JPH0512638B2 - - Google Patents
Info
- Publication number
- JPH0512638B2 JPH0512638B2 JP62294694A JP29469487A JPH0512638B2 JP H0512638 B2 JPH0512638 B2 JP H0512638B2 JP 62294694 A JP62294694 A JP 62294694A JP 29469487 A JP29469487 A JP 29469487A JP H0512638 B2 JPH0512638 B2 JP H0512638B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid nitrogen
- nitrogen gas
- nitrogen
- rectification column
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 258
- 239000007788 liquid Substances 0.000 claims description 93
- 229910052757 nitrogen Inorganic materials 0.000 claims description 89
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 80
- 238000004519 manufacturing process Methods 0.000 claims description 22
- 239000007789 gas Substances 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 10
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 8
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 4
- 239000001569 carbon dioxide Substances 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 3
- 230000020169 heat generation Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 22
- 229910052760 oxygen Inorganic materials 0.000 description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000002808 molecular sieve Substances 0.000 description 7
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 7
- 238000009835 boiling Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 238000010992 reflux Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000003584 silencer Effects 0.000 description 1
Landscapes
- Separation By Low-Temperature Treatments (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は窒素ガス製造装置に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] This invention relates to a nitrogen gas production apparatus.
電子工業では極めて多量の窒素ガスが使用され
ている。このため、安価な窒素ガスの供給が望ま
れ、その要望に応えるためにPSA方式が導入さ
れ、それによつて窒素ガスが製造され供給される
ようになつている。このPSA方式による窒素ガ
ス製造装置を第１図に示す。図において、１は空
気取入口、２は空気圧縮機、３はアフタークーラ
ー、３ａは冷却水供給路、４は油水セパレーター
である。５は第１の吸着槽、６は第２の吸着槽で
あり、V1およびV2は空気作動弁で、空気圧縮機
２によつて圧縮された空気を弁作用により吸着槽
６に送り込む。V3およびV4は真空弁であり、吸
着槽５，６内を真空ポンプ６ａの作用により真空
状態にする。６ｂは真空ポンプ６ａに冷却水を供
給する冷却パイプ、６ｃはサイレンサー、６ｄは
その排気パイプである。V5，V6，V7およびV9は
空気作動弁である。７は製品槽であり、パイプ８
により吸着槽５，６に接続されている。７ａは製
品窒素ガス取出パイプ、７ｂは不純物分析計、７
ｃは流量計である。
The electronic industry uses extremely large amounts of nitrogen gas. Therefore, it is desired to supply nitrogen gas at low cost, and in order to meet this demand, the PSA method has been introduced, and nitrogen gas has been manufactured and supplied using this method. Figure 1 shows a nitrogen gas production device using this PSA method. In the figure, 1 is an air intake port, 2 is an air compressor, 3 is an aftercooler, 3a is a cooling water supply path, and 4 is an oil-water separator. 5 is a first adsorption tank, 6 is a second adsorption tank, V 1 and V 2 are air-operated valves, and air compressed by the air compressor 2 is sent into the adsorption tank 6 by valve action. V 3 and V 4 are vacuum valves, and the interiors of the adsorption tanks 5 and 6 are brought into a vacuum state by the action of the vacuum pump 6a. 6b is a cooling pipe that supplies cooling water to the vacuum pump 6a, 6c is a silencer, and 6d is its exhaust pipe. V 5 , V 6 , V 7 and V 9 are air operated valves. 7 is a product tank, and pipe 8
It is connected to the adsorption tanks 5 and 6 by. 7a is a product nitrogen gas extraction pipe, 7b is an impurity analyzer, 7
c is a flow meter.
この窒素ガス製造装置は、空気圧縮機２により
空気を圧縮し、この空気圧縮機２に付髄するアフ
タークーラー３によつて圧縮された空気を冷却し
てセパレーター４で凝縮水を除去し、空気作動弁
V1またはV2を経由させて吸着槽５，６に送入す
る。２基の吸着槽５，６はそれぞれ酸素吸着用の
カーボンモレキユラシーブを内蔵しており、これ
らの吸着槽５，６にはプレツシヤースイング方式
により１分間毎に交互に圧縮空気が送り込まれ
る。この場合、圧縮空気の送り込まれていない吸
着槽５，６は真空ポンプ６ａの作用により内部が
真空状態にされる。すなわち、空気圧縮機２によ
り圧縮された空気は、一方の吸着槽５内に入りカ
ーボンモレキユラシーブによつてそのなかの酸素
分を吸着除去され、窒素ガスとなつて弁V5，V6，
V9を経て製品槽７に送られパイプ７ａから取り
出される。この時、他方の吸着槽６は、空気圧縮
機２からの空気が弁V2の閉成によつて遮断され、
かつ弁V4の開成によつて内部が真空ポンプ６ａ
により真空吸引される。その結果、カーボンモレ
キユラシーブに吸着された酸素が吸引除去されカ
ーボンモレキユラシーブが再生される。このよう
にして、吸着槽５，６から交互に窒素ガスが製品
槽７に送られ製品窒素ガスが連続的に得られる。 This nitrogen gas production device compresses air with an air compressor 2, cools the compressed air with an aftercooler 3 attached to the air compressor 2, removes condensed water with a separator 4, and operating valve
It is sent to the adsorption tanks 5 and 6 via V 1 or V 2 . The two adsorption tanks 5 and 6 each have a built-in carbon molecular sieve for oxygen adsorption, and compressed air is sent into these adsorption tanks 5 and 6 alternately every minute by a pressure swing system. . In this case, the adsorption tanks 5 and 6 to which compressed air is not fed are brought into a vacuum state by the action of the vacuum pump 6a. That is, the air compressed by the air compressor 2 enters one of the adsorption tanks 5, and the carbon molecular sieve adsorbs and removes the oxygen therein, converts it into nitrogen gas, and sends it to the valves V 5 , V 6 ,
It is sent to the product tank 7 via V 9 and taken out from the pipe 7a. At this time, air from the air compressor 2 is cut off from the other adsorption tank 6 by closing the valve V2 ,
And by opening the valve V4 , the inside becomes the vacuum pump 6a.
