JP2002264067A - Robot - Google Patents

Robot

Info

Publication number
JP2002264067A
JP2002264067A JP2001062413A JP2001062413A JP2002264067A JP 2002264067 A JP2002264067 A JP 2002264067A JP 2001062413 A JP2001062413 A JP 2001062413A JP 2001062413 A JP2001062413 A JP 2001062413A JP 2002264067 A JP2002264067 A JP 2002264067A
Authority
JP
Japan
Prior art keywords
arm
robot
rotating shaft
tilt
inclination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001062413A
Other languages
Japanese (ja)
Other versions
JP2002264067A5 (en
JP4029578B2 (en
Inventor
Shuichi Tonai
修一 藤内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2001062413A priority Critical patent/JP4029578B2/en
Publication of JP2002264067A publication Critical patent/JP2002264067A/en
Publication of JP2002264067A5 publication Critical patent/JP2002264067A5/ja
Application granted granted Critical
Publication of JP4029578B2 publication Critical patent/JP4029578B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a robot causing no lowering of reliability and parts accuracy while facilitating the work of adjusting the vertical inclination of a horizontally rotating arm. SOLUTION: This robot 1 comprises a body 2 and at least one horizontally rotating arm 4 connected to a rotating shaft 3 vertically projecting from the upper part of the body 2. The arm 4 is connected to the rotating shaft 3 at the side face of the arm 4, and the connection part is provided with an inclination adjusting device 6 so as to be able to easily correct the vertical inclination of the arm 4.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、胴体の上部に、鉛
直軸回りに回転する一本以上の水平アームを具備するロ
ボットに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot having one or more horizontal arms that rotate around a vertical axis at the top of a body.

【0002】[0002]

【従来の技術】例えば、このようなロボットとしては水
平多関節形ロボットがある。図2および図3に従来の水
平多関節形ロボットの一例を示す。水平多関節形ロボッ
ト11は、胴体12と、前記胴体12の上部に鉛直方向
に突出した回動軸13と、前記回動軸13に連結され、
水平方向に回動する第1アーム13と、前記第1アーム
13の先端部に、同様に回動可能に連結された第2アー
ム14とからなり、前記第2アーム14の先端部に、図
示しないウェハ搬送用フォークや加工具等を配設して構
成される。しかしながら、このような水平多関節形ロボ
ット11においては、第1アーム13の取り付け部に常
にモーメントがかっていること、および部品誤差あるい
は経年変化により軸受等に発生したガタのため、第2ア
ーム等が水平面に対して傾くという問題がある。このた
め、従来は、図3に示すように、回動軸15と第1アー
ム13との取り付け部において、アーム筐体13aと、
前記アーム筐体13aと連結する回動軸15との間に、
傾きに対応するシム16を敷いて水平多関節形ロボット
のアームの水平面に対する傾きを矯正を矯正していた。
なお、図4において17は締結ボルトである。
2. Description of the Related Art As such a robot, for example, there is a horizontal articulated robot. 2 and 3 show an example of a conventional horizontal articulated robot. The horizontal articulated robot 11 is connected to the body 12, a rotating shaft 13 vertically projecting above the body 12, and the rotating shaft 13,
A first arm 13 that rotates in the horizontal direction, and a second arm 14 that is also rotatably connected to the distal end of the first arm 13, are attached to the distal end of the second arm 14. It is configured by disposing a fork for wafer transfer, a processing tool, and the like. However, in such a horizontal articulated robot 11, the second arm and the like are not provided because a moment is always applied to the mounting portion of the first arm 13, and play occurs in bearings and the like due to component errors or aging. There is a problem of tilting with respect to the horizontal plane. For this reason, conventionally, as shown in FIG. 3, an arm housing 13a is provided at an attachment portion between the rotation shaft 15 and the first arm 13.
Between the arm housing 13a and the rotating shaft 15 connected to the arm housing 13a,
The inclination of the arm of the horizontal articulated robot with respect to the horizontal plane was corrected by laying the shim 16 corresponding to the inclination.
In FIG. 4, reference numeral 17 denotes a fastening bolt.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、このよ
うな従来の技術においては、第1アーム14と回動軸1
3との間にシム6を敷くために、次のような問題があっ
た。 (2) 一度組み立てた機構部を分解する必要があり、作業
が大変面倒である。 (2) 第1アーム14と回動軸13との間の面当たりが悪
くなるとともに、締結ボルト17も斜めに入って無理な
力が加わるため信頼性が低くなる。 (3) 第1アーム14のアーム筐体14aに無理な力が作
用して歪むため、部品精度が悪くなる。 本発明は、このような問題を解消するためになされたも
ので、水平方向に回動するアームの上下方向の傾きの調
節作業が容易で、かつ信頼性や部品精度の低下を招くこ
とのないロボットを提供することを目的とするものであ
る。
However, in such a conventional technique, the first arm 14 and the rotating shaft 1 are not provided.
In order to lay the shim 6 between the third and the third, there were the following problems. (2) It is necessary to disassemble the mechanical part once assembled, and the work is very troublesome. (2) The surface contact between the first arm 14 and the rotating shaft 13 becomes worse, and the fastening bolt 17 also enters obliquely and an excessive force is applied, thereby lowering the reliability. (3) Since an excessive force acts on the arm housing 14a of the first arm 14 to distort it, the precision of the parts is deteriorated. The present invention has been made in order to solve such a problem, and it is easy to adjust the vertical inclination of an arm that rotates in a horizontal direction, and does not cause a decrease in reliability or component accuracy. It is intended to provide a robot.

