JPH05136235A - Inspection device for dual-in-line type ic - Google Patents

Inspection device for dual-in-line type ic

Info

Publication number
JPH05136235A
JPH05136235A JP3318642A JP31864291A JPH05136235A JP H05136235 A JPH05136235 A JP H05136235A JP 3318642 A JP3318642 A JP 3318642A JP 31864291 A JP31864291 A JP 31864291A JP H05136235 A JPH05136235 A JP H05136235A
Authority
JP
Japan
Prior art keywords
terminal
terminals
laser
length measuring
measuring devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3318642A
Other languages
Japanese (ja)
Other versions
JPH06103710B2 (en
Inventor
Hisao Yoshimura
尚雄 吉村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SK Hynix Inc
Original Assignee
Hyundai Electronics Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Industries Co Ltd filed Critical Hyundai Electronics Industries Co Ltd
Priority to JP3318642A priority Critical patent/JPH06103710B2/en
Priority to KR1019920020734A priority patent/KR960005089B1/en
Publication of JPH05136235A publication Critical patent/JPH05136235A/en
Publication of JPH06103710B2 publication Critical patent/JPH06103710B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE: To provide an inspection device for a DIP IC for accurately detecting the bending state and defects of the terminal. CONSTITUTION: A device has a recessed part, where one portion of a mold case 7 of a DIP IC 6 enters at an upper part, and an IC is arranged at both sides of inclinated guides 1 for moving the IC by sliding, so that a terminal steps over the IC. Then, it has a pair of length-measuring laser equipment 4a and 4b for measuring the distance to a target site from a reflection laser beam by continuously applying laser beams 9a and 9b and a data-processing means for detecting the bent state and defects of terminals 8a and 8b of an IC 6, based on a measurement result from the distance-measuring equipment 4a and 4b.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、デュアル・イン・ライ
ン型IC(以下、DIP型ICと称す)に用いられる検
査装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection device used for a dual-in-line type IC (hereinafter referred to as DIP type IC).

【0002】[0002]

【従来の技術】DIP型ICは、半導体素子を封止した
モールドケースから前記素子の電極を各種の電子部品と
接続するための2列の端子が延出した構造を有する。前
記各列の端子は、前記モールドケース面と平行に延出さ
れると共に途中で所定の角度で内側に曲げられている。
かかるDIP型ICは、回路基板等の各種の電子部品に
実装して使用されることから、前記各列の端子が所定角
度で揃って曲げられていること、端子の欠損等がないこ
とが要求される。
2. Description of the Related Art A DIP type IC has a structure in which two rows of terminals for connecting electrodes of the element to various electronic parts extend from a molded case encapsulating a semiconductor element. The terminals in each row extend in parallel with the surface of the mold case and are bent inward at a predetermined angle in the middle.
Since the DIP type IC is used by being mounted on various electronic components such as a circuit board, it is required that the terminals in each row are bent at a predetermined angle and are not damaged. To be done.

【0003】このようなことから、前記DIP型ICに
おける端子の曲り状態および端子の欠損の検査は、従来
より目視またはCCDカメラによる撮影によって行われ
ている。
For this reason, the inspection of the bent state of the terminal and the defect of the terminal in the DIP type IC has been conventionally performed by visual inspection or photographing with a CCD camera.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、目視検
査は多くの作業者を必要とし、検査の能率が低いばかり
か、各作業者による検査精度のばからつきを生じ、良品
・不良品の判定精度が悪化する恐れがある。また、CC
Dカメラを用いた検査では前記ICの端子がモールドケ
ースからその両側に2列延出した構造を有するため、前
記カメラをどのような位置に設定しても前記各列の端子
の全ての曲り状態をカメラで撮影できず、前記ICの各
列の端子の曲り状態および欠損を精度よく検出すること
が困難であるという問題があった。
However, the visual inspection requires a lot of workers, and not only the efficiency of the inspection is low, but also the accuracy of inspection by each worker fluctuates, and the accuracy of determination of non-defective / defective products is high. May worsen. Also, CC
In the inspection using the D camera, the terminals of the IC have a structure in which two rows extend from the mold case to both sides of the IC. Therefore, regardless of the position of the camera, all the bent terminals of each row are bent. However, there is a problem that it is difficult to accurately detect the bent state and the loss of the terminals of each row of the IC.

【0005】本発明は、上記従来の問題点を解決するた
めになされたもので、DIP型ICの端子の曲り状態お
よび欠損を自動的にかつ精度よく検出することが可能な
DIP型IC用検査装置を提供しようとするものであ
る。
The present invention has been made to solve the above-mentioned conventional problems, and is an inspection for a DIP type IC capable of automatically and accurately detecting a bent state and a defect of a terminal of the DIP type IC. It is intended to provide a device.

