JPH05111867A - Working method for work with mutli-grinding wheel - Google Patents
Working method for work with mutli-grinding wheelInfo
- Publication number
- JPH05111867A JPH05111867A JP27548391A JP27548391A JPH05111867A JP H05111867 A JPH05111867 A JP H05111867A JP 27548391 A JP27548391 A JP 27548391A JP 27548391 A JP27548391 A JP 27548391A JP H05111867 A JPH05111867 A JP H05111867A
- Authority
- JP
- Japan
- Prior art keywords
- work
- rotary
- grinding stone
- cut
- grinding wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、複数の回転砥石を有
するマルチ砥石によって、ワークの平面に所定幅の複数
の凸条面や所定間隔の複数の溝を切削加工するマルチ砥
石によるワークの加工方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to machining of a work by a multi-grinding stone having a plurality of rotary grindstones for cutting a plurality of ridges having a predetermined width or a plurality of grooves at predetermined intervals on a flat surface of the work. It is about the method.
【０００２】この種のマルチ砥石によるワークの加工方
法の一例として、コンピュータシステムの外部記憶装置
である磁気ディスク装置に使用される薄膜磁気ヘッドの
スライダーの加工方法がある。[0002] As an example of a method of processing a work with this type of multi-grinding stone, there is a method of processing a slider of a thin film magnetic head used in a magnetic disk device which is an external storage device of a computer system.
【０００３】近年、磁気ディスク装置の小型化および大
容量化が要求されている。このような要求を満足させる
ために、磁気記録の高密度化が進められており、そのた
めの磁気ヘッドとして、磁極とコイルとを薄膜技術によ
って構成した薄膜磁気ヘッドが開発され、その薄膜磁気
ヘッドはますます小型化され、そのスライダーに凸条面
で形成された浮上面の幅もより狭くなってきている。In recent years, there has been a demand for miniaturization and large capacity of magnetic disk devices. In order to satisfy such demands, the density of magnetic recording has been increased, and as a magnetic head for that purpose, a thin film magnetic head having a magnetic pole and a coil formed by a thin film technology has been developed. As the slider becomes smaller and smaller, the width of the air bearing surface formed on the slider by the convex surface is becoming narrower.
【０００４】図４は従来一般の薄膜磁気ヘッドの斜視図
で、図５は薄膜磁気ヘッドの一部拡大図であり、同図
中、１０はアルミニウム・チタン・カーボン（Ａｌ・Ｔ
ｉ・Ｃ）のスライダーであり、一対の浮上面１０ａ，１
０ａが磁気記録媒体に対向するようになっている。スラ
イダー１０の端面部１０ｂには、一対の浮上面１０ａ，
１０ａそれぞれに対応する位置に、薄膜電磁変換素子を
構成するコイル１１および磁極１２，１３などが周知の
薄膜技術によって形成されている。FIG. 4 is a perspective view of a conventional general thin film magnetic head, and FIG. 5 is a partially enlarged view of the thin film magnetic head. In FIG. 4, 10 is aluminum titanium carbon (Al.T).
i.C) slider, which is a pair of air bearing surfaces 10a, 1
0a faces the magnetic recording medium. The end surface portion 10b of the slider 10 has a pair of air bearing surfaces 10a,
The coil 11 and the magnetic poles 12, 13 and the like forming the thin film electromagnetic conversion element are formed at positions corresponding to the respective 10a by a known thin film technique.
【０００５】前記薄膜磁気ヘッドは、Ａｌ・Ｔｉ・Ｃの
図示しないウェハ上に、図４に示す薄膜磁気ヘッドをア
レイ状に複数個形成し、図示しないが、このウェハから
複数の薄膜磁気ヘッドが横方向に並んだ薄膜磁気ヘッド
列毎に切断し、各薄膜磁気ヘッド列の複数の薄膜磁気ヘ
ッドの浮上面１０ａを切削加工し、最後に、各薄膜磁気
ヘッドを個々に切断分離する。各薄膜磁気ヘッド列の薄
膜磁気ヘッドの浮上面１０ａを形成するためには、各薄
膜電磁変換素子の両側に回転砥石を押し当てて溝を切削
する。In the thin film magnetic head, a plurality of thin film magnetic heads shown in FIG. 4 are formed in an array on a wafer (not shown) of Al.Ti.C. The thin film magnetic head rows arranged in the lateral direction are cut, the air bearing surfaces 10a of the plurality of thin film magnetic heads of each thin film magnetic head row are cut, and finally, the thin film magnetic heads are individually cut and separated. In order to form the air bearing surface 10a of the thin film magnetic head of each thin film magnetic head row, a grindstone is pressed against both sides of each thin film electromagnetic conversion element to cut a groove.
