JP2000155921A - Method for forming crown of levitation magnetic head and its device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for forming the crown of a levitation magnetic head with mass productivity for simultaneously forming a crown and a cross- crown, for reducing the fluctuation of the shape of the crown and the cross- crown, and for easily changing the shape of the crown and the cross-crown. SOLUTION: An almost rectangular bar 21 is constituted so that one or more magnetic head elements 29... can be lined up in a row on a side wall face 23, and a plurality of grooves 26... are formed between each magnetic head element 29... along the rectangular direction of the bar 21 on the upper face (face to be worked) 24 of the bar 21 so that the upper face (face to be worked) 24 can be turned into a plurality of split faces 24a.... This bar 21 is deformed like an arc along the longitudinal direction, and adhered to a jig 3 having a projecting curved surface 6, and each divided face 24a... of the bar 21 is butted to the working face formed like a recessed curved surface of a lap fixed disc, and the bar 21 and the working face are relatively moved so that each split face 24a... can be lapped. Thus, the crown of a levitation magnetic head can be formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a crown on a flying surface of a flying magnetic head, and to a crown forming apparatus for a flying magnetic head.

[0002]

2. Description of the Related Art A floating magnetic head performs recording and reproduction of information on and from a magnetic recording medium while floating from the magnetic recording medium. The floating magnetic head operates based on a so-called CSS system in which the magnetic recording medium floats from the magnetic recording medium by moving, and is mounted on the magnetic recording medium again when the magnetic recording medium stops. The floating magnetic head and the magnetic recording medium are easily attracted to each other due to the high smoothness of the surfaces facing each other, and there is a possibility that the floating magnetic head and the magnetic recording medium may have problems. Therefore, the floating surface of the floating magnetic head is made to have a convex curved surface, and the contact area between the floating surface and the magnetic recording medium is reduced to prevent mutual adsorption. The convex curved surface formed on the air bearing surface is called a crown. Various methods have conventionally been employed for forming the crown.

A conventional method for forming a crown of a floating magnetic head will be described with reference to the drawings. FIG. 12 shows a first example of a conventional method for forming a crown of a floating magnetic head. In FIG. 12, first, a substantially rectangular parallelepiped magnetic head slider 71 is prepared. The magnetic head slider 71 includes:
A magnetic head element (not shown) is provided in advance. A pair of rails 72a, 72a are formed on the flying surface 72 of the magnetic head slider 71. Next, a laser beam 74 is irradiated between the rails 72a, 72a of the magnetic head slider 71 to form a plurality of cracks 73 along the lateral direction of the magnetic head slider 71. Next, the magnetic head slider 71 is deformed in an arc shape along the longitudinal direction and the lateral direction thereof, and the flying surface 72 is formed into a convex curved surface. Since the cracks 73 are formed on the flying surface 72, the magnetic head slider 71 is easily deformed. Thus, a crown and a cross crown are formed on the floating surface 72 of the magnetic head slider 71.

FIG. 13 shows a second example of a conventional method for forming a crown of a floating magnetic head. In FIG. 13, first, a substantially rectangular parallelepiped bar 81 is prepared. The bar 81 is formed by forming a number of magnetic head elements on one surface of a wafer made of a material of a slider of a floating magnetic head using a thin film forming technique or the like, and then cutting out a part of the wafer to form a substantially rectangular parallelepiped. is there. On the side wall surface of the bar 81, a plurality of magnetic head elements 82 are arranged in a row.

[0005] Next, the spring type uneven jig 8 is attached to the bar 81.
3 is attached. The spring unevenness jig 83 includes a spring plate 84,
The spring plate includes an uneven plate 85 that is joined to both ends of the spring plate. The uneven plate 85 is provided with grooves 86 at predetermined intervals. The spring-type uneven jig 83 elastically deforms freely along its longitudinal direction. The bar 81 is attached to the spring-type uneven jig 83 so that the groove 86 of the spring-type uneven jig 83 is located between the magnetic head elements 82 and 82.

Next, the bars 81 are cut at equal intervals along the short direction to obtain chips 92. The cutting position is the position of the groove 86 of the spring-type uneven jig 83.

Next, the spring type uneven jig 83 is connected to the cylindrical jig 8.
Attach it to 7. An elastic material 88 is interposed between the spring type uneven jig 83 and the cylindrical jig 87. Further, each chip 92
Are pressed against the concave curved processing surface 89, and the cylindrical jig 87 and the processing surface 89 are relatively moved to wrap each one surface 90. Since the processing surface 89 is a concave curved surface, the spring-type uneven jig 83 and the elastic member 88 are elastically deformed, and the one surface 90 of all the chips 92. The shape of the processing surface 4 is transferred onto one surface 90 of the chip 92 by lapping.

Finally, the chips 92... Are removed from the spring-type uneven jig 83 to obtain a floating magnetic head 91. On one surface 90 (floating surface) of the floating magnetic head 91,
A crown that is convex in the longitudinal direction and a cross crown that is convex in the lateral direction of the flying magnetic head are simultaneously formed.

