JPH05136479A - Manufacture of piezoelectric plate complete with internal electrode layer - Google Patents
Manufacture of piezoelectric plate complete with internal electrode layerInfo
- Publication number
- JPH05136479A JPH05136479A JP29420991A JP29420991A JPH05136479A JP H05136479 A JPH05136479 A JP H05136479A JP 29420991 A JP29420991 A JP 29420991A JP 29420991 A JP29420991 A JP 29420991A JP H05136479 A JPH05136479 A JP H05136479A
- Authority
- JP
- Japan
- Prior art keywords
- internal electrode
- piezoelectric plate
- electrode layer
- piezoelectric
- thickness direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 27
- 239000000956 alloy Substances 0.000 claims abstract description 27
- 229910052751 metal Inorganic materials 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims abstract description 16
- 238000002844 melting Methods 0.000 claims abstract description 5
- 230000008018 melting Effects 0.000 claims abstract description 5
- 239000002245 particle Substances 0.000 claims description 24
- 238000010304 firing Methods 0.000 claims description 19
- 239000004020 conductor Substances 0.000 claims description 18
- 239000010953 base metal Substances 0.000 claims description 10
- 239000000654 additive Substances 0.000 claims description 5
- 230000000996 additive effect Effects 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 abstract description 18
- 229910052728 basic metal Inorganic materials 0.000 abstract 2
- 150000003818 basic metals Chemical class 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 229910052741 iridium Inorganic materials 0.000 description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は積層型圧電体に用いられ
る内部電極層付圧電板の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a piezoelectric plate with internal electrode layers used in a laminated piezoelectric material.
【０００２】[0002]
【従来の技術】従来より、電子制御サスペンション装置
等、各種機器の可動部の駆動を行うアクチュエータとし
て、電圧印加により変位する積層型圧電体が用いられて
いる。この積層型圧電体は、セラミックスよりなる圧電
板を利用するもので、高精度な印加電圧−変位特性が期
待できる。2. Description of the Related Art Hitherto, as an actuator for driving a movable part of various devices such as an electronically controlled suspension device, a laminated piezoelectric material which is displaced by voltage application has been used. This laminated piezoelectric body uses a piezoelectric plate made of ceramics, and highly accurate applied voltage-displacement characteristics can be expected.
【０００３】上記積層型圧電体として、一体焼成型の積
層型圧電体が知られており、これは導体ペーストが塗布
された圧電板のグリーンシートを複数枚積層し、所定温
度で焼成することにより、圧電板と内部電極層とが交互
に積層されて一体化された積層型圧電体とするもので、
上記内部電極層への通電により上記圧電板が軸方向に伸
びてアクチュエータとしての作動を行う。As the above-mentioned laminated piezoelectric body, an integrally fired laminated piezoelectric body is known, which is formed by laminating a plurality of green sheets of piezoelectric plates coated with a conductor paste and firing them at a predetermined temperature. , A laminated piezoelectric body in which piezoelectric plates and internal electrode layers are alternately laminated and integrated,
By energizing the internal electrode layers, the piezoelectric plate extends in the axial direction and operates as an actuator.
【０００４】[0004]
【発明が解決しようとする課題】ところで、上記従来の
一体焼成型の積層型圧電体では、内部電極層の導体ペー
ストとして主に球状のパラジウム、白金、銀−パラジウ
ム等の導電性粒子を使用し、内部電極層の導電率を高め
るためにその密度が９９％以上になるように緻密に焼成
されている。By the way, in the above conventional monolithic laminated piezoelectric material, spherical conductive particles such as palladium, platinum and silver-palladium are mainly used as the conductor paste of the internal electrode layers. In order to increase the conductivity of the internal electrode layers, the internal electrode layers are densely baked so that their density is 99% or more.