Vacuum suction is applied. As a result, the oxygen adsorbed on the carbon molecular sieve is removed by suction and the carbon molecular sieve is regenerated. In this way, nitrogen gas is alternately sent from the adsorption tanks 5 and 6 to the product tank 7, and product nitrogen gas is continuously obtained.
上記の窒素ガス製造装置は、カーボンモレキユ
ラシーブが酸素を選択的に吸着するという特性を
利用して窒素ガスを製造するため、安価に窒素ガ
スを得ることができる。しかしながら、前記のよ
うに、２基の吸着槽５，６に１分間毎に交互に圧
縮空気を送り、それと同時に、他方の吸着槽内を
真空吸引するため、弁が多数必要になるととも
に、弁操作も煩雑になり故障が多発しやすいとい
う欠点を有している。そのため、２個１組の吸着
槽５，６を２組設け、１組を予備としなければな
らないのが実情である。したがつて、設備費がか
さむという欠点も有している。
The above-mentioned nitrogen gas production apparatus produces nitrogen gas by utilizing the characteristic of the carbon molecular sieve that selectively adsorbs oxygen, and therefore can obtain nitrogen gas at a low cost. However, as mentioned above, compressed air is sent alternately to the two adsorption tanks 5 and 6 every minute, and at the same time, the inside of the other adsorption tank is vacuumed, which requires a large number of valves. It has the drawback of being complicated to operate and prone to frequent failures. Therefore, the reality is that two sets of two adsorption tanks 5 and 6 must be provided, and one set must be kept as a spare. Therefore, it also has the disadvantage of high equipment costs.
他方、従来の深冷液化方式の窒素ガス製造装置
は、圧縮機で圧縮された圧縮原料空気の冷却用熱
交換器の冷却のために、膨脹タービンを用い、こ
れを精留塔内に溜る液体空気（深冷液化分離によ
り低沸点の窒素はガスとして取り出され、残部が
酸素リツチな液体空気となつて溜る）から蒸発し
たガスの圧力で駆動するようになつている。とこ
ろが、膨脹タービンは回転速度が極めて大（数万
回／分）であつて負荷変動（製品窒素の取出量
《需要量》の変動）に対する追従運転が困難であ
るため、負荷変動時に製品の純度がばらつくとい
う難点を有している。また、このものは高速回転
するため機械構造上高精度が要求され、かつ高価
であり、機械が複雑なため特別に養成した要員が
必要という難点も有している。すなわち、膨脹タ
ービンは高速回転部を有するため、上記のような
諸問題を生じるのであり、このような高速回転部
を有する膨脹タービンの除去に対して強い要望が
あつた。 On the other hand, conventional cryogenic liquefaction nitrogen gas production equipment uses an expansion turbine to cool the heat exchanger for cooling the compressed raw air compressed by the compressor, and uses the liquid accumulated in the rectification tower to cool the compressed raw air. It is powered by the pressure of gas evaporated from air (low boiling point nitrogen is extracted as a gas through cryogenic liquefaction separation, and the remainder accumulates as oxygen-rich liquid air). However, the rotational speed of expansion turbines is extremely high (tens of thousands of rotations per minute), making it difficult to follow load fluctuations (fluctuations in the amount of product nitrogen taken out (demand amount)). It has the disadvantage that it varies. Furthermore, since this device rotates at high speed, it requires high precision in its mechanical structure, is expensive, and has the disadvantage that specially trained personnel are required due to the complexity of the machine. That is, since the expansion turbine has a high-speed rotating section, the above-mentioned problems arise, and there has been a strong desire to eliminate the expansion turbine having such a high-speed rotating section.
この発明は、外部より取り入れた空気を圧縮す
る空気圧縮手段と、この空気圧縮手段によつて圧
縮された圧縮空気中の炭酸ガスと水分とを除去す
る除去手段と、この除去手段を経た圧縮空気を超
低温に冷却する熱交換手段と、この熱交換手段に
より超低温に冷却された圧縮空気の一部を液化し
て底部に溜め窒素を上部へ上昇させる精留塔を備
えた窒素ガス製造装置において、精留塔の上側に
設けられた液体窒素を溜める分縮器であつて、精
留塔と連通する複数のチユーブが底面から植立し
ていて、各チユーブの間が液体窒素溜めに形成さ
れ各チユーブの上端が内部において開口している
分縮器と、装置外から液体窒素の供給を受けこれ
を貯蔵する液体窒素貯蔵手段と、この液体窒素貯
蔵手段内の液体窒素を冷熱発生用膨脹器からの発
生冷熱に代えて圧縮空気液体用の寒冷源として連
続的に上記精留塔内に導く導入路と、上記精留塔
から気体として取り出される窒素ガスおよび上記
精留塔内において寒冷源としての作用を終え気化
した上記液体窒素を上記熱交換手段を経由させ上
記圧縮空気と熱交換させることにより温度上昇さ
せ製品窒素ガスとする窒素ガス取出路を備えたこ
とを特徴とする窒素ガス製造装置をその要旨とす
るものである。
This invention provides air compression means for compressing air taken in from the outside, removal means for removing carbon dioxide and moisture from the compressed air compressed by the air compression means, and compressed air that has passed through the removal means. In a nitrogen gas production device equipped with a heat exchange means for cooling the compressed air to an ultra-low temperature, and a rectification column for liquefying a part of the compressed air cooled to an ultra-low temperature by the heat exchange means and storing it at the bottom and raising the nitrogen to the top, It is a dephlegmator installed above the rectification tower to store liquid nitrogen. Multiple tubes communicating with the rectification tower are planted from the bottom, and the space between each tube is formed as a liquid nitrogen reservoir. A decentralizer whose upper end of the tube is open inside, a liquid nitrogen storage means for receiving and storing liquid nitrogen from outside the device, and a liquid nitrogen storage means for storing the liquid nitrogen from an expander for generating cold heat. An introduction path that continuously leads compressed air into the rectification column as a cold source for the liquid in place of the generated cold heat, and nitrogen gas taken out as a gas from the rectification column and a cold source in the rectification column. A nitrogen gas production device characterized by comprising a nitrogen gas extraction passage for raising the temperature of the liquid nitrogen that has been vaporized after its operation and exchanging heat with the compressed air through the heat exchange means to produce a product nitrogen gas. This is the summary.
