一の部分には
同一番号をつけて説明は省略する。
Next, a second embodiment of the present invention will be described with reference to FIG. The same parts as those of the conventional example are designated by the same reference numerals and the description thereof will be omitted.

【0024】図に示すように、検知極層103およびN
AXS板101の一部を覆う形で、炭化水素異性化触媒
あるいは脱水性の触媒(例えば、Al2O3 )の粉末、即ち
触媒物質1の添加されているガス透過性膜2が被覆され
ている。ガス透過性膜2はペースト状の非晶質ガラスシ
ール材を塗布後、乾燥・焼成して形成された非晶質ガラ
ス膜である。
As shown, the sensing electrode layers 103 and N
A part of the AXS plate 101 is covered with a powder of a hydrocarbon isomerization catalyst or a dehydrating catalyst (for example, Al 2 O 3 ), that is, a gas permeable membrane 2 to which a catalyst substance 1 is added. There is. The gas-permeable film 2 is an amorphous glass film formed by applying a paste-like amorphous glass sealing material, and then drying and firing it.

【0025】上記構成において、検知極層103は、雰
囲気中の干渉ガスがガス透過性膜2を通過する時に触媒
物質1により分解されるため、雰囲気中の干渉ガスから
完全に遮断されている。そのため、検知極層103は測
定雰囲気の干渉ガスの影響を受けず、出力の雰囲気干渉
ガス依存性は防止でき、同時に腐食性ガス等も検知極層
103に到達する前に触媒物質1により分解されるため
検知極層103の劣化を防止し長期に渡って安定した出
力がえられる。
In the above structure, the sensing electrode layer 103 is completely shielded from the interfering gas in the atmosphere because the interfering gas in the atmosphere is decomposed by the catalytic substance 1 when passing through the gas permeable membrane 2. Therefore, the detection electrode layer 103 is not affected by the interference gas of the measurement atmosphere, the dependence of the output on the atmosphere interference gas can be prevented, and at the same time, the corrosive gas and the like are decomposed by the catalytic substance 1 before reaching the detection electrode layer 103. Therefore, deterioration of the detection electrode layer 103 is prevented, and stable output can be obtained for a long period of time.

【0026】このように、本発明第2実施例の炭酸ガス
センサによれば、出力の干渉ガス依存性を防止し、検知
極層103の劣化を防ぐことができるため、長期に渡っ
て安定した出力がえられる。
As described above, according to the carbon dioxide sensor of the second embodiment of the present invention, the dependence of the output on the interference gas can be prevented and the deterioration of the detection electrode layer 103 can be prevented, so that the stable output can be obtained for a long period of time. Can be obtained.

【0027】なお、本実施例では触媒物質1をAl2O3
したがB2O3ーAl2O3、H2B2O4、SiO2、SiO2ーAl2O3、SiO2-M
gO、CaO、MgO、Cu、Cu-Ni合金、Ag、ZnO、Gd2O3、Pr
2O3、Y2O 3、Nd2O3、Dy2O3、Sm2O3、ZnZrO3、V2O3、Cr2O
3(CrO3)、Mo、W、MoO3、WO3、UO2Re(-Pt)Fe2O3、Co 等
の炭化水素異性化触媒あるいは脱水性の触媒で(化2)
に示す検知極層103での反応を阻害しない物質であれ
ばどの様な物質でもよい。
In this embodiment, the catalyst substance 1 is Al2O3When
But B2O3ー Al2O3, H2B2OFour, SiO2, SiO2ー Al2O3, SiO2-M
gO, CaO, MgO, Cu, Cu-Ni alloy, Ag, ZnO, Gd2O3, Pr
2O3, Y2O 3, Nd2O3, Dy2O3, Sm2O3, ZnZrO3, V2O3, Cr2O
3(CrO3), Mo, W, MoO3, WO3, UO2Re (-Pt) Fe2O3, Co etc
Of hydrocarbon isomerization catalyst or dehydration catalyst (Chemical formula 2)
Any substance that does not interfere with the reaction in the sensing electrode layer 103 shown in
Any substance may be used.

【0028】[0028]

【発明の効果】以上のように、本発明によれば検知極層
に触媒物質を添加することにより雰囲気干渉ガスによる
センサの誤動作を防止し、応答性を向上する事ができ
る。
As described above, according to the present invention, by adding the catalytic substance to the detection electrode layer, it is possible to prevent the malfunction of the sensor due to the atmospheric interference gas and improve the responsiveness.