【０００５】ところが、緻密に焼成された内部電極層
は、導電率が高まる反面、ヤング率が向上して変形に対
する自由度が小さくなる。このため、各圧電板の表裏面
に一体化された内部電極層により、各圧電板は径方向の
自由度が減少され、結果的に厚さ方向の変位が抑えられ
る。したがって、積層型圧電体本来の性能が充分に生か
されないという問題があった。However, in the densely fired internal electrode layer, the conductivity increases, but the Young's modulus increases and the degree of freedom for deformation decreases. Therefore, the internal electrode layers integrated on the front and back surfaces of each piezoelectric plate reduce the radial freedom of each piezoelectric plate, and consequently suppress the displacement in the thickness direction. Therefore, there is a problem that the inherent performance of the laminated piezoelectric material is not fully utilized.
【０００６】本発明は上記実情に鑑みてなされたもので
あり、圧電板と一体化された内部電極層の径方向の自由
度を高めて、内部電極層により圧電板の厚さ方向変位が
抑制されることを効果的に防ぐことを目的とする。The present invention has been made in view of the above circumstances, and increases the degree of freedom in the radial direction of the internal electrode layer integrated with the piezoelectric plate so that displacement of the piezoelectric plate in the thickness direction is suppressed by the internal electrode layer. The purpose is to effectively prevent that.
【０００７】[0007]
【課題を解決するための手段】本発明の内部電極層付圧
電板の製造方法は、母金属８０〜９５重量％、並びに該
母金属より融点及び導電率の高い添加金属５〜１５重量
％の合金組成をもつ紡錘形状の合金粒子を含む、内部電
極層となる導体ペーストを、圧電板のグリーンシートの
片面に厚さ方向の配向性をもたせて塗布する塗布工程
と、該導体ペーストが塗布された圧電板のグリーンシー
トを焼成して、内部電極層と圧電板とを一体化する焼成
工程とからなることを特徴とする。A method for manufacturing a piezoelectric plate with an internal electrode layer according to the present invention comprises a base metal of 80 to 95% by weight, and an added metal having a melting point and conductivity higher than that of the base metal of 5 to 15% by weight. An applying step of applying a conductor paste, which contains spindle-shaped alloy particles having an alloy composition, to be an internal electrode layer on one surface of the green sheet of the piezoelectric plate with orientation in the thickness direction, and the conductor paste is applied. And a firing step of firing the green sheet of the piezoelectric plate to integrate the internal electrode layers with the piezoelectric plate.
【０００８】上記母金属としては、パラジウム、白金、
銀パラジウムなどから選択した１種以上とすることがで
きる。母金属の添加量が８０重量％より少ないと、焼成
後の内部電極層の空孔率が高過ぎ、導電率が低下する。
一方母金属の添加量が９５重量％より多いと、焼成後の
内部電極層の空孔率が低過ぎて内部電極層の径方向（厚
さ方向と垂直方向、以下同様）の自由度が低下するの
で、結果的に圧電板の厚さ方向の変位が抑制される。As the mother metal, palladium, platinum,
It can be one or more selected from silver palladium and the like. If the addition amount of the mother metal is less than 80% by weight, the porosity of the internal electrode layer after firing will be too high, and the conductivity will decrease.
On the other hand, when the amount of the mother metal added is more than 95% by weight, the porosity of the internal electrode layer after firing is too low, and the degree of freedom in the radial direction of the internal electrode layer (the direction perpendicular to the thickness direction, and so on) decreases. As a result, the displacement of the piezoelectric plate in the thickness direction is suppressed as a result.
【０００９】上記添加金属は、上記母金属より融点及び
導電率の高い金属であり、イリジウム、ロジウム、ルテ
ニウム、モリブデンなどから選択した１種以上とするこ
とができる。また、添加金属は上記母金属と金属間化合
物をつくらないものとすることが好ましい。上記紡錘形
状とは、略円柱形の両端が尖った形をいう。紡錘形状の
合金粒子は、長さを３〜５μｍとすることが好ましく、
中央部の径を０．８〜１．０μｍとすることが好まし
い。The additive metal is a metal having a melting point and conductivity higher than that of the base metal, and may be one or more selected from iridium, rhodium, ruthenium, molybdenum and the like. Further, it is preferable that the added metal does not form an intermetallic compound with the mother metal. The spindle shape is a substantially columnar shape in which both ends are sharp. The spindle-shaped alloy particles preferably have a length of 3 to 5 μm,
The diameter of the central portion is preferably 0.8 to 1.0 μm.
