JPH0511520Y2 - - Google Patents

Info

Publication number
JPH0511520Y2
JPH0511520Y2 JP1985050657U JP5065785U JPH0511520Y2 JP H0511520 Y2 JPH0511520 Y2 JP H0511520Y2 JP 1985050657 U JP1985050657 U JP 1985050657U JP 5065785 U JP5065785 U JP 5065785U JP H0511520 Y2 JPH0511520 Y2 JP H0511520Y2
Authority
JP
Japan
Prior art keywords
adhesive
crystal
spectroscopic
spectroscopic crystal
curved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985050657U
Other languages
Japanese (ja)
Other versions
JPS61167553U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985050657U priority Critical patent/JPH0511520Y2/ja
Publication of JPS61167553U publication Critical patent/JPS61167553U/ja
Application granted granted Critical
Publication of JPH0511520Y2 publication Critical patent/JPH0511520Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Description

【考案の詳細な説明】 [産業上の利用分野] 本考案はX線マイクロアナライザー等に用いら
れるX線分光結晶構成体に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an X-ray spectroscopy crystal structure used in an X-ray microanalyzer or the like.

[従来の技術] 一般に、X線マイクロアナライザー等に用いら
れる湾曲分光結晶等においては、保持台の片面を
湾曲面にして、この面に反射膜を形成させて、こ
の上に分光結晶を接着剤によつて貼りつけたもの
がある(実公昭44−30140号)。
[Prior Art] In general, in a curved spectroscopic crystal used in an X-ray microanalyzer, etc., one side of the holder is made into a curved surface, a reflective film is formed on this surface, and the spectroscopic crystal is glued onto this surface. There is one pasted by the author (Utility Model Publication No. 44-30140).

[考案が解決しようとする問題点] ところで、分光結晶と保持台を接着剤を用いて
接着させる場合には、分光結晶の種類に応じて、
接着剤に要求される条件、つまり、接着強度、粘
度、固化収縮、アウトガスの有無、固化後の熱膨
張係数、接着温度、加圧度、接着時間等が負々最
も望ましい接着剤を選定する必要がある。
[Problems to be solved by the invention] By the way, when the spectroscopic crystal and the holding stand are bonded together using an adhesive, depending on the type of the spectroscopic crystal,
It is necessary to select the adhesive with the most desirable conditions required for the adhesive, such as adhesive strength, viscosity, solidification shrinkage, presence of outgassing, coefficient of thermal expansion after solidification, adhesive temperature, degree of pressure, adhesive time, etc. There is.

しかし乍ら、上記に列挙した接着剤に要求され
る条件を全て満足する最も望ましい接着剤であつ
ても、分光結晶によつては接着剤と分光結晶自体
とが反応してしまうものがある。例えば、T
AP(フタル酸タリユウム)分光結晶や、RbAP
(フタル酸ルビジユウム)分光結晶はエポキシ系
接着剤の硬化剤として使用されているアミン類と
反応してしまう。このようなことから、従来は分
光結晶と反応する接着剤はたとえ上記条件が満足
しても使用できず、上記条件をすべて満足しない
接着剤であつても分光結晶と接着剤が反応しない
所謂非反応性接着剤を選択せざるを得なかつた。
そのため、接着剤と分光結晶との接着が不十分で
あつたり、薄い分光結晶では接着ムラにより回折
格子面が歪んだり、又、湾曲分光結晶において
は、湾曲状態が不均一となり、X線回折強度が著
しく弱いものになり、分光性能を低下させてしま
う。又、従来の分光結晶構成体においては、分光
結晶自体が一様に保持台に接着されているかどう
かを光学的に簡単に検査することは困難であつ
た。
However, even if the adhesive is the most desirable one that satisfies all of the above-mentioned requirements for an adhesive, the adhesive and the spectroscopic crystal itself may react with each other depending on the spectroscopic crystal. For example, T
AP (thallium phthalate) spectroscopic crystal, RbAP
(Rubidium phthalate) spectroscopic crystals react with amines used as hardeners in epoxy adhesives. For this reason, conventionally, adhesives that react with spectroscopic crystals cannot be used even if the above conditions are satisfied, and even adhesives that do not meet all of the above conditions cannot be used because they do not react with spectroscopic crystals. I had no choice but to choose a reactive adhesive.
For this reason, the adhesion between the adhesive and the spectroscopic crystal may be insufficient, the diffraction grating surface may be distorted due to uneven adhesion in a thin spectroscopic crystal, and the curved state of a curved spectroscopic crystal may become uneven, resulting in an increase in the X-ray diffraction intensity. becomes extremely weak, degrading the spectral performance. Furthermore, in conventional spectroscopic crystal structures, it has been difficult to easily optically inspect whether the spectroscopic crystal itself is evenly bonded to the holder.