【０００６】図６は薄膜磁気ヘッドのスライダー１０に
浮上面１０ａを切削加工する方法を示すもので、以下こ
の切削加工方法について説明する。図６において、１４
は図示しない回転駆動機構によって回転駆動されるよう
に配設されたマルチ砥石で、このマルチ砥石は、薄膜磁
気ヘッドのスライダー１０に形成する一対の浮上面１０
ａ，１０ａそれぞれの幅と同一の対向幅で対向配置され
た４枚の回転砥石１５1 〜１５4 を有しており、また、
このマルチ砥石は、図示しない上下駆動機構および左右
駆動機構によって上下および左右移動可能になってい
る。FIG. 6 shows a method of cutting the air bearing surface 10a on the slider 10 of the thin film magnetic head. This cutting method will be described below. In FIG. 6, 14
Is a multi-grinding stone arranged so as to be rotationally driven by a rotary driving mechanism (not shown). The multi-grinding stone is a pair of air bearing surfaces 10 formed on the slider 10 of the thin film magnetic head.
a, 10a has four rotating grindstones 15 1 to 15 4 arranged to face each other with the same facing width, and
This multi-grinding stone can be moved up and down and left and right by a vertical drive mechanism and a horizontal drive mechanism (not shown).
【０００７】１６はウェハから複数の薄膜磁気ヘッドが
横方向に並んだ状態に切り出された薄膜磁気ヘッド列で
あり、この薄膜磁気ヘッド列１６は、図示しない駆動機
構で紙面に垂直方向に駆動されるテーブルに載置保持さ
れている。Reference numeral 16 denotes a thin-film magnetic head array in which a plurality of thin-film magnetic heads are cut out from the wafer in a row in the lateral direction. The thin-film magnetic head array 16 is driven by a drive mechanism (not shown) in the direction perpendicular to the plane of the drawing. It is placed and held on a table.
【０００８】前記マルチ砥石１４は、上下駆動機構によ
って上方に移動させ、さらに、左右駆動機構が図示しな
い制御手段で制御されて、４枚の回転砥石１５1,１
５2 、１５3 ，１５4 が薄膜電磁変換素子の磁気ギャッ
プの中間から等位置の上に来るように移動され、その後
に上下駆動機構によって下降させて回転砥石１５1,１５
2 、１５3 ，１５4 を薄膜磁気ヘッド列１６に押し当
て、薄膜磁気ヘッド列１６を紙面に垂直方向に移動さ
せ、薄膜電磁変換素子の磁気ギャップの中間から等位置
の両側に溝１６ａ，１６ｂを切削加工することによっ
て、スライダー１０に一対の浮上面１０ａ，１０ａが形
成される。The multi-grinding stone 14 is moved upward by an up-and-down driving mechanism, and further, the left-and-right driving mechanism is controlled by a control means (not shown) so that four rotary grindstones 15 1, 1
5 2 , 15 3 and 15 4 are moved so as to come to the same position from the middle of the magnetic gap of the thin film electromagnetic conversion element, and then they are lowered by the vertical drive mechanism to rotate the grindstones 15 1, 15
2 , 15 3 and 15 4 are pressed against the thin film magnetic head array 16 to move the thin film magnetic head array 16 in a direction perpendicular to the paper surface, and grooves 16a and 16b are formed on both sides of the magnetic gap of the thin film electromagnetic conversion element at equal positions from the middle. The pair of air bearing surfaces 10a, 10a is formed on the slider 10 by cutting the.
【０００９】このようにして、スライダー１０に一対の
浮上面１０ａ，１０ａが形成されると、前記マルチ砥石
１４は、上下駆動機構によって上方に移動させ、さら
に、左右駆動機構が図示しない制御手段で制御させて鎖
線で示すように右方に移動させて、順次一対の浮上面１
０ａ，１０ａが形成される。When the pair of air bearing surfaces 10a, 10a is formed on the slider 10 in this way, the multi-grinding stone 14 is moved upward by the vertical drive mechanism, and the horizontal drive mechanism is operated by the control means (not shown). It is controlled and moved to the right as shown by the chain line, and a pair of air bearing surfaces 1
0a and 10a are formed.