【００１０】上記塗布工程では、上記合金粒子を含む導
体ペーストが圧電板の片面に塗布される。このとき、紡
錘形状の合金粒子は、厚さ方向に配向するように塗布さ
れる。このように、導体ペーストを配向性をもたせてグ
リーンシートに塗布するには、例えば紡錘形状の合金粒
子の径よりも大きく、かつ長さよりも小さい目開きをも
つスクリーン印刷版を用いて行うことができる。In the coating step, the conductor paste containing the alloy particles is coated on one surface of the piezoelectric plate. At this time, the spindle-shaped alloy particles are applied so as to be oriented in the thickness direction. As described above, in order to apply the conductive paste to the green sheet with orientation, for example, a screen printing plate having an opening larger than the diameter of the spindle-shaped alloy particles and smaller than the length can be used. it can.
【００１１】上記焼成工程は、導体ペーストが塗布され
た圧電板のグリーンシートを焼成して、内部電極層と圧
電板とを一体化する工程である。このとき、上記導体ペ
ーストが塗布された圧電板のグリーンシートを複数枚積
層してから焼成して、圧電板と内部電極層とが交互に積
層されて一体化された積層型圧電体とすることもできる
し、又は導体ペーストが塗布された圧電板のグリーンシ
ートを焼成してから複数枚積層して積層型圧電体とする
こともできる。The firing step is a step of firing the green sheet of the piezoelectric plate coated with the conductor paste to integrate the internal electrode layers with the piezoelectric plate. At this time, a plurality of green sheets of the piezoelectric plate coated with the conductor paste are laminated and then fired to form a laminated piezoelectric body in which piezoelectric plates and internal electrode layers are alternately laminated and integrated. Alternatively, it is also possible to fire a green sheet of a piezoelectric plate coated with a conductor paste and then laminate a plurality of sheets to obtain a laminated piezoelectric body.
【００１２】焼成工程における焼成条件は、圧電板を緻
密に焼成可能で、かつ内部電極層が所定の空孔率を確保
できる範囲内とすることができる。具体的には、母金属
としてパラジウム、白金、銀−パラジウムのうちの少な
くとも１種以上を８０〜９５重量％とし、添加金属とし
てイリジウム、ロジウム、ルテニウム、モリブデンのう
ちの少なくとも１種以上を５〜２０重量％とした場合、
圧電板の密度が９９％以上となり、かつ内部電極層の空
孔率が７〜１５％となるように焼成するには、空気中で
１１００〜１２００℃の焼成温度、５〜１０時間の焼成
時間とすることができる。The firing conditions in the firing step can be set within a range in which the piezoelectric plate can be densely fired and the internal electrode layers can secure a predetermined porosity. Specifically, at least one or more of palladium, platinum, and silver-palladium as a base metal is 80 to 95% by weight, and at least one or more of iridium, rhodium, ruthenium, and molybdenum is 5 to 5 as an additive metal. When set to 20% by weight,
For firing so that the density of the piezoelectric plate is 99% or more and the porosity of the internal electrode layers is 7 to 15%, the firing temperature is 1100 to 1200 ° C. in air, and the firing time is 5 to 10 hours. Can be
【００１３】[0013]
【作用】本発明の内部電極層付圧電板の製造方法は、内
部電極層を形成する導体ペーストに、母金属並びに該母
金属より融点及び導電率の高い添加金属を所定割合で合
金化した合金粒子を用いる。このため、圧電板を緻密に
焼成可能な通常な焼成温度において、内部電極層の空孔
発生による導電性低下を抑えつつ、内部電極層の焼結を
抑制して空孔率を高めることができる。The method of manufacturing a piezoelectric plate with an internal electrode layer according to the present invention is an alloy in which a conductor metal forming an internal electrode layer is alloyed with a base metal and an additive metal having a melting point and conductivity higher than that of the base metal at a predetermined ratio. Use particles. Therefore, at a normal firing temperature at which the piezoelectric plate can be fired densely, it is possible to suppress the sintering of the internal electrode layers and increase the porosity while suppressing the decrease in conductivity due to the generation of voids in the internal electrode layers. ..
