JPH0487650U - - Google Patents
Info
- Publication number
- JPH0487650U JPH0487650U JP13021090U JP13021090U JPH0487650U JP H0487650 U JPH0487650 U JP H0487650U JP 13021090 U JP13021090 U JP 13021090U JP 13021090 U JP13021090 U JP 13021090U JP H0487650 U JPH0487650 U JP H0487650U
- Authority
- JP
- Japan
- Prior art keywords
- interlayer insulating
- insulating film
- wiring
- film
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 8
- 239000011229 interlayer Substances 0.000 claims 7
- 239000002184 metal Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13021090U JPH0487650U (fr) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13021090U JPH0487650U (fr) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487650U true JPH0487650U (fr) | 1992-07-30 |
Family
ID=31877568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13021090U Pending JPH0487650U (fr) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487650U (fr) |
-
1990
- 1990-11-30 JP JP13021090U patent/JPH0487650U/ja active Pending