すなわち、この発明の窒素ガス製造装置は、液
体窒素の蒸発熱を利用して、精留塔に送り込まれ
る圧縮空気を冷却し、圧縮空気の一部を液化分離
して窒素を気体のままで保持し、これを、精留塔
における寒冷源としての作用を終えて気化した液
体窒素と合わせて製品窒素ガスとして取り出すた
め、膨脹タービンが不要になり、膨脹タービンに
起因する上記負荷変動時における純度ばらつき等
の弊害を回避でき、かつ窒素ガスを安価に得るこ
とができるようになる。そのうえ、この装置は、
精留塔とは別個に液体窒素蒸発器を備えており、
精留塔ラインの故障時もしくは精留塔だけでは対
応できないような製品窒素ガスの需要量の大幅な
増加時に、上記液体窒素蒸発器を作動させ、上記
液体窒素貯蔵手段の液体窒素をその液体窒素蒸発
器で製品窒素ガスとして気化させうるため、製品
窒素ガスの供給がとぎれたり、需要量の大幅増加
時における製品窒素ガスの純度低下が生じないの
である。 In other words, the nitrogen gas production device of this invention uses the heat of vaporization of liquid nitrogen to cool the compressed air sent to the rectification column, liquefies and separates a portion of the compressed air, and retains the nitrogen as a gas. However, this is extracted as a product nitrogen gas by combining it with vaporized liquid nitrogen after it has finished its role as a cold source in the rectification column, eliminating the need for an expansion turbine and eliminating the above-mentioned purity variations caused by the expansion turbine during load fluctuations. This makes it possible to avoid such adverse effects, and to obtain nitrogen gas at low cost. Moreover, this device
It is equipped with a liquid nitrogen evaporator separate from the rectification column.
In the event of a breakdown in the rectification column line or in the event of a significant increase in demand for product nitrogen gas that cannot be met by the rectification column alone, the liquid nitrogen evaporator is operated to convert the liquid nitrogen in the liquid nitrogen storage means into liquid nitrogen. Since it can be vaporized as product nitrogen gas in an evaporator, the supply of product nitrogen gas will not be interrupted or the purity of the product nitrogen gas will not deteriorate when demand increases significantly.
つぎに、この発明を実施例にもとづいて詳しく
説明する。 Next, the present invention will be explained in detail based on examples.
第２図はこの発明の一実施例の構成図である。
図において、９は空気圧縮機、１０はドレン分離
器、１１はフロン冷却器、１２は２個１組の吸着
筒である。吸着筒１２は内部にモレキユラシーブ
が充填されていて空気圧縮機９により圧縮された
空気中のH2OおよびCO2を吸着除去する作用をす
る。１３は第１の熱交換器であり、吸着筒１２に
よりH2OおよびCO2を吸着除去された圧縮空気が
送り込まれる。１４は第２の熱交換であり、第１
の熱交換器１３を経た圧縮空気が送り込まれる。
１５は液体窒素を溜めるための分縮器１６を塔頂
に備えた精留塔であり、第１および第２の熱交換
器１３，１４により超低温に冷却された圧縮空気
をさらに冷却し、その一部を液化して底部に溜
め、窒素のみを気体状態で上部から取り出すよう
になつている。すなわち、この精留塔１５は、第
１および第２の熱交換器１３，１４を経て超低温
（約−170℃）に冷却された圧縮空気を、パイプ１
７により精留塔１５の底部の貯溜液体空気
（N250〜70％，O230〜50％）１８中を通してさら
に冷却し、ついで膨脹弁１９を経て内部に噴射さ
せ、精留棚および分縮器１６で酸素等を液化し、
窒素を気体のまま残すようになつている。この分
縮器１６は、多数のチユーブ２０が植設されてい
る仕切板２１によつて塔部２２と区切られてい
て、仕切板２１上には圧縮空気の液化分離の際に
生じた液体窒素および液体窒素貯槽２３から第１
の導入路パイプ２４を経て供給されれた液体窒素
が貯溜される。そして、上記分縮器１６は、精留
棚を経て精留塔１５内を上昇する圧縮空気由来の
ガスをチユーブ２０内に案内して貯溜液体窒素の
冷熱で冷却し、そのガスを分縮すると同時にその
ガス中の微量酸素（沸点−183℃）等を液化して
流下させ窒素（沸点−196℃）気体のまま上方に
移行させるようになつている。上方に移行した気
体窒素の一部は先に述べたように液化して仕切板
２１上の貯溜液体窒素となる。
FIG. 2 is a block diagram of an embodiment of the present invention.
In the figure, 9 is an air compressor, 10 is a drain separator, 11 is a fluorocarbon cooler, and 12 is a set of two adsorption cylinders. The adsorption cylinder 12 is filled with a molecular sieve and functions to adsorb and remove H 2 O and CO 2 from the air compressed by the air compressor 9. 13 is a first heat exchanger, into which compressed air from which H 2 O and CO 2 have been adsorbed and removed by the adsorption column 12 is sent. 14 is the second heat exchanger, the first
Compressed air is fed through a heat exchanger 13.