【0004】[0004]

【課題を解決するための手段】上記課題を解決するため
に、本発明は、胴体と、前記胴体の上部に鉛直方向に突
出した回動軸に連結され、水平方向に回動する少なくと
も一本のアームを具備して構成されたロボットにおい
て、前記アームを、アームの側面において前記回動軸と
連結するとともに、前記アームの上下方向の傾きを容易
に修正できるように、前記連結部に傾き調整装置を設け
るようにしたものである。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to a body and at least one shaft which is connected to a rotating shaft vertically protruding from an upper portion of the body and which rotates in a horizontal direction. In the robot configured with the arm of (1), the arm is connected to the rotating shaft on a side surface of the arm, and the connecting portion is tilt-adjusted so that the vertical tilt of the arm can be easily corrected. An apparatus is provided.

【0005】[0005]

【発明の実施の形態】以下、本発明の実施例を図に基づ
いて説明する。図1(a)は、本発明の実施例を示す水
平多関節形ロボットの側面図で、(b)は、(a)にお
ける第1アームと回動軸との取り付け部を示す部分断面
図である。本発明の水平多関節形ロボット1も、従来の
水平多関節形ロボットと同様に、胴体2と、前記胴体2
の上部に鉛直方向に突出した回動軸3と、前記回動軸3
に連結され、水平方向に回動する第1アーム3と、前記
第1アーム3の先端部に、同様に回動可能に連結された
第2アーム4とからなり、前記第2アームの先端部に、
図示しないウェハ搬送用フォークや加工具等を配設して
構成されるが、第アーム4のアーム筐体4aと回動軸3
との連結構造が従来とは異なっている。すなわち、図2
に示すように、回動軸3と第1アーム4のアーム筐体4
aは、両者の間にL字状の傾き調整装置6を介在させて
連結し、第1アーム4の上下方向の傾きを調整できるよ
うにしている。前記傾き調整装置6は、回動軸3と連結
される、または回動軸3と一体的に構成される水平部6
aと、前記第1アーム4と連結される鉛直部6bとから
構成されており、鉛直部6bの中央部分にピン穴6cを
形成するとともに、前記ピン穴6cの周囲に図示しない
ボルト穴を複数個形成している。前記ボルト穴は、第1
アーム4の傾きを吸収できる程度の大きさのバカ穴で形
成されている。また、前記第1アーム4は、前記傾き調
整装置6と連結するアーム筐体4aの側面部に、傾き調
整装置6のピン穴6cと対応するピン4bを形成してい
る。第1アーム4と傾き調整装置6は、前記ピン4bを
ピン穴6cに嵌合し、締結ボルト7を締め付けていない
状態において、第1アーム4をHで示す鉛直面上で回転
自在に調整することができる構造となっている。したが
って、ロボットの初期組立時、更には長期間使用後の経
年変化でアームの傾きが変化した場合にも、機構部を分
解することなく、外部から締結ボルト7を緩めるだけ
で、容易に、かつ確実にアームの傾きを調整してロボッ
トに要求される傾き許容値にすることができる。なお、
本発明においては、胴体内にアームの昇降装置を有して
いるロボットにおいても適用することができるし、リン
ク式のロボットにおいても適用することができる。ま
た、傾き調整装置は第1アームのみでなく、第2アーム
等にも使用することができる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1A is a side view of a horizontal articulated robot showing an embodiment of the present invention, and FIG. 1B is a partial cross-sectional view showing a mounting portion between a first arm and a rotating shaft in FIG. is there. The horizontal articulated robot 1 of the present invention also has a torso 2 and the torso 2 similar to the conventional horizontal articulated robot.
A rotating shaft 3 protruding vertically in the upper part of the
And a second arm 4 similarly rotatably connected to a distal end of the first arm 3. The distal end of the second arm To
An arm housing 4a of the fourth arm 4 and a rotating shaft 3 are provided.
Is different from the conventional structure. That is, FIG.
As shown in the figure, the arm housing 4 of the rotating shaft 3 and the first arm 4
“a” is connected by interposing an L-shaped tilt adjusting device 6 between them so that the vertical tilt of the first arm 4 can be adjusted. The tilt adjusting device 6 includes a horizontal portion 6 connected to the rotating shaft 3 or integrally formed with the rotating shaft 3.