[0009]

However, in the first example of the conventional method of forming a crown of a floating magnetic head,
Since the crack 73 must be formed by irradiating the laser beam 74 a plurality of times, the process becomes complicated, and there is a problem that productivity is low. There is also a problem that the curvatures of the crown and the cross crown cannot be adjusted independently.

On the other hand, in the second example of the conventional method for forming a crown of a flying magnetic head, the crown and the cross crown are formed by transferring the processing surface 89, so that the shape of the crown and the cross crown is changed. Has a problem that the shape of the processing surface 89 must be changed.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has high productivity, simultaneously forms a crown and a cross crown, has small variations in the shape of the crown and the cross crown, An object of the present invention is to provide a method for forming a crown of a floating magnetic head that can easily change the shape of the crown. The present invention also provides a crown forming apparatus which has high productivity, forms a crown and a cross crown at the same time, has small variations in the shapes of the crown and the cross crown, and can easily change the shapes of the crown and the cross crown. The purpose is to do.

[0012]

In order to achieve the above object, the present invention employs the following constitution. In the method of manufacturing a floating magnetic head according to the present invention, a processing surface adjacent to the side wall surface of a substantially rectangular parallelepiped bar having one or more magnetic head elements formed in a row or several rows on the side wall surface is wrapped. By cutting the bar along the transverse direction, the surface to be processed becomes a floating surface, and when manufacturing a floating magnetic head including at least one magnetic head element, At least one groove is provided between the magnetic head elements along the short direction of the bar on the surface to be processed, and the surface to be processed is divided into a plurality of divided surfaces. Using a tool and a lap plate having a concave curved processing surface, each of the divided surfaces of the bar is set to the lap plate side, and the bar is deformed into an arc shape along the longitudinal direction to form the jig. Paste on the convex curved surface, the bar It abuts a dividing plane on the working surface of the lapping plate,
A lap process is performed on the divided surfaces by relatively moving the divided surfaces and the processing surface, thereby forming a crown on the floating surface of the floating magnetic head. The groove is provided between each of the magnetic head elements.
It is preferable to provide one.

In the above-mentioned method for forming a crown of a floating magnetic head, the lap plate is rotated, and the bar is swung in a direction perpendicular to the rotation direction of the lap plate to thereby form the bar. It is preferable that the division surface and the processing surface of the lap surface plate are relatively moved. Further, in the method of forming a crown of a floating magnetic head, a dummy bar having the same shape and the same material as the bar is provided in parallel with a longitudinal direction of the bar and separated from the bar. It is preferable that the lapping process is performed by sticking to the convex curved surface.

[0014] The crown forming apparatus of the present invention comprises: a lap surface plate having a concave curved processing surface; a jig having a convex curved surface;
Driving means for moving the jig and the processing surface relative to each other, with the convex curved surface of the jig facing the processing surface of the lap surface plate, and one or more magnetic heads on a side wall surface. The elements are provided in a row, and at least one or more grooves are provided on the surface to be processed along the lateral direction of the surface to be processed, between the magnetic head elements. A substantially cubic bar having a plurality of divided surfaces is deformed into an arc shape along the longitudinal direction with each of the divided surfaces as the lap platen side and attached to the convex curved surface of the jig, Each of the divided surfaces of the bar is configured to be in contact with the processing surface of the lap surface plate.
Preferably, one groove is provided between the magnetic head elements.

The driving means comprises: a rotating mechanism for rotating the lap plate; holding the jig and pressing each of the divided surfaces of the bar against the processing surface of the lap plate;
A swing mechanism for swinging the jig in a direction orthogonal to the rotation direction of the lap platen, wherein the bar is fixed to the jig so that the longitudinal direction of the bar coincides with the swing direction of the jig. It is characterized by being attached to a tool. In the crown forming apparatus, a dummy bar having the same shape and the same material as the bar is attached to the convex curved surface of the jig in a direction parallel to a longitudinal direction of the bar and apart from the bar. Preferably, it is attached.

The radius of curvature of the machined surface is R ₂ ,
If the radius of curvature of the convex curved surface and R _1, is preferably a R ₁ ≧ R _2.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method and apparatus for forming a crown of a floating magnetic head according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a crown forming apparatus 1 according to the present invention. This crown forming device 1
A lap plate 2 provided on a table T, a jig 3 provided thereon, a driving means 10, a control plate S provided upright behind the lap plate 2, The swing plate 11 supported by the control panel S and the polishing liquid jet nozzle 16 are mainly configured.

As shown in FIGS. 2A and 2B, the lapping plate 2 has a substantially disc shape and a processed surface 4 having a concave upper surface. The processing surface 4 is inclined downward toward the center of the lap surface plate 2.

