JPH0514186Y2 - - Google Patents
Info
- Publication number
- JPH0514186Y2 JPH0514186Y2 JP1984171142U JP17114284U JPH0514186Y2 JP H0514186 Y2 JPH0514186 Y2 JP H0514186Y2 JP 1984171142 U JP1984171142 U JP 1984171142U JP 17114284 U JP17114284 U JP 17114284U JP H0514186 Y2 JPH0514186 Y2 JP H0514186Y2
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- temperature
- pressure
- chip
- strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000001514 detection method Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 230000006870 function Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984171142U JPH0514186Y2 (hr) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984171142U JPH0514186Y2 (hr) | 1984-11-12 | 1984-11-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6184835U JPS6184835U (hr) | 1986-06-04 |
JPH0514186Y2 true JPH0514186Y2 (hr) | 1993-04-15 |
Family
ID=30728838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984171142U Expired - Lifetime JPH0514186Y2 (hr) | 1984-11-12 | 1984-11-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0514186Y2 (hr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4544039B2 (ja) * | 2005-06-01 | 2010-09-15 | 株式会社デンソー | センサ装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5791431A (en) * | 1980-10-09 | 1982-06-07 | Gen Motors Corp | Double hollow pressure sensor |
-
1984
- 1984-11-12 JP JP1984171142U patent/JPH0514186Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5791431A (en) * | 1980-10-09 | 1982-06-07 | Gen Motors Corp | Double hollow pressure sensor |
Also Published As
Publication number | Publication date |
---|---|
JPS6184835U (hr) | 1986-06-04 |
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