【0006】[0006]

【課題を解決するための手段】本発明に係わるDIP型
IC用検査装置は、モールドケースの両側面から延出さ
れた2列の端子を有するDIP型ICの前記端子の曲り
状態および端子の欠損を検査する装置において、上部に
前記ICのモールドケースの一部が入る凹部を有し、前
記ICをその端子が跨ぐようにして滑らせ、移動させる
ための傾斜ガイドと、前記傾斜ガイドの両側にそれぞれ
配置され、前記ICの2列の端子の外表面および前記I
Cの端子間の前記傾斜ガイドの両側面にそれぞれレーザ
光を照射して反射レーザ光から距離を測定するための一
対のレーザ測長器と、前記各レーザ測長器に接続され、
それら測長器の位置から前記各端子の外表面および前記
傾斜ガイドの側面までのそれぞれの距離の測定結果に基
づいて前記ICの曲り状態および端子の欠損を判定する
ためのデータ処理手段と、を具備したことを特徴とする
ものである。
SUMMARY OF THE INVENTION A DIP type IC inspection apparatus according to the present invention comprises a DIP type IC having two rows of terminals extending from both side surfaces of a mold case. In the device for inspecting the above, there is a recess at the top into which a part of the mold case of the IC is inserted, and a slant guide for sliding and moving the IC so that its terminals straddle, and both sides of the slant guide. Respectively disposed on the outer surface of the two rows of terminals of the IC and the I
A pair of laser length measuring devices for irradiating both side surfaces of the tilt guide between the terminals of C with laser light to measure the distance from the reflected laser light, and connected to the respective laser length measuring devices,
Data processing means for determining the bending state of the IC and the loss of the terminal based on the measurement results of the distances from the positions of the length measuring devices to the outer surface of each terminal and the side surface of the tilt guide. It is characterized by having.

【0007】また、本発明の別のDIP型IC用検査装
置はモールドケースの両側面から延出された2列の端子
を有するDIP型ICの前記端子の曲り状態および端子
の欠損を検査する装置において、上部に前記ICのモー
ルドケースの一部が入る凹部を有し、前記ICを逆さに
して滑らせ、移動させるための傾斜ガイドと、前記傾斜
ガイドの上方に前記傾斜ガイドを移動する前記ICの2
列の端子間に位置するように立てて配置された遮蔽板
と、前記傾斜ガイドの両側にそれぞれ配置され、前記I
Cの2列の端子の外表面および前記ICの端子間の前記
遮蔽板の両側面にそれぞれレーザ光を照射して反射レー
ザ光から距離を測定するための一対のレーザ測長器と、
前記各レーザ測長器に接続され、それら測長器の位置か
ら前記各端子の外表面および前記遮蔽板の側面までのそ
れぞれの距離の測定結果に基づいて前記ICの曲り状態
および端子の欠損を判定するためのデータ処理手段と、
を具備したことを特徴とするものである。
Another DIP type IC inspection apparatus of the present invention is an apparatus for inspecting a bent state of the terminal and a terminal defect of the DIP type IC having two rows of terminals extending from both side surfaces of the mold case. In the above, there is a recessed part in which a part of the mold case of the IC is inserted, and an inclined guide for sliding and moving the IC upside down, and the IC for moving the inclined guide above the inclined guide. Of 2
The shielding plates are arranged upright so as to be located between the terminals of the row, and are arranged on both sides of the inclined guide, respectively.
A pair of laser length measuring devices for irradiating the outer surfaces of the terminals of the two rows of C and both side surfaces of the shielding plate between the terminals of the IC with laser light to measure the distance from the reflected laser light,
Connected to each of the laser length-measuring devices, the bending state of the IC and the loss of the terminal are determined based on the measurement results of the distances from the positions of the length-measuring devices to the outer surface of each terminal and the side surface of the shielding plate. Data processing means for determining,
It is characterized by having.

【0008】[0008]

【作用】本発明に係わる検査装置によれば、傾斜ガイド
上の凹部ににDIP型ICのモールドケースを入れると
共に、そのケースの両側面から延出した2列の端子が前
記傾斜ガイドを跨ぐようにして前記傾斜ガイド上をゆっ
くり滑らせて移動させ、前記傾斜ガイドの両側に配置し
た一対のレーザ測長器からレーザ光を前記移動する前記
ICの端子に向けて連続照射する。一方の測長器から放
出されたレーザ光の照射において、前記一方の列の端子
の外表面にレーザ光が照射され、反射したレーザ光は前
記レーザ測長器に入射されて前記測長器の位置から前記
端子の外表面までの距離(X1 )が測定される。また、
前記ICの端子間にレーザ光が照射されると、それら端
子間を通して前記傾斜ガイドの側面に当たり、反射した
レーザ光は前記レーザ測長器に入射されて前記測長器の
位置から前記傾斜ガイドの側面までの距離(Y1 )が測
定される。他方の測長器からレーザ光を連続照射するこ
とにより、前記一方の測長器の場合と同様に前記測長器
の位置から他方の列の端子外表面までの距離(X2 )と
同測長器位置から前記傾斜ガイドの反対側の側面までの
距離(Y2 )がそれぞれ測定される。
According to the inspection device of the present invention, the mold case of the DIP type IC is placed in the recess on the tilt guide, and the two rows of terminals extending from both side surfaces of the case straddle the tilt guide. Then, it is slid on the tilt guide and moved, and a pair of laser length measuring devices arranged on both sides of the tilt guide continuously irradiate the laser light toward the terminal of the moving IC. In the irradiation of the laser light emitted from one of the length measuring devices, the outer surface of the terminal in the one row is irradiated with the laser light, and the reflected laser light is incident on the laser length measuring device to The distance (X 1 ) from the position to the outer surface of the terminal is measured. Also,
When the laser light is irradiated between the terminals of the IC, it strikes the side surface of the tilt guide through the terminals, and the reflected laser light is incident on the laser length measuring device and is moved from the position of the length measuring device to the tilt guide. The distance to the side (Y 1 ) is measured. By continuously irradiating the laser beam from the other length measuring device, as in the case of the one length measuring device, the distance (X 2 ) from the position of the length measuring device to the outer surface of the terminal of the other row is measured. The distance (Y 2 ) from the length position to the opposite side of the tilt guide is measured.

