JPH0512719Y2 - - Google Patents

Description

[Detailed description of the invention] (Field of industrial application) The present invention is a hot isostatic pressing device ( (hereinafter referred to as HIP device).

(Prior Art) As illustrated in FIG. 8, a HIP device includes a high-pressure container 41 that seals high-pressure gas, an upper lid 42, and a lower lid 4.
A heat insulating layer 45 is provided in the high pressure chamber 44 divided by
Generally, a heater 46, a mounting table 48 for the object to be processed 47, etc. are provided. In order to shorten the processing cycle time of the HIP device, a stirring flow is generated in the high-pressure chamber 44 during cooling by forced or natural convection to exchange heat between the high-temperature gas and the inner wall of the high-pressure container 41 and the upper lid 42. However, methods have been developed to rapidly cool high-temperature gases. By the way, when rapidly cooling the high-temperature gas in this way, the amount of heat exchange between the high-temperature gas and the inner wall of the high-pressure vessel 41 and the upper lid 42 becomes excessive, causing the problem that the temperature of the inner wall surface of the high-pressure vessel 41 exceeds the safe allowable upper limit. There is.

Conventionally, as shown in FIG. 8, a heat shield plate 49 is disposed on the upper part of the inner wall of the high-pressure chamber 41 to prevent excessive temperature rise in the upper part of the high-pressure chamber 44, which has a large amount of heat exchanged. -Refer to Publication No. 83595).

In addition, as shown in FIG. 9, a heat sink 50 is disposed above the high pressure chamber 44, and after the high temperature gas in the high pressure chamber 44 passes through the heat sink 50, it is released to the outside of the high pressure chamber 44. Preventing the heat inside the high pressure chamber 44 from being released outside the high pressure chamber 44 at once,
The high-temperature gas is released by averaging it over time (see Japanese Patent Laid-Open No. 87032/1983).

(Problem to be solved by the invention) In the prior art, when high-temperature gas flows from top to bottom in the high-pressure chamber 44 to exchange heat, as shown by the arrows in FIGS. 8 and 9, the high-temperature gas Hyperbaric chamber 44
Since it hits the inner upper wall surface, the amount of heat exchange will inevitably increase, leading to excessive temperature rise of the upper inner wall of the high pressure vessel 41 and the inner wall of the upper cover 42, and the amount of heat exchange with the lower wall surface of the high pressure vessel 41 will decrease, resulting in a decrease in overall heat transfer. There is a problem in that the cooling efficiency decreases in proportion to the thermal area.

The present invention was developed in view of the above-mentioned circumstances, and its purpose is to rapidly cool high-temperature gas without causing excessive temperature rise on the upper inner wall of the high-pressure chamber, thereby shortening the processing cycle time. The goal is to provide a HIP device that can be used for various purposes.

(Means for Solving the Problems) In the present invention, the following technical measures were taken in order to achieve the above object.

That is, the present invention provides an inverted cup-shaped heat insulating layer 18 with a ventilation opening 21 in the upper part of the high-pressure chamber 4 divided by the high-pressure container 1, the upper lid 2, and the lower lid 3.
A heater 19 is arranged inside the heat insulating layer 18 to form a furnace chamber F, an object to be processed 14 is placed in the furnace chamber F, and a high temperature and high pressure pressure medium gas is applied to the object to be processed 14. This is an apparatus for performing hot isostatic pressure treatment, and after the hot isostatic pressure treatment, the high temperature pressure medium gas in the furnace chamber F is passed through the ventilation opening 21 to the heat insulation layer 18 and the high pressure vessel. In a hot isostatic pressurizing device that cools the high-temperature pressure medium gas by guiding it between the high-pressure vessel 1 and circulating it again from below the heat insulating layer 18 into the furnace chamber F, the high-pressure vessel 1 A heat insulating casing 20 covering the insulating layer 18 is disposed between the casing 20 and the insulating layer 18, and a plurality of ventilation holes 23 are provided at intervals in the circumferential direction on the peripheral wall of the casing 20. It is characterized by being provided in multiple stages in the height direction.