The jig 3 has a cylindrical shape as shown in FIG. Further, a bar 21 is attached to the convex curved surface 6 as shown in FIGS. 5A to 5C. The bar 21 is formed by forming a large number of magnetic head elements on one surface of a wafer made of a material of a slider of a floating magnetic head by using a thin film forming technique or the like, and then cutting out a part of the wafer to form a substantially rectangular parallelepiped. . Bar 21
Is cut out from the wafer so that five magnetic head elements 29 are arranged in a row on the side wall surface 23 as shown in FIG. 4A. FIG.
As shown in the figure, the upper surface (work surface) adjacent to the side wall surface 23
24 are provided with grooves 26. The grooves 26 are provided so as to be located between the magnetic head elements 29. Bar 2
In 1, the thickness of the portion where the groove 26 is provided is smaller than the thickness of the other portions by the depth of the groove 26. This portion is referred to as a thin portion 27. The upper surface 24 of the bar 21 is divided by the grooves 26 to form five divided surfaces 24a. The divided surface 24a serves as a floating surface of the finally obtained floating magnetic head. The groove 26 is formed by cutting the upper surface 24 of the bar 21 with, for example, a grindstone. In addition,
The number of magnetic head elements 29 provided on the bar 21 is
In FIG. 4B, the number is five, but the number is not limited to five. Also, in FIG. 4B, one groove 26 is provided between the two magnetic head elements 29, 29,
The number of the grooves 26 is not limited to this, and the magnetic head elements 29, 2
9 may be provided with a plurality of grooves.

As shown in FIG. 4C, the bar 21 has the split surface 24a... Facing upward and the other surface 25 facing the split surface 24a.
The bar 21 is attached to the jig 3 while being deformed in an arc shape along the longitudinal direction of the bar 21. To deform the bar 21, it is preferable to heat the bar 21 in advance.

As shown in FIG. 5A, a dummy bar 22 having the same shape and the same material as the bar 21 is provided on the convex curved surface 6 of the jig 3 in parallel with the longitudinal direction of the bar 21.
It is attached at a distance. The dummy bar 22 is provided with a plurality of grooves like the bar 21. Further, an elastic sheet 30 may be interposed between the bar 21 and the dummy bar 22 and the convex curved surface 6. The elastic sheet is made of urethane, for example, and has an adhesive surface so that the bar 21 can be fixed to the convex curved surface 6. Further, the elastic sheet 30 may be omitted. In this case, the bar 21 and the dummy bar 22 are fixed to the convex curved surface 6 with an adhesive, wax, or the like. The radius of curvature R ₁ of the convex curved surface 6 radius of curvature R ₂ and the jig 3 of the surface 4 of the lap plate 2
Is defined as R ₁ ≧ R ₂ .

As shown in FIG. 1, the driving means 10 presses the jig 3 against the processing surface 4 of the lap plate 2 by rotating the lap plate 2 with a rotation mechanism 17 for rotating the lap plate 2. Board 2
And a swing mechanism 18 for swinging in a direction orthogonal to the rotation direction of The rotating mechanism 17 may be of any type as long as it rotates the lap platen 2. For example, as shown in FIG. 1, a motor 7 connected to the center of the lap surface plate 2 and rotating the lap surface plate 2 in the direction of arrow A may be used. The oscillating mechanism 18 includes an oscillating plate 11 provided on the front side of the control panel S, a convex portion 12 provided on an upper front portion of the oscillating plate 11, and a pair of right and left loads projecting downward from the convex portion 12. It comprises rods 13, 13 and load blocks 14 suspended from the load rods 13, 13.

As shown in FIG. 1, a support surface 19 is provided on the back side of the swinging plate 11, and the lap plate 2 of the support surface 19 is provided.
The rail members 118, 118 shown in FIG.
And rail receiving members 119 and 119 are provided so as to engage with the rail members 118 and 118. The rail receiving members 119 and 119 are connected to the back surface of the swing plate 11, Are the rail members 118, 1
It is configured to be able to reciprocate left and right along 18.

On the front side of the support surface 19, a motor 120 and a link arm 123 are provided between the swing plate 11 and the support plate 19 as shown in FIG.
One end of a link arm 123 is rotatably connected to an end of an arm plate 122 attached to the rotation shaft 121 of the drive shaft 126 by a pin 125, and the other end of the link arm 123 is connected to a center of a drive plate 126 by a pin 127. In addition to being rotatably connected, rail receiving members 119 and 119 are attached to upper and lower portions of the driving plate 126, respectively.

With the above arrangement, the arm plate 122 is rotated with the rotation of the motor 120, whereby one end of the link arm 123 rotates eccentrically, and the other end of the link arm 123 connects the drive plate 126 to the rail member 118,
Since the reciprocating movement is performed right and left along 118, the swinging plate 11
Are swingable in the direction of arrow X in FIG.

As shown in FIG. 1, the convex curved surface 6 is attached to the load block 14 so as to face the processing surface 4 of the lap platen 2, and is wrapped by an elastic material (not shown) built in the load rods 13, 13. The jig 3 is biased toward the surface plate 2. Thus, the bar 21 and the dummy bar 22
Is pressed against the processing surface 4.