【0009】このように測定された距離のうち、前記X
1 、X2は前記ICの端子の曲がり角度を関係する情報
であり、前記Y1 、Y2 は前記曲がり角度を評価する上
での基準となる情報であるため、これらの測定結果をデ
ータ処理手段に出力して処理することにより前記ICの
端子の曲り状態および端子の欠損を極めて簡単かつ精度
よく検査することができる。
Of the distances thus measured, the X
1 and X 2 are information relating to the bending angle of the terminal of the IC, and Y 1 and Y 2 are information serving as a reference for evaluating the bending angle. Therefore, these measurement results are processed as data. By outputting the data to the means for processing, the bent state of the IC and the defect of the terminal can be inspected extremely easily and accurately.

【0010】また、本発明に係わる別の検査装置によれ
ば上方に遮蔽板が配置された傾斜ガイド上の凹部にに逆
さにしたDIP型ICのモールドケースを入れると共
に、前記ICの2列の端子間に前記遮蔽板を位置させる
ようにして前記傾斜ガイド上をゆっくり滑らせて移動さ
せ、前記傾斜ガイドの両側に配置した一対のレーザ測長
器からレーザ光を前記移動する前記ICの端子に向けて
連続照射する。かかる一方の測長器から放出されたレー
ザ光の照射において、前記一方の列の端子の外表面にレ
ーザ光が照射され、反射したレーザ光は前記レーザ測長
器に入射されて前記測長器の位置から前記端子の外表面
までの距離(X1 )が測定される。また、前記ICの端
子間にレーザ光が照射されると、それら端子間を通して
前記遮蔽板の側面に当たり、反射したレーザ光は前記レ
ーザ測長器に入射されて前記測長器の位置から前記遮蔽
板の側面までの距離(Y1 )が測定される。他方の測長
器からレーザ光を連続照射することにより、前記一方の
測長器の場合と同様に前記測長器の位置から他方の列の
端子外表面までの距離(X2 )と同測長器位置から前記
遮蔽板の反対側の側面までの距離(Y2 )がそれぞれ測
定される。
Further, according to another inspection apparatus of the present invention, an inverted DIP type IC mold case is put in a concave portion on an inclined guide having a shield plate arranged above, and two rows of the ICs are arranged. The shield plate is positioned between the terminals and slowly slid over the tilt guide to move the laser light from a pair of laser length measuring devices arranged on both sides of the tilt guide to the terminal of the moving IC. Irradiate continuously toward. In the irradiation of the laser light emitted from one of the length measuring devices, the laser light is applied to the outer surface of the terminal of the one row, and the reflected laser light is incident on the laser measuring device and the length measuring device. The distance (X 1 ) from the position of to the outer surface of the terminal is measured. Further, when the laser light is irradiated between the terminals of the IC, it hits the side surface of the shielding plate through the terminals, and the reflected laser light is incident on the laser length measuring device and is shielded from the position of the length measuring device. The distance to the side of the plate (Y 1 ) is measured. By continuously irradiating the laser beam from the other length measuring device, as in the case of the one length measuring device, the distance (X 2 ) from the position of the length measuring device to the outer surface of the terminal of the other row is measured. The distance (Y 2 ) from the length position to the opposite side surface of the shield is measured.

【0011】このように測定された距離のうち、前記X
1 、X2は前記ICの端子の曲がり角度を関係する情報
であり、前記Y1 、Y2 は前記曲がり角度を評価する上
での基準となる情報であるため、これらの測定結果をデ
ータ処理手段に出力して処理することにより前記ICの
端子の曲り状態および端子の欠損を極めて簡単かつ精度
よく検査することができる。
Of the distances thus measured, the X
1 and X 2 are information relating to the bending angle of the terminal of the IC, and Y 1 and Y 2 are information serving as a reference for evaluating the bending angle. Therefore, these measurement results are processed as data. By outputting the data to the means for processing, the bent state of the IC and the defect of the terminal can be inspected extremely easily and accurately.

【0012】前述した第1の発明のように傾斜ガイド上
にICをその2列の端子が前記傾斜ガイドを跨せて移動
させると、前記2列の端子が傾斜ガイドの上部の角に接
触して円滑な滑り、移動を阻害する恐れがある。これに
対し、前記第2の発明ではICを逆さまにして傾斜ガイ
ド上に配置するため、端子の曲がり状態等に影響される
ことなく前記傾斜ガイド上を円滑に移動させることが可
能となり、作業性を著しく改善できる。
When the ICs on the inclined guide are moved so that the terminals in the two rows straddle the inclined guide as in the first invention described above, the terminals in the two rows come into contact with the upper corners of the inclined guide. Smooth sliding and hindering smooth movement. On the other hand, in the second invention, since the IC is placed upside down on the tilt guide, it is possible to smoothly move on the tilt guide without being influenced by the bending state of the terminal, and the workability is improved. Can be significantly improved.