15 is a rectification column equipped with a dephlegmator 16 at the top for storing liquid nitrogen, which further cools compressed air that has been cooled to an ultra-low temperature by the first and second heat exchangers 13 and 14; A portion of it is liquefied and stored at the bottom, and only nitrogen is extracted in gaseous form from the top. That is, this rectification column 15 passes compressed air cooled to an ultra-low temperature (approximately -170°C) through the first and second heat exchangers 13 and 14 to the pipe 1.
7, the stored liquid air (N 2 50-70%, O 2 30-50%) at the bottom of the rectification column 15 is passed through 18 for further cooling, and then injected into the interior through the expansion valve 19, and is then injected into the rectification shelf and fractionator. Oxygen etc. are liquefied in the condenser 16,
It is designed to leave nitrogen as a gas. The dephlegmator 16 is separated from the column section 22 by a partition plate 21 in which a large number of tubes 20 are installed. and the first one from the liquid nitrogen storage tank 23.
Liquid nitrogen supplied through the inlet pipe 24 is stored. The partial condenser 16 guides the compressed air-derived gas rising in the rectifying tower 15 through the rectifying shelf into the tube 20, cools it with the cold heat of the stored liquid nitrogen, and decompresses the gas. At the same time, trace amounts of oxygen (boiling point -183°C) etc. in the gas are liquefied and flowed down, and moved upward as nitrogen (boiling point -196°C) gas. A portion of the gaseous nitrogen that has moved upward is liquefied as described above and becomes liquid nitrogen stored on the partition plate 21.
この場合、精留塔１５の塔部２２内に噴射され
た圧縮空気は、チユーブ２０から流下する液体酸
素と向流的に接触するため、酸素の液化分離が一
層促進される。２５は上記分縮器１６内の貯溜液
体窒素の液面を一定に保つ液面計であり、分縮器
１６内の液体窒素の液面の変動に応じてバルブ２
６を制御し液体窒素貯槽２３からの液体窒素の供
給量を制御する。２７は分縮器１６の上部に溜ま
つた窒素ガスを取り出す取り出しパイプで、超低
温の窒素ガスを第２、第１の熱交換器１４，１３
内に案内し、そこに送り込まれる圧縮空気と熱交
換させて常温にしメインパイプ２８に送り込む作
用をする。２９は精留塔１５の底部の貯溜液体空
気１８を第２および第１の熱交換器１４，１３に
送り込む送り込みパイプで、２９ａは保圧弁であ
る。上記第２および第１の熱交換器１４，１３で
熱交換（熱交換器１４，１３内の圧縮空気の冷
却）を終えた上記貯溜液体空気は気化して第１の
熱交換器１３から矢印Ａのように放出されるよう
になつている。３０はバツクアツプ系ラインであ
り、液体窒素蒸発器３１、これは上記液体窒素貯
槽２３から液体窒素を供給する第２の導入路パイ
プ３０ａ、上記液体窒素蒸発器３１で気化生成し
た窒素ガスをメインパイプ２８に送入する案内パ
イプ３０ｂ、この案内パイプ３０ｂに設けられた
圧力調節弁３３ａから構成されている。上記圧力
調節弁３３ａは、２次側（使用側）の圧力が設定
圧力より下がると、弁を開き、または弁の開度を
調節し、２次側の圧力が設定圧力を保つよう作用
する。このバツクアツプ系ライン３０では、精留
塔ラインが故障したり、または製品窒素ガスの需
要量が大幅に増加したりしてメインパイプ２８内
の圧力が下がると、上記圧力調節弁３３ａが開成
作動するため、上記液体窒素貯槽２３から液体窒
素が液体窒素蒸発器３１に流れて気化し、その生
成気化窒素ガスが製品窒素ガスとして上記メイン
パイプ２８内に流入するようになつている。３２
は不純物分析計であり、メインパイプ２８から送
り出される製品窒素ガスの純度を分析し、純度の
低いときは、弁３４，３４ａを作動させて製品窒
素ガスを矢印Ｂのように外部に逃気する作用をす
る。３３はメインパイプ２８に設けられた圧力調
節弁である。 In this case, the compressed air injected into the column section 22 of the rectification column 15 comes into contact with the liquid oxygen flowing down from the tube 20 in a countercurrent manner, so that the liquefaction and separation of oxygen is further promoted. Reference numeral 25 denotes a liquid level gauge that keeps the liquid level of the liquid nitrogen stored in the decentralizer 16 constant, and the valve 2
6 to control the amount of liquid nitrogen supplied from the liquid nitrogen storage tank 23. Reference numeral 27 is a take-out pipe for taking out the nitrogen gas accumulated in the upper part of the dephlegmator 16, and the extremely low temperature nitrogen gas is transferred to the second and first heat exchangers 14 and 13.
The main pipe 28 is guided into the main pipe 28 by exchanging heat with the compressed air sent there to bring the air to room temperature. 29 is a feed pipe for feeding the liquid air 18 stored at the bottom of the rectification column 15 to the second and first heat exchangers 14, 13, and 29a is a pressure holding valve. The stored liquid air that has completed heat exchange (cooling of the compressed air in the heat exchangers 14 and 13) in the second and first heat exchangers 14 and 13 is vaporized and flows from the first heat exchanger 13 as shown in the arrow It is designed to be released as shown in A. Reference numeral 30 denotes a backup system line, which includes a liquid nitrogen evaporator 31, a second introduction path pipe 30a that supplies liquid nitrogen from the liquid nitrogen storage tank 23, and a main pipe that carries the nitrogen gas vaporized and produced in the liquid nitrogen evaporator 31. 28, and a pressure regulating valve 33a provided on the guide pipe 30b. When the pressure on the secondary side (use side) falls below the set pressure, the pressure regulating valve 33a opens the valve or adjusts the degree of opening of the valve, so that the pressure on the secondary side maintains the set pressure. In this backup system line 30, when the pressure inside the main pipe 28 decreases due to a breakdown in the rectification column line or a significant increase in the demand for product nitrogen gas, the pressure regulating valve 33a is opened. Therefore, liquid nitrogen flows from the liquid nitrogen storage tank 23 to the liquid nitrogen evaporator 31 and is vaporized, and the resulting vaporized nitrogen gas flows into the main pipe 28 as product nitrogen gas. 32
is an impurity analyzer that analyzes the purity of the product nitrogen gas sent out from the main pipe 28, and when the purity is low, operates the valves 34, 34a to release the product nitrogen gas to the outside as shown by arrow B. act. 33 is a pressure regulating valve provided in the main pipe 28.