Further, the present invention is characterized in that the opening area of the lower ventilation hole 23 is larger than the opening area of the upper ventilation hole 23 of the ventilation hole 23 of the casing 20.

In addition, the present invention is characterized in that the number of the vent holes 23 at the bottom of the casing 20 is greater than that at the top.

Furthermore, the present invention is characterized in that a vent opening degree adjusting mechanism 27 is provided which can change the opening area of the vent hole 23.

In the present invention, a partition wall 16a is provided at the lower part of the high pressure chamber 4 to divide it into an upper high pressure chamber 4a and a lower high pressure chamber 4b, and a ventilation opening 34 is provided in the partition wall 16a.
It is characterized in that it can be opened and closed by an opening and closing means 35.

(Function) According to the present invention, after the processing of the object to be processed 14 is completed, the high-temperature gas in the furnace chamber F is released through forced or natural circulation by opening the ventilation opening 21 of the heat insulating layer 18. 21 and flowing down between the heat insulating layer 18 and the heat shield casing 20, the air vent 23
The high-temperature gas flows vertically and dispersedly between the high-pressure vessel 1 and the heat-insulating casing 20, and after coming into contact with the inner wall of the high-pressure vessel 1 and exchanging heat, the high-temperature gas flows into the furnace chamber in the heat-insulating layer 18. It circulates to F, absorbs heat from the gas in the furnace chamber F or the object to be processed 14, becomes high-temperature gas again, flows out of the heat insulating layer 18 through the ventilation opening 21, and repeats the above-described process. Therefore, the amount of heat exchanged between the high-temperature gas and the inner wall of the high-pressure vessel 1 is averaged in the vertical direction of the inner wall of the high-pressure vessel 1, and it is possible to prevent local excessive temperature rise of the inner wall of the high-pressure vessel 1 and the upper lid 2. 1. The heat transfer area of the inner wall can be used effectively without waste, increasing cooling capacity, enabling rapid cooling, and shortening processing cycle time.

(Example) Hereinafter, an example of the present invention will be described based on the drawings.

1 and 2 show a first embodiment of the present invention, in which 1 is a cylindrical high-pressure container, 2 is an upper lid, 3 is a lower lid, and both lids 2 and 3 are detachably attached to the high-pressure container 1. A high pressure chamber 4 is defined.

The high-pressure vessel 1 has a circumferential wall liner 6 provided with grooves forming refrigerant passages 5 on its outer circumferential surface fitted to its inner wall, so that high-temperature gas can be rapidly cooled.

A valve body insertion hole 7 is provided in the center of the upper lid 2,
An upper wall liner 9 having a refrigerant passage 8 on the upper surface is fixed to the outer periphery of a valve body insertion hole 17 on the lower surface of the upper lid 2, and a rod-shaped valve body 10 is slidable in the valve body insertion hole 7. It is inserted. The upper end of this valve body 10 is
The upper lid 2 has a valve operating cylinder 11 fixed to the center of the upper surface.
The piston 12 is inserted into the piston 12 and fixed thereto.

On the lower lid 3, there is a gas forced circulation fan 13 in the center.
A mounting table 15 for the object to be processed 14 is provided on the outside of the fan 13 so as to cover it, and a ring-shaped support plate 16 is provided on the outer periphery of the mounting table 15 via support legs 17. ing.

18 is a heat insulating layer, 19 is a heater, and 20 is a heat shielding casing, which are placed on the support plate 16.

The heat insulating layer 18 has an inverted cup shape, and a heater 19 is attached to the inner peripheral wall surface to form a furnace chamber F, and a ventilation opening 21 is provided in the center of the top wall 18a, and this ventilation opening 21 is connected to the valve body. It can be opened and closed by the lower end of 10.