【0013】[0013]

【実施例】以下、本発明の実施例を図面を参照して詳細
に説明する。
Embodiments of the present invention will now be described in detail with reference to the drawings.

【0014】実施例1 図1は、本実施例1の検査装置を示す斜視図、図2は同
検査装置の概略図である。図中の1は、細長ブロック状
の傾斜ガイドである。前記傾斜ガイド1の上部には、検
査すべきDIP型ICのモールドケースの一部が入る凹
部2が形成されている。前記傾斜ガイド1の両側面上部
には、溝部3a、3bが前記部材1の長手方向に沿って
それぞれ形成されている。前記傾斜ガイド1の両側に
は、前記傾斜ガイド1上を移動するICの2列の端子お
よび前記傾斜ガイド1の前記溝3a、3bに向けてレー
ザ光を連続照射するためのレーザ測長器4a、4bがそ
れぞれ配置されている。前記各レーザ測長器4a、4b
は、それらの測長器4a、4bによる距離測定結果に基
づいて前記ICの端子の曲がり状態および端子の欠損を
判定するためのデータ処理手段としてのパーソナルコン
ピュータ5が接続されている。
Embodiment 1 FIG. 1 is a perspective view showing an inspection device of the present embodiment 1, and FIG. 2 is a schematic view of the inspection device. Reference numeral 1 in the drawing denotes an elongated block-shaped tilt guide. On the upper part of the tilt guide 1, there is formed a recess 2 into which a part of the mold case of the DIP type IC to be inspected is inserted. Grooves 3 a and 3 b are formed in the upper portions of both side surfaces of the inclined guide 1 along the longitudinal direction of the member 1. On both sides of the tilt guide 1, a laser length measuring device 4a for continuously irradiating a laser beam toward the terminals of two rows of ICs moving on the tilt guide 1 and the grooves 3a and 3b of the tilt guide 1. 4b are arranged respectively. Each of the laser length measuring devices 4a, 4b
Is connected to a personal computer 5 as data processing means for determining a bent state of the IC terminal and a missing terminal based on the distance measurement results by the length measuring devices 4a and 4b.

【0015】このような構成によれば、傾斜ガイド1上
部の凹部2にDIP型IC6のモールドケース7部分を
入れると共に前記ケース7の両側から延出された2列の
端子8a、8bを前記傾斜ガイド1の両側面の溝3a、
3bを横切って跨ぐように乗せると、前記IC6は前記
傾斜ガイド1上を前記凹部2に案内されながらゆっくり
滑って移動される。前記IC6の移動過程において、前
記傾斜ガイド1の両側に配置した一対のレーザ測長器4
a、4bからレーザ光9a、9bを連続照射すると、一
方の測長器4aから放出されたレーザ光9aは前記移動
する前記IC6における一方の列の端子8aの外表面に
照射され、反射したレーザ光が前記レーザ測長器9aに
入射される。その結果、図3に示すように前記測長器4
aのレーザ光放出位置から前記端子の外表面までの距離
(X1 )が測定される。また、図4に示すように前記I
C6の一方の列の端子8a間にレーザ光9aが照射され
ると、それら端子8a間を通して前記傾斜ガイド1側面
の溝3aに当たり、反射したレーザ光は前記レーザ測長
器4aに入射されて前記測長器のレーザ光放出位置から
前記傾斜ガイド1の溝3a内面までの距離(Y1)が測
定される。他方の測長器4bからレーザ光9bを連続照
射した場合においても、前記一方の測長器4aの場合と
同様に前記測長器4bのレーザ放出位置から前記IC6
における他方の列の端子8bの外表面までの距離
(X2 )並びに同測長器4bのレーザ放出位置から前記
傾斜ガイド1の反対側の側面の溝3b内面までの距離
(Y2 )がそれぞれ図3、図4に示すように測定され
る。
According to this structure, the mold case 7 of the DIP type IC 6 is inserted into the recess 2 above the tilt guide 1, and the two rows of terminals 8a and 8b extending from both sides of the case 7 are tilted. Grooves 3a on both sides of the guide 1,
When the IC 6 is mounted across the 3b, the IC 6 is slid slowly while being guided by the recess 2 on the tilt guide 1. In the process of moving the IC 6, a pair of laser length measuring devices 4 arranged on both sides of the tilt guide 1
When laser beams 9a and 9b are continuously emitted from a and 4b, the laser beam 9a emitted from one length measuring device 4a is emitted to the outer surface of the terminal 8a of one row in the moving IC 6 and reflected. The light is incident on the laser length measuring device 9a. As a result, as shown in FIG.
The distance (X 1 ) from the laser light emitting position of a to the outer surface of the terminal is measured. In addition, as shown in FIG.
When the laser light 9a is irradiated between the terminals 8a of one row of C6, it hits the groove 3a on the side surface of the inclined guide 1 through the terminals 8a, and the reflected laser light is incident on the laser length-measuring device 4a. The distance (Y 1 ) from the laser beam emitting position of the length measuring device to the inner surface of the groove 3a of the tilt guide 1 is measured. Even when the laser beam 9b is continuously emitted from the other length-measuring device 4b, the IC 6 from the laser emission position of the length-measuring device 4b is similarly to the case of the one length-measuring device 4a.
The distance (X 2 ) to the outer surface of the terminal 8b of the other row and the distance (Y 2 ) from the laser emission position of the length measuring instrument 4b to the inner surface of the groove 3b on the side opposite to the tilt guide 1 are respectively. It is measured as shown in FIGS.