この装置は、つぎのようにして製品窒素ガスを
製造する。すなわち、空気圧縮機９により空気を
圧縮し、ドレン分離器１０により圧縮された空気
中の水分を除去してフロン冷却器１１により冷却
し、その状態でモレキユラシーブが充填されてい
る吸着筒１２に送り込み、空気中のH2Oおよび
CO2を吸着除去する。ついで、H2O，CO2が吸着
除去された圧縮空気を第１の熱交換器１３および
第２の熱交換器１４に送り込んで超低温に冷却
し、さらに精留塔１５の下部の貯溜液体空気１８
で冷却したのち、精留塔１５内に噴射させる。そ
して、窒素と酸素の沸点の差（酸素の沸点−183
℃，窒素の沸点−196℃）を利用して空気中の酸
素を液化し、窒素を気体のまま取り出して第１ま
たは第２の熱交換器１３，１４に送り込み常温近
くまで昇温させメインパイプ２８から窒素ガスと
して取り出す。この場合、液体窒素貯槽２３内の
液体窒素は、精留塔１５の分縮器１６の寒冷源と
して作用し、それ自身は気化してメインパイプ２
８内に送り込まれ、上記精留塔１５から得られる
空気中の窒素ガスと合わされ製品窒素ガスとして
取り出される。 This device produces product nitrogen gas in the following manner. That is, air is compressed by an air compressor 9, moisture in the compressed air is removed by a drain separator 10, and cooled by a fluorocarbon cooler 11. In this state, the air is sent to an adsorption column 12 filled with molecular sieve. , H 2 O in air and
Adsorbs and removes CO 2 . Next, the compressed air from which H 2 O and CO 2 have been adsorbed and removed is sent to the first heat exchanger 13 and the second heat exchanger 14 to be cooled to an ultra-low temperature, and then the stored liquid air at the bottom of the rectification column 15 is 18
After cooling, it is injected into the rectification column 15. And the difference between the boiling points of nitrogen and oxygen (boiling point of oxygen - 183
℃, the boiling point of nitrogen - 196℃) is used to liquefy oxygen in the air, and nitrogen is taken out as a gas and sent to the first or second heat exchanger 13, 14, where it is heated to near room temperature and then transferred to the main pipe. 28 as nitrogen gas. In this case, the liquid nitrogen in the liquid nitrogen storage tank 23 acts as a cold source for the partial condenser 16 of the rectification column 15, and is itself vaporized to the main pipe 2.
8 and is combined with the nitrogen gas in the air obtained from the rectification column 15 and taken out as a product nitrogen gas.
このように、この窒素ガス製造装置によれば、
液体窒素の蒸発熱を利用して圧縮空気を冷却し、
それを精留塔１５に送り込んで酸素等を分離し窒
素のみを取り出し、これを寒冷源となつた液体窒
素（気体状になつている）と合わせて製品窒素ガ
スとするため、膨脹タービンに起因する前記弊害
を全く生じず、極めて安価に、かつ高純度の窒素
ガスを得ることができる。 In this way, according to this nitrogen gas production device,
Cools compressed air using the heat of vaporization of liquid nitrogen,
It is sent to the rectification column 15 to separate oxygen, etc. and take out only nitrogen, which is combined with liquid nitrogen (in gaseous form), which is the cooling source, to create a product nitrogen gas. It is possible to obtain highly purified nitrogen gas at extremely low cost without causing any of the above-mentioned disadvantages.
すなわち、精留塔１５を高精度に設定すること
により、純度99.99％の窒素ガスを純度ばらつき
なく得ることができるようになる。これに対し
て、PSA方式の窒素ガス製造装置では、たかだ
か99.3％の純度のものしか得られないのであり、
膨脹タービンを用いる深冷液化分離装置では負荷
変動時に純度がばらつくのである。そのうえ、こ
の窒素ガス製造装置は、製品窒素ガスの需要量に
変動が生じても、その変動に応じて液面計２５が
バルブ２６の開度や開閉を制御するため、迅速に
対応できる。そして、液面計２５によるバルブ制
御では対応できないような需要量の大幅な増加
時、もしくは精留塔ラインの故障によつて精留塔
１５から製品窒素ガスが得られなくなつたりした
時等に、バツクアツプ系ライン３０が作動して液
体窒素貯槽２３内の液体窒素を直接蒸発器３１で
気化し、これを製品窒素ガスとしてメインパイプ
２８に流すため、需要量の大幅増加時における製
品窒素ガスの純度低下現象の発生や、製品窒素ガ
ス供給のとだえが回避され、常時安定に製品窒素
ガスを供給しうるのである。これが大きな特徴で
ある。しかも、この装置は、１基の液体窒素貯槽
２３を、精留塔ラインとバツクアツプラインの双
方の貯槽として共用するため、設備費を大幅に節
約できると同時に、液体窒素貯槽の設置スペース
を小さくでき、装置全体のコンパクト化を実現で
きるのであり、これも大きな特徴である。 That is, by setting the rectification column 15 with high precision, nitrogen gas with a purity of 99.99% can be obtained without variation in purity. In contrast, PSA nitrogen gas production equipment can only produce nitrogen with a purity of 99.3% at most.