The heat shield casing 20 is formed of a gas-impermeable material into an inverted cup shape, and covers the entire surface of the heat insulating layer 18 except for the lower side with a desired gap.
It is mounted on a support plate 16, and a valve body insertion hole 22 is provided in the center of the top plate 20a, and a plurality of ventilation holes 23 are provided in the peripheral wall at intervals in the circumferential direction. The pores 23 are provided in multiple stages in the height direction.

The heat insulating layer 18 and the heater 19 can be taken out of the high pressure chamber 4 together with the heat insulating casing 20 when the object to be processed 14 is housed or taken out.

Partition plates 24 and 25 are fixed to the supporting legs 17 with a vertical interval maintained therebetween, and a through hole 26 formed in the center of the upper partition plate 24 is used as a gas circulation path.

Furthermore, the ventilation hole 23 of the heat shield casing 20
As shown in Figure 2, the holes are provided in multiple stages in the height direction, and the opening area of the lower stage is sequentially larger than that of the upper stage, and the number of holes in the lower stage is sequentially larger than that of the upper stage. , the amount of heat exchanged can be averaged in the vertical direction.

The ventilation holes 23 may have the same diameter in the vertical direction, and the number of holes may be sequentially larger in the lower tier than in the upper tier, so that the total opening area of the lower tier is larger than that of the upper tier. The number of holes may be the same in both directions, and the opening area of the lower stage may be larger than that of the upper stage.

In the first embodiment, when performing the HIP process, the opening/closing valve body 10 controls the ventilation openings 2 of the heat insulating layer 18.
1 is closed and cooled down after the HIP process, first, the valve body 10 is raised by operating its operation cylinder 11 and the ventilation opening 21 of the heat insulating layer 18 is opened. Gas is circulated by convection as shown by the arrow in FIG.
forced circulation by starting the operation. That is, the high temperature gas in the furnace chamber F flows down from the ventilation opening 21 through between the heat insulation layer 18 and the heat shield casing 20, and flows out from the ventilation hole 23 between the heat shield casing 20 and the high pressure vessel 1, and the refrigerant The support plate 1 contacts the liners 6 and 9 which are cooled by
Through hole 2 is inserted from between both partition plates 24 and 25 from the bottom of 6.
6 to the inner furnace chamber F of the heat insulating layer 18, and is circulated again through the ventilation opening 21. In this way,
The high-temperature gas can effectively utilize the heat transfer area without locally overheating the high-pressure container 1, the upper lid 2, etc., and the cooling efficiency can be increased. Then, rapid cooling is performed efficiently without local excessive temperature rise, and the processing cycle time is shortened.

In the first embodiment, the forced gas circulation fan 13 is employed, but it is of course possible to omit this and circulate and cool the high temperature gas in the high pressure chamber 4 by natural convection.

In the first embodiment, the ventilation opening 21 is provided in the top wall 18a of the heat insulating layer 18, but the position of the vent opening 21 is substantially above the heat insulating layer 18, Any position may be sufficient as long as it allows high-temperature gas to flow down into the gap between the heat shield casing 20 and the heat shield casing 20.

That is, it may be located at the upper part of the peripheral wall of the heat insulating layer 18. In this case, the heat shielding casing 20 may have a cylindrical shape with inwardly facing flanges at both the upper and lower ends, and may have a structure in which the heat shielding casing 20 is fitted onto the heat insulating layer 18.

3 and 4 show a second embodiment of the present invention, which differs from the first embodiment in that a vent opening adjustment mechanism 27 that can change the opening area of the vent 23 of the heat shield casing 20 The point is that the .

This ventilation hole opening adjustment mechanism 27
and a slide tube 29 fitted on the outside of the heat shield casing 20 so as to be movable up and down;
9 is supported on the lower lid 3 so as to be movable up and down. The ventilation openings 28 are formed to have the same shape and size as the ventilation holes 23 in correspondence with the ventilation holes 23 of the heat shielding casing 20, and at the upper limit of the slide tube 29, the ventilation holes 23 and the ventilation openings 28 are formed. As shown in FIG. 5A, the slide cylinder 2 is fully opened and
During the downward movement of the slide cylinder 29, the vent hole 23 is partially opened as shown in FIG.

