JPH0499534U - - Google Patents

Info

Publication number
JPH0499534U
JPH0499534U JP172591U JP172591U JPH0499534U JP H0499534 U JPH0499534 U JP H0499534U JP 172591 U JP172591 U JP 172591U JP 172591 U JP172591 U JP 172591U JP H0499534 U JPH0499534 U JP H0499534U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP172591U
Other languages
Japanese (ja)
Other versions
JP2539732Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP172591U priority Critical patent/JP2539732Y2/ja
Publication of JPH0499534U publication Critical patent/JPH0499534U/ja
Application granted granted Critical
Publication of JP2539732Y2 publication Critical patent/JP2539732Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP172591U 1991-01-24 1991-01-24 ウェーハ洗浄装置 Expired - Lifetime JP2539732Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP172591U JP2539732Y2 (ja) 1991-01-24 1991-01-24 ウェーハ洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP172591U JP2539732Y2 (ja) 1991-01-24 1991-01-24 ウェーハ洗浄装置

Publications (2)

Publication Number Publication Date
JPH0499534U true JPH0499534U (enrdf_load_html_response) 1992-08-27
JP2539732Y2 JP2539732Y2 (ja) 1997-06-25

Family

ID=31729281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP172591U Expired - Lifetime JP2539732Y2 (ja) 1991-01-24 1991-01-24 ウェーハ洗浄装置

Country Status (1)

Country Link
JP (1) JP2539732Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6891013B2 (ja) * 2017-03-22 2021-06-18 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置およびノズル構造

Also Published As

Publication number Publication date
JP2539732Y2 (ja) 1997-06-25

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