JPH049533Y2 - - Google Patents
Info
- Publication number
- JPH049533Y2 JPH049533Y2 JP14886886U JP14886886U JPH049533Y2 JP H049533 Y2 JPH049533 Y2 JP H049533Y2 JP 14886886 U JP14886886 U JP 14886886U JP 14886886 U JP14886886 U JP 14886886U JP H049533 Y2 JPH049533 Y2 JP H049533Y2
- Authority
- JP
- Japan
- Prior art keywords
- measuring
- case
- measured
- measurement
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 40
- 230000007246 mechanism Effects 0.000 claims description 9
- 238000004804 winding Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14886886U JPH049533Y2 (en)) | 1986-09-30 | 1986-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14886886U JPH049533Y2 (en)) | 1986-09-30 | 1986-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6355103U JPS6355103U (en)) | 1988-04-13 |
| JPH049533Y2 true JPH049533Y2 (en)) | 1992-03-10 |
Family
ID=31063539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14886886U Expired JPH049533Y2 (en)) | 1986-09-30 | 1986-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH049533Y2 (en)) |
-
1986
- 1986-09-30 JP JP14886886U patent/JPH049533Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6355103U (en)) | 1988-04-13 |
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