【００１４】しかも、上記合金粒子は紡錘形状をもち、
この合金粒子が厚さ方向に配向するように導体ペースト
をグリーンシートに塗布するので、上記空孔は焼成され
た内部電極層の径方向の粒子間にのみ形成される。した
がって、焼成されて圧電板と一体化された内部電極層
は、径方向にのみ形成された空孔により径方向の自由度
が向上するので、圧電板も径方向に縮みやすくなり、そ
の結果圧電板は厚さ方向に伸びやすくなって変位量が増
大する。Moreover, the alloy particles have a spindle shape,
Since the conductor paste is applied to the green sheet so that the alloy particles are oriented in the thickness direction, the pores are formed only between the radial particles of the fired internal electrode layer. Therefore, since the internal electrode layer that has been fired and integrated with the piezoelectric plate has an increased degree of freedom in the radial direction due to the holes formed only in the radial direction, the piezoelectric plate also tends to contract in the radial direction, and as a result, The plate easily extends in the thickness direction and the displacement amount increases.
【００１５】[0015]
【実施例】以下、本発明の実施例を具体的に説明する。 （塗布工程）表１に示す合金組成をもつ合金粒子を１０
０ｇ、エチルセルロース１．５ｇ、及びテレピネオール
２０ｇを配合し、らいかい機で混練して導体ペースト１
を調整した。なお、本発明例１〜４及び比較例１〜３の
合金粒子には長さが３〜５μｍ、中央部の径が０．８〜
１．０μｍの紡錘形状の合金粒子を用い、比較例４の合
金粒子には球状の合金粒子（平均粒径０．８μｍ）を用
いた。EXAMPLES Examples of the present invention will be specifically described below. (Coating process) 10 alloy particles having the alloy composition shown in Table 1 were used.
0 g, ethyl cellulose 1.5 g, and terpineol 20 g were mixed and kneaded with a ladle machine to obtain a conductor paste 1.
Was adjusted. In addition, in the alloy particles of Inventive Examples 1 to 4 and Comparative Examples 1 to 3, the length is 3 to 5 μm, and the diameter of the central portion is 0.8 to.
Spindle-shaped alloy particles of 1.0 μm were used, and spherical alloy particles (average particle size 0.8 μm) were used as the alloy particles of Comparative Example 4.
【００１６】この導体ペースト１をＰＺＴ（ＰｂＺｒＯ
3 ・ＰｂＴｉＯ3 ）系セラミックスよりなる圧電板のグ
リーンシート（３０ｍｍ×３０ｍｍ×１ｍｍ）２の片面
全面に、目開きが１．５μｍのメッシュスクリーン印刷
版を用いて、紡錘形状の合金粒子が厚さ方向に配向する
ように所定厚さ塗布した。 （積層工程）上記導体ペースト１が塗布された圧電板の
グリーンシート２を、導体ペースト１とグリーンシート
２とが交互に積層されるように、３０枚積層し、荷重を
かけて圧着、乾燥して積層体とした。 （焼成工程）上記積層体を脱脂後、空気中で１２００
℃、１０時間の焼成条件で焼成して、内部電極層３と圧
電板４とが交互に積層されて一体化された積層型圧電体
５とした。なお、焼成後の、内部電極層３の厚さは約５
μｍであった。また、焼成後の積層型圧電体５のサイズ
は、２５ｍｍ×２５ｍｍ×２７ｍｍであった。This conductor paste 1 was mixed with PZT (PbZrO
3・ PbTiO 3 ) -based ceramics piezoelectric sheet green sheet (30 mm × 30 mm × 1 mm) 2 on one side, using a mesh screen printing plate with a mesh size of 1.5 μm, spindle-shaped alloy particles A predetermined thickness was applied so as to be oriented in the direction. (Lamination step) 30 sheets of the green sheets 2 of the piezoelectric plate coated with the above-mentioned conductor paste 1 are laminated so that the conductor paste 1 and the green sheets 2 are alternately laminated, a pressure is applied, and the sheets are dried. To form a laminated body. (Baking step) After degreasing the above laminated body, 1200 in air
Firing was performed under the firing conditions of 10 ° C. for 10 hours to obtain a laminated piezoelectric body 5 in which the internal electrode layers 3 and the piezoelectric plates 4 were alternately laminated and integrated. The thickness of the internal electrode layer 3 after firing is about 5
was μm. The size of the laminated piezoelectric body 5 after firing was 25 mm × 25 mm × 27 mm.