As shown in FIGS. 6 and 7, the jig 3 is disposed on the processing surface 4 so that the divided surfaces 24a... (Upper surface 24) of the bar 21 and the processing surface 4 of the lap platen 2 come into contact with each other. Is done.
The bar 21 and the dummy bar 22 are preferably attached to the jig 3 such that the longitudinal direction of the bar 21 and the dummy bar 22 and the swing direction of the jig 3 coincide.
As shown in FIG. 1, the polishing liquid jet nozzle 16 jets a polishing liquid toward the processing surface 4 of the lap surface plate 2.

In order to form a crown on the divided surfaces 24a... (Upper surface 24) of the bar 21 using the above-described crown forming device 1, the following operation is performed. First, a polishing liquid is sprayed from the polishing liquid jet nozzle 16 onto the processing surface 4. Next, the lap platen 2 is rotated, and the bar 21 attached to the jig 3 is rotated.
And the dummy bar 22 is swung in the direction orthogonal to the rotation direction of the lap platen 2 while being pressed against the processing surface 4 by the swinging mechanism 18, so that the bar 21 and the dummy bar 22 and the processing surface 4 are relatively moved. .. And the dummy bar 2
2 and the processing surface 4 are slid with each other to wrap the divided surfaces 24a of the bar 21. At this time, dummy bar 2
2 is wrapped by the processing surface 4 similarly to the bar 21.

Here, the main part of the crown forming apparatus 1 is shown in FIGS. 5, 6 and 7. FIG. As shown in FIGS. 5A and 5B, when the bar 21 is attached to the jig 3,
1 is deformed in an arc shape in the longitudinal direction, but since the rigidity of the thin portions 27 of the bar 21 is low, the bar 21 is mainly deformed at the thin portion 27. Therefore, the dividing surface 2 of the bar 21
4a are substantially flat along the longitudinal direction of the bar 21. The approximate radius of curvature of the entire divided surface 24a of the bar 21 is larger than the convex curved surface 6 by the thickness of the bar 21. In the short direction of the bar 21, as shown in FIG. 5C and FIG. 7, even if the bar 21 is attached to the convex curved surface 6, the bar 21 has high rigidity in the short direction and is hard to bend. Are substantially flat in the short direction of the bar 21. Thus, each of the divided surfaces 24a of the bar 21 attached to the convex curved surface 6 is substantially flat.

When the bar 21 is pressed against the processing surface 4,
Since the curvature radius of the convex curved surface 6 and the processing surface 4 is the same or the radius of curvature of the convex curved surface 6 is larger, both ends of the bar 21 in the longitudinal direction are pressed against the processing surface 4 as shown in FIGS. The elastic sheet 30 is deformed, and the divided surfaces 24a of the bar 21 are formed.
The approximate radius of curvature of the whole becomes substantially equal to the radius of curvature of the processing surface 4, and the corners 24b of the respective divided surfaces 24a contact the processing surface 4. When the bar 21 is directly attached to the convex surface 6 with an adhesive, wax, or the like without using the elastic sheet 30, when the bar 21 is pressed against the processing surface 4, both ends in the longitudinal direction of the bar 21 are processed. The bar 21 is pressed against the surface 4 so that the bar 21
, The approximate radius of curvature of the entire divided surface 24 a becomes substantially equal to the radius of curvature of the processing surface 4.

Since each of the divided surfaces 24a of the bar 21 is in contact with the processing surface 4 while remaining flat, as shown in FIG. 8B, the divided surfaces 24a of the bar 21 are polished by the processing surface 4 and lapped. The divided surfaces 24a are convex curved surfaces that are convex toward the longitudinal direction and the lateral direction of the bar 21. Thus, the crown 24c and the cross crown 24d are formed simultaneously.

The bar 21 having the divided surfaces 24a... Having a convex curved surface as described above is removed from the jig 3 and the elastic sheet 30, and the bars 21 are cut at equal intervals in the longitudinal direction, so that the floating type is used. The magnetic head 28 is obtained (FIG. 8)
C). The flying surface 31 of the flying magnetic head 28 is originally the dividing surface 24a of the bar 21, and the flying 31 has a crown 24c and a cross crown 24d.

In the above-described method for forming a crown of a floating magnetic head, a bar 21 in which a plurality of magnetic head elements are arranged in a row is attached to the convex curved surface 6 of the jig 3 and the bar 21 is formed on the concave curved processing surface 4. Since the lapping process is performed in contact, the lapping process can be performed on the air bearing surfaces of a plurality of floating magnetic heads at the same time, and the productivity of the floating magnetic head can be improved. Also, on the upper surface (work surface) 24 of the bar 21,
A plurality of grooves 26 are formed between the magnetic head elements 29 to form the upper surface 24 into a plurality of divided surfaces 24a. The bar 21 is deformed in an arc shape along the longitudinal direction and attached to the convex curved surface 6 of the jig 3. Since each divided surface 24a is wrapped, the crown 2
4c and the cross crown 24d can be formed at once.