【００１０】前記スライダー１０に形成された一対の浮
上面１０ａ，１０ａの間の切削加工は、図示しない別の
回転砥石で行われ、また、スライダー１０の間は、図示
しない別の切削工具によって切削分離されて個々の薄膜
磁気ヘッドが製造される。Cutting between the pair of air bearing surfaces 10a, 10a formed on the slider 10 is performed by another rotary grindstone (not shown), and between the slider 10 is cut by another cutting tool (not shown). Separately, individual thin film magnetic heads are manufactured.
【００１１】[0011]
【発明が解決しようとする課題】しかし、前記従来のよ
うな薄膜磁気ヘッドの浮上面１０ａ，１０ａの切削加工
方法によると、幅が例えば２５０μｍといった薄膜磁気
ヘッドの浮上面１０ａ，１０ａを切削加工する場合に、
回転砥石１５1,１５2 、１５3 ，１５4 の対向幅もそれ
に従って極めて狭くなり、そのため高速回転する回転砥
石１５1,１５2 、１５3 ，１５4 の間に研削液を供給す
ることが難しく、研削液が供給されなくなると、浮上面
１０ａのエッジが欠けたり、回転砥石の寿命が短くな
る。However, according to the conventional method of cutting the air bearing surfaces 10a, 10a of the thin film magnetic head as described above, the air bearing surfaces 10a, 10a of the thin film magnetic head having a width of, for example, 250 μm are machined. In case,
Rotary grindstone 15 1, 15 2, 15 3, 15 4 of the counter width accordingly becomes extremely narrow, is possible to supply the grinding liquid between the grinding wheel 15 1, 15 2, 15 3, 15 4 rotating at a high speed because its If it is difficult to supply the grinding liquid, the edge of the air bearing surface 10a will be chipped or the life of the rotary grindstone will be shortened.
【００１２】薄膜磁気ヘッドのスライダーに形成する浮
上面の幅はさらに狭くなる傾向にあり、このように浮上
面の幅が狭くなると、複数枚の回転砥石を備えたマルチ
砥石で、スライダーに一対の浮上面を一度に切削加工す
ることが困難となり、従って、１枚の回転砥石でスライ
ダーに一対の浮上面を切削加工しなければならず、加工
工数が多くなる、といった問題があった。The width of the air bearing surface formed on the slider of the thin film magnetic head tends to be further narrowed. When the width of the air bearing surface is narrowed in this way, a multi-grinding stone having a plurality of rotary grindstones is used to form a pair of sliders on the slider. It becomes difficult to cut the air bearing surface at one time, and therefore, it is necessary to cut a pair of air bearing surfaces on the slider with one rotating grindstone, resulting in a large number of processing steps.
【００１３】この発明は、このような従来の問題点に鑑
みてなされたもので、複数の回転砥石を有するマルチ砥
石によって、ワークの平面に極めて狭い幅の複数の凸条
面や複数の溝を切削加工する場合でも、複数枚の回転砥
石を備えたマルチ砥石を使用して、高精度の切削加工を
行うことができるマルチ砥石によるワークの加工方法を
提供することを目的とするものである。The present invention has been made in view of such conventional problems, and a multi-grinding stone having a plurality of rotary grindstones is used to form a plurality of ridges or grooves having a very narrow width on a flat surface of a work. An object of the present invention is to provide a method for processing a workpiece by using a multi-grinding stone that can perform high-precision cutting processing by using a multi-grinding stone including a plurality of rotary grindstones even in the case of cutting.
【００１４】[0014]
【課題を解決するための手段】前記目的を達成するた
め、この発明のマルチ砥石によるワークの加工方法は、
図１に示すように、複数の回転砥石１を有するマルチ砥
石２によってワーク３の平面に所定幅Ｗの複数の凸条面
４を切削加工する方法において、先ず、前記複数の凸条
面４の一側縁４ａを前記マルチ砥石２を形成する回転砥
石１で切削加工し、次に、回転砥石１を凸条面４の一側
縁４ａから離し、前記マルチ砥石２あるいはワーク３を
所定量移動させて、凸条面４の他側縁４ｂを前記回転砥
石１で切削加工するようにしたことを特徴とするマルチ
砥石によるワークの加工方法としたものである。In order to achieve the above object, a method of machining a work by a multi-grinding stone of the present invention is
As shown in FIG. 1, in a method of cutting a plurality of convex ridges 4 having a predetermined width W on a plane of a work 3 by a multi-grinding stone 2 having a plurality of rotary grindstones 1, first, The one side edge 4a is cut by the rotary grindstone 1 forming the multi-grind stone 2, then the rotary grindstone 1 is separated from the one side edge 4a of the convex surface 4, and the multi-grind stone 2 or the work 3 is moved by a predetermined amount. Then, the other side edge 4b of the convex surface 4 is cut by the rotary grindstone 1 to provide a method for machining a workpiece by a multi-grind stone.