In addition, in FIG. 4, the solenoid mechanism 30 is attached to the lower lid 3.
A partition plate 32 is provided between the solenoid mechanism 30 and the slide tube 29, and a solenoid shaft 33 is passed through the solenoid mechanism 30.
The operation is exactly the same as the case shown in FIG.

In the second embodiment, at the beginning of cooling immediately after the processing of the object to be processed 14 is completed, the slide cylinder 29 is slightly raised from the lower limit to reduce the opening area of the vent hole 23, thereby restricting the gas flow rate. The amount of heat dissipated is suppressed to prevent excessive temperature rise, and when the gas temperature decreases as the cooling process progresses, the solenoid mechanism 30 sequentially raises the slide cylinder 29 at an appropriate timing. Finally, the slide cylinder 29 is fixed at its upper limit, and the ventilation hole 23 is fully opened. In this way, the gas flow rate can be reduced while the gas temperature is high, and gradually increased as the gas temperature decreases, making it possible to cool with approximately the same amount of heat radiation throughout the entire cooling process. becomes.

In the second embodiment, the opening area of the ventilation hole 23 can be changed by rotating the slide tube 29 in the circumferential direction shown by the arrow in FIG. It can be rotatably supported by a solenoid mechanism or other driving means. In this case as well, the slide tube 29 is operated in the same manner as described above.

FIG. 7 shows a third embodiment of the present invention, which differs from the first embodiment in that the support plate 16 is enlarged to form a partition wall 16a, which divides the inside of the high pressure chamber 4 into upper and lower halves. , a plurality of ventilation openings 34 are provided to communicate the upper and lower high pressure chambers 4a, 4b, opening and closing means 35 are provided in each of the ventilation openings 34, and the ventilation opening 21 of the heat insulating layer 18 is kept open at all times.

Note that a sealing member 36 is fitted between the outer periphery of the partition wall 16a and the liner 6. A partition plate 37 is provided below the partition wall 16a, and the valve rod 35a of the opening/closing means 35 is provided on the partition plate 37.
passes through the lower lid 3, and a solenoid 35b, which is a driving mechanism for the opening/closing means 35, is fitted and fixed in a recess 38 provided in the lower lid 3.

The heat shield casing 20 also includes a top plate 20 thereof.
Ventilation holes 23 are also provided in a, allowing for more efficient cooling.

In the third embodiment, during the HIP process, the ventilation opening 34 is closed by the valve stem 35a of the opening/closing means 35, and gas circulation within the furnace chamber F is not performed.
After the treatment, the ventilation opening 34 is opened and a circulation path for the gas in the furnace chamber F is formed. Thereafter, the inside of the furnace chamber F is cooled through the same process as in the first embodiment.

According to this third embodiment, the machinery such as the gas forced circulation fan 13 and the opening/closing means 35 are concentrated in the lower low temperature region, which is advantageous in terms of machine life, heat resistance, etc. Since the opening/closing means is not provided, the area of the upper wall liner 9 of the upper lid 2 can be increased, and the cooling efficiency can be improved.

In each of the embodiments described above, the lower end of the heat insulating layer 18 and the lower end of the heat shield casing 20 do not necessarily have to be connected airtightly, but an airtight connection is preferable from the viewpoint of shortcutting the gas flow.

The present invention is not limited to the above-mentioned embodiments. For example, the heat shielding casing 20 can be constructed by providing a vent hole in the outer heat insulating layer of the double heat insulating layer, and the vent hole 23, The shape of the opening 28 can also be changed as appropriate.

