JPH049289U - - Google Patents

Info

Publication number
JPH049289U
JPH049289U JP4827090U JP4827090U JPH049289U JP H049289 U JPH049289 U JP H049289U JP 4827090 U JP4827090 U JP 4827090U JP 4827090 U JP4827090 U JP 4827090U JP H049289 U JPH049289 U JP H049289U
Authority
JP
Japan
Prior art keywords
chuck
blade
compression spring
cutting tool
chuck portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4827090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4827090U priority Critical patent/JPH049289U/ja
Publication of JPH049289U publication Critical patent/JPH049289U/ja
Pending legal-status Critical Current

Links

JP4827090U 1990-05-09 1990-05-09 Pending JPH049289U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4827090U JPH049289U (enrdf_load_stackoverflow) 1990-05-09 1990-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4827090U JPH049289U (enrdf_load_stackoverflow) 1990-05-09 1990-05-09

Publications (1)

Publication Number Publication Date
JPH049289U true JPH049289U (enrdf_load_stackoverflow) 1992-01-27

Family

ID=31564928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4827090U Pending JPH049289U (enrdf_load_stackoverflow) 1990-05-09 1990-05-09

Country Status (1)

Country Link
JP (1) JPH049289U (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136917U (enrdf_load_stackoverflow) * 1974-09-12 1976-03-18
JPS5182448U (enrdf_load_stackoverflow) * 1974-12-24 1976-07-01
JPS52143928U (enrdf_load_stackoverflow) * 1976-04-26 1977-10-31
JP2002018753A (ja) * 2000-06-29 2002-01-22 Asm Japan Kk ウエハーハンドリングロボットのティーチング装置および方法
JP2003080481A (ja) * 2001-09-06 2003-03-18 Shinko Kiki Kk ティーチングピン

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136917U (enrdf_load_stackoverflow) * 1974-09-12 1976-03-18
JPS5182448U (enrdf_load_stackoverflow) * 1974-12-24 1976-07-01
JPS52143928U (enrdf_load_stackoverflow) * 1976-04-26 1977-10-31
JP2002018753A (ja) * 2000-06-29 2002-01-22 Asm Japan Kk ウエハーハンドリングロボットのティーチング装置および方法
JP2003080481A (ja) * 2001-09-06 2003-03-18 Shinko Kiki Kk ティーチングピン

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