【００１５】また、図２に示すように、複数の回転砥石
１を有するマルチ砥石２によってワーク３の平面に所定
間隔の複数の溝５を切削加工する方法において、前記溝
５の間隔ｔの少なくとも二倍の間隔２ｔで回転砥石１を
有するマルチ砥石２を用意し、先ず、このマルチ砥石２
の回転砥石１でワーク３の平面に、所定間隔ｔの少なく
とも二倍の間隔２ｔの溝５を切削加工し、次に、回転砥
石１を切削した溝５から離し、前記マルチ砥石２あるい
はワーク３を溝５の間隔ｔだけ移動させた後に、この回
転砥石１をワーク３に押し当てて溝５′を切削加工する
ようにしたことを特徴とするマルチ砥石によるワークの
加工方法としたものである。Further, as shown in FIG. 2, in a method of cutting a plurality of grooves 5 at a predetermined interval on a plane of a work 3 by a multi-grinding stone 2 having a plurality of rotary grindstones 1, at least an interval t of the grooves 5 is cut. A multi grindstone 2 having a rotating grindstone 1 with a double interval 2t is prepared. First, the multi grindstone 2 is prepared.
Groove 5 at a distance 2t which is at least twice the predetermined distance t on the plane of the work 3 with the rotating grindstone 1. Then, the rotating grindstone 1 is separated from the cut groove 5 and the multi grindstone 2 or the work 3 Is moved by an interval t of the groove 5, and then the rotary grindstone 1 is pressed against the work 3 to cut the groove 5 '. .
【００１６】[0016]
【作用】この発明においては、先ず、ワーク３の平面に
切削加工する複数の凸条面４の一側縁４ａを前記マルチ
砥石２を形成する回転砥石１で切削加工し、次に、回転
砥石１を凸条面４の一側縁４ａから離し、前記マルチ砥
石２あるいはワーク３を所定量移動させて、凸条面４の
他側縁４ｂを前記回転砥石１で切削加工するようにした
ので、マルチ砥石２を形成する複数枚の回転砥石１は、
従来のように凸条面４の幅と同じく極めて狭い間隔で対
向配設されておらず、すなわち、複数枚の回転砥石１の
間隔は充分に広いので、回転砥石１の間に研削液を供給
することが容易となり、従来のように、凸条面４のエッ
ジが欠けたり、回転砥石の寿命を短くするようなことが
なくなる。In the present invention, first, the one side edge 4a of the plurality of convex ridges 4 to be cut on the flat surface of the work 3 is cut by the rotary grindstone 1 forming the multi-grind 2 and then the rotary grindstone. 1 is separated from the one side edge 4a of the ridge surface 4, the multi-grinding stone 2 or the work 3 is moved by a predetermined amount, and the other side edge 4b of the ridge surface 4 is cut by the rotary grindstone 1. , The plurality of rotary whetstones 1 forming the multi-grinding stone 2,
As opposed to the width of the convex ridges 4 which is different from the conventional one, they are not arranged facing each other at an extremely narrow interval, that is, the intervals between the plurality of rotary grindstones 1 are sufficiently wide, so that the grinding fluid is supplied between the rotary grindstones 1. It becomes easier to do so, and unlike the conventional case, the edge of the convex surface 4 is not chipped and the life of the rotary grindstone is not shortened.
