JPH05110155A - Electrostrictive element - Google Patents
Electrostrictive elementInfo
- Publication number
- JPH05110155A JPH05110155A JP3271634A JP27163491A JPH05110155A JP H05110155 A JPH05110155 A JP H05110155A JP 3271634 A JP3271634 A JP 3271634A JP 27163491 A JP27163491 A JP 27163491A JP H05110155 A JPH05110155 A JP H05110155A
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive effect
- effect element
- ceramic capacitor
- capacitor type
- electrostrictive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003985 ceramic capacitor Substances 0.000 claims abstract description 23
- 239000012530 fluid Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 6
- 230000000694 effects Effects 0.000 claims description 46
- 230000001747 exhibiting effect Effects 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 abstract description 5
- 230000001070 adhesive effect Effects 0.000 abstract description 5
- 238000003475 lamination Methods 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は電歪効果素子の構造に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the structure of an electrostrictive effect element.
【０００２】[0002]
【従来の技術】電歪効果素子は固体の電歪効果を利用し
て、電気エネルギーを機械エネルギーに変換するトラン
スデューサである。具体的には電歪効果の大きな固体の
対向する表面に金属膜などの電極を形成し、電極間に電
位差を与えたときに発生する固体の歪を利用する。この
際、電界と平行方向に発生する歪（縦効果歪）は電界強
度が大きくなるほど発生する歪が大きくなるため、電極
間隔を狭くし、これを複数積層して大きな歪を得られる
ようにしたものに積層セラミックコンデンサ型の電歪効
果素子がある。2. Description of the Related Art An electrostrictive effect element is a transducer that converts electric energy into mechanical energy by utilizing the electrostrictive effect of a solid. Specifically, an electrode such as a metal film is formed on the opposing surfaces of a solid having a large electrostrictive effect, and the strain of the solid generated when a potential difference is applied between the electrodes is used. At this time, since the strain (vertical effect strain) generated in the direction parallel to the electric field increases as the electric field strength increases, the electrode interval is narrowed and a large strain is obtained by stacking a plurality of electrodes. There is a multilayer ceramic capacitor type electrostrictive effect element.
【０００３】この積層セラミックコンデンサ型の電歪効
果素子において、より大きな歪を得るためには積層数を
多くすることが考えられる。しかし、積層数の多いもの
は製造技術的に困難であり、かつ製造コスト等の関係で
限界がある。このため、通常は、積層セラミックコンデ
ンサ型の電歪効果素子を複数個積み重ねた構造が用いら
れている。In this multilayer ceramic capacitor type electrostrictive effect element, it is conceivable to increase the number of stacked layers in order to obtain a larger strain. However, those having a large number of layers are difficult in terms of manufacturing technology, and there is a limit in terms of manufacturing cost and the like. Therefore, a structure in which a plurality of laminated ceramic capacitor type electrostrictive effect elements are stacked is usually used.
【０００４】図２は従来の積層セラミックコンデンサ型
の電歪効果素子を複数個積み重ねた構造の電歪効果素子
の縦断面図である。電歪材料１の内部に内部電極２ａ、
２ｂを一定の間隔で形成した積層セラミックコンデンサ
型の電歪効果素子が、接着剤４によって接着され複数個
積み重ねられている。また、内部電極２ａ、２ｂはそれ
ぞれ側面に形成された外部電極３ａ、３ｂに接続されて
いる。FIG. 2 is a vertical cross-sectional view of a conventional multilayer ceramic capacitor type electrostrictive effect element having a structure in which a plurality of electrostrictive effect elements are stacked. Inside the electrostrictive material 1, internal electrodes 2a,
A plurality of laminated ceramic capacitor type electrostrictive effect elements in which 2b are formed at regular intervals are adhered by an adhesive 4 and stacked. The internal electrodes 2a and 2b are connected to the external electrodes 3a and 3b formed on the side surfaces, respectively.