In the above-described method of forming a crown of a floating magnetic head, the bar 2 is rotated by rotating the lap plate 2 and swinging the jig 3 in a direction perpendicular to the rotation direction of the lap plate 2.
Since the workpiece 1 and the processing surface 4 move relative to each other, the lapping process can be performed efficiently. Further, since the bar 21 swings in a direction orthogonal to the rotation direction of the lap surface plate 2, the bar 21
No scratches along the rotation direction of the lapping plate 2 remain on the upper surface (working surface) 24 of the lapping plate 2. Also, the jig 3 is placed on the lapping plate 2
By oscillating in the direction orthogonal to the rotation direction, the bar 21 is uniformly contacted with the entire surface of the processing surface 4 and the lapping process is performed. The entire surface 4 is evenly worn to prevent deformation of the processed surface 4. Further, in the above-described method for forming a crown of a floating magnetic head, the bar 21 and the dummy bar 2
2 are attached to the jig 3 so that they are parallel to each other in the longitudinal direction, and the bar 21 and the dummy bar 22 are constantly pressed against the processing surface 4. On the other hand, the lapping process can be stably performed in contact with the processing surface 4, and a crown having excellent dimensional accuracy of the shape can be formed.

The above-described crown forming apparatus 1 comprises: a jig 3 on which a bar 21 in which a plurality of magnetic head elements 29 are arranged in a line; a lap surface plate 2 having a concave curved processing surface 4; Since the drive unit 10 is provided, the floating surfaces of the plurality of floating magnetic heads can be simultaneously lapped. Further, since the jig 3 has the convex curved surface 6, the plurality of grooves 26 are provided on the upper surface 24, and the bar 21 having the upper surface 24 as the plurality of divided surfaces 24a is formed in an arc shape along the longitudinal direction. It is possible to fix while deforming,
Since each of the divided surfaces 24a is reliably brought into contact with the processing surface 4,
A crown 24c and a cross crown 24d having the same shape can be formed on each of the divided surfaces 24a.

In the crown device 1 described above,
When the bar 21 is pressed against the processing surface 4, the elastic sheet 30
Alternatively, the bar 21 is elastically deformed by the deformation of the wax or the like, so that the approximate radius of curvature of the entire dividing surface 24a in the longitudinal direction of the bar 21 can be made the same as the radius of curvature of the processing surface 4. The surfaces 24a are surely machined surfaces 4.
To form a crown 24c and a cross crown 24d of the same shape on each of the divided surfaces 24a. Also, since the shape of the processing surface 4 is transferred to the divided surfaces 24a, the crown 2 having excellent dimensional accuracy of the shape is obtained.
4c and the cross crown 24d can be obtained.

The above-described crown forming apparatus 1 drives the lapping plate 2 to rotate and swing the jig 3 in a direction perpendicular to the rotation direction of the lapping plate 2 while pressing the jig 3 against the processing surface 4. Since the means 10 is provided, the lapping process can be performed efficiently. Further, since the bar 21 is swung in a direction orthogonal to the rotation direction of the lap surface plate 2, scratches along the rotation direction of the lap surface plate 2 may remain on the upper surface (work surface) 24 of the bar 21. Absent. Further, the jig 3 is swung in a direction orthogonal to the rotation direction of the lapping platen 2 so that the bar 21 is uniformly contacted with the entire surface of the processing surface 4 and the lapping process is performed. Is not unevenly worn, the entire surface of the processing surface 4 is evenly worn, and the deformation of the processing surface 4 can be prevented. Furthermore, in the crown forming apparatus 1 described above, the bar 21 and the dummy bar 22 are attached to the jig 3 so as to be parallel to each other in the longitudinal direction. The crown 24c and the cross crown 24d, which are in stable contact with the processing surface 4 without swinging in the hand direction and have excellent dimensional accuracy, can be formed.

Further, in the crown forming apparatus 1 described above, if the radius of curvature of the processing surface 4 is R ₂ and the radius of curvature of the convex curved surface 6 is R ₁ , R ₁ ≧ R ₂ and the bar 21 4, when pressed against both ends of the bar 21
Are always pressed and the divided surfaces 24a of the bar 21 are surely pressed against the processing surface 4, so that the bar 21 can be lapped while the bar 21 is always deformed in an arc shape, and the bar 21 can be divided. The shape of the processed surface 4 is transferred to the surfaces 24a, so that the crown 24c and the cross crown 24d having excellent shape dimensional accuracy can be formed.

[0039]

EXAMPLES (Experimental Example 1) The depth of a groove provided in a bar,
The relationship between the crown height and the cross crown height of the bar after the lap treatment was investigated. First, on a wafer made of Al ₂ O ₃ -TiC based Serammikusu, to form a large number of magnetic head elements using a thin film formation technique, and then cutting the wafer, cut out substantially rectangular parallelepiped bar. At this time, the wafer was cut so that a plurality of thin-film magnetic head elements were arranged in a row on the side wall surface of the bar. Further, a plurality of grooves were formed on one surface of the bar between the magnetic head elements.
The width of the groove is about 125 μm, and the depth of the groove is 0 to 0.15 μm.
m was prepared. Also, a bar and a same shape, were prepared dummy bar made of Al ₂ O ₃ -TiC based Serammikusu.