【００１７】また、ワーク３の平面に所定間隔で複数切
削加工する溝５の間隔ｔの少なくとも二倍の間隔２ｔ
で、複数枚の回転砥石１を有するマルチ砥石２を用意
し、先ずこのマルチ砥石２の回転砥石１で、ワーク３の
平面に所定間隔ｔの少なくとも二倍の間隔２ｔの溝５を
切削加工し、次に、回転砥石１を切削した溝５から離
し、前記マルチ砥石２あるいはワーク３を溝５の間隔ｔ
だけ移動させた後に、この回転砥石１をワーク３に押し
当てて溝５′を切削加工するようにしたので、マルチ砥
石２を形成する複数枚の回転砥石１は、従来のように溝
５の間隔と同じく極めて狭い間隔で対向配設されていな
いので、すなわち、複数枚の回転砥石１の間隔は充分に
広いので、回転砥石１の間に研削液を供給することが容
易となり、従来のように、溝５のエッジが欠けたり、回
転砥石の寿命を短くするようなことがなくなる。Further, an interval 2t that is at least twice the interval t between the grooves 5 to be cut on the plane of the work 3 at a predetermined interval.
Then, a multi-grinding stone 2 having a plurality of rotary grindstones 1 is prepared. First, with the rotary grindstone 1 of the multi-grinding stone 2, a groove 5 having an interval 2t that is at least twice the predetermined interval t is cut on the plane of the work 3. Next, the rotary grindstone 1 is separated from the cut groove 5, and the multi-grinding stone 2 or the work 3 is separated by the interval t of the groove 5.
After this movement, the rotary grindstone 1 is pressed against the work 3 to cut the groove 5 ', so that the plurality of rotary grindstones 1 forming the multi-grinding stone 2 have Since they are not arranged facing each other at an extremely narrow interval like the interval, that is, the interval between the plurality of rotary grindstones 1 is sufficiently wide, it becomes easy to supply the grinding liquid between the rotary grindstones 1 and it is possible to reduce the difference from the conventional case. Moreover, the edge of the groove 5 is not chipped and the life of the rotary grindstone is not shortened.
【００１８】[0018]
【実施例】以下、図面に従ってこの発明のマルチ砥石に
よるワークの加工方法について説明する。図１に示すこ
の発明において、複数の回転砥石１を有するマルチ砥石
２によってワーク３の平面に所定幅Ｗの複数の凸条面４
を切削加工する方法は、先ず、図に示す状態から、図示
しない上下駆動機構によってマルチ砥石２を下降させ
て、図示しない回転駆動機構によって回転されている回
転砥石１をワーク３の平面に当て、図示しない駆動機構
によってワーク３を紙面に対して垂直方向に移動させる
ことによって、ワーク３の平面に複数の凸条面４の一側
縁４ａを回転砥石１で切削加工する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method of processing a work by a multi-grinding stone of the present invention will be described below with reference to the drawings. In the present invention shown in FIG. 1, a plurality of convex ridges 4 having a predetermined width W are provided on a plane of a work 3 by a multi-grinding stone 2 having a plurality of rotary grindstones 1.
First, from the state shown in the figure, the multi-grinding stone 2 is lowered by the vertical drive mechanism (not shown), and the rotary grindstone 1 rotated by the rotary drive mechanism (not shown) is applied to the plane of the work 3 from the state shown in the figure. By moving the work 3 in the direction perpendicular to the paper surface by a drive mechanism (not shown), one side edge 4a of the plurality of convex ridge surfaces 4 is cut on the plane of the work 3 by the rotary grindstone 1.
【００１９】次に、上下駆動機構によって回転砥石１を
凸条面４の一側縁４ａから離し、図示しない左右駆動機
構および左右駆動制御手段によって、前記マルチ砥石２
あるいはワーク３を所定量移動させて、凸条面４の他側
縁４ｂの上に前記回転砥石１が位置するようにした後、
上下駆動機構によってマルチ砥石２を下降させて、凸条
面４の他側縁４ｂを切削加工するようにしたものであ
る。前記ワーク３に形成された一対の凸条面４，４の間
の切削加工は、図示しない別の回転砥石で行われる。Next, the rotary grindstone 1 is separated from the one side edge 4a of the convex surface 4 by the vertical driving mechanism, and the multi-grinding stone 2 is moved by the left and right driving mechanism and the horizontal driving control means (not shown).
Alternatively, after the work 3 is moved by a predetermined amount so that the rotary grindstone 1 is located on the other side edge 4b of the convex surface 4,
The multi-grinding stone 2 is moved down by the vertical drive mechanism, and the other side edge 4b of the convex strip surface 4 is cut. The cutting work between the pair of convex ridge surfaces 4 and 4 formed on the work 3 is performed by another rotating grindstone (not shown).