【0016】前記一方の測長器4aからの測定情報をパ
ーソナルコンピュータ5に出力し、例えば前記IC6の
長さに対応して前記測長器4aによる測定距離(X1
および(Y1 )をプロットすると、前記測定距離
(X1 )は前記測定距離(Y1 )に比べて通常、短いた
め、IC6の長さに対する測長器4aによる測定距離の
波形(山の部分が前記Y1 に対応、谷の部分が前記X1
に対応)が得られる。このように処理された波形におい
て、予め求めたレーザ測長器から設計角度で曲がった端
子の外表面までの距離(X0 )と前記傾斜ガイドの溝内
面までの距離(Y1 )との差(実際には許容し得る差;
ΔL)および前記測定距離(X1 )、(Y1 )の差を対
比する。この際、後者の差が前者の差(ΔL)の範囲内
である場合には、測定対象となる端子8aが設計通りの
角度で曲っていることが検出される。これに対し、後者
の差が前者の差(ΔL)から外れている、具体的には前
者の差が前記ΔLより大きい場合には測定対象となる端
子8aが設計角度より外側に曲がり過ぎていること、前
者の差が前記ΔLより小さい場合には測定対象となる端
子8aが設計角度より内側に曲がり過ぎていること、が
検出される。
The measurement information from the one length measuring device 4a is output to the personal computer 5, and for example, the measurement distance (X 1 ) by the length measuring device 4a corresponding to the length of the IC 6 is output.
When (Y 1 ) and (Y 1 ) are plotted, since the measurement distance (X 1 ) is usually shorter than the measurement distance (Y 1 ), the waveform of the measurement distance by the length measuring instrument 4 a with respect to the length of the IC 6 (the peak portion) Corresponds to Y 1 above, and the valley portion corresponds to X 1 above
Corresponding to) is obtained. In the waveform thus processed, the difference between the distance (X 0 ) from the laser length measuring device obtained in advance to the outer surface of the terminal bent at the design angle and the distance (Y 1 ) to the groove inner surface of the tilt guide. (Actually acceptable difference;
The difference between ΔL) and the measured distances (X 1 ) and (Y 1 ) is compared. At this time, when the latter difference is within the range of the former difference (ΔL), it is detected that the terminal 8a to be measured is bent at the designed angle. On the other hand, the latter difference deviates from the former difference (ΔL). Specifically, when the former difference is larger than the aforementioned ΔL, the terminal 8a to be measured is bent too far outside the design angle. That is, when the former difference is smaller than ΔL, it is detected that the terminal 8a to be measured is bent too inward from the design angle.

【0017】また、前記波形において前記X1 に対応す
る谷がなく、前記Y1 に対応する山の部分が長くプロッ
トされる箇所が見出だされない場合には、前記箇所に端
子が存在しなかったことを意味するため、測定されたI
C6は端子8aの欠損があることが検出される。
If there is no trough corresponding to the X 1 in the waveform and no peak in the peak corresponding to the Y 1 is found, then no terminal is present at that point. I was measured to mean that
It is detected that C6 has a defect in the terminal 8a.

【0018】同時に、他方のレーザ測長器4bからの測
定情報もパーソナルコンピュータ5に出力され、前記I
C6の反対側の列の端子8bにおける曲がり状態および
欠損が検出される。
At the same time, the measurement information from the other laser length-measuring device 4b is also output to the personal computer 5, and the I
A bent state and a defect in the terminal 8b on the opposite side of C6 are detected.

【0019】以上の検出操作は、前記パーソナルコンピ
ュータ5に予めプログラミングされた情報に基づいて自
動的に行なわれる。
The above detection operation is automatically performed based on the information preprogrammed in the personal computer 5.

【0020】したがって、前記検出操作において、一対
のレーザ測長器4a、4bからの測定情報を前記パーソ
ナルコンピュータ5に出力することによって、前記傾斜
ガイド1上を移動するDIP型IC6の2列の端子8
a、8bの曲がり状態および欠損を極めて簡単かつ精度
よく検出することができる。この場合、前記IC6の2
列の端子8a、8bのいずれか1つでも設計角度を外れ
て曲がっていたり、欠損していたりすることが検出され
ると、そのIC6は不良品として処理される。
Therefore, in the detection operation, by outputting the measurement information from the pair of laser length-measuring devices 4a and 4b to the personal computer 5, the two rows of terminals of the DIP type IC 6 moving on the tilt guide 1 are outputted. 8
The bent states and defects of a and 8b can be detected extremely easily and accurately. In this case, 2 of IC6
If any one of the terminals 8a and 8b in the row is detected to be bent or missing outside the design angle, the IC 6 is treated as a defective product.

