JPH0489562A - Sensor element for oxygen sensor - Google Patents
Sensor element for oxygen sensorInfo
- Publication number
- JPH0489562A JPH0489562A JP2204005A JP20400590A JPH0489562A JP H0489562 A JPH0489562 A JP H0489562A JP 2204005 A JP2204005 A JP 2204005A JP 20400590 A JP20400590 A JP 20400590A JP H0489562 A JPH0489562 A JP H0489562A
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- ceramic plate
- sensor element
- sealing material
- cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052760 oxygen Inorganic materials 0.000 title claims description 15
- 239000001301 oxygen Substances 0.000 title claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 14
- 239000008188 pellet Substances 0.000 claims abstract description 25
- 239000000919 ceramic Substances 0.000 claims abstract description 18
- 239000011521 glass Substances 0.000 claims abstract description 17
- 239000003566 sealing material Substances 0.000 claims abstract description 12
- 229910052573 porcelain Inorganic materials 0.000 claims abstract description 6
- 229910052839 forsterite Inorganic materials 0.000 claims abstract description 5
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 27
- 238000009792 diffusion process Methods 0.000 claims description 14
- 239000007784 solid electrolyte Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 abstract description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000005086 pumping Methods 0.000 description 3
- 230000003685 thermal hair damage Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 2
- 239000006230 acetylene black Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- -1 oxygen ions Chemical class 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、各種雰囲気中の酸素濃度の測定に使用される
酸素センサのセンサエレメントに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a sensor element of an oxygen sensor used for measuring oxygen concentration in various atmospheres.
従来の酸素センサのセンサエレメントは、第３図に示す
ように、ガス拡散孔１ａを有すると共に、−面にカソー
ド電極２ａを、他面に上記電極２ａと対向してアノード
電極２ｂをそれぞれ形成したイオン伝導性固体電解質の
ペレット１のカソード電極２ａ側に、加熱用ヒータ３を
頂面に形成したキャップ４がガス拡散室５を介在して封
着されている。As shown in FIG. 3, the sensor element of the conventional oxygen sensor has a gas diffusion hole 1a, and has a cathode electrode 2a formed on the negative side and an anode electrode 2b opposite the electrode 2a on the other side. A cap 4 having a heater 3 formed on the top surface is sealed to the cathode electrode 2a side of the ion-conductive solid electrolyte pellet 1 with a gas diffusion chamber 5 interposed therebetween.
なお、前記カソード、アノードの各電極２ａ。Note that each of the cathode and anode electrodes 2a.
２ｂは例えば白金のスクリーン印刷、ペレット１は例え
ば安定化ジルコニア、加熱用ヒータ３は例えば抵抗膜の
スクリーン印刷、キャップ４は例えばガラスから構成さ
れている。2b is made of, for example, screen-printed platinum, the pellet 1 is made of, for example, stabilized zirconia, the heater 3 is made of, for example, screen-printed with a resistive film, and the cap 4 is made of, for example, glass.
そして、このセンサエレメントは、画電極２ａ。This sensor element is the picture electrode 2a.
２ｂ間及び加熱用ヒータ３に電圧を印加し、所定の加熱
温度下における電極２ａ／ペレツト１／電極２ｂの酸素
ポンピング作用によって、ガス拡散孔１ａよりガス拡散
室５内に拡散した酸素分子が矢印のように移送して外部
に排出される。2b and to the heating heater 3, and by the oxygen pumping action of the electrode 2a/pellet 1/electrode 2b at a predetermined heating temperature, oxygen molecules diffused into the gas diffusion chamber 5 from the gas diffusion hole 1a as indicated by the arrow. It is transported and discharged to the outside.
而して、前記酸素ポンピング作用により、酸素イオンを
キャリアとする電流が電極２ａ、２ｂ間に流れるが、こ
の電流は電圧の成る領域でフラットとなる（限界電流と
いわれる）。Due to the oxygen pumping action, a current using oxygen ions as carriers flows between the electrodes 2a and 2b, but this current becomes flat in a voltage range (referred to as a limiting current).
そして、この限界電流値と酸素濃度とが一対一の関係に
あることから、センサエレメントの温度と限界電流値か
ら濃度を測定するものである。Since there is a one-to-one relationship between this limiting current value and oxygen concentration, the concentration is measured from the temperature of the sensor element and the limiting current value.
