JPH051113B2 - - Google Patents

Info

Publication number
JPH051113B2
JPH051113B2 JP62097765A JP9776587A JPH051113B2 JP H051113 B2 JPH051113 B2 JP H051113B2 JP 62097765 A JP62097765 A JP 62097765A JP 9776587 A JP9776587 A JP 9776587A JP H051113 B2 JPH051113 B2 JP H051113B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62097765A
Other versions
JPS63264286A (en
Inventor
Naoto Sakagami
Original Assignee
Nippon Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co filed Critical Nippon Electric Co
Priority to JP62097765A priority Critical patent/JPH051113B2/ja
Publication of JPS63264286A publication Critical patent/JPS63264286A/en
Publication of JPH051113B2 publication Critical patent/JPH051113B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

JP62097765A 1987-04-20 1987-04-20 Expired - Lifetime JPH051113B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62097765A JPH051113B2 (en) 1987-04-20 1987-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62097765A JPH051113B2 (en) 1987-04-20 1987-04-20

Publications (2)

Publication Number Publication Date
JPS63264286A JPS63264286A (en) 1988-11-01
JPH051113B2 true JPH051113B2 (en) 1993-01-07

Family

ID=14200960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62097765A Expired - Lifetime JPH051113B2 (en) 1987-04-20 1987-04-20

Country Status (1)

Country Link
JP (1) JPH051113B2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6639177B2 (en) 2001-03-29 2003-10-28 Gsi Lumonics Corporation Method and system for processing one or more microstructures of a multi-material device
US7935941B2 (en) 2004-06-18 2011-05-03 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laser beam spots spaced on-axis on non-adjacent structures
US7633034B2 (en) 2004-06-18 2009-12-15 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laser beam spots overlapping lengthwise on a structure
US7687740B2 (en) 2004-06-18 2010-03-30 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laterally spaced laser beam spots delivering multiple blows
US8148211B2 (en) 2004-06-18 2012-04-03 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laser beam spots spaced on-axis delivered simultaneously
US7435927B2 (en) 2004-06-18 2008-10-14 Electron Scientific Industries, Inc. Semiconductor link processing using multiple laterally spaced laser beam spots with on-axis offset
US8383982B2 (en) 2004-06-18 2013-02-26 Electro Scientific Industries, Inc. Methods and systems for semiconductor structure processing using multiple laser beam spots
US7425471B2 (en) 2004-06-18 2008-09-16 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset
US7629234B2 (en) 2004-06-18 2009-12-08 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laterally spaced laser beam spots with joint velocity profiling
KR100766300B1 (en) 2006-07-12 2007-10-12 (주)미래컴퍼니 Laser slit and laser machining apparatus

Also Published As

Publication number Publication date
JPS63264286A (en) 1988-11-01

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