JP2003347387A - Mounting position adjusting apparatus and mounting position adjusting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a position adjusting apparatus in which a mounting position is accurately and easily adjusted without distortion. <P>SOLUTION: In a mounting position adjusting apparatus 10 for adjusting positions of a load port 100 and a semiconductor manufacturing device 200 by means of a push bolt 24 and a pull bolt 22 when mounting and fixing the load port 100 on the mount face 200a of the semiconductor manufacturing device 200 while keeping a prescribed interval, the mounting position adjusting apparatus is equipped with a position adjusting bolt 20 in which the pull bolt 22 is used as a hollow shank 22a and the push bolt 24 is inserted into the hollow shank 22a. <P>COPYRIGHT: (C)2004,JPO

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mounting position adjusting device and a mounting position adjusting method for mounting an object to be mounted on a mounting surface of the object, and more particularly to loading a semiconductor wafer in a clean room into a semiconductor manufacturing apparatus. Position adjustment device and an attachment position adjustment method for attaching a load port to a mounting surface of a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art In a clean room, when a semiconductor wafer in a pod is transferred to a semiconductor manufacturing apparatus, a load port is used as an apparatus for transferring the semiconductor wafer in the pod to the semiconductor manufacturing apparatus while keeping the pod hermetically sealed. Is used.

[0003] This load port will be described with reference to FIG. FIG. 4 is a partially cutaway side view for explaining the load port 100. As shown in FIG. 4, the load port 100 includes a base plate 102, a load port table 110 on which a pod (not shown) is loaded, an upper bracket 120, a lower bracket 122, and a push bolt 13.
2. A pull bolt 130 is provided.

On the other hand, an upper plate 202 and a lower plate 20 for mounting the load port 100 are mounted on the mounting surface 200a of the load port 100 of the semiconductor manufacturing apparatus 200.
4 are provided.

In general, since the mounting surface 200a of the load port 100 of the semiconductor manufacturing apparatus 200 is not necessarily vertical, an adjusting mechanism for adjusting the gap between the mounting surface 200a and the load port 100 is required. The adjustment is performed by adjusting the upper and lower brackets 120 and 122 of the load port 100 and the upper plate 20 of the mounting surface 200 a of the semiconductor manufacturing apparatus 200.
2. It is performed by adjusting the gap of the lower plate 204 with the push bolt 132 and the pull bolt 130.

[0006] Here, the push bolt 132 sets the amount of lift of the gap, and the pull bolt 130 is used to fix the load port 100. This push bolt 13
2. The method of adjusting the gap using the pull bolt 130 is as follows.
It has the advantage that the degree of freedom of adjustment is greater than the method of setting the gap using a spacer or the like.

In FIG. 4, representatively, a push bolt 1
Although a pair of upper and lower 32 and pull bolts 130 are shown, there are various cases such as a case where there are two pairs of push bolts 132 and one pair of pull bolts 130.

[0008]

Problems with the above-described conventional load port adjusting mechanism will be described with reference to FIGS. 5 and 6 and to FIG. FIG.
Is a partially cut-away enlarged side view showing an adjustment mechanism of a load port, in which there are two adjustment bolts. FIG. 6 is a partially cut-away enlarged side view showing an adjustment mechanism of the load port, in which there are three adjustment bolts.

FIGS. 5 and 6 are enlarged views of a portion near the position adjusting mechanism in the load port 100 and the semiconductor manufacturing apparatus 200 shown in FIG. 5 and 6
Although the drawing is somewhat exaggerated, as shown in FIG. 5, when the pull bolt 130 and the push bolt 132 are a pair of upper and lower, respectively, the bracket 120 of the load port 100 is distorted, Since the bending stress acts on the load port 100, the load port 100 is distorted, and the position adjustment becomes inaccurate. In addition, the adjustment mechanism is complicated because a plurality of bolts 130 and 132 are used,
There is also a problem that the adjustment work becomes complicated.

[0010] The present invention solves the above problems (problems),
It is an object of the present invention to provide a position adjustment device and a position adjustment method that can be accurately and easily adjusted without distortion.

[0011]

According to the first aspect of the present invention, there is provided a mounting position adjusting device for mounting and fixing an object to be mounted on a mounting surface of the object with a predetermined gap. In a mounting position adjusting device for arbitrarily adjusting the position of an object to be mounted and a mounting object with a push bolt and a pull bolt, a position adjusting bolt having the pull bolt as a hollow shaft and a push bolt inserted into the hollow shaft is provided. Configured.

With this configuration, the pull bolt and the push bolt are located at the same center, and the distribution of force is concentric, so that no bending stress acts on the object to be mounted and no distortion is generated. It can be a device. Further, since the pull bolt and the push bolt are integrated and the structure is simplified, the adjustment work is simplified, the adjustment accuracy is improved, and the space and the cost are reduced.

According to a second aspect of the present invention, when the load port is mounted and fixed on the mounting surface of the semiconductor manufacturing apparatus with a predetermined gap therebetween, the load port and the semiconductor manufacturing apparatus are fixed by a push bolt and a pull bolt. In the mounting position adjusting device for adjusting the position with the device, the pull bolt is used as a hollow shaft, and a position adjusting bolt having the push bolt inserted into the hollow shaft is provided.

With this configuration, the pull bolt and the push bolt are located at the same center, and the distribution of force is concentric, so that no bending stress acts on the load port and no distortion occurs. It can be. Further, since the pull bolt and the push bolt are integrated and the structure is simplified, the adjustment work is simplified, the adjustment accuracy is improved, and the space and the cost are reduced.

According to a third aspect of the present invention, there is provided a mounting position adjusting method using the mounting position adjusting device according to the first or second aspect, wherein the interval is set by the push bolt and fixed by the pull bolt.