a, and a vertical portion 6b connected to the first arm 4. A pin hole 6c is formed at the center of the vertical portion 6b, and a plurality of bolt holes (not shown) are provided around the pin hole 6c. Individually formed. The bolt hole is the first
It is formed with a stupid hole large enough to absorb the inclination of the arm 4. The first arm 4 has a pin 4b corresponding to a pin hole 6c of the tilt adjustment device 6 formed on a side surface of an arm housing 4a connected to the tilt adjustment device 6. The first arm 4 and the tilt adjusting device 6 adjust the first arm 4 rotatably on a vertical plane indicated by H in a state where the pin 4b is fitted into the pin hole 6c and the fastening bolt 7 is not tightened. It has a structure that can do it. Therefore, at the time of initial assembly of the robot, and even when the inclination of the arm changes due to aging after long-term use, the loosening of the fastening bolt 7 from the outside is easy, and The tilt of the arm can be reliably adjusted to the tilt allowable value required for the robot. In addition,
In the present invention, the present invention can be applied to a robot having an arm elevating device in the body, and can also be applied to a link type robot. Further, the tilt adjusting device can be used not only for the first arm but also for the second arm and the like.

【0006】[0006]

【発明の効果】以上述べたように、本発明によれば、ア
ームの傾きを、組み立て初期、更には経年変化で傾きが
変化した場合にも、部材に悪影響を与えることなく、ま
た機構部を分解することなく、外部から容易に、かつ正
確に調整適合させ、ロボットに要求される傾き許容値に
することができる効果がある。
As described above, according to the present invention, even when the inclination of the arm is changed at the initial stage of assembly, or even after aging, the arm is not adversely affected, and the mechanism is not affected. Without disassembly, there is an effect that adjustment and adaptation can be easily and accurately performed from the outside, and the tilt tolerance required for the robot can be set.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の実施例を示す水平多関節形ロボット
で、(a)は側面図、(b)は(a)における第1アー
ムと回動軸との取り付け部を示す部分断面図である。
FIG. 1 is a horizontal articulated robot showing an embodiment of the present invention, wherein (a) is a side view, and (b) is a partial cross-sectional view showing a mounting portion between a first arm and a rotating shaft in (a). is there.

【図2】 従来技術における水平多関節形ロボットを示
す側面図である。
FIG. 2 is a side view showing a horizontal articulated robot according to the related art.

【図3】 図2における第1アームと回動軸との取り付
け部を示す部分断面図である。
FIG. 3 is a partial cross-sectional view showing a mounting portion between a first arm and a rotation shaft in FIG. 2;

【符号の説明】[Explanation of symbols]

1 水平多関節形ロボット、 2 胴体、 3 回動軸、 4 第1アーム、 4a アーム筐体、 4b ピン、 5 第2アーム、 6 傾き調整装置、 6a 鉛直部、 6b 水平部、 6c ピン穴、 7 締結ボルト Reference Signs List 1 horizontal articulated robot, 2 torso, 3 rotation axis, 4 first arm, 4a arm housing, 4b pin, 5 second arm, 6 tilt adjusting device, 6a vertical part, 6b horizontal part, 6c pin hole, 7 Fastening bolt