Next, a jig having a convex curved surface is prepared, an elastic sheet made of urethane having a thickness of 1 mm is attached to the convex curved surface, and the bar and the dummy bar are deformed in an arc shape to form an elastic sheet on the convex curved surface. Pasted. The bar and the dummy bar were attached to a jig parallel to each other in the longitudinal direction and apart from each other. In addition, a lap surface plate having a concave curved processing surface was prepared.

Next, the jig and the lapping plate are attached to the crown forming apparatus shown in FIG. 1, and the bar is wrapped by rotating the lapping plate while swinging the jig.
A crown and a cross crown were formed on the divided surface of the bar. The crown height and the cross crown height at each divided surface of the obtained bar were measured, and the average value of each characteristic value was obtained. FIG. 9 shows the results.

As shown in FIG. 9A, when the depth of the groove is increased from 0 μm to 0.15 μm, the crown height becomes 27 nm.
To 19 nm. Also, as shown in FIG. 9B,
As the groove depth increased from 0 μm to 0.15 μm, the cross crown height increased linearly from −2.7 nm to 13 nm.

As described above, it has been found that the crown height and the cross crown height can be particularly adjusted by changing the depth of the groove. It is not clear why the groove depth affects the crown height and cross crown height values, but it is presumed that the lengthwise rigidity of the bar changes depending on the groove depth. You.

(Experimental Example 2) The width of the groove provided in the bar,
The relationship between the crown height and the cross crown height of the bar after the lap treatment was investigated. The depth of the groove is about 75 μm,
Bars were prepared in the same manner as in Experimental Example 1 except that bars having groove widths varying from 125 to 190 μm were prepared, and lapping was performed using these bars. The height of the crown and the height of the cross crown on each divided surface of the obtained bar were measured. The results are shown in FIG.

As shown in FIG. 10A, the width of the groove is 125 μm.
When the height was increased from m to 190 μm, the crown height tended to slightly decrease on average from 23 nm to 20 nm. There was no significant change in the variation of the crown height for each groove width. In addition, as shown in FIG.
When increasing from 25 μm to 190 μm, the cross crown height increased linearly from 2 nm to 6 nm. The variation of the cross crown height for each groove width tended to increase as the groove width increased.

When the width of the groove was changed, there was no significant change in the crown height, but it was found that the cross crown height increased linearly. The reason why the width of the groove affects the value of the cross crown height is not clear, but Experimental Example 1
It is presumed that this is caused by a change in the rigidity of the bar in the longitudinal direction, as in the case of.

(Experimental Example 3) The relationship between the roughness of the bottom surface of the groove provided in the bar and the crown height and the cross crown height of the bar after the lapping treatment was examined. Bar, 600-2
Bars were made in the same manner as in Experimental Example 1 except that grooves having a depth of about 75 μm and a width of about 125 μm were formed by cutting with a 000 mesh whetstone, and lapping was performed using these bars. Was done. The height of the crown and the height of the cross crown on each divided surface of the obtained bar were measured.
The results are shown in FIG.

As shown in FIG. 11A, the roughness of the grindstone is 60
When the mesh was increased from 0 mesh to 2000 mesh, the crown height tended to slightly increase on average from 20 nm to 23 nm. There was no significant change in the variation in crown height for each roughness of the grindstone. Also, as shown in FIG. 11B, when the roughness of the grindstone was increased from 600 mesh to 2000 mesh, the cross crown height was changed from 3 nm to 1 mesh.
nm linearly. There was no significant change in the variation of the cross crown height for each roughness of the grindstone.

When the width of the groove was arbitrarily changed, no significant change was observed in the crown height, but it was found that the cross crown height slightly decreased linearly.

Based on the results of Experimental Examples 1 to 3, the width and depth of the groove and the roughness of the entire surface of the groove are changed without changing the radius of curvature of the processing surface of the lap platen and the convex curved surface of the jig. As a result, it has been found that the cross crown height of the cross crown formed on the divided surface of the bar can be changed. Further, it has been found that the crown height of the crown formed on the divided surface of the bar can be changed by changing the depth of the groove.

[0051]

As described above in detail, according to the method of forming a crown of a floating magnetic head of the present invention, a bar in which a plurality of magnetic head elements are arranged in a row is attached to a convex curved surface of a jig, and the bar is mounted. Since the lapping process is performed by abutting on the concave curved processing surface, it is possible to lap the floating surfaces of the plurality of floating magnetic heads at the same time, thereby improving the productivity of the floating magnetic head. In addition, a plurality of grooves are formed between the magnetic head elements on the processed surface of the bar to form a plurality of divided surfaces on the processed surface, and the bar is deformed into an arc shape along the longitudinal direction to form a jig having a convex curved surface. The crown and the cross crown can be formed at a time since they are attached and each divided surface is lapped. If the number of grooves formed between the magnetic head elements is one, the step of forming the grooves is simplified, and the productivity of the floating magnetic head can be improved. In the method for forming a crown of a floating magnetic head according to the present invention,
By appropriately changing the width, depth of the groove, the roughness of the entire surface of the groove, etc., it becomes possible to independently change the respective curvature radii of the crown and the cross crown of the bar. The cross crown can be formed at one time.