In a cryogenic liquefaction separator using an expansion turbine, the purity varies when the load fluctuates. Moreover, in this nitrogen gas production apparatus, even if there is a change in the demand for product nitrogen gas, the liquid level gauge 25 controls the degree of opening and opening/closing of the valve 26 in accordance with the change, so that it can respond quickly. When there is a significant increase in demand that cannot be met by valve control using the liquid level gauge 25, or when product nitrogen gas cannot be obtained from the rectification column 15 due to a failure in the rectification column line, etc. , the backup system line 30 operates to directly vaporize the liquid nitrogen in the liquid nitrogen storage tank 23 in the evaporator 31 and flow it into the main pipe 28 as product nitrogen gas. This avoids the occurrence of purity deterioration and interruptions in the supply of product nitrogen gas, making it possible to constantly and stably supply product nitrogen gas. This is a major feature. In addition, this device uses one liquid nitrogen storage tank 23 as a storage tank for both the rectification column line and the back-up line, so it is possible to significantly reduce equipment costs and reduce the installation space of the liquid nitrogen storage tank. This also makes it possible to make the entire device more compact, which is another major feature.
上記のように、この発明の窒素ガス製造装置に
よれば高純度の窒素ガスが安定な状態で得られる
ため、それをそのまま電子工業向けにすることが
できる。そして、このガスには炭酸ガスが含まれ
ていない（製造装置内で除去されている）ため、
炭酸ガス用の吸着槽を別個に装備する必要がな
い。さらに、少量の液体窒素を供給するだけで大
量の窒素ガスが得られるようになる。すなわち、
この発明の窒素ガス製造装置によれば、液体窒素
貯槽２３から100Nm3（ガス換算）の液体窒素を
分縮器１６に送り込むことにより、1000Nm3の製
品窒素ガスを得ることができる。このように、こ
の製造装置によれば少量の液体窒素を供給するだ
けで、その10倍の製品窒素ガスが得られるように
なるのである。したがつて、極めて安価な窒素ガ
スが得られるようになる。また、PSA方式や膨
脹タービン使用の従来の深冷液化分離方式による
窒素ガス製造装置に比べて、装置が簡単であるた
め装置全体が安価であり、かつ多数の弁等も不要
なため、装置の信頼度が大である。また、膨脹タ
ービンに起因する特別な要員も不要になる。 As described above, according to the nitrogen gas production apparatus of the present invention, highly purified nitrogen gas can be obtained in a stable state, so that it can be directly used in the electronic industry. And since this gas does not contain carbon dioxide (it is removed in the manufacturing equipment),
There is no need to separately equip an adsorption tank for carbon dioxide gas. Furthermore, a large amount of nitrogen gas can be obtained by simply supplying a small amount of liquid nitrogen. That is,
According to the nitrogen gas production apparatus of the present invention, by sending 100 Nm 3 (gas equivalent) of liquid nitrogen from the liquid nitrogen storage tank 23 to the dephlegmator 16, product nitrogen gas of 1000 Nm 3 can be obtained. In this way, with this production equipment, by supplying only a small amount of liquid nitrogen, 10 times as much product nitrogen gas can be obtained. Therefore, extremely cheap nitrogen gas can be obtained. In addition, compared to nitrogen gas production equipment using the PSA method or the conventional cryogenic liquefaction separation method that uses an expansion turbine, the equipment is simple and inexpensive, and it does not require a large number of valves. High reliability. It also eliminates the need for special personnel due to the expansion turbine.
第３図は他の実施例の構成図である。この窒素
ガス製造装置は、精留塔１５の上方に凝縮器３５
を付帯させて連通パイプ３６により分縮器１６の
上部と連通させ、分縮器１６の上部に溜められた
窒素ガス（分縮器１６によつて酸素が液化分離さ
れ得られた窒素ガス＋液体窒素貯槽２３から供給
された液体窒素の気化窒素ガス）を凝縮器３５内
に入れるように構成している。そして、この窒素
ガスを、一端３５ｂが精留塔１５の底部と連通し
他端３５ｃが第２および第１の熱交換器１４，１
３を通つて空気中に開放されている冷却パイプ３
５ａで冷却して（冷媒は精留塔１５底部の貯溜液
体空気）その一部を凝縮させ、生成した液体窒素
３７を、ヘツド差を利用して戻しパイプ３８から
分縮器１６内へ戻し、未凝縮の窒素ガスを第２お
よび第１の熱交換器１４，１３を通してメインパ
イプ２８に送り込むようにしている。それ以外の
部分は前記の実施例と同じであり、同一部分に同
一符号を付している。 FIG. 3 is a block diagram of another embodiment. This nitrogen gas production device has a condenser 35 installed above the rectification column 15.
The nitrogen gas stored in the upper part of the partial condenser 16 (nitrogen gas obtained by liquefying and separating oxygen by the partial condenser 16 + liquid) The structure is such that liquid nitrogen (vaporized nitrogen gas) supplied from the nitrogen storage tank 23 is introduced into the condenser 35. One end 35b communicates this nitrogen gas with the bottom of the rectification column 15, and the other end 35c communicates with the second and first heat exchangers 14, 1.
Cooling pipe 3 open to the air through 3
5a (the refrigerant is liquid air stored at the bottom of the rectification column 15), a part of it is condensed, and the generated liquid nitrogen 37 is returned to the demultiplexer 16 from the return pipe 38 using the head difference. Uncondensed nitrogen gas is sent into the main pipe 28 through the second and first heat exchangers 14 and 13. The other parts are the same as those in the previous embodiment, and the same parts are given the same reference numerals.