【００１７】上記積層型圧電体５に、絶縁処理及びリー
ド線の取り出しを行い、シリコーンオイル中でリード線
５ｃに１ｋＶの高電圧を印加して分極処理を行って、積
層型圧電アクチュエータを製造した（図２参照）。な
お、上記絶縁処理は、積層型圧電体５の一側面に表出す
る内部電極層３を一層おきに絶縁ゴム５ａで被覆し、積
層型圧電体５の上記一側面の隣の側面に表出し、上記絶
縁ゴム５ａで被覆されていない他の内部電極層３を一層
おきに絶縁ゴム５ａで被覆することにより行った。ま
た、上記リード線の取り出しは、絶縁ゴム５ａで被覆し
た積層型圧電体５の各側面に、絶縁ゴム５ａで被覆され
ずに表出している各内部電極層３と接触するように銀板
５ｂを配設し、銀板５ｂにリード線５を接続して行っ
た。The laminated piezoelectric body 5 was subjected to an insulation treatment and lead wires taken out, and a high voltage of 1 kV was applied to the lead wire 5c in silicone oil for polarization treatment to manufacture a laminated piezoelectric actuator. (See Figure 2). In the insulating treatment, the internal electrode layers 3 exposed on one side surface of the laminated piezoelectric body 5 are covered with insulating rubber 5a every other layer, and exposed on the side surface adjacent to the one side surface of the laminated piezoelectric body 5. The other internal electrode layers 3 not covered with the insulating rubber 5a were covered with the insulating rubber 5a every other layer. Further, the lead wire is taken out so that each side surface of the laminated piezoelectric body 5 covered with the insulating rubber 5a is brought into contact with each internal electrode layer 3 exposed without being covered with the insulating rubber 5a. And the lead wire 5 was connected to the silver plate 5b.
【００１８】このように製造した各積層型圧電アクチュ
エータについて、プリセット荷重２００ｋｇ、電圧−２
００〜６００Ｖで変位量を測定した。その結果を表１、
及び図３に示す。また、内部電極層３について、水銀ポ
ロシメータにより空孔率、及び４探針式抵抗測定機によ
りシート抵抗値を調べた。その結果を表１に示す。For each of the laminated piezoelectric actuators manufactured as described above, a preset load of 200 kg and a voltage of -2
The displacement amount was measured at 00 to 600V. The results are shown in Table 1,
And shown in FIG. Further, regarding the internal electrode layer 3, the porosity was examined by a mercury porosimeter, and the sheet resistance value was examined by a 4-probe resistance measuring machine. The results are shown in Table 1.
【００１９】[0019]
【表１】 これらの結果から、母金属としてパラジウムを８０〜９
５重量％、及び添加金属としてイリジウムを５〜２０重
量％添加した合金組成をもつ本発明例１〜４において
は、内部電極層３の空孔率が約７〜１５％を示し、積層
型圧電アクチェータの変位量がいずれも４９μｍ以上
と、母金属のみからなる合金粒子を用いた比較例３のも
のと比較して向上した。このように、内部電極層３の空
孔率を１．４％から約７〜１５％と高めることにより上
記変位量が増加したのは、内部電極層３の厚さ方向に紡
錘形状の合金粒子が配向されて、内部電極層３の径方向
の粒子３ａ間にのみ空孔３ｂが形成されたためである
（図４参照）。すなわち、上記空孔３ｂにより内部電極
層３の径方向の自由度が向上するので、圧電板も径方向
に縮みやすくなって、その結果圧電板は厚さ方向に伸び
やす易くなって変位量が増加したものと考えられる。[Table 1] From these results, palladium as a base metal is 80-9.