【０００５】[0005]
【発明が解決しようとする課題】図３（ａ）は従来の積
層セラミックコンデンサ型の電歪効果素子の縦断面図で
ある。外部電極３ａ、３ｂ間に電圧を印加した際、図中
Ｘで示した素子中央部は内部電極２ａ、２ｂによって電
界がかかり歪が生じるが、図中Ｙで示した素子側面部は
電界がかからないため歪が生じない。このため、電圧印
加による素子の変形は図３（ｂ）のように端面において
素子中央が凸の形状となる。FIG. 3A is a vertical sectional view of a conventional monolithic ceramic capacitor type electrostrictive effect element. When a voltage is applied between the external electrodes 3a and 3b, an electric field is applied to the central portion of the element shown by X in the drawing due to the internal electrodes 2a and 2b, but no electric field is applied to the side surface portion of the element shown by Y in the drawing. Therefore, no distortion occurs. Therefore, the element is deformed by applying a voltage so that the center of the element is convex on the end face as shown in FIG.
【０００６】図３（ｃ）は従来の積層セラミックコンデ
ンサ型の電歪効果素子を複数個積み重ねた構造の電歪効
果素子の縦断面図の一部である。個々の積層セラミック
コンデンサ型の電歪効果素子の端面が接着剤４によって
拘束されているため、この構造の素子に電圧を印加する
と図３（ｄ）の様に素子側面で引張応力が生じる。通常
接着剤４は柔らかい樹脂を用いているので素子側面の応
力に追従して変形するが、外部電極３ａ、３ｂは金属粉
を有機溶媒に溶かしてペースト状にしたものを塗布、焼
成してつくる金属薄膜であるためにこの応力によって断
線し易い。このため従来構造の電歪効果素子では電圧印
加によって外部電極が断線し動作不良を起こし易いとい
う問題点があった。FIG. 3 (c) is a part of a vertical cross-sectional view of an electrostrictive effect element having a structure in which a plurality of conventional multilayer ceramic capacitor type electrostrictive effect elements are stacked. Since the end surface of each electrostrictive effect element of the monolithic ceramic capacitor type is restrained by the adhesive 4, tensile stress is generated on the side surface of the element when a voltage is applied to the element of this structure as shown in FIG. Since the adhesive 4 is usually made of a soft resin, it deforms following the stress on the side surface of the element, but the external electrodes 3a and 3b are formed by applying a paste made by dissolving metal powder in an organic solvent and firing it. Since it is a metal thin film, it is easy to break due to this stress. Therefore, in the electrostrictive effect element having the conventional structure, there is a problem that the external electrode is disconnected due to the voltage application and the malfunction tends to occur.
【０００７】本発明の目的は積層セラミックコンデンサ
型の電歪効果素子を複数個積み重ねた構造の電歪効果素
子において、電圧印加の際の内部応力によって、外部電
極がその境界で断線することを防ぎ、信頼性を向上させ
ることができる構造を提供することにある。An object of the present invention is to prevent an external electrode from breaking at its boundary due to internal stress when a voltage is applied in an electrostrictive effect element having a structure in which a plurality of electrostrictive effect elements of a laminated ceramic capacitor type are stacked. The purpose is to provide a structure that can improve reliability.
【０００８】[0008]
【課題を解決するための手段】本発明の電歪効果素子
は、電歪効果を示す材料と内部電極とが交互に積層さ
れ、各内部電極が一層おきに同一の外部電極に接続して
いる積層セラミックコンデンサ型の電歪効果素子を一つ
の単位とし、これを複数個積み重ねた構造の電歪効果素
子において、一つの積層セラミックコンデンサ型の電歪
効果素子と、その上または下に位置する他の積層セラミ
ックコンデンサ型の電歪効果素子とが、それぞれの外部
電極間を導電性の粘性流体で満たすことによって電気的
に接続している。In the electrostrictive effect element of the present invention, a material exhibiting an electrostrictive effect and internal electrodes are alternately laminated, and each internal electrode is connected to the same external electrode every other layer. An electrostrictive effect element having a structure in which a plurality of laminated ceramic capacitor type electrostrictive effect elements are stacked and a plurality of these are stacked, and one laminated ceramic capacitor type electrostrictive effect element and another element positioned above or below The monolithic ceramic capacitor type electrostrictive effect element is electrically connected by filling the space between the external electrodes with a conductive viscous fluid.
