JPH05121385A - Cleaning device - Google Patents

Abstract

PURPOSE:To improve cleaning capacity of a cleaning device to be used in a cleaning step of semiconductor, an electronic component, etc., to simplify the step and to improve an operating efficiency. CONSTITUTION:(1) Several tens to several hundreds of fibers are bundled to form fiber bundles 1, and the bundles 1 are spirally disposed on a rear surface of a rotating plate 2 having a cleanser discharging nozzle 3 at the nozzle 3 as a center. (2) The inner and outer peripheries of the plate 2 are formed of different materials and shapes. Thus, readherence of cleaned contaminants is prevented to enhance a cleaning effect.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a glass substrate, a silicon wafer,
The present invention relates to a cleaning device used when cleaning a printed circuit board or the like.

[0002]

2. Description of the Related Art Conventionally, as shown in FIG. 5, a brush used in this type of cleaning device has a dozen to several hundred fibers bundled on the back surface of a rotary plate 2 having a cleaning liquid discharge nozzle 3 at the center. Cleaning is performed by concentrically arranging a number of fiber bundles 1 each of which is a unit, and rotating and moving the surface of conveyed electronic parts (not shown) while discharging the cleaning liquid. It was a thing.

[0003]

With the brush of the conventional cleaning device described above, a cleaning effect can be seen with respect to stains depending on the shape and material of the fibers constituting the brush, but it is difficult to wash with other stains. However, in order to deal with various types of contamination, there is a problem that a plurality of types of brushes must be prepared and cleaning must be performed in several steps. Further, since the fiber bundles are densely planted on the back surface of the rotary plate, the cleaning liquid supplied from the center cannot be discharged smoothly, and there is a problem that stains once cleaned are redeposited. The present invention is intended to solve these conventional problems.

[0004]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems of the prior art, the present invention adopts a method in which a fiber bundle on the back surface of a rotary plate is planted in a spiral shape, and the material and shape of the fibers constituting the brush Is different between the inner peripheral portion and the outer peripheral portion of the rotary plate.

[0005]

The fiber bundles which are planted in a spiral shape act so as to smoothly discharge the cleaning liquid supplied from the central portion of the rotary plate. Fibers having different materials and shapes act to wipe off stains having different properties.

[0006]

1 is a rear view showing an embodiment of the present invention. A cleaning liquid discharge nozzle 3 is provided at the center of the back surface of a circular rotary plate 2 fixed to the lower end of a rotary shaft (not shown). At the same time, a large number of fiber bundles 1 formed by bundling dozens to hundreds of fibers are spirally planted around it.

FIG. 2 shows another embodiment, in which the tip of the cleaning liquid discharge nozzle 3 faces the center of the rear surface of the circular rotary plate 2 attached to the lower end of the rotary shaft 4 as in the above embodiment. , A large number of fiber bundles are planted around it. Here, in the embodiment, the fiber bundle planted on the back surface of the rotating plate is different in material between the inner peripheral portion and the outer peripheral portion,
A fiber bundle 1 ′ made of soft fibers near the inner circumference of the rotary plate 2.
A fiber bundle 1 ″ made of hard fibers is planted near the outer periphery. Reference numeral 5 in the drawing communicates with the discharge nozzle 3,
A cleaning liquid supply tube for supplying a cleaning liquid to the discharge nozzle 3 is shown.

The rotating brush of the cleaning apparatus of the present invention thus constituted is arranged in plural at predetermined positions as shown in FIGS. 3 and 4, and is on the surface of the object to be cleaned 7 such as a glass substrate moving in the carrying direction. While rotating around the rotary shaft 2, the cleaning liquid is discharged from the discharge nozzles provided in each of them to clean the surface thereof. At this time, in the rotating brush in which the fiber bundles are radially implanted as shown in the first embodiment, the cleaning liquid supplied from the center of the rotating plate is guided in the circumferential direction as the rotating plate rotates during cleaning. , Discharged to the outside. Reference numeral 6 denotes a high-pressure pure water shower for removing the cleaning liquid thus used for cleaning from the surface of the object to be cleaned 7. Therefore, retention of the cleaning liquid is prevented, and a clean cleaning liquid is always used, so that a high cleaning effect can be obtained. Further, in the rotating brush shown in the second embodiment in which the fiber material is different between the inner circumference and the outer circumference, the hard brush on the outer circumference removes strong dirt and relatively large foreign matter on the surface, Use a soft brush on the part to remove dirt and fine particles in fine parts,
Different types of stains can be removed efficiently and simultaneously.

In the second embodiment, the material of the fibers to be planted is changed between the inner peripheral portion and the outer peripheral portion of the rotary plate, but the shape and thickness of the fibers may be changed. Therefore, the properties of the brush may be different between the inner peripheral portion and the outer peripheral portion.

[0010]

As described above, in the rotary brush used in the cleaning apparatus of the present invention, in which the fiber bundle is planted in a spiral shape, the cleaning liquid is smoothly discharged, and thus the reattachment of the cleaned dirt is prevented. The cleaning effect is improved. Further, by changing the material and shape of the fiber inside and outside, various stains can be dealt with, the cleaning effect is improved, the cleaning process is simplified, and the apparatus is also simplified. Therefore, cleaning can be performed efficiently and with high precision, and an excellent effect can be obtained in improving the yield of products.

[Brief description of drawings]

FIG. 1 is a simplified back view showing an embodiment of a rotating brush.

FIG. 2 is a partially cutaway perspective view of another embodiment.

FIG. 3 is a plan view of a usage state.

FIG. 4 is a side view of a usage state.

FIG. 5 is a simplified back view of a conventional example.

[Explanation of symbols]

 1,1 ', 1 "fiber bundle 2 rotary plate 3 discharge nozzle 4 rotary shaft

Claims (3)

[Claims] 1. A cleaning device having a rotating brush that removes dirt adhering to the surface of various electronic components such as a silicon wafer and a printed circuit board by being rotationally driven while discharging a cleaning liquid from a discharge nozzle opened at the center of the back surface. A fiber bundle of several tens to several hundred fibers is planted on the back surface of the rotary plate of the rotary brush, and the fiber bundle is spirally arranged around the cleaning liquid discharge nozzle. Cleaning device. 2. The cleaning device according to claim 1, wherein the material or shape of the fibers of the rotating brush is different between the inner peripheral portion and the outer peripheral portion of the rotating plate. 3. The cleaning apparatus using the rotating brush according to claim 1 or 2, further comprising a high-pressure pure water shower for removing the cleaning liquid discharged from the rotating brush from the surface of the object to be cleaned. apparatus.