【0021】また、傾斜ガイド1の両側面に溝3a、3
bをそれぞれ形成すれば、これらの溝3a、3bにレー
ザ測長器4a、4bからレーザ光9a、9bを照射して
測定された距離(Y1 )、(Y2 )は前記溝を形成しな
かった場合に比べて長くなる。つまり、前記IC6の2
列の端子8a、8bの外表面にレーザ測長器4a、4b
からレーザ光9a、9bを照射して測定した距離
(X1 )、(X2 )と前記距離(Y1 )、(Y2 )との
差は前記傾斜ガイド1に溝を形成しなかった場合に比べ
て大きくなり、S/N比を向上できため、前記端子8
a、8bの曲がり状態および欠損をより高い精度で検出
することが可能となる。
Further, grooves 3a, 3 are formed on both side surfaces of the inclined guide 1.
b are formed respectively, the distances (Y 1 ) and (Y 2 ) measured by irradiating the grooves 3a and 3b with laser beams 9a and 9b from the laser length measuring devices 4a and 4b form the grooves. It will be longer than without it. That is, 2 of IC6
Laser length measuring devices 4a and 4b are provided on the outer surfaces of the terminals 8a and 8b in the row.
From the distances (X 1 ), (X 2 ) and the distances (Y 1 ), (Y 2 ) measured by irradiating laser beams 9a, 9b from the case where no groove is formed in the inclined guide 1. Since it is larger than that of the terminal 8 and the S / N ratio can be improved,
It becomes possible to detect the bent states and defects of a and 8b with higher accuracy.

【0022】実施例2 図5は、本実施例2の検査装置を示す斜視図、図6は同
検査装置の概略図である。図中の1は、細長ブロック状
の傾斜ガイドである。前記傾斜ガイド1の上部には、検
査すべきDIP型ICのモールドケースの一部が入る凹
部2が形成されている。前記傾斜ガイド1の上方には、
前記傾斜ガイド1上面に対して垂直な遮蔽板10が前記
傾斜ガイド1上を移動するICの2列の端子間に位置す
るように配置されている。前記傾斜ガイド1の両側に
は、前記傾斜ガイド1上を移動するICの2列の端子お
よび前記遮蔽板10の両側面に向けてレーザ光を連続照
射するためのレーザ測長器4a、4bがそれぞれ配置さ
れている。前記各レーザ測長器4a、4bは、それらの
測長器4a、4bによる距離測定結果に基づいて前記I
Cの端子の曲がり状態および端子の欠損を検出するため
のデータ処理手段としてのパーソナルコンピュータ5が
接続されている。
Embodiment 2 FIG. 5 is a perspective view showing an inspection apparatus of this Embodiment 2, and FIG. 6 is a schematic view of the inspection apparatus. Reference numeral 1 in the drawing denotes an elongated block-shaped tilt guide. On the upper part of the tilt guide 1, there is formed a recess 2 into which a part of the mold case of the DIP type IC to be inspected is inserted. Above the tilt guide 1,
A shield plate 10 perpendicular to the upper surface of the tilt guide 1 is arranged so as to be located between two rows of terminals of the IC that moves on the tilt guide 1. On both sides of the tilt guide 1, there are two rows of terminals of ICs moving on the tilt guide 1 and laser length measuring devices 4a, 4b for continuously irradiating laser light toward both side surfaces of the shield plate 10. Each is arranged. Each of the laser length-measuring devices 4a and 4b outputs the I based on the distance measurement result by the length-measuring devices 4a and 4b.
A personal computer 5 is connected as a data processing means for detecting the bent state of the C terminal and the loss of the terminal.

【0023】このような構成によれば、傾斜ガイド1上
部の凹部2に逆さにしたDIP型IC6のモールドケー
ス7部分を入れて乗せると、前記IC6は前記傾斜ガイ
ド1上を前記凹部2に案内されながらゆっくり滑って移
動されると共に、前記IC6の移動過程で前記ケース7
の両側から延出され、上に向いた2列の端子8a、8b
間に遮蔽板10が位置される。前記IC6の移動過程に
おいて、前記傾斜ガイド1を中心にして両側に配置した
一対のレーザ測長器4a、4bからレーザ光9a、9b
を連続照射すると、一方の測長器4aから放出されたレ
ーザ光9aは前記移動する前記IC6における一方の列
の端子8aの外表面に照射され、反射したレーザ光が前
記レーザ測長器9aに入射される。その結果、図6に示
すように前記測長器4aのレーザ光放出位置から前記端
子の外表面までの距離(X1 )が測定される。また、同
図6に示すように前記IC6の一方の列の端子8a間に
レーザ光9aが照射されると、それら端子8a間を通し
て前記遮蔽板10側面に当たり、反射したレーザ光は前
記レーザ測長器4aに入射されて前記測長器のレーザ光
放出位置から前記遮蔽板10側面までの距離(Z1 )が
測定される。他方の測長器4bからレーザ光9bを連続
照射した場合においても、前記一方の測長器4aの場合
と同様に前記測長器4bのレーザ放出位置から前記IC
6における他方の列の端子8bの外表面までの距離(X
2 )並びに同測長器4bのレーザ放出位置から前記遮蔽
版10の反対側の側面までの距離(Z2 )がそれぞれ同
図6に示すように測定される。
With such a structure, when the mold case 7 of the inverted DIP type IC 6 is put into the recess 2 above the tilt guide 1 and placed, the IC 6 guides the tilt guide 1 on the recess 2 to the recess 2. It is slid slowly while being moved, and the case 7 is moved during the movement of the IC 6.
Two rows of terminals 8a, 8b extending from both sides of the
The shield plate 10 is located in between. In the process of moving the IC 6, the laser beams 9a and 9b from the pair of laser length measuring devices 4a and 4b arranged on both sides with the tilt guide 1 as the center.
Is continuously irradiated, the laser beam 9a emitted from one length measuring device 4a is applied to the outer surface of the terminal 8a of one row in the moving IC 6, and the reflected laser beam is applied to the laser length measuring device 9a. It is incident. As a result, as shown in FIG. 6, the distance (X 1 ) from the laser light emitting position of the length measuring device 4a to the outer surface of the terminal is measured. Further, as shown in FIG. 6, when the laser light 9a is irradiated between the terminals 8a of one row of the IC 6, the side surface of the shielding plate 10 is hit between the terminals 8a, and the reflected laser light is the laser length measurement. The distance (Z 1 ) from the laser beam emission position of the length measuring device to the side surface of the shielding plate 10 is measured by being incident on the instrument 4a. Even when the laser beam 9b is continuously emitted from the other length measuring device 4b, the IC is moved from the laser emission position of the length measuring device 4b as in the case of the one length measuring device 4a.
6 to the outer surface of the terminal 8b of the other row (X
2 ) and the distance (Z 2 ) from the laser emission position of the length measuring instrument 4b to the opposite side surface of the shielding plate 10 are measured as shown in FIG.