【０００９】[0009]
【実施例】次に本発明について図面を参照して説明す
る。図１は本発明の一実施例による電歪効果素子の横断
面図および縦断面図である。チタン酸ジルコン酸鉛系の
電歪材料１の予焼粉末に有機溶媒、バインダ、可塑剤を
添加してドクターブレード法によってグリーンシートを
作成する。このグリーンシート上に白金粉末を主成分と
する内部電極２ａ、２ｂをスクリーン印刷し、所定形状
に切断し、所定枚数積層して熱圧着した後１１００℃で
焼成する。さらに、内部電極２ａ、２ｂの端が露出する
一対の側面に銀粉末を主成分とする外部電極ペーストを
塗布、焼成して、外部電極３ａ、３ｂを形成して積層セ
ラミックコンデンサ型の電歪効果素子を作成する。The present invention will be described below with reference to the drawings. FIG. 1 is a horizontal sectional view and a vertical sectional view of an electrostrictive effect element according to an embodiment of the present invention. A green sheet is prepared by a doctor blade method by adding an organic solvent, a binder, and a plasticizer to the pre-calcined powder of the lead zirconate titanate-based electrostrictive material 1. Internal electrodes 2a and 2b containing platinum powder as a main component are screen-printed on this green sheet, cut into a predetermined shape, a predetermined number of layers are laminated, thermocompression bonded, and then baked at 1100 ° C. Further, an external electrode paste containing silver powder as a main component is applied to a pair of side surfaces where the ends of the internal electrodes 2a and 2b are exposed and baked to form external electrodes 3a and 3b, thereby forming a multilayer ceramic capacitor type electrostrictive effect. Create the element.
【００１０】次に、この積層セラミックコンデンサ型の
電歪効果素子を所定個数エポキシ系の接着剤４により接
着し、プラスチック製のケース６に入れ、ケース６内で
外部電極３ａ間、３ｂ間が導電性の粘性流体５によって
電気的に接続できるようにケース６に設けられた溝に導
電性の粘性流体５として水銀をいれ、その後ケース６の
上下にフィルム状のふた７をして封入する。一方のふた
７には粘性流体５が接する部分に金属膜８が設けられて
いて、この部分から外部にリード線９を取り出すことが
できる。Next, a predetermined number of the electrostrictive effect elements of the monolithic ceramic capacitor type are adhered by an epoxy adhesive 4 and put in a plastic case 6, and inside the case 6, the external electrodes 3a and 3b are electrically conductive. The conductive viscous fluid 5 is filled with mercury as a conductive viscous fluid 5 so that it can be electrically connected by the viscous fluid 5. A metal film 8 is provided on the one lid 7 at a portion in contact with the viscous fluid 5, and the lead wire 9 can be taken out to the outside from this portion.
【００１１】本発明の一実施例の電歪効果素子に電圧１
５０Ｖ、周波数３０Ｈｚのパルス状の電圧を印加して動
作を確認したところ、従来構造の電歪効果素子が１００
０時間で約１０％の外部電極断線による動作不良が起こ
るのに対し、本発明による電歪効果素子は２０００時間
でも正常に動作することを確認した。A voltage 1 is applied to the electrostrictive effect element of one embodiment of the present invention.
The operation was confirmed by applying a pulsed voltage of 50 V and a frequency of 30 Hz.
It was confirmed that the electrostrictive effect element according to the present invention operates normally even after 2000 hours, whereas the operation failure due to the external electrode disconnection of about 10% occurs at 0 hours.
【００１２】本発明の第２の実施例では、全体の構成は
第１の実施例と同様とし、図１において導電性の粘性流
体５としてインジウムガリウムを用いる。In the second embodiment of the present invention, the overall structure is the same as that of the first embodiment, and indium gallium is used as the conductive viscous fluid 5 in FIG.
【００１３】これにより、実施例１の水銀を用いた場合
に比べ環境上の安全性が増す。As a result, the environmental safety is increased as compared with the case of using the mercury of Example 1.
【００１４】[0014]
【発明の効果】以上説明したように本発明は、積層セラ
ミックコンデンサ型の電歪効果素子を一つの単位とし、
これを複数個積み重ねた構造の電歪効果素子において、
一つの積層セラミックコンデンサ型の電歪効果素子と、
その上または下に位置する他の積層セラミックコンデン
サ型の電歪効果素子とが、それぞれの外部電極間を導電
性の粘性流体で満たすことによって電気的に接続する構
造としたので、電圧印加の際の内部応力によって、外部
電極がその境界で断線することを防ぎ信頼性を向上させ
るという効果を有する。As described above, the present invention uses a monolithic ceramic capacitor type electrostrictive effect element as one unit,
In the electrostrictive effect element having a structure in which a plurality of these are stacked,
One monolithic ceramic capacitor type electrostrictive effect element,
The other multilayer ceramic capacitor type electrostrictive effect element located above or below it is electrically connected by filling each external electrode with a conductive viscous fluid. This has the effect of preventing disconnection of the external electrodes at their boundaries due to the internal stress of, and improving reliability.