In the method for forming a crown of a floating magnetic head according to the present invention, the lapping plate is rotated, and the jig is swung in a direction perpendicular to the rotation direction of the lapping plate to process each divided surface of the bar. Since the surface relatively moves, lapping can be performed efficiently. Further, since the bar is swung in a direction orthogonal to the rotation direction of the lap surface plate, no scratch is left on the surface to be processed of the bar along the rotation direction of the lap surface plate.
In addition, by swinging the jig in a direction orthogonal to the rotation direction of the lap surface plate, the bar is uniformly contacted with the entire surface of the processing surface and the lapping process is performed, so that a part of the processing surface is unevenly worn. Therefore, the entire surface of the processing surface is evenly worn, so that the deformation of the processing surface can be prevented. In the method of forming a crown of a floating magnetic head according to the present invention, the bar and the dummy bar are attached to a jig so as to be parallel to each other in the longitudinal direction, and the bar and the dummy bar are constantly pressed against the processing surface. Therefore, the bar can be stably wrapped in contact with the processing surface in the short direction of the bar, and a crown having excellent dimensional accuracy of the shape can be formed.

According to the crown forming apparatus of the present invention, there is provided a jig to which a bar in which a plurality of magnetic head elements are arranged in a row is mounted, a lap surface plate having a concavely processed surface,
Since the driving means is provided, the floating surfaces of the plurality of floating magnetic heads can be simultaneously lapped. Further, since the jig of the crown forming device of the present invention has a convex curved surface, it is possible to fix the bar while deforming the bar in an arc shape along the longitudinal direction, and each divided surface is reliably processed. Since it is in contact with the surface, a crown and a cross crown can be formed on each divided surface at once.

Further, in the crown device of the present invention,
When the bar is pressed against the processing surface, the bar is elastically deformed along the convex curved surface of the jig, and the approximate radius of curvature of the entire divided surface in the longitudinal direction of the bar is made equal to the radius of curvature of the processing surface. Since each of the divided surfaces can reliably contact the processing surface, a crown and a cross crown can be formed on each of the divided surfaces at once. Further, since the shape of the processed surface is transferred to the divided surface, a crown and a cross crown excellent in dimensional accuracy of the shape can be obtained.

The crown forming apparatus of the present invention is provided with driving means for rotating the lap plate and swinging the jig in a direction perpendicular to the rotation direction of the lap plate while pressing the jig against the processing surface. Therefore, the lapping process can be performed efficiently. In addition, since the bar is swung in a direction orthogonal to the rotation direction of the lap surface plate, no scratch is left on the work surface of the bar along the rotation direction of the lap surface plate. Furthermore, since the jig is swung in a direction perpendicular to the rotation direction of the lapping plate, the bar is uniformly contacted with the entire surface of the processing surface and the lapping process is performed. And the entire surface of the processing surface is evenly worn and
Can be prevented from being deformed.

Further, in the crown forming apparatus of the present invention, the bar and the dummy bar are attached to the jig so as to be parallel to each other in the longitudinal direction. On the other hand, it is possible to form a crown and a cross crown with excellent shape dimensional accuracy by stably coming into contact with the processed surface without shaking.

Further, in the crown forming apparatus of the present invention, if the radius of curvature of the processing surface is R ₂ and the radius of curvature of the convex surface is R ₁ , then R ₁ ≧ R ₂ and the bar is pressed against the processing surface. When the bar is pressed, both ends of the bar are always pressed against the processing surface and each divided surface of the bar is reliably pressed against the processing surface, so the bar can be wrapped while the bar is always deformed in an arc shape The shape of the processed surface is transferred to the divided surface of the bar, and a crown and a cross crown having excellent dimensional accuracy of the shape can be formed.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a crown forming device according to an embodiment of the present invention.

FIG. 2 is a diagram showing a lap surface plate according to an embodiment of the present invention, wherein A is a perspective view and B is a side sectional view.

FIG. 3 is a perspective view showing a jig of the crown forming apparatus according to the embodiment of the present invention.

FIG. 4 is a process diagram showing a process of attaching a bar to a jig of the crown forming device according to the embodiment of the present invention.

FIG. 5 is a view showing a jig of the crown forming apparatus according to the embodiment of the present invention, wherein A is a perspective view, B is a side sectional view, and C is a front sectional view.

FIG. 6 is a side sectional view showing a main part of the crown forming apparatus according to the embodiment of the present invention.

FIG. 7 is a front sectional view showing a main part of the crown forming apparatus according to the embodiment of the present invention.

