JPH05113305A - Inspecting device for probe - Google Patents

Abstract

PURPOSE:To obtain a detecting device for the position of the fore end of a probe which is inexpensive, has a high measuring precision and, moreover, measures even probes of a plurality of pins in a short time, in regard to a detecting device for measuring the position of the fore end of the probe. CONSTITUTION:A uniform resistance plate 3 which is flat, of which the resistance per unit volume and with which a plurality of probes can be brought into contact simultaneously is so provided as to be positioned in parallel to a probe card 1. On the occasion when the position is measured, the fore end of the probe 2 and the uniform resistance plate 3 are brought into contact with each other, a current is made to flow between an electrode A4 and an electrode B5 or between an electrode C6 and an electrode D7, a voltage generated between the electrode A4 or C6 and the probe or between the electrode B5 or D7 and the probe is measured, a resistance is calculated and further converted into a distance and thereby the position of the fore end of the probe 2 is inspected. Since the position can be measured electrically, a system can be made inexpensive in comparison with a usual method using an image processing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection device for a probe needle used when an electrical measurement target is minute.

[0002]

2. Description of the Related Art Conventionally, the position of the tip of a probe needle has been measured by visual inspection with a microscope or image processing.

[0003]

However, the conventional visual inspection using a microscope has a low inspection accuracy and requires a lot of man-hours. In addition, the method using image processing has increased the device cost. It is an object of the present invention to provide a probe needle inspection device that has high inspection accuracy, a small number of work steps, a short measurement time, and is inexpensive.

[0004]

According to the present invention, a plurality of probe needles can be contacted at the same time, and a resistance plate having a uniform resistance is provided. The feature is that the resistance value between the plate and an arbitrary position is measured and the distance is converted.

[0005]

FIG. 1 shows an embodiment of the present invention. As shown in FIG. 1, a uniform resistance plate 3 is provided so as to be positioned parallel to the probe card 1 on which the probe needle 2 is mounted.

The uniform resistance plate 3 has a constant resistance value per unit volume, is excellent in flatness, and has a size such that all the probe needles 2 can contact simultaneously.

In measuring the tip position of the probe needle 2 in this embodiment, first, as shown in FIG. 1, the probe card 1 is moved downward or the uniform resistance plate 3 is moved upward.
The tip position of the probe needle 2 is brought into contact with the uniform resistance plate 3.

Further, a constant current is applied between the electrodes A4 and B5 provided on the uniform resistance plate 3, and the voltage generated between the electrode A4 or the electrode B5 and the probe needle 2 to be measured is measured. , Calculate the resistance value.

The resistance value and the electrode A4 which has been grasped in advance
The distance A15 is obtained by the ratio of the resistance value between the electrode B5 and the electrode B5.

At this time, in order to prevent the resistance component A13 and the contact resistance 12 of the probe needle from being measurement errors, the measuring circuit 9 shown in the block diagrams of FIGS. No current is passed through the resistor 12 and the resistor A13 so that an accurate distance can be obtained.

The switching of the measuring object of the probe needle 2 is performed by disconnecting and connecting the relay 8 shown in FIG.

By repeating the above operation for all probe needles, the physical distances of all probe needles 2 in the directions of the electrodes A4 and B5 can be measured.

Then, a constant current is applied between the electrode C6 and the electrode D7, the voltage generated between the electrode C6 or the electrode D7 and the probe needle 2 to be measured is measured, and the resistance value is calculated.

The resistance value and the electrode C6 which is known in advance.
The distance B16 is obtained by the ratio of the resistance value between the electrode D7 and the electrode D7.

By repeating the above operation while switching the measurement object of the probe needle 2 by the relay 8 in FIG. 2, the distances in the directions of the electrodes C6 and D7 can be measured for all probe needles.

As described above, the horizontal position of the tip of the probe needle 2 can be measured.

Further, the downward movement amount of the probe card 1 or the upward movement amount of the uniform resistance plate 3 is moved by an arbitrary amount, and every time the probe needle is electrically measured, the probe needle tips are electrically measured. It is possible to measure the vertical height position of the.

The above is an example of measuring the distance by applying a current to the uniform resistance plate 3 and measuring the voltage. In FIG. 4, a voltage is applied to the uniform resistance plate 3 to measure the current. Thing
An example of measuring the distance will be shown.

A constant voltage is applied between the electrodes A4 and B5, and the current A17 is measured.

A constant voltage is applied between the electrode A4 and the probe needle 2 to measure the current B18. Further, a constant voltage is applied between the electrode B5 and the probe needle 2 to measure the current C19. Current A17 and current B1 measured by the above operation
8. From the current C19, the resistance A13, the resistance B14, the distance A15, and the distance B16 are calculated.

[0021]

According to the present invention, since the probe needle tip position can be measured electrically, it is possible to make the system cheaper than the conventional method by image processing. Moreover, since the mechanical movement operation for measuring a plurality of probe needles is performed only once, the measurement time can be greatly reduced.

[Brief description of drawings]

FIG. 1A is a plan view showing a positional relationship between a probe needle and a uniform resistance plate when measuring a tip position of a probe needle. (B) is the side view.

FIG. 2 is a block diagram when electrically measuring.

FIG. 3 is an equivalent circuit diagram when measuring one probe needle.

FIG. 4 is an equivalent circuit diagram of voltage application and current measurement when measuring one probe needle.

[Explanation of symbols]

 1 probe card 2 probe needle 3 uniform resistance plate 4 electrode A 5 electrode B 6 electrode C 7 electrode D 8 relay 9 measurement circuit 10 resistance plate resistance A 11 resistance plate resistance B 12 probe needle contact resistance 13 resistance component A 14 Resistance B 15 Distance A 16 Distance B 17 Current A 18 Current B 19 Current C

Claims (1)

[Claims] 1. An apparatus for inspecting the tip position of a probe needle used when an electrical measurement target is minute, capable of measuring a plurality of needles with a single contact and having a uniform resistance, Generate a voltage or current by applying multiple probe needles to a resistance plate large enough to contact multiple pins at the same time, and then applying voltage or current to the electrodes provided at appropriate positions on the needle to be measured and the resistance plate. The probe needle inspection device is characterized in that the resistance value is obtained by measuring the current or voltage to measure the position by converting the distance, and the needle tip position can be measured without repeating the contact operation.