【００２０】図２に示すこの発明において、複数の回転
砥石１を有するマルチ砥石２によってワーク３の平面に
所定間隔の複数の溝５を切削加工する方法は、前記溝５
の間隔ｔの少なくとも二倍の間隔２ｔで回転砥石１を有
するマルチ砥石２を用意し、先ず、図に示す状態から、
図示しない上下駆動機構によって、このマルチ砥石２を
下降させて、図示しない回転駆動機構によって回転され
ている回転砥石１をワーク３の平面に当て、図示しない
駆動機構によってワーク３を紙面に対して垂直方向に移
動させることによって、ワーク３の平面に所定間隔ｔの
少なくとも二倍の間隔２ｔの溝５を切削加工する。In the present invention shown in FIG. 2, a method of cutting a plurality of grooves 5 at a predetermined interval on a plane of a work 3 by a multi-grinding stone 2 having a plurality of rotary grindstones 1 is the above-mentioned groove 5
Prepare a multi-grinding stone 2 having a rotary grindstone 1 at an interval 2t that is at least twice as large as the interval t.
The multi-grinding stone 2 is lowered by an up-and-down drive mechanism (not shown), the rotary grindstone 1 rotated by a rotary drive mechanism (not shown) is applied to the plane of the work 3, and the work 3 is perpendicular to the paper surface by a drive mechanism (not shown). By moving the groove 3 in the direction, a groove 5 having an interval 2t, which is at least twice the predetermined interval t, is cut on the plane of the work 3.
【００２１】次に、上下駆動機構によって回転砥石１を
切削した溝５から離し、図示しない左右駆動機構および
左右駆動制御手段によって、前記マルチ砥石２あるいは
ワーク３を溝５の間隔ｔだけ移動させた後に、上下駆動
機構によってこの回転砥石１をワーク３に押し当てて溝
５′を切削加工するようにしたものである。Next, the rotary grindstone 1 is separated from the cut groove 5 by the vertical drive mechanism, and the multi-grindstone 2 or the work 3 is moved by the interval t of the groove 5 by the horizontal drive mechanism and the horizontal drive control means (not shown). After that, the rotary grindstone 1 is pressed against the work 3 by the vertical drive mechanism to cut the groove 5 '.
【００２２】図３はこの発明を実施する切削加工機構の
概略を示す図であり、６は前記ワーク３が載置保持され
るテーブルで、レール７，７に載置されるとともに、図
示しない駆動機構によって回転されるボールネジ８と螺
合されてレール７，７に沿って摺動自在になっている。FIG. 3 is a diagram showing an outline of a cutting mechanism for carrying out the present invention. Reference numeral 6 is a table on which the work 3 is placed and held, which is placed on rails 7 and 7 and which is not shown in the drawing. It is slidable along the rails 7 and 7 by being screwed with the ball screw 8 rotated by the mechanism.
【００２３】テーブル６に載置保持されたワーク３の平
面に、所定幅Ｗの複数の凸条面４を切削加工したり、所
定間隔の複数の溝５を切削加工する複数枚の回転砥石を
有するマルチ砥石２は回転軸９に保持され、この回転軸
９は図示しない回転駆動機構によって回転駆動され、ま
た、図示しない上下駆動機構および左右駆動機構によっ
て上下および左右に移動されるようになっている。A plurality of rotary grindstones for cutting a plurality of ridges 4 having a predetermined width W or cutting a plurality of grooves 5 at predetermined intervals are formed on the flat surface of the work 3 placed and held on the table 6. The multi-grinding stone 2 that it has is held by a rotary shaft 9, and this rotary shaft 9 is driven to rotate by a rotary drive mechanism (not shown), and is moved vertically and horizontally by a vertical drive mechanism and a horizontal drive mechanism (not shown). There is.