In the present invention examples 1 to 4 having an alloy composition in which 5 wt% and iridium as an additive metal are added in an amount of 5 to 20 wt%, the porosity of the internal electrode layer 3 is about 7 to 15%, and the laminated piezoelectric The displacement amount of each actuator was 49 μm or more, which was improved as compared with that of Comparative Example 3 in which alloy particles composed of only a base metal were used. As described above, the displacement amount is increased by increasing the porosity of the internal electrode layer 3 from 1.4% to about 7 to 15% because the spindle-shaped alloy particles in the thickness direction of the internal electrode layer 3 are formed. Is oriented and the holes 3b are formed only between the particles 3a in the radial direction of the internal electrode layer 3 (see FIG. 4). That is, since the holes 3b improve the degree of freedom in the radial direction of the internal electrode layer 3, the piezoelectric plate is also likely to be contracted in the radial direction, and as a result, the piezoelectric plate is easily extended in the thickness direction and the displacement amount is increased. It is considered to have increased.
【００２０】一方、添加金属の添加量が少な過ぎる比較
例１は、内部電極層３の空孔率が小さ過ぎて内部電極層
３の径方向の自由度が向上していないので、内部電極層
３により圧電板４の厚さ方向変位が抑制されるために、
積層型圧電アクチェータの変位量の向上が認められなか
ったものと考えられる。また、添加金属の添加量が多過
ぎる比較例２は、内部電極層３の空孔率が２０．４％と
高すぎて導電性が低下したために、上記変位量の向上が
認められなかったものと考えられる。また、球状の合金
粒子を用いた比較例４においては、内部電極層３の厚さ
方向にも空孔が形成されるため、内部電極層３の厚さ方
向のヤング率が低下し、圧電板５の厚さ方向変位を吸収
してしまうので、圧電アクチュエータの変位量の向上が
認められなかったものと考えられる。On the other hand, in Comparative Example 1 in which the amount of the added metal is too small, the porosity of the internal electrode layer 3 is too small and the radial degree of freedom of the internal electrode layer 3 is not improved. Since the displacement of the piezoelectric plate 4 in the thickness direction is suppressed by 3,
It is probable that no improvement in displacement of the laminated piezoelectric actuator was observed. Further, in Comparative Example 2 in which the amount of the added metal was too large, the porosity of the internal electrode layer 3 was too high as 20.4% and the conductivity was lowered, so that the above-mentioned displacement was not improved. it is conceivable that. Further, in Comparative Example 4 using the spherical alloy particles, voids are formed also in the thickness direction of the internal electrode layer 3, so that the Young's modulus of the internal electrode layer 3 in the thickness direction is reduced and the piezoelectric plate It is considered that since the displacement in the thickness direction of No. 5 was absorbed, the improvement of the displacement amount of the piezoelectric actuator was not recognized.
【００２１】[0021]
【発明の効果】以上詳述したように本発明の内部電極層
付圧電板の製造方法は、内部電極層の導電率の低下を防
ぎつつ、内部電極層の径方向の自由度を高めて、圧電板
を厚さ方向に伸びやすくすることが可能となり、その変
位量が増加する。したがって、本発明による内部電極層
付圧電板は、積層型圧電アクチュエータの小型化及び稼
働電圧の縮小化に貢献する。As described in detail above, the method of manufacturing a piezoelectric plate with an internal electrode layer according to the present invention increases the degree of freedom in the radial direction of the internal electrode layer while preventing the conductivity of the internal electrode layer from decreasing. The piezoelectric plate can be easily stretched in the thickness direction, and its displacement amount increases. Therefore, the piezoelectric plate with the internal electrode layer according to the present invention contributes to downsizing of the laminated piezoelectric actuator and reduction of the operating voltage.
【図１】本実施例に係るグリーンシート及び導体ペース
トの断面図である。FIG. 1 is a cross-sectional view of a green sheet and a conductor paste according to this embodiment.