前記のように、従来のセンサエレメントは加熱用ヒータ
３がキャップ４の頂面に形成されているので、
（ａ） 小形化を意図してキャップ４の厚さを小さく
した場合には、加熱用ヒータ３の形成パタンの影響を受
は易く、加熱が不均一でパターンどおりの温度分布とな
り、
（ｂ） 一方、上記不均一加熱を避けるべく、キャッ
プ４の厚さを大きくした場合には、厚み方向の温度分布
の差が大きくなり、
（ｃ） 何れにしても、温度分布の不均一現象から、
キャップ４が破損し易いというセンサエレメントとして
致命的な問題があった。As mentioned above, in the conventional sensor element, the heating heater 3 is formed on the top surface of the cap 4. (a) When the thickness of the cap 4 is made small with the intention of downsizing, (b) On the other hand, if the thickness of the cap 4 is increased in order to avoid the uneven heating, the thickness (c) In any case, due to the non-uniform phenomenon of temperature distribution,
There was a fatal problem as a sensor element in that the cap 4 was easily damaged.
本発明は、かかる事情に鑑みなされたもので、キャップ
が熱的に破損しない加熱手段を備えた酸素センサのセン
サエレメントを提供することを目的とするものである。The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a sensor element for an oxygen sensor that is equipped with a heating means that prevents the cap from being thermally damaged.
本発明は、前記目的を達成するために、ガス拡散孔を有
すると共に、表裏対向面にカソード電極とアノード電極
を形成したイオン伝導性固体電解質よりなるペレットと
、該ペレットのカソード電極側にガス拡散室を介在して
封着したキャップと、上記ペレットのアノード電極側に
、ガス導入孔とガス導入室の形成を兼ねる封止材を介し
て一面が固着され、他面に加熱用ヒータを形成したセラ
ミック板とからなることを特徴とするものである。In order to achieve the above object, the present invention provides a pellet made of an ion conductive solid electrolyte that has gas diffusion holes and has a cathode electrode and an anode electrode formed on opposite surfaces thereof, and a gas diffusion hole on the cathode side of the pellet. A cap sealed with a chamber interposed therebetween, and one side of the pellet was fixed to the anode electrode side of the pellet through a sealing material that also formed a gas introduction hole and a gas introduction chamber, and a heater was formed on the other side. It is characterized by being made of a ceramic plate.
そして、上記セラミック板は、ペレットの熱膨脹係数に
近似したフォルステライト磁器又は結晶化ガラスであり
、また上記封止材は、ペレットの周縁部に配された複数
のガラス又は環状の多孔性結晶化ガラスであることを特
徴とするものである。The ceramic plate is forsterite porcelain or crystallized glass whose coefficient of thermal expansion is similar to that of the pellet, and the sealing material is a plurality of glasses or annular porous crystallized glass arranged around the periphery of the pellet. It is characterized by:
センサエレメントの所定温度の加熱か、キャップからで
はなく、耐熱性、機械的強度に優れ、また熱膨脹係数も
１０Ｘ１０−６に’と比較的大きなフォルステライト磁
器又は結晶化ガラス等のセラミック板を介して行われる
ので、キャップの熱的破損の要因か除去されると共に、
セラミック板の熱的破損もない。The sensor element is heated to a predetermined temperature not through the cap, but through a ceramic plate such as forsterite porcelain or crystallized glass, which has excellent heat resistance and mechanical strength, and has a relatively large coefficient of thermal expansion of 10 x 10-6. This eliminates the cause of thermal damage to the cap, and
There is no thermal damage to the ceramic plate.
本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described with reference to the drawings.
なお、従来例と同一部品には同一符号を付して説明する
。Note that the same parts as in the conventional example will be described with the same reference numerals.
第１図に示すように、１はイオン伝導性固体電解質（例
えば、ジルコニアに８Ｙ等を固溶した安定化ジルコニア
よりなる）のペレットにして、その中心にはガス拡散孔
１ａが穿設されると共に、表裏対向面にはカソード電極
２ａとアノード電極２ｂか形成（例えば、白金のスクリ
ーン印刷等）されている。As shown in Fig. 1, 1 is a pellet of an ion-conductive solid electrolyte (for example, made of stabilized zirconia in which 8Y, etc. is dissolved in zirconia), and a gas diffusion hole 1a is bored in the center of the pellet. At the same time, a cathode electrode 2a and an anode electrode 2b are formed (for example, by platinum screen printing, etc.) on the front and back opposing surfaces.
４は上記ペレット１のカソード電極２ａ側にガス拡散室
５を介在して封着されたキャップ（例えば、ガラス等か
らなる）である。Reference numeral 4 denotes a cap (made of glass, for example) sealed to the cathode electrode 2a side of the pellet 1 with a gas diffusion chamber 5 interposed therebetween.