【００２４】[0024]
【発明の効果】以上説明したように、この発明のマルチ
砥石によるワークの加工方法によって、複数の回転砥石
を有するマルチ砥石によってワークの平面に所定幅の複
数の凸条面を切削加工する場合は、先ず、ワークの平面
に切削加工する複数の凸条面の一側縁を前記回転砥石で
切削加工し、次に、回転砥石を凸条面の一側縁から離
し、前記マルチ砥石あるいはワークを所定量移動させ
て、凸条面の他側縁を前記回転砥石で切削加工するよう
にしたので、マルチ砥石を形成する複数枚の回転砥石
は、従来のように凸条面の幅と同じく極めて狭い間隔で
対向配設されておらず、すなわち、複数枚の回転砥石の
間隔は充分に広いので、回転砥石の間に研削液を供給す
ることが容易となり、従来のように、凸条面のエッジが
欠けたり、回転砥石の寿命を短くするようなことがなく
なる。As described above, according to the method for machining a work by the multi-grinding stone of the present invention, when the multi-grinding stone having a plurality of rotary grindstones is used to cut a plurality of ridges having a predetermined width on the plane of the work, First, one side edge of a plurality of ridges to be machined into a flat surface of a work is cut by the rotary grindstone, and then the rotary grindstone is separated from the one side edge of the ridge, and the multi-grind stone or the work is By moving a predetermined amount and cutting the other side edge of the convex surface with the rotary grindstone, a plurality of rotary grindstones forming a multi-grinding stone have an extremely same width as that of the convex striation as in the conventional case. Since they are not arranged facing each other at a narrow interval, that is, the intervals between the plurality of rotary grindstones are sufficiently wide, it becomes easy to supply the grinding fluid between the rotary grindstones, and the conventional method for forming the convex surface The edge is chipped, the life of the rotating whetstone That there is no longer such as to shorten.
【００２５】また、複数の回転砥石を有するマルチ砥石
によってワークの平面に所定間隔の複数の溝を切削加工
する場合は、ワークの平面に所定間隔で複数切削加工す
る溝の間隔の少なくとも二倍の間隔で、複数枚の回転砥
石を有するマルチ砥石を用意し、先ずこのマルチ砥石の
回転砥石で、ワークの平面に所定間隔の少なくとも二倍
の間隔の溝を切削加工し、次に、回転砥石を切削した溝
から離し、前記マルチ砥石あるいはワークを溝の間隔だ
け移動させた後に、この回転砥石をワークに押し当てて
溝を切削加工するようにしたので、マルチ砥石を形成す
る複数枚の回転砥石は、従来のように溝の間隔と同じく
極めて狭い間隔で対向配設されていないので、すなわ
ち、複数枚の回転砥石の間隔は充分に広いので、回転砥
石の間に研削液を供給することが容易となり、従来のよ
うに、溝のエッジが欠けたり、回転砥石の寿命を短くす
るようなことがなくなる。When a plurality of grooves at a predetermined interval are cut on the plane of the work by a multi-grinding wheel having a plurality of rotary grindstones, the interval between the grooves to be cut at a predetermined interval on the plane of the work is at least twice the interval. At intervals, prepare a multi-grinding stone having a plurality of rotary grindstones, first, with the rotary grindstone of this multi-grinding stone, a groove of at least twice the predetermined interval is cut on the plane of the work, and then the rotary grindstone After separating from the cut groove and moving the multi-grinding stone or the work by the gap between the grooves, this rotary grinding stone is pressed against the work to cut the groove, so that a plurality of rotary grinding stones forming the multi-grinding stone Is not arranged opposite to each other at an extremely narrow interval like the groove interval, that is, the interval between a plurality of rotating grindstones is sufficiently wide, so that the grinding fluid is supplied between the rotating grindstones. To it becomes easier, as in the prior art, or missing edges of the groove, it is such that there is no short life of the grinding wheel.
【図１】この発明の第１実施例を示す図である。FIG. 1 is a diagram showing a first embodiment of the present invention.
【図２】この発明の第２実施例を示す図である。FIG. 2 is a diagram showing a second embodiment of the present invention.
【図３】この発明を実施する切削加工機構の概略を示す
図である。FIG. 3 is a diagram schematically showing a cutting mechanism for carrying out the present invention.
【図４】従来一般の薄膜磁気ヘッドの斜視図である。FIG. 4 is a perspective view of a conventional general thin film magnetic head.
【図５】薄膜磁気ヘッドの一部拡大図である。FIG. 5 is a partially enlarged view of the thin film magnetic head.
【図６】従来のスライダーの浮上面の切削加工法を示す
図である。FIG. 6 is a diagram showing a conventional method of cutting an air bearing surface of a slider.