【0024】前記一対の測長器4a、4bからの測定情
報をパーソナルコンピュータ5に出力し、前述した実施
例1と同様に処理することにより、前記傾斜ガイド1上
を移動するDIP型IC6の2列の端子8a、8bの曲
がり状態および欠損を極めて簡単かつ精度よく検出する
ことができる。この場合、前記IC6の2列の端子8
a、8bのいずれか1つでも設計角度を外れて曲がって
いたり、欠損していたりすることが検出されると、その
IC6は不良品として処理される。
By outputting the measurement information from the pair of length measuring devices 4a and 4b to the personal computer 5 and processing it in the same manner as in the first embodiment, the DIP type IC 6 moving on the tilt guide 1 can be used. It is possible to detect the bent state and the defect of the terminals 8a and 8b in the row extremely easily and accurately. In this case, the two rows of terminals 8 of the IC 6
If even one of a and 8b is detected to be bent or missing outside the design angle, the IC 6 is treated as a defective product.

【0025】また、本実施例2では前記IC6を逆さま
にして傾斜ガイド1上に乗せるため、2列の端子8a、
8bの曲がり状態等に影響されることなく前記傾斜ガイ
ド1の凹部2に案内されて円滑に移動させることが可能
となり、検査作業を著しく改善できる。
In the second embodiment, since the IC 6 is placed upside down on the tilt guide 1, two rows of terminals 8a,
It is possible to move smoothly by being guided by the concave portion 2 of the inclined guide 1 without being affected by the bending state of 8b and the like, and the inspection work can be remarkably improved.

【0026】[0026]

【発明の効果】以上詳述した如く、本発明によれば従来
の目視検査のように多大な労力を費やしたり、作業者間
の検査ばらつきを招くことなく、DIP型ICの端子の
曲り状態および欠損を自動的にかつ精度よく検出するこ
とが可能なDIP型IC用検査装置を提供することがで
きる。
As described above in detail, according to the present invention, the bending state of the terminals of the DIP type IC and the inspection state between workers can be prevented without spending a great deal of labor as in the conventional visual inspection and causing inspection variations among operators. It is possible to provide a DIP type IC inspection device capable of automatically and accurately detecting a defect.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例1のDIP型IC用検査装置を
示す斜視図。
FIG. 1 is a perspective view showing a DIP type IC inspection device according to a first embodiment of the present invention.

【図2】実施例1の検査装置を示す概略図。FIG. 2 is a schematic diagram showing an inspection apparatus of Example 1.

【図3】実施例1の検査装置におけるレーザ測長器でD
IP型ICの2列の端子の外表面までの距離測定を説明
するための概略図。
FIG. 3 shows a laser length measuring device in the inspection apparatus according to the first embodiment.
FIG. 6 is a schematic diagram for explaining distance measurement to the outer surface of the terminals in two rows of the IP type IC.

【図4】実施例1の検査装置におけるレーザ測長器で傾
斜ガイドの両側面の溝内面までの距離測定を説明するた
めの概略図。
FIG. 4 is a schematic diagram for explaining the distance measurement to the groove inner surface on both side surfaces of the tilt guide by the laser length measuring device in the inspection apparatus of the first embodiment.

【図5】本発明の実施例2のDIP型IC用検査装置を
示す斜視図。
FIG. 5 is a perspective view showing a DIP type IC inspection device according to a second embodiment of the present invention.

【図6】実施例2の検査装置を示す概略図。FIG. 6 is a schematic diagram showing an inspection apparatus of Example 2.