而して、６は一面に加熱用ヒータ３が形成されたセラミ
ック板にして、該セラミック板６の他面周縁部が、ペレ
ットｌのアノード電ｔ！ｌ１ｉ２ｂ側の周縁部に配され
て、ガス導入孔とガス導入室７の形成を兼ねる複数のガ
ラスよりなる封止材８により固着されている（複数の封
止材８の間にガス導入孔か形成され、封止材８は等間隔
の配置が好ましい）。6 is a ceramic plate having a heating heater 3 formed on one side, and the peripheral edge of the other side of the ceramic plate 6 is the anode electrode t! of the pellet L. It is arranged at the peripheral edge on the l1i2b side and is fixed by a sealing material 8 made of a plurality of glasses, which also serves to form the gas introduction hole and the gas introduction chamber 7. (The sealing members 8 are preferably arranged at equal intervals).
上記セラミック板６は、耐熱性、機械的強度に優れ、熱
膨脹係数が１０ Ｘ １０−６に−１のようにペレット
１の熱膨脹係数に近似したフォルステライト磁器（２Ｍ
ｇＯ・ＳｉＯ２が主結晶相の磁器）又は結晶化ガラス（
例えば、旭硝子株式会社製ＡＰ５７１０等）などから構
成されている。The ceramic plate 6 is made of forsterite porcelain (2M
porcelain whose main crystalline phase is gO・SiO2) or crystallized glass (
For example, it is composed of AP5710 (manufactured by Asahi Glass Co., Ltd.), etc.).
また、第２図は他の実施例を示すもので、ペレット１と
セラミック板６との封止材９として環状の多孔性結晶化
ガラス（例えば、結晶化ガラス「旭硝子株式会社製Ｎｏ
、１０１Ｊと、カーボン「イビデン株式会社製アセチレ
ンブラック」とのブレンド焼成体−カーボンのガス化）
から構成したものであり、その他は第１図の実施例と同
一であるので、説明を省略する。FIG. 2 shows another embodiment, in which a ring-shaped porous crystallized glass (for example, crystallized glass "No. 1 manufactured by Asahi Glass Co., Ltd."
, 101J and carbon "acetylene black manufactured by IBIDEN Co., Ltd. - Carbon gasification)"
The rest of the structure is the same as the embodiment shown in FIG. 1, so a description thereof will be omitted.
よって、センサエレメントの所定温度の加熱はセラミッ
ク板６を介して行われ、キャップ４の熱的破損の要因が
除去されている。Therefore, the sensor element is heated to a predetermined temperature through the ceramic plate 6, and the cause of thermal damage to the cap 4 is eliminated.
また、雰囲気ガスは、封止材８．９によるガス導入孔−
ガス導入室７−ガス拡散孔１ａ−ガス拡散室５−カソー
ド電極２ａ−ペレット１−アノード電極２ｂ−封止材８
，９によるガス導入孔の移送過程における酸素ポンピン
グ作用により酸素濃度が測定される。In addition, the atmospheric gas is supplied to the gas introduction hole by the sealing material 8.9.
Gas introduction chamber 7 - gas diffusion hole 1a - gas diffusion chamber 5 - cathode electrode 2a - pellet 1 - anode electrode 2b - sealing material 8
, 9, the oxygen concentration is measured by the oxygen pumping action during the transfer process of the gas introduction hole.
本発明は、センサエレメントの所定温度の加熱を、ペレ
ットのアノード電極側に封止材を介して固着されたセラ
ミック板を介して行うようにしたので、
（ａ） カソード電極側のキャップの熱的破損をなく
すことができる。The present invention heats the sensor element to a predetermined temperature through a ceramic plate fixed to the anode electrode side of the pellet via a sealing material. Damage can be eliminated.
（ｂ） キャップの薄形化可能とセラミック板の厚み
付加とが相殺されて大形化することなく機能の向上を図
ることができる。(b) The ability to make the cap thinner and the added thickness of the ceramic plate offset each other, making it possible to improve functionality without increasing the size.
（Ｃ） 封止材によりガス導入孔が形成されるので、
セラミック板にはガス導入孔の穿設が不要であり、加熱
用ヒータの形成パターンに制約を受けることがない。(C) Since the gas introduction hole is formed by the sealing material,
There is no need to provide gas introduction holes in the ceramic plate, and there are no restrictions on the formation pattern of the heater.
第１図は本発明に係る実施例の縦断面図、第２図は他の
実施例の縦断面図、
第３図は従来例の縦断面図である。
１・・・ペレット、１ａ・・・ガス拡散孔、２ａ・・・
カソード電極、２ｂ・・・アノード電極、３・・・加熱
用ヒータ、４・・・キャップ、５・・・ガス拡散室、６
・・・セラミック板、７・・・ガス導入室、８．９・・
・封止材。
蔓 ｌ 囚
出願人代理人 藤 本 博 元本 ２ 目
塾３図FIG. 1 is a longitudinal sectional view of an embodiment according to the present invention, FIG. 2 is a longitudinal sectional view of another embodiment, and FIG. 3 is a longitudinal sectional view of a conventional example. 1... Pellet, 1a... Gas diffusion hole, 2a...