【図１】図１は本発明の一実施例の電歪効果素子の横断
面図および縦断面図である。FIG. 1 is a horizontal cross-sectional view and a vertical cross-sectional view of an electrostrictive effect element according to an embodiment of the present invention.
【図２】従来構造の電歪効果素子の一例の縦断面図であ
る。FIG. 2 is a vertical sectional view of an example of an electrostrictive effect element having a conventional structure.
【図３】従来の積層セラミックコンデンサ型の電歪効果
素子の単位素子の縦断面図およびこれに電圧を印加した
際の変形を示した状態図、並びに複数個重ねた従来構造
の電歪効果素子の一部縦断面図およびその電歪効果素子
に電圧を印加した際の様子を示した状態図である。FIG. 3 is a longitudinal sectional view of a unit element of a conventional monolithic ceramic capacitor type electrostrictive effect element, a state diagram showing deformation when a voltage is applied to the unit element, and a plurality of stacked electrostrictive effect elements having a conventional structure. FIG. 3 is a partial vertical sectional view of FIG. 4 and a state diagram showing a state when a voltage is applied to the electrostrictive effect element.
１ 電歪材料 ２ａ，２ｂ 内部電極 ３ａ，３ｂ 外部電極 ４ 接着剤 ５ 導電性の粘性流体 ６ ケース ７ ふた ８ 金属膜 ９ リード線 1 Electrostrictive Material 2a, 2b Internal Electrode 3a, 3b External Electrode 4 Adhesive 5 Conductive Viscous Fluid 6 Case 7 Lid 8 Metal Film 9 Lead Wire
Claims (1)
に積層され、各内部電極が一層おきに同一の外部電極に
接続している積層セラミックコンデンサ型の電歪効果素
子を一つの単位とし、これを複数個積み重ねた構造の電
歪効果素子において、一つの前記積層セラミックコンデ
ンサ型の電歪効果素子と、その上または下に位置する他
の前記積層セラミックコンデンサ型の電歪効果素子と
が、それぞれの電歪効果素子の外部電極間を導電性の粘
性流体で満たすことによって電気的に接続されているこ
とを特徴とする電歪効果素子。1. A unit of a multilayer ceramic capacitor type electrostrictive effect element in which a material exhibiting an electrostrictive effect and internal electrodes are alternately laminated, and each internal electrode is connected to the same external electrode every other layer. In the electrostrictive effect element having a structure in which a plurality of these are stacked, one of the monolithic ceramic capacitor type electrostrictive effect element and another of the monolithic ceramic capacitor type electrostrictive effect element positioned above or below The electrostrictive effect element is characterized in that the external electrodes of each electrostrictive effect element are electrically connected by filling with a conductive viscous fluid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3271634A JPH05110155A (en) | 1991-10-21 | 1991-10-21 | Electrostrictive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3271634A JPH05110155A (en) | 1991-10-21 | 1991-10-21 | Electrostrictive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05110155A true JPH05110155A (en) | 1993-04-30 |
Family
ID=17502802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3271634A Pending JPH05110155A (en) | 1991-10-21 | 1991-10-21 | Electrostrictive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05110155A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002536591A (en) * | 1999-02-10 | 2002-10-29 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Injector with piezoelectric multilayer actuator for injection system |
| DE102004012282B4 (en) * | 2003-03-13 | 2014-02-13 | Denso Corporation | Piezoelectric layer element and manufacturing method thereof |
-
1991
- 1991-10-21 JP JP3271634A patent/JPH05110155A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002536591A (en) * | 1999-02-10 | 2002-10-29 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Injector with piezoelectric multilayer actuator for injection system |
| DE102004012282B4 (en) * | 2003-03-13 | 2014-02-13 | Denso Corporation | Piezoelectric layer element and manufacturing method thereof |
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