JPH05126205A - Vibration eliminating device - Google Patents

Abstract

PURPOSE:To provide a vibration eliminating device which can avoid the state that would affect yield of products or accuracy of measurement and observation by monitoring vibration on a floor plate all the time with a vibration sensor mounted on the floor plate of a vibration eliminating table, judging whether the vibration is within a permitted value of mounted machinery and by putting out a machinery operative signal when the vibration is within the permitted value. CONSTITUTION:A vibration eliminating device suspends a floor plate of a vibration eliminating table 1 and has a spring action for eliminating microvibration from the installed floor of the vibration eliminating table or an exciting force from machinery 2 itself on the vibration eliminating table floor plate. A vibration detector S for detecting vibration on the floor plate is provided at the vibration eliminating table 1, and a vibration monitor device 4 is provided for judging whether the vibration detected by the vibration detector S is within a permitted value of the machinery 2 mounted on the floor plate of the vibration eliminating table 1 and for putting out a machinery operative signal only when the vibration is within the permitted value.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anti-vibration device, and particularly to a semiconductor manufacturing device, an electron microscope, or the like, vibration from the installation floor or vibration force from the device itself adversely affects the yield of products and the accuracy of measurement and observation. The present invention relates to a high-precision vibration isolator that shuts off vibrations from the installation floor of equipment to which it is applied and that damps the vibration force of the equipment itself.

[0002]

2. Description of the Related Art Generally, mechanical devices such as semiconductor manufacturing equipment and electron microscopes adversely affect the yield of products and the accuracy of measurement and observation due to vibrations from the installation floor. The device is used. As this vibration isolator, there has been one in which the vibration isolation base floor plate is supported by vibration isolation rubber or an air spring so that the vibration of the installation floor is not transmitted to the vibration isolation base floor plate.

[0003]

As described above, in the vibration isolator using the anti-vibration rubber and the air spring, the vibration caused by the vibration of the installation floor with respect to the mounted semiconductor manufacturing equipment and the mechanical equipment such as the electron microscope. Can be blocked to some extent,
As a result of constant vibration isolation, it is not observed whether the vibration level (absolute value) is suppressed within the allowable value of the device or not.Therefore, if the device is operated when it exceeds the allowable value, the product This will adversely affect the yield and the accuracy of measurement and observation.

The present invention has been made in view of the above-mentioned points, and a vibration detector mounted on a vibration isolation base floor plate constantly monitors vibrations on the floor plate, and the vibration is within a permissible value of a mechanical device mounted. To provide a vibration isolation device capable of avoiding a condition that adversely affects the yield of products and the measurement and observation accuracy by determining whether or not it is within the allowable value and outputting a machine device operation enable signal when it is within the allowable value. It is an object.

[0005]

In order to achieve the above object, a vibration isolator according to the present invention suspends a vibration isolation base plate to cause a slight vibration from a floor on which a vibration isolation base is installed or a mechanical device on the vibration isolation base plate. In a vibration isolator having a spring action for isolating the vibration force from itself, a vibration detector for detecting vibration on the vibration isolation base floor plate is provided on the vibration isolation base, and the vibration detector detects the vibration. The vibration is constantly monitored, and it is determined whether or not the vibration is within the allowable value of the mechanical device mounted on the floor plate of the vibration isolation table, and only when the vibration is within the allowable value, the mechanical device operable signal is output. The present invention is characterized by a vibration isolation device having a vibration monitoring device.

[0006]

According to the present invention having the above-mentioned structure, the vibration detector mounted on the vibration isolation table detects the vibration on the table, and if the vibration is within the vibration allowable value of the mechanical device, the operable signal is issued. Is output, and the mechanical device is operated only when this operable signal is output. If the allowable value is exceeded, no signal will be output and the machine will stop. Therefore,
The mechanical device operates depending on the presence or absence of the operation enable signal, and always operates in an environment in which the vibration on the table is within the allowable value.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a vibration isolator according to the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a diagram showing a vibration isolation system according to the present invention.

A mechanical device 2 such as a semiconductor manufacturing apparatus or an electron microscope is mounted on a vibration isolation table 1, and the mechanical device 2 is connected to a mechanical device controller 3 and controlled by the mechanical device controller 3. ing. Vibration isolation table 1
Is equipped with a vibration detector S.

A vibration monitoring device 4 is provided adjacent to the mechanical device 2 and the vibration isolation table 1, and the vibration on the vibration isolation table detected by the vibration detector S is always on the vibration monitoring device 4.
(Active type vibration isolation table is inside the controller). Further, the vibration monitoring device 4 is connected to the mechanical device controller 3.

Next, the operation of the vibration isolator constructed as described above will be described with reference to FIG. 2 which is a vibration monitoring flowchart.

The vibration detector S attached to the vibration isolation table 1 detects the vibration of the vibration isolation table 1 and outputs a detection signal to the vibration monitoring device 4.
To (step 1). It is determined whether the vibration X is within the vibration allowable value of the mechanical device 2 (step 2). If the vibration is within the vibration allowable value of the mechanical device 2, an operable signal is sent to the mechanical device controller 3 (step 3). Then, the mechanical device 2 is operated only when the operable signal is sent. If the allowable value is exceeded, the operable signal is not sent and the mechanical device 2 is stopped. Therefore, the mechanical device 2 operates depending on the presence / absence of this operable signal, and always operates in the environment in which the vibration on the vibration isolation table 1 is within the allowable value.

[0013]

As described above, according to the vibration isolator of the present invention, the mechanical device mounted on the vibration isolation table operates depending on the presence or absence of the mechanical device operation enable signal from the vibration monitoring device, and is always on the table. The mechanical device will operate in an environment where the vibration of the above is within the allowable value. Therefore, it is possible to avoid a state that adversely affects the yield of products and the accuracy of measurement and observation.

[Brief description of drawings]

FIG. 1 is a basic configuration diagram showing an embodiment of a vibration isolation device according to the present invention.

FIG. 2 is a vibration monitoring flowchart in the vibration isolation device according to the present invention.

[Explanation of symbols]

 1 Vibration Isolation Table 2 Mechanical Device 3 Mechanical Device Controller 4 Vibration Monitoring Device (Vibration Isolation Table Controller) S Vibration Detector

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Office reference number FI technical display location G01H 17/00 Z 8117-2G H01L 21/027

Claims (1)

[Claims] 1. A vibration isolation device having a spring action for suspending a vibration isolation table floor plate and isolating a microvibration from a floor on which the vibration isolation table is installed or a vibration force from a mechanical device itself on the vibration isolation table floor plate. , A vibration detector for detecting vibration on the vibration isolation base floor plate is provided on the vibration isolation base, and the vibration detected by the vibration detector is constantly monitored to mount the vibration on the vibration isolation base floor plate. The vibration isolation device is provided with a vibration monitoring device for determining whether or not it is within a permissible value of the mechanical device, and outputting a mechanical device operation enable signal only when within the permissible value.