FIG. 8 is an explanatory diagram illustrating a process in which a bar is lapped and a floating magnetic head is obtained.

FIG. 9 is a diagram showing a relationship between the depth of the groove and the crown shape, wherein A is a diagram showing the relationship between the depth of the groove and the crown height, and B is a diagram showing the relationship between the depth of the groove and the cross crown height. FIG.

FIG. 10 is a diagram showing a relationship between a groove width and a crown shape, wherein A is a diagram showing a relationship between a groove width and a crown height, and B is a diagram showing a relationship between a groove width and a cross crown height. FIG.

11 is a diagram showing a relationship between the roughness of a grindstone forming a groove and a crown shape, wherein A is a diagram showing a relationship between the roughness of a grindstone and a crown height, and B is a diagram showing the roughness of a grindstone and a cross crown height. FIG. FIG. 7 is a diagram showing a relationship between the above.

FIG. 12 is a process diagram illustrating an example of a conventional method for forming a crown of a floating magnetic head.

FIG. 13 is a process diagram illustrating another example of a conventional method for forming a crown of a floating magnetic head.

FIG. 14 is a schematic view showing a main part of a drive mechanism of the crown forming device according to the embodiment of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 crown forming device 2 lap surface plate 3 jig 4, processing surface 5 center axis 6 convex curved surface 7 motor 10 drive means 17 rotation mechanism 18 swing mechanism 21 bar 22 dummy bar 23 side wall surface 24 top surface (work surface) 24 c crown 24 d Cross crown 26 Groove 27 Thin part 28 Floating magnetic head 29 Magnetic head element

Continuation of the front page (72) Inventor Isao Nakabayashi 1-7 Yukitani Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. F term (reference) 5D042 NA02 QA01 RA02 5D093 AA05 AC08 DA04 FA22 FA26

Claims (8)

[Claims] 1. A substantially rectangular parallelepiped bar, in which one or more magnetic head elements are formed in a row or several rows on a side wall surface, a lapping process is performed on a surface to be processed adjacent to the side wall surface, and the bar is shortened. By cutting along the direction, the surface to be processed becomes an air bearing surface, and when manufacturing a floating magnetic head including at least one magnetic head element, on the surface to be processed of the bar, A jig having a convex curved surface and a concave curved surface processing are provided by providing at least one groove located between the magnetic head elements along the short direction of the bar to divide the surface to be processed into a plurality of divided surfaces. Using a lapping plate having a surface, the respective divided surfaces of the bar are set to the lapping plate side, and the bar is deformed into an arc shape along the longitudinal direction and is attached to the convex curved surface of the jig, Place each of the divided surfaces of the bar on the lap platen Abutting on the processing surface, the respective divided surfaces and the processing surface are relatively moved to wrap each of the divided surfaces, thereby forming a crown on the floating surface of the floating magnetic head. Forming method for a floating magnetic head. 2. The method according to claim 1, wherein the number of grooves provided between the magnetic head elements is one. 3. The lap plate is rotated, and the bar is swung in a direction orthogonal to the rotation direction of the lap plate, so that each of the divided surfaces of the bar and the processing surface of the lap plate are processed. 3. The method for forming a crown of a floating magnetic head according to claim 1 or 2, wherein the relative movement is performed. 4. A dummy bar having the same shape and the same material as that of the bar is provided in parallel with the longitudinal direction of the bar.
The method for forming a crown of a floating magnetic head according to any one of claims 1 to 3, wherein the lap processing is performed by attaching the jig to the convex curved surface of the jig separately from the bar. 5. A lap surface plate having a concave curved surface, a jig having a convex surface, and the jig with the convex surface of the jig facing the processing surface of the lap surface. And a driving means for relatively moving the processing surface, wherein one or more magnetic head elements are provided in a row on the side wall surface, and the processing surface is provided along a short direction of the processing surface. At least one groove is provided between each of the magnetic head elements to form a substantially cubic bar having a plurality of divided surfaces on the surface to be processed. Side, is formed into an arc shape along the longitudinal direction, is attached to the convex curved surface of the jig, and the respective divided surfaces of the bar are in contact with the processed surface of the lap surface plate. A crown forming device characterized by being performed. 6. The crown forming apparatus according to claim 5, wherein one of the grooves is provided between the magnetic head elements. 7. The driving unit includes: a rotation mechanism configured to rotate the lap plate; holding the jig to press each of the divided surfaces of the bar against the processing surface of the lap plate; A swinging mechanism for swinging the jig in a direction orthogonal to the rotation direction of the lap platen, wherein the bar is provided with the jig such that a longitudinal direction of the bar coincides with a swinging direction of the jig. The crown forming device according to claim 5, wherein the crown forming device is attached to a crown. 8. A dummy bar having the same shape and the same material as the bar is provided in parallel with a longitudinal direction of the bar.
The crown forming device according to any one of claims 5 to 7, further comprising affixed to the convex curved surface of the jig at a distance from the bar.