JPH05126117A - Connection mechanism of inter-unit frame - Google Patents

Abstract

PURPOSE:To facilitate procedure at the time of connecting units together, to achieve reproducibility in the height and direction between the respective units at the time of connection when they are re-connected, and to reduce production cost as a result of simplification of mechanical process and parts mounting precision. CONSTITUTION:When a connection fitting 1 of a unit for connection, and a connection fitting 2 of a unit to be connected, are to be connected together, after the height and so on of a wafer carrier is adjusted, adjustment is carried out by using an adjustment plate 5 so that a pin 3 is inserted into the connection fitting 2 of the unit to be connected, through the connection fitting 1 of the unit for connection, and after the pin 3 is fixed by a pin press plate 4, final fixation of the units is carried out by a bolt 7 for fixing unit.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connection between devices having a concept of two or more units in a semiconductor manufacturing apparatus or the like.

[0002]

2. Description of the Related Art FIG. 3 is a front view of a conventional connecting portion, and FIG. 4 is a side view thereof. In the figure, 1 is a connecting metal fitting of the unit 10 to be connected, 2 is a connecting metal fitting on the unit 11 side to be connected, and 9 is a bolt for connection. The connection fitting 1 is provided with a bolt hole larger than the bolt 9, and the connection fitting 2 is provided with a screw hole corresponding to the bolt 9.

In the connection device having such a structure, when connecting the units, the heights from the reference planes between the connection fittings 1 and 2 and the directions of the surfaces to be connected are accurately determined. After the connection, the bolts 9 were connected and fixed. Further, since the degree of freedom of the connecting fitting is limited, it is necessary to increase the dimensional accuracy of the parts and to make the mounting location of the connecting fitting on the mount accurate.

[0004]

Since the inter-unit connection portion represented by the conventional semiconductor manufacturing apparatus is constructed as described above, when adjusting, for example, the wafer transfer height on the apparatus, It is difficult to match the levels between the units, and when the connected units are separated, the play of the wafer transfer height between the units cannot be reproducible due to play in the bolt holes. Also,
Since the degree of freedom of the connecting portion is small, it is necessary to manufacture the parts with high processing accuracy and dimensional accuracy of the mounting location, which causes problems such as an increase in processing cost.

The present invention has been made in order to solve the above problems, and facilitates and simplifies the work at the site when the unit is connected, and reproduces the condition at the time of connection after disconnecting the unit. The purpose is to gain sex. Another object of the present invention is to increase the degree of freedom of the connecting fitting by using the adjusting plate, eliminate the need to extremely improve the mechanical accuracy of parts and the mounting accuracy of the mounting fitting, and reduce the processing cost.

[0006]

The connecting portion between the units according to the present invention is easy to connect between the units by replacing the ones that are conventionally connected by using screws with pins and providing an adjusting plate in the middle. It has been transformed.

[0007]

In the connection portion between the units according to the present invention, the pins, the pin pressing plate, and the adjusting plate simplify the attachment and detachment between the units, and the reproducibility of the wafer transfer height between the units can be provided. Further, since the bolts can be finely adjusted, there is no problem that the bolts cannot be attached because the bolts and the screw holes are misaligned even if the connection between the units is in an appropriate position.

[0008]

【Example】

Example 1. An embodiment of the present invention will be described below with reference to the drawings. 1 shows a front view and FIG. 2 shows a side view thereof. In the figure, 3 is a pin, 4 is a pin pressing plate, 5 is an adjusting plate,
6 is a bolt for fixing the adjusting plate, and 7 is a bolt for fixing the unit. The insertion portions of the connection fittings 1 and 2 and the pin 3 provided on the adjustment plate 5 are provided with bolt holes slightly larger than the pin 3. The pin pressing plate 4 fixes the pin 3, which is fixed to the adjusting plate 5 by a pin pressing plate fixing bolt 8. The adjustment plate fixing bolt 6 has a role of fixing the adjustment plate 5 to the unit connection fitting 1. For final connection and fixing between the units, the unit fixing bolts 7 are used. Since each bolt and pin of the unit to be connected is provided with play, it is possible to deal with the situation that the metal fittings are slightly displaced from each other but are appropriate between the units. .

In the inter-unit connection mechanism configured as described above, for example, after adjusting the most necessary dimensions such as the wafer transfer height and the position of the connecting portion, the pin holes and the pins arranged in the adjusting plate 5 are arranged. By adjusting the play allowance of
Make sure that the pin 3 can be inserted into the fitting 2 smoothly.
After fixing the adjustment plate 5 with the adjustment plate fixing bolts 6, the units are connected and the pins 3 are connected to the connection fittings 2.
, And fix the pin pressing plate 4 with the pin pressing plate fixing bolt 8. The final connection and fixing of the unit is fixed by the unit fixing bolt 7. To detach the unit, simply remove the bolt 7, and at the time of the next connection, just adjust the height and direction of the unit so that the pin 3 can be inserted into the connection metal fitting 2 and have the reproducibility at the time of the previous docking. You can Originally, it was difficult to connect if the connection bolt holes were slightly misaligned at the time of connection, and fine adjustment was performed by moving the entire unit, but in the present invention, the unit to be connected, the pin or the bolt, Since there is a long hole in the part where there is, fine adjustment is possible. Furthermore, it is no longer necessary to raise the machining accuracy and mounting dimensional accuracy of parts to an extremely high level.

Embodiment 2. In the above embodiment, the configuration of the connecting mechanism is one in which two pins are provided for one set of connecting fittings. However, in the case of a unit having a long connecting portion, the number of pins is two.
Not only in one place but also in several places between them, the connection state may be made more reliable.

Embodiment 3. Although the unit fixing bolts 7 were used for final connection and fixing, the bolts are omitted in places where a load is not so much applied or where the unit is small and no bolts are required, and the pin 3 is a split pin or a retaining ring. May be provided.

[0012]

As described above, according to the present invention, the pin is used instead of the bolt for connecting the units, and the position of the pin is adjusted by adjusting the adjusting plate. The connection can be simplified, and since the pins are fixed, there is an effect that the previous reproducibility can be obtained when the units are connected again. Also, since the adjustment plate is used for fine adjustment, it leads to simplification of machining accuracy of parts and mounting accuracy of parts, the device can be made inexpensive, and fine adjustment is easy, so workability at the site is also improved. To do.

[Brief description of drawings]

FIG. 1 is a front view showing a connection mechanism of an inter-unit mount according to an embodiment of the present invention.

FIG. 2 is a side view showing a connection mechanism of the inter-unit mount according to the embodiment of the present invention.

FIG. 3 is a front view showing a conventional connecting mechanism for an inter-unit mount.

FIG. 4 is a side view showing a conventional connecting mechanism of an inter-unit mount.

[Explanation of symbols]

 1 Connection fittings for the unit to be connected 2 Connection fittings for the unit to be connected 3 pins 4 pins holding plate 5 adjustment plate 6 adjustment plate fixing bolts 7 unit fixing bolts 8 pins holding plate fixing bolts 9 unit fixing bolts 10 Unit to be connected 11 Unit to be connected

Claims (1)

[Claims] 1. When connecting a device divided into at least two or more units, a metal fitting fixed to the two units, an adjusting plate fixed to one of the metal fittings, and the above-mentioned 3
A connecting mechanism for an inter-unit pedestal, comprising: one metal fitting, a pin connecting the adjusting plate, and a means for fixing the pin to the adjusting plate.