Cathode electrode, 2b... Anode electrode, 3... Heater, 4... Cap, 5... Gas diffusion chamber, 6
... Ceramic plate, 7... Gas introduction chamber, 8.9...
・Encapsulation material. Vine l Prisoner Applicant's Representative Hiroshi Fujimoto Motomoto 2nd School 3
Claims (1)
電極とアノード電極を形成したイオン伝導性固体電解質
よりなるペレットと、 該ペレットのカソード電極側にガス拡散室を介在して封
着したキャップと、 上記ペレットのアノード電極側に、ガス導入孔とガス導
入室の形成を兼ねる封止材を介して一面が固着され、他
面に加熱用ヒータを形成したセラミック板と、 からなることを特徴とする酸素センサのセンサエレメン
ト。 ２、上記セラミック板は、ペレットの熱膨脹係数に近似
したフォルステライト磁器又は結晶化ガラスである請求
項１記載の酸素センサのセンサエレメント。 ３、上記封止材は、ペレットの周縁部に配された複数の
ガラス又は環状の多孔性結晶化ガラスである請求項１又
は２記載の酸素センサのセンサエレメント。[Claims] 1. A pellet made of an ion-conducting solid electrolyte having gas diffusion holes and having a cathode electrode and an anode electrode formed on opposite surfaces thereof, and a gas diffusion chamber interposed on the cathode electrode side of the pellet. a ceramic plate having one side fixed to the anode electrode side of the pellet via a sealing material that also serves to form a gas introduction hole and a gas introduction chamber, and a heater formed on the other side; A sensor element for an oxygen sensor characterized by comprising: 2. The sensor element for an oxygen sensor according to claim 1, wherein the ceramic plate is made of forsterite porcelain or crystallized glass whose thermal expansion coefficient approximates that of the pellet. 3. The sensor element of the oxygen sensor according to claim 1 or 2, wherein the sealing material is a plurality of glasses arranged around the periphery of the pellet or a ring-shaped porous crystallized glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2204005A JPH0489562A (en) | 1990-08-02 | 1990-08-02 | Sensor element for oxygen sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2204005A JPH0489562A (en) | 1990-08-02 | 1990-08-02 | Sensor element for oxygen sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0489562A true JPH0489562A (en) | 1992-03-23 |
Family
ID=16483196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2204005A Pending JPH0489562A (en) | 1990-08-02 | 1990-08-02 | Sensor element for oxygen sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0489562A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994018553A1 (en) * | 1993-02-09 | 1994-08-18 | Robert Bosch Gmbh | Solid electrolyte sensor with integrated heater |
| WO2000039572A1 (en) * | 1998-12-24 | 2000-07-06 | Matsushita Electric Industrial Co., Ltd. | Hydrocarbon sensor |
| US10436661B2 (en) * | 2016-12-19 | 2019-10-08 | Sporian Microsystems, Inc. | Heat resistant sensors for very high temperature conditions |
| US11346698B2 (en) | 2019-06-21 | 2022-05-31 | Sporian Microsystems, Inc. | Compact pressure and flow sensors for very high temperature and corrosive fluids |
| US11940336B2 (en) | 2021-03-26 | 2024-03-26 | Sporian Microsystems, Inc. | Driven-shield capacitive pressure sensor |
-
1990
- 1990-08-02 JP JP2204005A patent/JPH0489562A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994018553A1 (en) * | 1993-02-09 | 1994-08-18 | Robert Bosch Gmbh | Solid electrolyte sensor with integrated heater |
| WO2000039572A1 (en) * | 1998-12-24 | 2000-07-06 | Matsushita Electric Industrial Co., Ltd. | Hydrocarbon sensor |
| US6589410B1 (en) | 1998-12-24 | 2003-07-08 | Matsushita Electric Industrial Co., Ltd. | Hydrocarbon sensor |
| US10436661B2 (en) * | 2016-12-19 | 2019-10-08 | Sporian Microsystems, Inc. | Heat resistant sensors for very high temperature conditions |
| US11346698B2 (en) | 2019-06-21 | 2022-05-31 | Sporian Microsystems, Inc. | Compact pressure and flow sensors for very high temperature and corrosive fluids |
| US11940336B2 (en) | 2021-03-26 | 2024-03-26 | Sporian Microsystems, Inc. | Driven-shield capacitive pressure sensor |
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