(Effects of the invention) As described above, the HIP device according to the invention includes a heat insulating casing 20 that covers the heat insulating layer 18 between the high pressure vessel 1 and the heat insulating layer 18.
A plurality of ventilation holes 23 are provided on the peripheral wall of the high pressure chamber 4 at intervals in the circumferential direction, and the ventilation holes 23 are provided in multiple stages in the height direction. The high-temperature gas can be circulated in and out of the furnace chamber F inside the heat insulating layer 18 and brought into contact with the wall of the high-pressure vessel 1 for rapid cooling without causing an excessive temperature rise in the high-pressure vessel. The amount of heat exchanged with the inner wall of the high-pressure vessel 1 is averaged in the vertical direction, and the heat transfer area of the inner wall of the high-pressure vessel 1 can be used advantageously without wasting it, greatly increasing the cooling capacity, shortening the processing cycle time, and improving processing efficiency. It is possible to do so.

[Brief explanation of the drawing]

Figures 1 and 2 show the first embodiment of the present invention, in which Figure 1 is a central vertical cross-sectional view, Figure 2 is a front view of the heat shield casing, and Figures 3 to 5 are the first embodiment of the present invention. Fig. 3 is a central vertical sectional view, Fig. 4 is an enlarged sectional view of the main part showing another example of the mounting structure of the slide tube drive solenoid, and Fig. 5 A to C show a heat shield casing. FIG. 6 is a sectional view taken along the line A-A in FIG. 3, FIG. 7 is a central vertical sectional view of the third embodiment of the present invention, and FIGS. FIG. 7 is a central vertical sectional view, and FIG. 9 is a schematic sectional view, respectively, showing a conventional example. 1...High pressure container, 2...Upper lid, 3...Lower lid, 4
...High pressure chamber, 4a, 4b...Upper and lower high pressure chamber, 14
...Object to be treated, 16a...Partition wall, 18...Insulating layer, 19...Heater, 20...Heat-insulating casing,
21, 34...Vent opening, 23...Vent hole, 27
...Vent opening adjustment mechanism, 35...Opening/closing means, F
...furnace room.

Claims (1)

[Claims for Utility Model Registration] (1) An inverted cup-shaped heat insulating layer 18 with a ventilation opening 21 in the upper part of the high-pressure chamber 4 divided by the high-pressure container 1 and the upper lid 2 and lower lid 3; The heat insulation layer 1
A heater 19 is disposed inside the chamber 8 to form a furnace chamber F, a workpiece 14 is placed inside the furnace chamber F, and a high-temperature, high-pressure pressure medium gas is applied to the workpiece 14 to heat the workpiece 14. This is an apparatus for performing hydrostatic pressurization, and after hot isostatic pressurization, high-temperature pressure medium gas in the furnace chamber F is pumped between the heat insulating layer 18 and the high-pressure vessel 1 through the ventilation opening 21. In a hot isostatic pressurizing device that cools the high-temperature pressure medium gas by guiding it and circulating it again from below the heat insulating layer 18 into the furnace chamber F, the high pressure vessel 1 and the heat insulating layer 18 are A heat insulating casing 20 covering the heat insulating layer 18 is disposed in between, and a plurality of ventilation holes 23 are provided in the peripheral wall of the casing 20 at intervals in the circumferential direction, and the ventilation holes 23 are arranged in the height direction. A hot isostatic pressurizing device characterized by being provided in multiple stages. (2) The hot-heat heating system according to claim 1, wherein the opening area of the lower ventilation hole 23 of the casing 20 is larger than the opening area of the upper ventilation hole 23. Hydrostatic pressure device. (3) The hot isostatic pressurizing device according to claim (1), wherein the number of vent holes 23 in the casing 20 is greater in the lower part of the casing 20 than in the upper part. (4) The hot isostatic press according to claim (1), (2) or (3), further comprising a vent opening adjustment mechanism 27 that can change the opening area of the vent hole 23. Pressure device. (5) A partition wall 16a is provided at the lower part of the high pressure chamber 4 to divide it into an upper high pressure chamber 4a and a lower high pressure chamber 4b,
The hot isostatic pressurizing device according to claim 1, wherein the partition wall 16a is provided with a ventilation opening 34 and can be opened and closed by an opening and closing means 35. .