１ 回転砥石 ２ マルチ砥石 ３ ワーク ４ 凸条面 ４ａ 一側縁 ４ｂ 他側縁 ５，５′ 溝 ６ テーブル ７ レール ８ ボールネジ ９ 回転軸 １０ スライダー １０ａ 浮上面 １１ コイル １２ 磁極 １３ 磁極 １４ マルチ砥石 １５1 〜１５4 回転砥石 １６ 薄膜磁気ヘッド列 １６ａ 溝 １６ｂ 溝1 rotary grindstone 2 multi grindstone 3 work 4 convex surface 4a one side edge 4b other side edge 5,5 'groove 6 table 7 rail 8 ball screw 9 rotating shaft 10 slider 10a air bearing surface 11 coil 12 magnetic pole 13 magnetic pole 14 multi grindstone 15 1 ~ 15 4 rotating grindstone 16 thin film magnetic head row 16a groove 16b groove
Claims (2)
石（２）によってワーク（３）の平面に所定幅（Ｗ）の
複数の凸条面（４）を切削加工する方法において、先ず
前記複数の凸条面（４）の一側縁（４ａ）を前記マルチ
砥石（２）を形成する回転砥石（１）で切削加工し、次
に、回転砥石（１）を凸条面（４）の一側縁（４ａ）か
ら離し、前記マルチ砥石（２）あるいはワーク（３）を
所定量移動させて、凸条面（４）の他側縁（４ｂ）を前
記回転砥石（１）で切削加工するようにしたことを特徴
とするマルチ砥石によるワークの加工方法。1. A method of cutting a plurality of ridges (4) having a predetermined width (W) on a plane of a work (3) by a multi-grinding stone (2) having a plurality of rotary grindstones (1), wherein One side edge (4a) of the plurality of convex ridges (4) is cut by the rotary grindstone (1) forming the multi-grinding stone (2), and then the rotary grindstone (1) is ridged (4). The multi-grinding stone (2) or the work (3) is moved by a predetermined amount apart from the one side edge (4a), and the other side edge (4b) of the convex surface (4) is cut by the rotating grindstone (1). A method of processing a workpiece by a multi-grinding stone, which is characterized by being processed.
石（２）によってワーク（３）の平面に所定間隔の複数
の溝（５）を切削加工する方法において、前記溝（５）
の間隔（ｔ）の少なくとも二倍の間隔（２ｔ）で回転砥
石（１）を有するマルチ砥石（２）を用意し、先ず、こ
のマルチ砥石（２）の回転砥石（１）でワーク（３）の
平面に、所定間隔（ｔ）の少なくとも二倍の間隔（２
ｔ）の溝（５）を切削加工し、次に、回転砥石（１）を
切削した溝（５）から離し、前記マルチ砥石（２）ある
いはワーク（３）を溝（５）の間隔（ｔ）だけ移動させ
た後に、この回転砥石（１）をワーク（３）に押し当て
て溝（５′）を切削加工するようにしたことを特徴とす
るマルチ砥石によるワークの加工方法。2. A method for cutting a plurality of grooves (5) at predetermined intervals on a plane of a work (3) by a multi-grinding stone (2) having a plurality of rotary grindstones (1), said groove (5).
A multi-grinding stone (2) having a rotary grindstone (1) at an interval (2t) which is at least twice the space (t), and first, the work (3) is made with the rotary grindstone (1) of this multi-grinding stone (2). On the plane of at least twice the predetermined distance (t) (2
The groove (5) of t) is cut, then the rotary grindstone (1) is separated from the cut groove (5), and the multi-grinding stone (2) or the work (3) is separated by the interval (t) of the groove (5). ), The rotary grindstone (1) is pressed against the work (3) to cut the groove (5 ').
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27548391A JPH05111867A (en) | 1991-10-23 | 1991-10-23 | Working method for work with mutli-grinding wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27548391A JPH05111867A (en) | 1991-10-23 | 1991-10-23 | Working method for work with mutli-grinding wheel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05111867A true JPH05111867A (en) | 1993-05-07 |
Family
ID=17556154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27548391A Pending JPH05111867A (en) | 1991-10-23 | 1991-10-23 | Working method for work with mutli-grinding wheel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05111867A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11207592A (en) * | 1998-01-26 | 1999-08-03 | Isuzu Motors Ltd | Internal fine-groove machining device and method for cylinder bore |
-
1991
- 1991-10-23 JP JP27548391A patent/JPH05111867A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11207592A (en) * | 1998-01-26 | 1999-08-03 | Isuzu Motors Ltd | Internal fine-groove machining device and method for cylinder bore |
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