すなわち、この窒素ガス製造装置は、分縮器１
６の上部から得られる製品窒素ガスを凝縮器３５
に導き、その一部を凝縮させて分縮器１６内に戻
し、液体窒素貯槽２３から供給される液体窒素に
合わせるようにするため、上記凝縮器３５が精留
作用を発揮するようになる。したがつて、前記の
実施例の装置に比べて、液体窒素貯槽２３に供給
する液体窒素として純度の低いものを用いうると
いう優れた効果を得ることができるようになる。 That is, this nitrogen gas production apparatus has a dephlegmator 1
The product nitrogen gas obtained from the upper part of 6 is transferred to a condenser 35.
The condenser 35 exerts a rectification effect in order to condense a portion of it and return it to the demultiplexer 16 to match the liquid nitrogen supplied from the liquid nitrogen storage tank 23. Therefore, compared to the apparatus of the embodiment described above, it is possible to obtain the excellent effect that liquid nitrogen of lower purity can be used as the liquid nitrogen to be supplied to the liquid nitrogen storage tank 23.
第４図はさらに他の実施例の構成図である。こ
の窒素ガス製造装置は、戻しパイプ３８を分縮器
１６ではなく、精留塔１５の上部に接続して凝縮
液体窒素を精留塔１５の上部へ戻すようにしてい
る。それ以外の部分は第３図の実施例と同じであ
り同一部分に同一符号を付している。 FIG. 4 is a block diagram of still another embodiment. In this nitrogen gas production apparatus, the return pipe 38 is connected to the upper part of the rectification column 15 instead of the decentralizer 16, so that the condensed liquid nitrogen is returned to the upper part of the rectification column 15. The other parts are the same as the embodiment shown in FIG. 3, and the same parts are given the same reference numerals.
この実施例によれば、上記と同様の効果が得ら
れるほか、還流液量が増加するため精留効果の向
上も実現しうるようになる。 According to this embodiment, in addition to obtaining the same effects as described above, it is also possible to improve the rectification effect because the amount of reflux liquid increases.
以上のように、この発明の窒素ガス製造装置
は、膨脹タービンを用いず、それに代えて何ら回
転部を持たない液体窒素貯槽のような液体窒素貯
槽手段を用いるため、装置全体として回転部がな
くなり故障が全く生じない。しかも膨脹タービン
は高速回転機器であるため、負荷変動（製品窒素
ガスの取出量の変化）に対するきめ細かな追従運
転が困難であるところ、この発明の装置は、膨脹
タービンに代えて液体窒素貯槽を用い、供給量の
きめ細かい調節が可能な液体窒素を寒冷源として
用いるため、負荷変動に対するきめ細かな追従が
可能となり、純度が安定していて極めて高い窒素
ガスを製造しうるようになる。特に、この発明の
装置は精留塔の上部に、液体窒素の冷熱により還
流液をつくり、これを連続的に精留塔に流下させ
る分縮器を設けたため、分縮器内に液体窒素が所
定量溜つたのちはそれ以降生成する液体窒素が還
流液として常時精留塔内に戻るようになる。した
がつて、分縮器からの還流液の流下供給の断続に
起因する製品純度のばらつき（還流液の流下の中
断により上部精留塔では液がなくなりガスの吹抜
け現象を招いて製品純度が下がり、流下の再開時
には一定純度に戻る）を生じず、常時安定した純
度の製品窒素ガスを供給することができる。ま
た、この発明の装置は、精留塔とは別個に液体窒
素蒸発器を備えることができ、これによつて、精
留塔ラインの故障時もしくは精留塔だけでは対応
できないような製品窒素ガスの需要量の大幅な増
加時に、上記液体窒素蒸発器を作動させ、上記液
体窒素貯蔵手段の液体窒素をその液体窒素蒸発器
で製品窒素ガスとし気化させうるため、製品窒素
ガスの供給がとぎれたり、需要量の大幅増加時に
おける製品窒素ガスの純度低下が生じないという
優れた効果を奏するのである。しかも、この装置
では、１基の液体窒素貯蔵手段を、精留塔ライン
とバツクアツプラインの双方の液体窒素貯蔵手段
として共用でき、それによつて、設備費を大幅に
節約できると同時に、液体窒素貯蔵等の液体窒素
貯蔵手段の設置スペースを小さくでき、装置全体
のコンパクト化を実現できる。
As described above, the nitrogen gas production device of the present invention does not use an expansion turbine, but instead uses a liquid nitrogen storage tank means such as a liquid nitrogen storage tank that does not have any rotating parts, so the entire device has no rotating parts. No failures occur. Furthermore, since the expansion turbine is a high-speed rotating device, it is difficult to perform operation that closely follows load fluctuations (changes in the amount of product nitrogen gas taken out).However, the device of this invention uses a liquid nitrogen storage tank instead of the expansion turbine. Since liquid nitrogen, whose supply amount can be finely adjusted, is used as a cold source, it is possible to closely follow load fluctuations, and it becomes possible to produce nitrogen gas with stable and extremely high purity. In particular, the apparatus of this invention is equipped with a partial condenser at the top of the rectification column that uses the cold heat of liquid nitrogen to create a reflux liquid and continuously flows it down to the rectification column. After a predetermined amount has been accumulated, the liquid nitrogen that is produced thereafter constantly returns to the rectification column as a reflux liquid. Therefore, variations in product purity due to intermittent supply of reflux liquid from the partial condenser (interruption of flow of reflux liquid causes liquid to run out in the upper rectification column, causing gas blow-by phenomenon and reducing product purity). , the purity returns to a constant level when the flow resumes), and product nitrogen gas of stable purity can be supplied at all times. In addition, the apparatus of the present invention can be equipped with a liquid nitrogen evaporator separately from the rectification column, thereby making it possible to handle product nitrogen gas when the rectification column line breaks down or when the rectification column alone cannot handle the product nitrogen evaporator. When there is a significant increase in the demand for nitrogen, the liquid nitrogen evaporator may be activated to vaporize the liquid nitrogen in the liquid nitrogen storage means into product nitrogen gas, which may cause the supply of product nitrogen gas to be interrupted. This has an excellent effect in that the purity of the product nitrogen gas does not deteriorate even when the demand increases significantly. Moreover, with this device, one liquid nitrogen storage means can be used in common as a liquid nitrogen storage means for both the rectification column line and the backup line, thereby significantly reducing equipment costs and at the same time The installation space for liquid nitrogen storage means such as storage can be reduced, and the entire device can be made more compact.