本考案は以上の点に鑑みてなされたもので、分
光結晶を保持台に接着剤等により密着されて形成
されるX線分光結晶において、前述した分光結晶
と接着剤との反応に基づく接着剤の選択に関する
制限を除き、最適な接着剤を使用して接着するこ
とにより、接着ムラによる回折格子面の歪み、湾
曲状態の不均一等を防止して分光性能を向上させ
ると共に接着状態を簡単に光学的に検査できるX
線分光結晶構成体を提供することを目的としてい
る。
The present invention has been made in view of the above points, and in an X-ray spectroscopy crystal that is formed by closely adhering a spectroscopy crystal to a holding table with an adhesive, etc., an adhesive based on the reaction between the spectrometer crystal and the adhesive described above is used. By using the most suitable adhesive for bonding, excluding restrictions on the selection of , it is possible to prevent distortion of the diffraction grating surface due to uneven adhesion, non-uniformity of the curved state, etc., improve spectral performance, and easily adjust the bonding state. X that can be inspected optically
The object of the present invention is to provide a line-spectroscopy crystal structure.

[問題点を解決するための手段] 本問題点を解決するための本考案の構成は、片
面に蒸着膜が形成された分光結晶と、該分光結晶
を保持する保持台とを備え、該保持台と前記蒸着
膜は接着剤により接着されており、前記蒸着膜は
分光結晶と接着剤との反応を防止する材質より成
るX線分光結晶構成体を特徴としている。
[Means for solving the problem] The configuration of the present invention for solving the problem includes a spectroscopic crystal having a vapor-deposited film formed on one side, a holder for holding the spectroscopic crystal, and a holder for holding the spectroscopic crystal. The base and the deposited film are bonded together with an adhesive, and the deposited film is characterized by an X-ray spectroscopy crystal structure made of a material that prevents reaction between the spectroscopy crystal and the adhesive.

[実施例] 以下本考案の実施例を添付図面に基づき詳述す
る。
[Examples] Examples of the present invention will be described below in detail based on the accompanying drawings.

第1図は本考案の一実施例の構成断面図であ
る。第1図において、1は分光結晶で、該分光結
晶1の接着面側には例えばアルミニユームの蒸着
膜2が均一に形成されている。3は分光結晶1と
分光結晶を保持する保持台4とを蒸着膜2を介し
て接着するための接着剤である。
FIG. 1 is a sectional view of an embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a spectroscopic crystal, and a vapor deposited film 2 of, for example, aluminum is uniformly formed on the adhesive surface side of the spectroscopic crystal 1. Reference numeral 3 denotes an adhesive for bonding the spectroscopic crystal 1 and the holding table 4 for holding the spectroscopic crystal via the vapor deposited film 2.

このような構成においては、分光結晶1は直接
接着剤3によつて、保持台4に接着されずに、分
光結晶1にコーテイングされた蒸着膜を介して接
着剤3により保持台4に接着されるため、接着剤
3と分光結晶1との反応を防止することができ
る。そのため、分光結晶1を保持台4に接着する
場合に、分光結晶と接着剤の反応を考慮する必要
はなく、各種の分光結晶に対して前記に列挙した
接着剤に要求される条件を満足する最も望ましい
接着剤を使用して接着することができる。そのた
め、特に薄い分光結晶においても、接着が不十分
になつたり、接着ムラによる回折格子面が歪んだ
りすることはない。
In such a configuration, the spectroscopic crystal 1 is not directly bonded to the holder 4 with the adhesive 3, but is bonded to the holder 4 with the adhesive 3 through the vapor deposited film coated on the spectroscopic crystal 1. Therefore, reaction between the adhesive 3 and the spectroscopic crystal 1 can be prevented. Therefore, when bonding the spectroscopic crystal 1 to the holding table 4, there is no need to consider the reaction between the spectroscopic crystal and the adhesive, and the conditions required for the adhesive listed above for various spectroscopic crystals are satisfied. Can be glued using the most desirable adhesive. Therefore, even in a particularly thin spectroscopic crystal, there is no possibility of insufficient adhesion or distortion of the diffraction grating surface due to uneven adhesion.