【符号の説明】[Explanation of symbols]

1…傾斜ガイド、2…凹部、3a、3b…溝、4a、4
b…レーザ測長器、5…ハーソナルコンピュータ、6…
DIP型IC、8a、8b…端子、10…遮蔽板。
1 ... Inclination guide, 2 ... Recessed parts, 3a, 3b ... Grooves, 4a, 4
b ... Laser length measuring device, 5 ... Hersonal computer, 6 ...
DIP type IC, 8a, 8b ... Terminal, 10 ... Shielding plate.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 モールドケースの両側面から延出された
2列の端子を有するデュアル・イン・ライン型ICの前
記端子の曲り状態および端子の欠損を検査する装置にお
いて、 上部に前記ICのモールドケースの一部が入る凹部を有
し、前記ICをその端子が跨ぐようにして滑らせ、移動
させるための傾斜ガイドと、 前記傾斜ガイドの両側にそれぞれ配置され、前記ICの
2列の端子の外表面および前記ICの端子間の前記傾斜
ガイドの両側面にそれぞれレーザ光を連続照射して反射
レーザ光から距離を測定するための一対のレーザ測長器
と、 前記各レーザ測長器に接続され、それら測長器の位置か
ら前記各端子の外表面および前記傾斜ガイドの側面まで
のそれぞれの距離の測定結果に基づいて前記ICの端子
の曲り状態および端子の欠損を判定するためのデータ処
理手段と、 を具備したことを特徴とするデュアル・イン・ライン型
IC用検査装置。
1. An apparatus for inspecting a bent state of the terminal and a defect of the terminal of a dual-in-line type IC having two rows of terminals extending from both side surfaces of a mold case, wherein a mold of the IC is provided on an upper portion. A tilt guide having a recess into which a part of the case is inserted, for sliding and moving the IC so that the IC is straddled by the terminals, and two rows of terminals of the IC, which are arranged on both sides of the tilt guide, respectively. A pair of laser length measuring devices for continuously irradiating the outer surface and both side surfaces of the inclined guide between the terminals of the IC with a laser beam and connecting the laser length measuring devices. Then, based on the measurement results of the distances from the positions of the length measuring devices to the outer surface of each terminal and the side surface of the inclined guide, it is possible to determine the bent state of the IC terminal and the loss of the terminal. A dual-in-line IC inspection device, comprising:
【請求項2】 モールドケースの両側面から延出された
2列の端子を有するデュアル・イン・ライン型ICの前
記端子の曲り状態および端子の欠損を検査する装置にお
いて、 上部に前記ICのモールドケースの一部が入る凹部を有
し、前記ICを逆さにして滑らせ、移動させるための傾
斜ガイドと、 前記傾斜ガイドの上方に前記傾斜ガイドを移動する前記
ICの2列の端子間に位置するように配置された遮蔽板
と、 前記傾斜ガイドの両側にそれぞれ配置され、前記ICの
2列の端子の外表面および前記ICの端子間の前記遮蔽
板の両側面にそれぞれレーザ光を連続照射して反射レー
ザ光から距離を測定するための一対のレーザ測長器と、 前記各レーザ測長器に接続され、それら測長器の位置か
ら前記各端子の外表面および前記遮蔽板の側面までのそ
れぞれの距離の測定結果に基づいて前記ICの端子の曲
り状態および端子の欠損を判定するためのデータ処理手
段と、 を具備したことを特徴とするデュアル・イン・ライン型
IC用検査装置。
2. An apparatus for inspecting a bent state of the terminal and a defect of the terminal of a dual-in-line type IC having two rows of terminals extending from both side surfaces of a mold case, wherein the IC is molded on the upper part. Positioned between a tilt guide for moving the IC upside down and a tilt guide for moving the IC upside down, the tilt guide having a recess into which a part of the case is inserted. And a shield plate disposed so as to be arranged on both sides of the inclined guide, and laser beams are continuously irradiated to the outer surfaces of the terminals of the two rows of the IC and both side surfaces of the shield plate between the terminals of the IC. A pair of laser length-measuring devices for measuring a distance from the reflected laser light, and the laser length-measuring devices are connected to the outer surfaces of the terminals and the side surfaces of the shielding plate from the positions of the length-measuring devices. Dual-in-line type IC inspecting device, comprising: data processing means for determining a bent state of the IC terminal and a defect of the terminal based on the measurement results of the respective distances. ..
JP3318642A 1991-11-07 1991-11-07 Dual-in-line IC inspection device Expired - Lifetime JPH06103710B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3318642A JPH06103710B2 (en) 1991-11-07 1991-11-07 Dual-in-line IC inspection device
KR1019920020734A KR960005089B1 (en) 1991-11-07 1992-11-05 Inspection device for dual in line type ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3318642A JPH06103710B2 (en) 1991-11-07 1991-11-07 Dual-in-line IC inspection device

Publications (2)

Publication Number Publication Date
JPH05136235A true JPH05136235A (en) 1993-06-01
JPH06103710B2 JPH06103710B2 (en) 1994-12-14

Family

ID=18101419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3318642A Expired - Lifetime JPH06103710B2 (en) 1991-11-07 1991-11-07 Dual-in-line IC inspection device

Country Status (2)

Country Link
JP (1) JPH06103710B2 (en)
KR (1) KR960005089B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0239850A2 (en) 1986-03-29 1987-10-07 BASF Lacke + Farben AG Process for the single coating of finishing foils and endless borders

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0239850A2 (en) 1986-03-29 1987-10-07 BASF Lacke + Farben AG Process for the single coating of finishing foils and endless borders

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KR960005089B1 (en) 1996-04-20
JPH06103710B2 (en) 1994-12-14
KR930010525A (en) 1993-06-22

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