With this arrangement, the pull bolt and the push bolt are located at the same center, and the distribution of force is concentric, so that no bending stress is applied and no distortion is generated. it can.

[0017]

1 to 3 show an embodiment of a mounting position adjusting device and a mounting position adjusting method according to the present invention.
This will be described with reference to FIG. FIG. 1 is a partially cut-away side view showing an embodiment of a mounting position adjusting device according to the present invention. FIG.
FIG. 3 is a side view showing the structure of the position adjusting bolt used in the mounting position adjusting device of the present invention, and FIG.

As shown in FIG. 1, a mounting position adjusting device 10 according to the present embodiment has a structure in which position adjusting bolts 20 are mounted on upper and lower brackets 120 and 122 of a load port 100. As shown in FIGS. 2 and 3, the position adjusting bolt 20 is configured by using a push bolt 22 as a hollow shaft 22 a and inserting a pull bolt 24 into the hollow shaft 22 a.

The position of the load port 100 is adjusted by mounting the position adjusting bolt 20 at a predetermined position on the upper and lower plates 202 and 204 of the semiconductor manufacturing apparatus 200. As with the conventional adjusting mechanism, the push bolt 22 is The distance between the load port 100 and the semiconductor manufacturing apparatus 200 is set, and the pull bolt 24 serves to fix the load port 100 to the semiconductor manufacturing apparatus 200.

On the other hand, in the position adjusting device 10 of the present embodiment, as shown in FIG.
Since the pull bolt 24 is inserted into the hollow shaft 22a, the pull bolt 24 and the push bolt 22 are located at the same center, and the force distribution is concentric. When the device 200 is mounted on the mounting surface 200a and the mounting position is adjusted, no bending stress acts on the device 200 and no distortion occurs. In addition, since the pull bolt 24 and the push bolt 22 are integrated and the structure is simplified, the adjustment work is simplified, the adjustment accuracy is improved, and space and cost are reduced.

The mounting position adjusting device of the present invention is not limited to the above-described embodiment, and various changes can be made. For example, in the above-described embodiment, an example in which the load port is attached to the semiconductor manufacturing apparatus has been described. However, in general, the present invention is not limited to this combination. It is obvious.

[0022]

The mounting position adjusting device and the mounting position adjusting method according to the present invention have the following excellent effects because they are configured as described above. (1) As described in claim 1, the mounting position adjusting device of the present invention is such that the mounting position adjusting device is provided with a position adjusting bolt having a pull bolt as a hollow shaft and a push bolt inserted into the hollow shaft. With this configuration, the pull bolt and the push bolt are located at the same center, and the distribution of force is concentric, so that no bending stress acts on the object to be mounted, and the mounting position adjusting device does not generate distortion. . (2) In addition, since the pull bolt and the push bolt are integrated and the structure is simplified, adjustment work is simplified, and
This improves the adjustment accuracy and contributes to space saving and cost reduction.

(3) As described in claim 2, in the mounting position adjusting device for adjusting the position between the load port and the semiconductor manufacturing apparatus, the position where the pull bolt is a hollow shaft and the push bolt is inserted into the hollow shaft. If it is configured to have an adjusting bolt, the pulling bolt and the push bolt will be at the same center, and the distribution of force will be concentric, so that no bending stress acts on the load port and no distortion occurs. It can be. (4) In addition, since the pull bolt and the push bolt are integrated and the structure is simplified, adjustment work is simplified, and
This improves the adjustment accuracy and contributes to space saving and cost reduction.

(5) The mounting position adjusting method according to the present invention uses the mounting position adjusting device as described in claim 3;
When the interval is set by the push bolt and fixed by the pull bolt, the pull bolt and the push bolt are at the same center and the distribution of force is concentric, so no bending stress acts and distortion occurs. A mounting position adjustment method that does not need to be performed.

[Brief description of the drawings]

FIG. 1 is a partially cutaway side view showing an embodiment of a mounting position adjusting device according to the present invention.

FIG. 2 is a side view showing a structure of a position adjusting bolt used in the mounting position adjusting device of the present invention.

FIG. 3 is a front view showing a structure of a position adjusting bolt used in the mounting position adjusting device of the present invention.

FIG. 4 is a partially cutaway side view for explaining a conventional load port.

FIG. 5 is a partially cut-away enlarged side view illustrating a problem of a conventional adjustment mechanism of a load port, in which two adjustment bolts are used.

FIG. 6 is a partially cut-away enlarged side view illustrating a problem of a conventional adjustment mechanism of a load port, in which three adjustment bolts are used.

[Explanation of symbols]

10: Mounting position adjustment device 20: Position adjustment bolt 22: Push bolt 22a: Hollow shaft of pull bolt 24: Pull bolt 100: Load port 200: semiconductor manufacturing equipment 200a: Mounting surface

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) F16B 35/00 F16B 35/00 Y

Claims (3)

[Claims] When mounting and fixing an object to be mounted on a mounting surface of the object with a predetermined gap therebetween, the position of the object and the object can be arbitrarily adjusted with a push bolt and a pull bolt. In the position adjusting device, the pulling bolt is a hollow shaft, and a position adjusting bolt having a push bolt inserted into the hollow shaft is provided. 2. A mounting position adjustment for adjusting the position of the load port and the semiconductor manufacturing apparatus with a push bolt and a pull bolt when mounting and fixing the load port to the mounting surface of the semiconductor manufacturing apparatus with a predetermined gap therebetween. The mounting position adjusting device, wherein the pull bolt is a hollow shaft, and a position adjusting bolt having the push bolt inserted into the hollow shaft is provided. 3. A mounting position adjusting method using the mounting position adjusting device according to claim 1 or 2, wherein an interval is set by the push bolt and fixed by the pull bolt.