【図２】本実施例に係る積層型圧電アクチュエータの斜
視図である。FIG. 2 is a perspective view of a laminated piezoelectric actuator according to this embodiment.
【図３】内部電極層の空孔率と積層型圧電アクチュエー
タの変位量との関係を示す線図である。FIG. 3 is a diagram showing a relationship between a porosity of an internal electrode layer and a displacement amount of a laminated piezoelectric actuator.
【図４】本実施例に係る内部電極層を模式的に示す拡大
断面図である。FIG. 4 is an enlarged cross-sectional view schematically showing an internal electrode layer according to this example.
１は導体ペースト、２はグリーンシート、３は内部電極
層、３ａは合金粒子、３ｂは空孔、４は圧電板、５は積
層型圧電体である。Reference numeral 1 is a conductor paste, 2 is a green sheet, 3 is an internal electrode layer, 3a is alloy particles, 3b is a hole, 4 is a piezoelectric plate, and 5 is a laminated piezoelectric material.
Claims (1)
属より融点及び導電率の高い添加金属５〜１５重量％の
合金組成をもつ紡錘形状の合金粒子を含み、内部電極層
となる導体ペーストを、該合金粒子が厚さ方向に配向す
るように圧電板のグリーンシートの片面に塗布する塗布
工程と、 該導体ペーストが塗布された圧電板のグリーンシートを
焼成して、内部電極層と圧電板とを一体化する焼成工程
とからなることを特徴とする内部電極層付圧電板の製造
方法。1. A conductor for forming an internal electrode layer, comprising spindle-shaped alloy particles having an alloy composition of 80 to 95% by weight of a base metal and 5 to 15% by weight of an additive metal having a melting point and a conductivity higher than that of the base metal. An applying step of applying the paste to one surface of the green sheet of the piezoelectric plate so that the alloy particles are oriented in the thickness direction, and firing the green sheet of the piezoelectric plate coated with the conductor paste to form an internal electrode layer. A method of manufacturing a piezoelectric plate with an internal electrode layer, which comprises a firing step of integrating with a piezoelectric plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29420991A JPH05136479A (en) | 1991-11-11 | 1991-11-11 | Manufacture of piezoelectric plate complete with internal electrode layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29420991A JPH05136479A (en) | 1991-11-11 | 1991-11-11 | Manufacture of piezoelectric plate complete with internal electrode layer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05136479A true JPH05136479A (en) | 1993-06-01 |
Family
ID=17804742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29420991A Pending JPH05136479A (en) | 1991-11-11 | 1991-11-11 | Manufacture of piezoelectric plate complete with internal electrode layer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05136479A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006013437A (en) * | 2004-05-27 | 2006-01-12 | Kyocera Corp | Laminated piezoelectric element, its manufacturing method, and injection device using it |
| WO2007049697A1 (en) * | 2005-10-28 | 2007-05-03 | Kyocera Corporation | Layered piezoelectric element and injection device using the same |
| JP2010507222A (en) * | 2006-10-20 | 2010-03-04 | 京セラ株式会社 | Piezoelectric actuator unit and manufacturing method thereof |
-
1991
- 1991-11-11 JP JP29420991A patent/JPH05136479A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006013437A (en) * | 2004-05-27 | 2006-01-12 | Kyocera Corp | Laminated piezoelectric element, its manufacturing method, and injection device using it |
| WO2007049697A1 (en) * | 2005-10-28 | 2007-05-03 | Kyocera Corporation | Layered piezoelectric element and injection device using the same |
| JP4864899B2 (en) * | 2005-10-28 | 2012-02-01 | 京セラ株式会社 | Multilayer piezoelectric element and jetting apparatus using the same |
| US8378554B2 (en) | 2005-10-28 | 2013-02-19 | Kyocera Corporation | Multi-layer piezoelectric element and injection apparatus using the same |
| JP2010507222A (en) * | 2006-10-20 | 2010-03-04 | 京セラ株式会社 | Piezoelectric actuator unit and manufacturing method thereof |
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