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 胴体と、前記胴体の上部に鉛直方向に突
出した回動軸に連結され、水平方向に回動する少なくと
も一本のアームを具備して構成されたロボットにおい
て、 前記アームを、アームの側面において前記回動軸と連結
するとともに、前記アームの上下方向の傾きを容易に修
正できるように、前記連結部に傾き調整装置を設けたこ
とを特徴とするロボット。
1. A robot comprising: a torso; and at least one arm that rotates in a horizontal direction and that is connected to a rotating shaft that protrudes vertically in an upper part of the torso, wherein the arm includes: A robot, wherein the robot is provided with a tilt adjusting device at the connecting portion so as to be connected to the rotation shaft on a side surface of the arm and to easily correct the vertical tilt of the arm.
JP2001062413A 2001-03-06 2001-03-06 robot Expired - Fee Related JP4029578B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001062413A JP4029578B2 (en) 2001-03-06 2001-03-06 robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001062413A JP4029578B2 (en) 2001-03-06 2001-03-06 robot

Publications (3)

Publication Number Publication Date
JP2002264067A true JP2002264067A (en) 2002-09-18
JP2002264067A5 JP2002264067A5 (en) 2005-11-04
JP4029578B2 JP4029578B2 (en) 2008-01-09

Family

ID=18921555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001062413A Expired - Fee Related JP4029578B2 (en) 2001-03-06 2001-03-06 robot

Country Status (1)

Country Link
JP (1) JP4029578B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101683738A (en) * 2008-09-26 2010-03-31 日本电产三协株式会社 Industrial robot
JP2011031372A (en) * 2009-08-06 2011-02-17 Yaskawa Electric Corp Industrial robot
CN103770126A (en) * 2012-10-17 2014-05-07 北京北方微电子基地设备工艺研究中心有限责任公司 Adjustment device and plasma machining device
WO2015020089A1 (en) * 2013-08-09 2015-02-12 日本電産サンキョー株式会社 Horizontal multi-joint robot and production method for horizontal multi-joint robot
JP2015036183A (en) * 2013-08-09 2015-02-23 日本電産サンキョー株式会社 Horizontally articulated robot and method for manufacturing horizontally articulated robot
JP2015100863A (en) * 2013-11-22 2015-06-04 キヤノン株式会社 Teaching method for robot
US10780586B2 (en) 2013-08-09 2020-09-22 Nidec Sankyo Corporation Horizontal articulated robot with bevel gears

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102319645B1 (en) 2019-11-22 2021-11-01 세메스 주식회사 Substrate processing apparatus and substrate processing method

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101683738A (en) * 2008-09-26 2010-03-31 日本电产三协株式会社 Industrial robot
CN101683738B (en) * 2008-09-26 2014-01-01 日本电产三协株式会社 Industrial robot
JP2011031372A (en) * 2009-08-06 2011-02-17 Yaskawa Electric Corp Industrial robot
CN103770126A (en) * 2012-10-17 2014-05-07 北京北方微电子基地设备工艺研究中心有限责任公司 Adjustment device and plasma machining device
WO2015020089A1 (en) * 2013-08-09 2015-02-12 日本電産サンキョー株式会社 Horizontal multi-joint robot and production method for horizontal multi-joint robot
JP2015036183A (en) * 2013-08-09 2015-02-23 日本電産サンキョー株式会社 Horizontally articulated robot and method for manufacturing horizontally articulated robot
CN105408068A (en) * 2013-08-09 2016-03-16 日本电产三协株式会社 Horizontal multi-joint robot and production method for horizontal multi-joint robot
KR20160042880A (en) * 2013-08-09 2016-04-20 니혼 덴산 산쿄 가부시키가이샤 Horizontal multi-joint robot and production method for horizontal multi-joint robot
US10195743B2 (en) 2013-08-09 2019-02-05 Nidec Sankyo Corporation Horizontal articulated robot and method for manufacturing horizontal articulated robot
US10780586B2 (en) 2013-08-09 2020-09-22 Nidec Sankyo Corporation Horizontal articulated robot with bevel gears
KR102294107B1 (en) * 2013-08-09 2021-08-26 니혼 덴산 산쿄 가부시키가이샤 Horizontal multi-joint robot and production method for horizontal multi-joint robot
JP2015100863A (en) * 2013-11-22 2015-06-04 キヤノン株式会社 Teaching method for robot

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