第１図は従来例の構成図、第２図はこの発明の
一実施例の構成図、第３図は他の実施例の構成
図、第４図はさらに他の実施例の構成図である。
９……空気圧縮機、１２……吸着筒、１３，１
４……熱交換器、１５……精留塔、１６……分縮
器、１８……貯溜液体空気、２３……液体窒素貯
槽、２４……第１の導入路パイプ、２５……液面
計、２６……バルブ、２７……取り出しパイプ、
２８……メインパイプ、３０……バツクアツプラ
イン系、３０ａ……第２の導入路パイプ、３１…
…液体窒素蒸発器、３３，３３ａ……圧力調節
弁。
Fig. 1 is a block diagram of a conventional example, Fig. 2 is a block diagram of an embodiment of the present invention, Fig. 3 is a block diagram of another embodiment, and Fig. 4 is a block diagram of yet another embodiment. . 9...Air compressor, 12...Adsorption cylinder, 13,1
4... Heat exchanger, 15... Rectification column, 16... Decentralizer, 18... Storage liquid air, 23... Liquid nitrogen storage tank, 24... First introduction pipe, 25... Liquid level Total, 26...Valve, 27...Takeout pipe,
28...Main pipe, 30...Backup line system, 30a...Second introduction pipe, 31...
...Liquid nitrogen evaporator, 33, 33a...Pressure control valve.
Claims (1)
手段と、この空気圧縮手段によつて圧縮された圧
縮空気中の炭酸ガスと水分とを除去する除去手段
と、この除去手段を経た圧縮空気を超低温に冷却
する熱交換手段と、この熱交換手段により超低温
に冷却された圧縮空気の一部を液化して底部に溜
め窒素を上部へ上昇させる精留塔を備えた窒素ガ
ス製造装置において、精留塔の上側に設けられた
液体窒素を溜める分縮器であつて、精留塔と連通
する複数のチユーブが底面から植立していて、各
チユーブの間が液体窒素溜めに形成され各チユー
ブの上端が内部において開口している分縮器と、
装置外から液体窒素の供給を受けこれを貯蔵する
液体窒素貯蔵手段と、この液体窒素貯蔵手段内の
液体窒素を冷熱発生用膨脹器からの発生冷熱に代
えて圧縮空気液化用の寒冷源として連続的に上記
精留塔内に導く導入路と、上記精留塔から気体と
して取り出される窒素ガスおよび上記精留塔内に
おいて寒冷源としての作用を終え気化した上記液
体窒素を上記熱交換手段を経由させ上記圧縮空気
と熱交換させることにより温度上昇させ製品窒素
ガスとする窒素ガス取出路を備えたことを特徴と
する窒素ガス製造装置。1. Air compression means for compressing air taken in from the outside, removal means for removing carbon dioxide and moisture from the compressed air compressed by this air compression means, and cooling the compressed air that has passed through this removal means to an ultra-low temperature. In a nitrogen gas production apparatus equipped with a heat exchange means for cooling, and a rectification column that liquefies a part of the compressed air cooled to an ultra-low temperature by the heat exchange means, stores it at the bottom, and raises nitrogen to the top, the rectification column is used. It is a dephlegmator installed on the upper side to store liquid nitrogen, and has a plurality of tubes communicating with the rectification column planted from the bottom, and a liquid nitrogen reservoir is formed between each tube, and the upper end of each tube is a decentralizer having an opening in the interior thereof;
A liquid nitrogen storage means that receives liquid nitrogen from outside the device and stores it, and a liquid nitrogen storage means that continuously uses the liquid nitrogen in the liquid nitrogen storage means as a cold source for liquefying compressed air in place of the cold heat generated from the cold heat generation expander. an inlet passage that leads into the rectification column, nitrogen gas taken out as a gas from the rectification column, and the liquid nitrogen that has finished acting as a cold source and has been vaporized in the rectification column, through the heat exchange means. 1. A nitrogen gas production apparatus, comprising: a nitrogen gas extraction path for raising the temperature of the nitrogen gas by exchanging heat with the compressed air, and producing nitrogen gas as a product.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29469487A JPS63148080A (en) | 1987-11-20 | 1987-11-20 | Production unit for nitrogen gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29469487A JPS63148080A (en) | 1987-11-20 | 1987-11-20 | Production unit for nitrogen gas |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2417888A Division JP2540244B2 (en) | 1990-12-28 | 1990-12-28 | Nitrogen gas production equipment |
| JP5753792A Division JPH0587447A (en) | 1987-11-20 | 1992-02-10 | Producing apparatus for nitrogen gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63148080A JPS63148080A (en) | 1988-06-20 |
| JPH0512638B2 true JPH0512638B2 (en) | 1993-02-18 |
Family
ID=17811095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29469487A Granted JPS63148080A (en) | 1987-11-20 | 1987-11-20 | Production unit for nitrogen gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63148080A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07305952A (en) * | 1994-12-22 | 1995-11-21 | Daido Hoxan Inc | Preparation of nitrogen gas |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5047882A (en) * | 1973-04-13 | 1975-04-28 | ||
| JPS5514351A (en) * | 1978-07-14 | 1980-01-31 | Aisin Warner Ltd | Controller of automatic change gear |
-
1987
- 1987-11-20 JP JP29469487A patent/JPS63148080A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5047882A (en) * | 1973-04-13 | 1975-04-28 | ||
| JPS5514351A (en) * | 1978-07-14 | 1980-01-31 | Aisin Warner Ltd | Controller of automatic change gear |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63148080A (en) | 1988-06-20 |
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