【0029】また、検知極層もしくは検知極層を含むイ
オン伝導性セラミックス板の表面の一部あるいは全部を
被覆するガス透過性膜に触媒物質を添加することによ
り、従来のガス感知部にガス透過性膜を加えるだけで簡
単に検知極層は雰囲気中の干渉ガスと遮断されるため干
渉ガスによる誤動作が防止できるとともに、雰囲気中の
腐食性ガスなど検知極層を劣化させる物質も遮断するた
め、検知極層の劣化を防止し長期に渡って安定した出力
を得ることができる。
Further, by adding a catalytic substance to the gas permeable film covering a part or all of the surface of the sensing electrode layer or the surface of the ion conductive ceramics plate including the sensing electrode layer, gas permeation to the conventional gas sensing part is achieved. Since the detection electrode layer can be easily shielded from the interference gas in the atmosphere simply by adding a protective film, malfunctions due to the interference gas can be prevented, and substances that deteriorate the detection electrode layer such as corrosive gas in the atmosphere can also be blocked. It is possible to prevent deterioration of the detection electrode layer and obtain stable output over a long period of time.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例の炭酸ガスセンサの構成を
示す縦断面図
FIG. 1 is a vertical cross-sectional view showing the configuration of a carbon dioxide gas sensor according to a first embodiment of the present invention.

【図2】本発明の第2実施例の炭酸ガスセンサの構成を
示す縦断面図
FIG. 2 is a vertical sectional view showing the configuration of a carbon dioxide sensor according to a second embodiment of the present invention.

【図3】従来の炭酸ガスセンサの構成を示す縦断面図FIG. 3 is a vertical sectional view showing the configuration of a conventional carbon dioxide sensor.

【符号の説明】[Explanation of symbols]

1 触媒物質 2 ガス透過性膜 101 イオン伝導性セラミックス板(NAXS板) 102 1対の電極層 103 検知極層 105 金属炭酸塩 106 ガス感知部 107 加熱部 DESCRIPTION OF SYMBOLS 1 catalyst substance 2 gas permeable membrane 101 ion conductive ceramics plate (NAXS plate) 102 pair of electrode layers 103 sensing electrode layer 105 metal carbonate 106 gas sensing unit 107 heating unit

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】固体電解質からなるイオン伝導性セラミッ
クス板の両端に1対の電極層を設け、前記1対の電極層
のいずれか一方の電極層に1種類もしくは2種類以上の
金属炭酸塩の混合物を添加して検知極層とし、前記検知
極層に触媒物質を添加して構成されるガス感知部と、前
記ガス感知部を測定温度に加熱する加熱部とを備えてな
る炭酸ガスセンサ。
1. A pair of electrode layers are provided at both ends of an ion conductive ceramics plate made of a solid electrolyte, and one or two or more kinds of metal carbonates are provided in either one of the pair of electrode layers. A carbon dioxide gas sensor, comprising a gas sensing unit configured by adding a mixture to form a sensing electrode layer, and adding a catalytic substance to the sensing electrode layer, and a heating unit heating the gas sensing unit to a measurement temperature.
【請求項2】固体電解質からなるイオン伝導性セラミッ
クス板の両端に1対の電極を設け、前記1対の電極層の
いずれか一方の電極層に1種類もしくは2種類以上の金
属炭酸塩の混合物を添加して検知極層を形成し、前記検
知極層もしくは検知極層を含む前記イオン伝導性セラミ
ックス板の表面の一部あるいは全部を、ガス透過性膜で
被覆し、前記ガス透過性膜に触媒物質を添加して構成さ
れる請求項1記載の炭酸ガスセンサ。
2. A pair of electrodes is provided at both ends of an ion conductive ceramic plate made of a solid electrolyte, and one of the pair of electrode layers has a mixture of one kind or two or more kinds of metal carbonates. Is added to form a detection electrode layer, and a part or all of the surface of the detection electrode layer or the ion conductive ceramics plate including the detection electrode layer is covered with a gas permeable film to form a gas permeable film. The carbon dioxide gas sensor according to claim 1, which is configured by adding a catalytic substance.
JP3318940A 1991-12-03 1991-12-03 Carbon dioxide gas sensor Pending JPH05157724A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3318940A JPH05157724A (en) 1991-12-03 1991-12-03 Carbon dioxide gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3318940A JPH05157724A (en) 1991-12-03 1991-12-03 Carbon dioxide gas sensor

Publications (1)

Publication Number Publication Date
JPH05157724A true JPH05157724A (en) 1993-06-25

Family

ID=18104689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3318940A Pending JPH05157724A (en) 1991-12-03 1991-12-03 Carbon dioxide gas sensor

Country Status (1)

Country Link
JP (1) JPH05157724A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117355738A (en) * 2021-06-09 2024-01-05 三菱电机株式会社 Sensor and electrical device having the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117355738A (en) * 2021-06-09 2024-01-05 三菱电机株式会社 Sensor and electrical device having the same

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