JPH01308905A - Measurement of shape and apparatus for shape recognition at high speed using semiconductor position detector - Google Patents

Measurement of shape and apparatus for shape recognition at high speed using semiconductor position detector

Info

Publication number
JPH01308905A
JPH01308905A JP9793588A JP9793588A JPH01308905A JP H01308905 A JPH01308905 A JP H01308905A JP 9793588 A JP9793588 A JP 9793588A JP 9793588 A JP9793588 A JP 9793588A JP H01308905 A JPH01308905 A JP H01308905A
Authority
JP
Japan
Prior art keywords
measured
condensed
spot
shape
psd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9793588A
Other languages
Japanese (ja)
Inventor
Masato Ozawa
Akihiko Nakamura
Masahiro Isoda
Original Assignee
Juki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP7960888 priority Critical
Application filed by Juki Corp filed Critical Juki Corp
Priority to JP9793588A priority patent/JPH01308905A/en
Publication of JPH01308905A publication Critical patent/JPH01308905A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To shorten a measuring time and to perform highly accurate measurement by moving a beam spot applied to an object to be measured on the surface of the object to be measured through a luminous flux position altering means to scan the surface of said object.
CONSTITUTION: The projected beam from a semiconductor laser 1 is condensed by projection lens groups 2, 3 to be applied to an object (a) to be measured as a small beam spot and the reflected beam f1 from the object (a) to be measured is condensed to one point on the beam receiving surface of a two-dimensional semiconductor position detector (PSD) 7 through a beam receiving lens 6 and a luminous flux position altering means 4 is constituted on the optical axis in the vicinity of the projection lens groups 2, 3. When the object (a) to be measured is displaced to the position a1 shown by a broken line, the angle of the incident beam f2 to the beam receiving lens 6 is changed and, therefore, the condensed beam spot on the PSD 7 is moved in proportion to the displacement (L1-L2) of the object (a) to be measured. As a result, when the position of the condensed beam spot on the PSD 7 is clarified, the distance L up to the object (a) to be measured can be calculated.
COPYRIGHT: (C)1989,JPO&Japio
JP9793588A 1988-03-31 1988-04-20 Measurement of shape and apparatus for shape recognition at high speed using semiconductor position detector Pending JPH01308905A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7960888 1988-03-31
JP9793588A JPH01308905A (en) 1988-03-31 1988-04-20 Measurement of shape and apparatus for shape recognition at high speed using semiconductor position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9793588A JPH01308905A (en) 1988-03-31 1988-04-20 Measurement of shape and apparatus for shape recognition at high speed using semiconductor position detector

Publications (1)

Publication Number Publication Date
JPH01308905A true JPH01308905A (en) 1989-12-13

Family

ID=26420627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9793588A Pending JPH01308905A (en) 1988-03-31 1988-04-20 Measurement of shape and apparatus for shape recognition at high speed using semiconductor position detector

Country Status (1)

Country Link
JP (1) JPH01308905A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5373362A (en) * 1992-04-03 1994-12-13 Kabushiki Kaisha Tokai-Rika-Denki-Seisakusho Light source device for measuring shape
CN107036533A (en) * 2017-05-03 2017-08-11 重庆重科智能装备研究院有限公司 Gun barrel rifling bullet hall measuring machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5373362A (en) * 1992-04-03 1994-12-13 Kabushiki Kaisha Tokai-Rika-Denki-Seisakusho Light source device for measuring shape
CN107036533A (en) * 2017-05-03 2017-08-11 重庆重科智能装备研究院有限公司 Gun barrel rifling bullet hall measuring machine

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