JPH0494735U - - Google Patents
Info
- Publication number
- JPH0494735U JPH0494735U JP400991U JP400991U JPH0494735U JP H0494735 U JPH0494735 U JP H0494735U JP 400991 U JP400991 U JP 400991U JP 400991 U JP400991 U JP 400991U JP H0494735 U JPH0494735 U JP H0494735U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP400991U JPH0494735U (OSRAM) | 1991-01-14 | 1991-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP400991U JPH0494735U (OSRAM) | 1991-01-14 | 1991-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0494735U true JPH0494735U (OSRAM) | 1992-08-17 |
Family
ID=31733441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP400991U Pending JPH0494735U (OSRAM) | 1991-01-14 | 1991-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0494735U (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017080835A (ja) * | 2015-10-26 | 2017-05-18 | 株式会社ディスコ | バイト切削装置 |
| WO2020226152A1 (ja) * | 2019-05-08 | 2020-11-12 | 株式会社ニコン | 基板ホルダ、基板貼り合わせ装置および基板貼り合わせ方法 |
-
1991
- 1991-01-14 JP JP400991U patent/JPH0494735U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017080835A (ja) * | 2015-10-26 | 2017-05-18 | 株式会社ディスコ | バイト切削装置 |
| WO2020226152A1 (ja) * | 2019-05-08 | 2020-11-12 | 株式会社ニコン | 基板ホルダ、基板貼り合わせ装置および基板貼り合わせ方法 |
| JPWO2020226152A1 (OSRAM) * | 2019-05-08 | 2020-11-12 | ||
| KR20210144892A (ko) * | 2019-05-08 | 2021-11-30 | 가부시키가이샤 니콘 | 기판 접합 장치 및 기판 접합 방법 |
| CN113795907A (zh) * | 2019-05-08 | 2021-12-14 | 株式会社尼康 | 基板保持架、基板贴合装置以及基板贴合方法 |
| CN113795907B (zh) * | 2019-05-08 | 2024-06-04 | 株式会社尼康 | 基板贴合装置以及基板贴合方法 |
| US12165902B2 (en) | 2019-05-08 | 2024-12-10 | Nikon Corporation | Substrate bonding apparatus and substrate bonding method |