第2図は本考案を湾曲分光結晶に適用した場合
の構成断面図である。第2図おいて、5は湾曲分
光結晶で、該湾曲分光結晶5の接着面側には前記
と同様な蒸着膜6が形成されている。7は湾曲分
光結晶5を保持する保持台である。この保持台7
の片面は、曲率半径Rの曲面とされており、前記
湾曲分光結晶5は、蒸着膜6を介して保持台7の
曲面に接着剤8を介して接着される。
FIG. 2 is a sectional view of the structure when the present invention is applied to a curved spectroscopic crystal. In FIG. 2, reference numeral 5 denotes a curved spectroscopic crystal, and a vapor deposited film 6 similar to that described above is formed on the adhesive surface side of the curved spectroscopic crystal 5. 7 is a holding stand that holds the curved spectroscopic crystal 5; This holding stand 7
One side of the curved spectroscopic crystal 5 is a curved surface with a radius of curvature R, and the curved spectroscopic crystal 5 is bonded to the curved surface of the holding table 7 via a vapor deposited film 6 via an adhesive 8.

このように構成することにより、湾曲分光結晶
5と接着剤8との反応は蒸着膜6により防止され
るため、湾曲分光結晶においても、該湾曲結晶の
種類によつて最適な接着剤を選択することができ
る。従つて、このような接着剤により接着した湾
曲分光結晶では、湾曲状態の均一度を従来に比較
して高くできるため、分光性能を向上させること
ができる。又、第2図の実施例において、曲率半
径Rの曲面が形成された保持台に、接着面に蒸着
膜が形成された分光結晶を押しつけて湾曲分光結
晶構成体を製作した場合には、該蒸着膜が反射鏡
の役目をするため湾曲後の分光結晶自体の湾曲状
態が可視光で光学的に簡単に検査できる利点も有
する。
With this configuration, the reaction between the curved spectroscopic crystal 5 and the adhesive 8 is prevented by the vapor deposited film 6, so even in the case of a curved spectroscopic crystal, the optimal adhesive is selected depending on the type of the curved crystal. be able to. Therefore, in a curved spectroscopic crystal bonded with such an adhesive, the uniformity of the curved state can be made higher than that of the conventional crystal, and thus the spectroscopic performance can be improved. In addition, in the embodiment shown in FIG. 2, when a curved spectroscopic crystal structure is manufactured by pressing a spectroscopic crystal with a vapor-deposited film formed on the adhesive surface onto a holding table on which a curved surface with a radius of curvature R is formed, Since the vapor deposited film acts as a reflecting mirror, it also has the advantage that the curved state of the spectroscopic crystal itself after being curved can be easily inspected optically using visible light.

[考案の効果] 以下詳述した如く本考案のX線分光結晶構成体
は、片面に蒸着膜が形成された分光結晶と、この
分光結晶を保持する保持台とを備え、この保持台
と前記蒸着膜は接着剤により接着されており、前
記蒸着膜は分光結晶と接着剤との反応を防止する
材質より成るので、この分光結晶の種類によつて
接着条件を全て満足する最適な接着剤を選択して
使用することができるため、接着ムラによる回折
格子面の歪みや湾曲状態の不均一等を防止して分
光性能を向上させることができる。また、蒸着膜
を反射膜として用いることにより、可視光で分光
結晶の湾曲状態を簡単に検査できるX線分光結晶
構成体が提供される。
[Effects of the invention] As detailed below, the X-ray spectroscopy crystal structure of the present invention includes a spectroscopy crystal on which a vapor-deposited film is formed on one side, and a holder for holding the spectral crystal. The vapor deposited film is bonded with an adhesive, and the vapor deposited film is made of a material that prevents reaction between the spectroscopic crystal and the adhesive, so depending on the type of spectroscopic crystal, it is necessary to select the most suitable adhesive that satisfies all the bonding conditions. Since they can be selectively used, it is possible to improve the spectral performance by preventing distortion of the diffraction grating surface and non-uniformity of the curved state due to uneven adhesion. Further, by using the vapor deposited film as a reflective film, an X-ray spectroscopy crystal structure is provided in which the curved state of the spectroscopy crystal can be easily inspected using visible light.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例の構成断面図、第2
図は本考案を湾曲分光子結晶構成体に実施した場
合の一実施例の構成断面図である。 1,5……分光結晶、2,6……蒸着膜、3,
8……接着剤、4……保持台、7……曲面を有す
る保持台。
Fig. 1 is a cross-sectional view of the structure of one embodiment of the present invention;
The figure is a cross-sectional view of an embodiment of the present invention applied to a curved spectrometer crystal structure. 1,5... Spectroscopic crystal, 2,6... Vapor deposited film, 3,
8... Adhesive, 4... Holding stand, 7... Holding stand having a curved surface.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 片面に蒸着膜が形成された分光結晶と、該分光
結晶を保持する保持台とを備え、該保持台と前記
蒸着膜は接着剤により接着されており、前記蒸着
膜は分光結晶と接着剤との反応を防止する材質よ
り成るX線分光結晶構成体。
It includes a spectroscopic crystal with a vapor deposited film formed on one side and a holder for holding the spectroscopic crystal, the holder and the vapor deposited film are bonded together with an adhesive, and the vapor deposited film is bonded to the spectroscopic crystal and the adhesive. An X-ray spectroscopy crystal structure made of a material that prevents the reaction of
JP1985050657U 1985-04-05 1985-04-05 Expired - Lifetime JPH0511520Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985050657U JPH0511520Y2 (en) 1985-04-05 1985-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985050657U JPH0511520Y2 (en) 1985-04-05 1985-04-05

Publications (2)

Publication Number Publication Date
JPS61167553U JPS61167553U (en) 1986-10-17
JPH0511520Y2 true JPH0511520Y2 (en) 1993-03-22

Family

ID=30568997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985050657U Expired - Lifetime JPH0511520Y2 (en) 1985-04-05 1985-04-05

Country Status (1)

Country Link
JP (1) JPH0511520Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158985A (en) * 1978-06-06 1979-12-15 Jeol Ltd Production of x-ray spectral crystals

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158985A (en) * 1978-06-06 1979-12-15 Jeol Ltd Production of x-ray spectral crystals

Also Published As

Publication number Publication date
JPS61167553U (en) 1986-10-17

Similar Documents

Publication Publication Date Title
EP1147522B1 (en) Curved optical device and method of fabrication
TWI461751B (en) A method of forming a color wheel assembly
US4579616A (en) Method of fabrication of an optically flat membrane
JP2002071923A (en) Method for manufacturing diffractive optical element, diffractive optical element, optical system having the diffractive optical element, and photographing device and observation device having the optical system
JPH0511520Y2 (en)
JPS5932967Y2 (en) lens support
MY127639A (en) "optical disc structure, method of manufacturing the same, and apparatus for manufacturing the same"
JPH05210851A (en) Fixing device for optical parts of optical pickup
JPS6150231A (en) Optical disc and its bonding method
JP3431039B2 (en) Optical encoder
US4960268A (en) Spacer holder arrangement
JPS6117651U (en) gas analyzer
JPH01298162A (en) Sputter jig for optical disk
JPS6146548Y2 (en)
JPS5913601Y2 (en) optical element
JPS6242347A (en) Production of optical disk recorder
JPH0314601U (en)
JPS62239444A (en) Optical recording medium
JPS5846448Y2 (en) lcd clock
JPS60182531A (en) Optical recording medium
JPH02249151A (en) Optical recording medium
JPS5837528B2 (en) Hiyojisouchi
JPH03129823A (en) Lapping of semiconductor substrate
JPS60129947A (en) Optical recording medium
JPS6371955A (en) Production of optical recording medium